KR100395657B1 - Mass flow controller - Google Patents

Mass flow controller Download PDF

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Publication number
KR100395657B1
KR100395657B1 KR1020030002581A KR20030002581A KR100395657B1 KR 100395657 B1 KR100395657 B1 KR 100395657B1 KR 1020030002581 A KR1020030002581 A KR 1020030002581A KR 20030002581 A KR20030002581 A KR 20030002581A KR 100395657 B1 KR100395657 B1 KR 100395657B1
Authority
KR
South Korea
Prior art keywords
temperature
mass flow
sample
flow controller
sample fluid
Prior art date
Application number
KR1020030002581A
Other languages
English (en)
Inventor
Wook Hyun Kim
Original Assignee
Wook Hyun Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wook Hyun Kim filed Critical Wook Hyun Kim
Priority to KR1020030002581A priority Critical patent/KR100395657B1/ko
Priority to PCT/KR2003/000425 priority patent/WO2004063679A1/en
Priority to AU2003212680A priority patent/AU2003212680A1/en
Application granted granted Critical
Publication of KR100395657B1 publication Critical patent/KR100395657B1/ko

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Flow Control (AREA)
KR1020030002581A 2003-01-14 2003-01-14 Mass flow controller KR100395657B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020030002581A KR100395657B1 (en) 2003-01-14 2003-01-14 Mass flow controller
PCT/KR2003/000425 WO2004063679A1 (en) 2003-01-14 2003-03-05 Mass flow controller
AU2003212680A AU2003212680A1 (en) 2003-01-14 2003-03-05 Mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030002581A KR100395657B1 (en) 2003-01-14 2003-01-14 Mass flow controller

Publications (1)

Publication Number Publication Date
KR100395657B1 true KR100395657B1 (en) 2003-08-21

Family

ID=32709883

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030002581A KR100395657B1 (en) 2003-01-14 2003-01-14 Mass flow controller

Country Status (3)

Country Link
KR (1) KR100395657B1 (ko)
AU (1) AU2003212680A1 (ko)
WO (1) WO2004063679A1 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102068930B1 (ko) 2019-06-07 2020-01-21 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계
JP2020503615A (ja) * 2016-12-31 2020-01-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 熱ベースの質量流量コントローラ（ｍｆｃ）の流れ検出再現性を高めるための方法及び装置
KR102171750B1 (ko) 2019-06-07 2020-10-29 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계에 있어서 유량센서의 결합구조

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2249128A1 (de) * 2009-05-08 2010-11-10 Linde Aktiengesellschaft Messanordnung und Verfahren zur Erfassung des Fluidstroms der Sumpfflüssigkeit in einer Luftzerlegungsanlage
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
JP6613609B2 (ja) * 2015-05-13 2019-12-04 東京電力ホールディングス株式会社 計測システム及び方法
CN107844133A (zh) * 2017-12-20 2018-03-27 北京创昱科技有限公司 一种质量流量控制器
US11772958B2 (en) 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices
US20220081282A1 (en) * 2020-09-17 2022-03-17 Applied Materials, Inc. Micro-electromechanical device for use in a flow control apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6244293B1 (en) * 1997-07-15 2001-06-12 Faramarz Azima Fluid mass flow controller device and method
US6332348B1 (en) * 2000-01-05 2001-12-25 Advanced Micro Devices, Inc. Gas flow calibration of mass flow controllers
US6360772B1 (en) * 2000-06-30 2002-03-26 Promos Technologies, Inc. Mass flow controller
KR100395656B1 (ko) * 2001-12-19 2003-08-21 김욱현 질량유량제어기의 질량유량측정센서

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020503615A (ja) * 2016-12-31 2020-01-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 熱ベースの質量流量コントローラ（ｍｆｃ）の流れ検出再現性を高めるための方法及び装置
KR102068930B1 (ko) 2019-06-07 2020-01-21 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계
KR102171750B1 (ko) 2019-06-07 2020-10-29 안무아 온도제어와 유량조절이 동시에 가능한 유량조절계에 있어서 유량센서의 결합구조

Also Published As

Publication number Publication date
AU2003212680A1 (en) 2004-08-10
WO2004063679A1 (en) 2004-07-29

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