WO2004063679A1 - Controleur de debit massique - Google Patents

Controleur de debit massique Download PDF

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Publication number
WO2004063679A1
WO2004063679A1 PCT/KR2003/000425 KR0300425W WO2004063679A1 WO 2004063679 A1 WO2004063679 A1 WO 2004063679A1 KR 0300425 W KR0300425 W KR 0300425W WO 2004063679 A1 WO2004063679 A1 WO 2004063679A1
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WO
WIPO (PCT)
Prior art keywords
temperature
sample
mass flux
flowing tube
sample fluid
Prior art date
Application number
PCT/KR2003/000425
Other languages
English (en)
Inventor
Wook-Hyun Kim
Original Assignee
Wook-Hyun Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wook-Hyun Kim filed Critical Wook-Hyun Kim
Priority to AU2003212680A priority Critical patent/AU2003212680A1/en
Publication of WO2004063679A1 publication Critical patent/WO2004063679A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Definitions

  • the present invention relates to a mass flow controller, and more particularly to a mass flow measuring sensor which can constantly maintain the temperature of a heating coil installed on the outer peripheral surface of the sample flowing tube by providing a heating coil controlling unit separately, thereby remarkably improving a linear flux range and measurement accuracy, and a mass flow controller having the same.
  • a mass flow controller is designed to measure flux of a fluid flowing in various channels and control flowing of a fluid according to the measured value, and is widely used in many industrial fields including semiconductor industry, etc.
  • the method for measuring flux of a fluid flowing through the channel can be largely classified into 1) a method for measuring volume flux and 2) a method for measuring mass flux.
  • FIG. 1 is a schematic, cross-sectional view of a mass flow controller using the conventional thermal measuring method.
  • the conventional mass flow controller 100 includes: a mass flux measuring sensor 120 for measuring mass flux flowing through a channel 110; a valve operator 160 and a valve 130 for changing the opening of the channel 110 to control mass flux flowing through the channel 110; a controlling unit 140 for detecting mass flux measured by the mass flux measuring sensor 120, and transmitting an electrical signal to the valve operator 160 so that the opening of the channel 110 may be controlled.
  • the mass flux measuring sensor 120 includes: a sample flowing tube 121 connected to the channel 110 for passing a predetermined portion of a fluid flowing through the channel 110 therethrough; a heating coil 122 wound around the outer periphery of the sample flowing tube 121, for converting electric energy provided from a power source 170 into heat energy to act as a heat source which heats a sample fluid flowing through the sample flowing tube 121; a first temperature sensing coil 123 wound around the outer periphery of the sample flowing tube 121 in the upstream of the heating coil 122, for functioning as a temperature measuring device for measuring a temperature of the upstream of the sample fluid; and a second temperature sensing coil 124 wound around the outer periphery of the sample flowing tube 121 in the downstream of the heating coil 122, for functioning as a temperature measuring device for measuring a temperature of the downstream of the sample fluid.
  • the electrical signal that corresponds to the temperature of the sample fluid at the upstream is obtained at the first temperature sensing coil 123 and the ' electrical signal that corresponds
  • the sample flowing tube 121 of the mass flux measuring sensor 120 is connected to the channel 110 in such a way that its upper end is connected to the lateral wall of the channel 110 in a passing through manner and its lower end is connected to the lateral wall of the channel 110 in a passing through manner at the downstream compared to the upper end.
  • the sample fluid flows out of the lower end.
  • a flow guider such as a laminar device 150 is provided to the inner side of the channel 110 so that flowing line of the fluid passing by without passing through the sample flowing tube 121 may be changed.
  • FIG. 2 schematically shows the principle for measuring mass flux using a temperature difference at the mass flux measuring sensor 120 shown in FIG. 1.
  • the electrical signals that correspond to the identical temperature are obtained at the first and the second temperature sensing coils 123, 124.
  • the electrical signals that correspond to a temperature difference AT are obtained respectively at the first and the second temperature sensing coils 123, 124.
  • Such temperature difference AT is generated because the sample fluid introducing from the upstream is heated by absorbing a part of heat from the heating coil 122 while passing by the neighborhood of the heating coil 122 and the heated sample fluid moves to the downstream. Namely, the temperature difference AT is caused by convection phenomenon due to movement of the sample fluid in the inside of the sample flowing tube.
  • the temperature difference AT of the sample fluid is in functional relation with a heat flux Q provided from the heat source and the mass flux of the sample fluid passing through the sample flowing tube 121 heated by the heat flux Q. Therefore, as shown in the following [formula 1], the mass flux m of the sample fluid flowing through the sample flowing tube 121 can be calculated from a specific heat C p of the sample fluid, the heat flux Q applied by the heat source, and the temperature difference AT of the sample fluid obtained from the electrical signals provided from the first and the second temperature sensing coils 123, 124. Also, the total mass flux passing through the channel 110 is calculated by multiplying the mass flux of the sample fluid passing through the sample flowing tube 121 by the ratio of mass flux of the sample fluid to the mass flux passing through the laminar device 150. [Formula 1]
  • the heat flux provided from the heat source is maintained constantly and the controlling unit 140 transmits a valve operating signal to the valve operator 160 'in response to the temperature difference or the resistance difference between the upstream and the downstream of the sample fluid obtained by the electrical signals from the first and the second temperature sensing coils 123, 124, and the valve operator 160 controls mass flux flowing through the channel by operating the valve 130 and . adjusting the opening of the channel 110 according to the valve operating signal.
  • a general single tube type sample flowing tube is widely used as shown in FIG. 1 and FIG. 2, but there is also used the mass flux measuring sensor having a double tube type sample flowing tube, such that an inner tube 51 is provided in parallel lengthwise, with respect to the sample flowing tube 50, at the inside of the sample flowing tube 50 so that the channel of the sample flowing tube 50 forms a circular channel 58 and a linear flux range is extended remarkably compared to the case of the single tube type sample flowing tube, as shown in FIG. 3 and FIG. 4.
  • the mass flux measuring, sensor using such a double tube type is disclosed in detail in the Korean Patent Application Nos. 10-2001-81357, 10-2002-14257, 10-2002- 26202, 10-2002-79262, which have been filed by the applicant of the present invention.
  • the mass flux measuring sensor of the conventional mass flux controller has such construction that the heating coil wound around the outside of the sample flowing tube, for heating the sample fluid, supplies a predetermined heat flux constantly and measures the mass flux value using the temperature difference (or resistance difference) between the upstream and the downstream of the sample flowing tube generated while the sample fluid is flowing in the inside of the sample flowing tube.
  • FIG. 5 is a graph showing a change in temperature difference between the first and the second temperature sensing coils with respect to a change in mass flux m in the conventional single tube type mass flux measuring sensor. As shown from the graph of FIG. 5, linear change appears only at some region in the initial stage (within about 5 ⁇ 10sccm) , and non-linear change appears in the rest region beyond that initial stage.
  • the mass flux controller detects a mass flux value of the sample fluid passing through the sample flowing tube within the linear flux range of the mass flux measuring sensor, and calculates the whole flux using the ratio of mass flux of the sample fluid to the mass flux passing through the laminar device of the channel .
  • the present invention has been made to solve the above-mentioned problems of the mass flux controller using the narrow linear flux range of the conventional mass flux measuring sensor, and it is an object of the present invention to provide a mass flux controller which can constantly maintain the position of the maximum temperature and the change in the maximum temperature due to movement of the sample fluid in • the inside of the sample flowing tube, which is the most principal factor causing non-linearity in the relation of a change in temperature difference according to a change in mass flux in the mass flux measuring ' sensor, even in the case where the sample fluid is moved in the inside of the sample flowing tube, thereby remarkably increasing the linear flux range of' the mass flux measuring sensor, improving measurement accuracy and measurement precision of the mass flux controller, and accomplishing stability of the system.
  • the present invention controls the supply of the power source so that the temperature (or the resistance) of the heating coil wound around the outer peripheral surface of the sample flowing tube, for heating the sample fluid, may be maintained constantly at a predetermined temperature (or resistance) by separately providing a heating coil controlling unit to a mass flux controller.
  • the sample fluid at room temperature that has introduced from the upstream of the sample flowing tube is heated by absorbing a part of heat from the heating coil while passing through the vicinity of the heating coil, and the heated sample fluid moves to the downstream, emits heat to the outside, and is cooled down again. Due to such convection phenomenon by movement of the sample fluid, heat loss is generated at the heating coil, whereby the temperature of the heating coil is lowered.
  • the heating coil controlling unit functions to control the power source in such a way that the temperature (or resistance) of the heating coil may be maintained constantly at a predetermined temperature (or resistance) in the case where the temperature (or resistance) of the heating coil is changed due to the convection phenomenon as descried above .
  • FIG. 1 is a schematic view showing the construction of the conventional single tube type mass flux controller
  • FIG. 2 is a view schematically showing a change in temperature distribution according to a change in mass flux in the sample flowing tube of the conventional single type mass flux measuring sensor;
  • FIG. 3 is a schematic view showing the construction of the conventional double tube type mass flux measuring sensor
  • FIG. 4 is a cross-sectional view of the conventional double tube type mass flux measuring sensor taken along line V-V ;
  • FIG. 5 is a graph showing a change in temperature difference according to a change in mass flux in the conventional single tube type mass flux measuring sensor
  • FIG. 6 is a schematic view showing the construction of the single tube type mass flux controller according to the present invention.
  • FIG. 7a and FIG. 7b are schematic views showing the construction of the single tube type mass measuring sensor according to the present invention.
  • FIG. 8 is a schematic view showing the construction of the double tube type mass flux measuring sensor according to the present invention
  • FIG. 9a and FIG. 9b are schematic views showing the construction of the single tube type mass flux measuring sensor of the present invention that employs a thin film layer in the vicinity of the heating coil;
  • FIG. 10 is a schematic view showing the construction of the double tube type mass flux measuring sensor of the present invention that employs the thin film layer in the vicinity of the heating coil;
  • FIG. 11 is a view schematically showing a change in temperature distribution according to a change in mass flux of the sample flowing tube in the single tube type mass flux measuring sensor that adopts the construction of the mass flux controller of the present invention.
  • FIG. 12 is a graph showing a change in temperature difference according to a change in mass flux in case of the mass flux measuring sensor that adopts the construction of the mass flux controller having the heating coil controlling unit of the present invention, compared with the case of the mass flux measuring sensor that adopts the construction of the conventional mass flux controller.
  • FIG. 6 is a schematic, structural view of the mass flux controller according to the preferred embodiment of the present invention.
  • the mass flux controller of the present invention includes: a sample flowing tube 221 installed so that a sample fluid can be always collected in a constant ratio from a fluid flowing through a channel 110; a heating coil 222 wound around a predetermined region in the central part on the outer peripheral surface of the sample flowing tube 221, for heating the sample fluid flowing in the inside of the sample flowing tube 221; a mass flux measuring sensor 200 consisting of a first temperature sensing coil 223 for sensing a temperature of the upstream of the sample fluid and a second temperature sensing coil 224 for sensing a temperature of the downstream of the sample fluid.; a laminar device 150 for allowing a fluid not passing through the mass flux measuring sensor 200 but merely passing by, to pass through the channel while always maintaining a constant ratio with respect to the mass flux of the sample fluid passing through the sample flowing tube 221; a heating coil controlling unit 270 for controlling a power source in order to
  • the mass flux controller may also separately include a display unit 145 for displaying a mass flux value converted from the difference in the temperature or the resistance measured from the mass flux measuring sensor 200.
  • the constant temperature value (or resistance value) of the above-mentioned heating coil specifically means a relative constant temperature value with respect to the outside.
  • FIG. 7a and FIG. 7b are exemplary views showing the construction of a single tube type mass flux measuring sensor adopting the construction of the mass flux controller of the present invention.
  • the mass flux controller of the present invention includes: a sample flowing tube 70 installed in such a way that a sample fluid always collected in a constant ratio from the channel can flow; a heating coil 71 installed in the central region on the outer peripheral surface of the sample flowing tube 70, for heating the sample fluid while maintaining at a predetermined constant temperature; a first temperature sensing coil 72 for sensing a temperature of the upstream of the sample fluid; and a second temperature sensing coil 73 for sensing a temperature of the downstream of the sample fluid.
  • FIG. 8 is an exemplary view showing the construction of- a double tube type mass flux measuring sensor adopting the construction of the mass flux controller of the present invention.
  • the mass flux controller of the present invention includes: a sample flowing tube 70 installed in such a way that a sample fluid always collected in a constant ratio from the channel can flow; an inner tube 75 installed in parallel lengthwise in the inside of the sample flowing tube 70 so that the channel of the sample flowing tube 70 may be formed in a circular shape; a heating coil 71 installed in the central region on the outer peripheral surface of the sample flowing tube 70, for heating the sample fluid while maintaining at a predetermined constant temperature; a first temperature sensing coil 72 for sensing a temperature of the upstream of the sample fluid; and a second temperature sensing coil 73 for sensing a temperature of the downstream of the sample fluid.
  • FIG. 9a and FIG. 9b are exemplary views showing the construction of an alternative single tube type mass flux measuring sensor adopting the construction of the mass flux controller of the present invention.
  • the mass flux controller of the present invention includes: a sample flowing tube 90 installed in such a way that a sample fluid always collected in a constant ratio from the channel can flow; a heating coil 91 installed in the central region on the outer peripheral surface of the sample flowing tube 90, for heating the sample fluid while maintaining at a predetermined constant temperature; a first temperature sensing coil 92 for sensing a temperature of the upstream of the sample fluid; a second temperature sensing coil 93 for sensing a temperature of the downstream of the sample fluid; and a thin film layer 94 formed on the outer peripheral surface of the sample flowing tube 90 corresponding to the heating coil 91.
  • FIG. 10 is an exemplary view showing the construction of alternative double tube type mass flux measuring sensor adopting the construction of the mass flux controller of the present invention.
  • the mass flux controller of the present invention includes: a sample flowing tube 90 installed in such a way that a sample fluid always collected in a constant ratio from the channel can flow; an inner tube 95 installed in parallel lengthwise in the inside of the sample flowing tube 90 so that the channel of the sample flowing tube 90 can be formed in a circular shape; a heating coil 91 installed in the central region on the outer peripheral surface of the sample flowing tube 90, for heating the sample fluid while maintaining at a predetermined constant temperature; a first temperature sensing coil 92 for sensing a temperature of the upstream of the sample fluid; a second temperature sensing coil 93 for sensing a temperature of the downstream of the sample fluid; and a thin film layer 94 formed on the outer peripheral surface of the sample flowing tube 90 corresponding to the heating coil 91.
  • the materials such as Al, Cu, Au, Ag whose heat transfer performance is superior (i.e., thermal diffusivity is larger to) to stainless that is used for the sample flowing tube.
  • thermal equilibrium reaching time of the sample flowing tube in the vicinity of the heating coil is shortened and maintaining of a constant temperature of the heating coil by the heating coil controlling unit can be performed in a more rapid and accurate manner.
  • Installation of such a thin film layer may be realized by the winding of the thin film made of the above- mentioned material, on the outer peripheral surface of the sample flowing tube a predetermined number of times, or by coating or plating, application of the above-mentioned material, on the outer peripheral surface of the sample flowing tube, or by the chemical vapor deposition method, etc.
  • FIG. 11 is a view schematically showing temperature distribution characteristics of the sample flowing tube of the single tube type mass flux measuring sensor of the present invention and shows a change in temperature distribution according to a change in mass flux of the sample fluid with the heating . coil of the sample flowing tube maintained at a constant temperature .
  • FIG. 12 is a graph showing a change in temperature difference according to a change in mass .flux in case of the conventional mass flux measuring sensor compared with the case of the mass flux measuring sensor according to the present invention. As shown in FIG. 12, it is revealed that the linear flux range and a change in temperature difference according to a change in mass flux are much larger for the case where the temperature of the heating ' coil is maintained constantly, compared with the case of the conventional mass flux measuring sensor.
  • the heating coil controlling unit is provided .separately so that the temperature of the heating coil is maintained constantly, thereby eliminating the most principal factor that causes non-linearity in the relation of a change in temperature difference with respect to a change in mass flux in the mass flux measuring sensor. Also, the linear flux range in the mass flux measuring sensor can be increased remarkably and a change in temperature difference with respect to a change in mass flux gets larger even more, thereby insignificantly improving measurement accuracy and measurement precision of the mass flux controller.
  • the thin film layer is formed on the outer peripheral surface of the sample flowing tube in corresponding position of the heating coil with use of the material whose thermal conductivity is excellent, so that controlling of the power source by the heating coil controlling unit for maintaining the heating coil at a constant temperature, is carried out easily and a response speed of the mass flux measuring sensor can be improved.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Flow Control (AREA)

Abstract

L'invention concerne un contrôleur de débit massique. Dans un capteur de mesure de débit massique thermique on prévoit : un canal à travers lequel un fluide s'écoule ; un tube d'écoulement d'échantillon installé de manière que le fluide d'échantillon puisse être toujours collecté dans un rapport constant à partir du canal ; des moyens chauffants enroulés autour d'une région prédéterminée dans une partie centrale sur une surface périphérique externe du tube d'écoulement d'échantillon, en vue du chauffage de l'écoulement du fluide d'échantillon à l'intérieur du tube d'écoulement d'échantillon ; une première bobine de détection de température permettant de détecter une température dans un courant en amont du fluide d'échantillon ; et une seconde bobine de détection de température permettant de détecter une température d'un écoulement en aval du fluide d'échantillon, une unité de commande de bobine chauffante permettant de maintenir en permanence une température pour la bobine chauffante. Le capteur de mesure du débit massique est placé séparément de manière que la modification de position de la température maximale et la modification de la température maximale du tube d'écoulement d'échantillon, qui sont des facteurs principaux causant une non linéarité dans le rapport d'une modification de différence de températures par rapport à une modification du débit massique, puissent être éliminées, d'où une amélioration considérable de la fourchette du flux et une amélioration de la précision des mesures.
PCT/KR2003/000425 2003-01-14 2003-03-05 Controleur de debit massique WO2004063679A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003212680A AU2003212680A1 (en) 2003-01-14 2003-03-05 Mass flow controller

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2003-0002581 2003-01-14
KR1020030002581A KR100395657B1 (en) 2003-01-14 2003-01-14 Mass flow controller

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2249128A1 (fr) * 2009-05-08 2010-11-10 Linde Aktiengesellschaft Agencement de mesure et procédé de détermination du flux de la fraction liquide dans un décompositeur d'air
JP2016212029A (ja) * 2015-05-13 2016-12-15 東京電力ホールディングス株式会社 計測システム及び方法
WO2019119757A1 (fr) * 2017-12-20 2019-06-27 北京创昱科技有限公司 Régulateur de débit massique
US10508966B2 (en) 2015-02-05 2019-12-17 Homeserve Plc Water flow analysis
JP2020503615A (ja) * 2016-12-31 2020-01-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 熱ベースの質量流量コントローラ（ｍｆｃ）の流れ検出再現性を高めるための方法及び装置
US10704979B2 (en) 2015-01-07 2020-07-07 Homeserve Plc Flow detection device
WO2022061023A1 (fr) * 2020-09-17 2022-03-24 Applied Materials, Inc. Régulation de débit massique basée sur des dispositifs microélectromécaniques
US11772958B2 (en) 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices

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Publication number Priority date Publication date Assignee Title
KR102171750B1 (ko) 2019-06-07 2020-10-29 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계에 있어서 유량센서의 결합구조
KR102068930B1 (ko) 2019-06-07 2020-01-21 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계

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US11209333B2 (en) 2015-01-07 2021-12-28 Homeserve Plc Flow detection device
US10508966B2 (en) 2015-02-05 2019-12-17 Homeserve Plc Water flow analysis
JP2016212029A (ja) * 2015-05-13 2016-12-15 東京電力ホールディングス株式会社 計測システム及び方法
JP2020503615A (ja) * 2016-12-31 2020-01-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 熱ベースの質量流量コントローラ（ｍｆｃ）の流れ検出再現性を高めるための方法及び装置
WO2019119757A1 (fr) * 2017-12-20 2019-06-27 北京创昱科技有限公司 Régulateur de débit massique
WO2022061023A1 (fr) * 2020-09-17 2022-03-24 Applied Materials, Inc. Régulation de débit massique basée sur des dispositifs microélectromécaniques
US11772958B2 (en) 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices

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