Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
  • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
  • G05B2219/00—Program-control systems
  • G05B2219/30—Nc systems
  • G05B2219/32—Operator till task planning
  • G05B2219/32237—Repair and rework of defect, out of tolerance parts, reschedule
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
  • G05B2219/00—Program-control systems
  • G05B2219/30—Nc systems
  • G05B2219/37—Measurements
  • G05B2219/37617—Tolerance of form, shape or position

Definitions

• the present invention relates to a method and an apparatus for inspecting and correcting the shape and dimensions of a component mounted on a precision instrument or the like, and correcting the shape and dimension as necessary.
• Methods and devices for inspecting the shape and dimensions of components mounted on precision equipment such as hard disks and correcting them based on the inspection results include checking the inclination of the slider due to deformation of the panel of the hard disk head unit. (See, for example, Japanese Patent Application Laid-Open No. 10-204842). This device inspects the inclination of the slider using autocollimation while pressing the panel panel to give the slider the same displacement as the actual one. Then, based on the inspection results, a part of the panel is manually twisted and corrected using tools (tweezers).
• a method and apparatus for inspecting the shape and position of a similar part there is a method and apparatus for detecting a bending angle of a part to be bent between upper and lower molds (for example, see Japanese Patent Application Laid-Open No. H4-178851). No. 1).
• a contact / distance sensor is provided in a mold to detect a bending angle of a component. Then, additional bending is performed until the detected result falls within the allowable value.
• the present invention has been made in view of the above problems, and an object of the present invention is to provide a method and apparatus for inspecting and correcting a molded part that can automatically inspect and correct a molded part. Disclosure of the invention
• the method for inspecting and correcting a part comprises the steps of measuring the shape and / or dimensions of a part molded to a certain shape and dimensions, and determining whether the measured value is within an allowable range (tolerance). Determining whether the part is out of tolerance; and, if determined to be out of tolerance, correcting the shape and / or dimensions of the part by applying a quantitatively controlled plastic working to a part of the part. Re-measuring and re-determining the shape and Z or dimension of the part later; and, if the re-determining result is outside the tolerance again, repeating the correcting step and the re-measuring / re-determining step again.
• a method for inspecting and correcting a part comprising: automatically performing all of the steps on a single device while fixing the part.
• the straightening work is not performed manually by using tweezers in the present invention, but the straightening work is performed automatically, so that the work result is accurate. Further, it is not necessary in the present invention to set components for each operation as disclosed in Japanese Patent Laid-Open No. 4-178511.
• the straightening result is accurate, and the dimension and shape of the part can be freely corrected.
• the degree increases.
• the inspection / correction of a plurality of parts of the component is automatically performed while the component is fixed on the single device, the component is fixed once. Inspections and corrections can be performed for a plurality of parts as they are, so that inspections and corrections can be performed accurately and in a short time.
• the measurement result can be quantitatively reflected in the correction amount.
• the amount of the second or subsequent correction operation can be changed according to the correction amount actually obtained as a result of the first correction or the previous correction (correction result amount).
• the part size and shape can be kept within the tolerance with a small number of corrections.
• the target value of the correction result amount per correction can be set to (2 ⁇ tolerance) or a slightly smaller value.
• a component inspection and correction device is a component inspection and correction device that measures and corrects the shape and / or dimension of a component formed into a certain shape and size, a fixing unit that fixes a component to be inspected, and a component to be inspected.
• Correction means for correcting the shape and / or dimensions of the part by performing the plastic working performed by the measuring means, and until the result measured by the measuring means falls within an allowable range (tolerance). It is characterized in that the measurement, the judgment by the judgment means and the correction by the correction means are automatically repeated.
• inspection and correction of a plurality of parts of the component can be automatically performed while being fixed by the fixing means.
• the correction means can automatically reflect the measurement result of the measuring means in the correction amount quantitatively.
• the correction means can change the amount of the second or the next correction operation according to the correction amount (correction result amount) actually generated as a result of the first correction or the previous correction.
• the correction means may set a target value of the correction result amount per correction to (2 ⁇ tolerance) or a slightly smaller value.
• the correction unit includes a correction member that contacts a part (corrected part) of the part and applies force and displacement to the part. A first stage on which the correction member is mounted, a second stage on which the first stage is mounted, and a second stage driven in a direction of displacement of the correction member, and a first stage between the first stage and the second stage.
• An interposed spring for keeping the first stage at a relative neutral point, and a synchronizing unit for synchronizing the movement of the first and second stages when the spring is biased to a certain extent A floating mechanism having both stage abutting portions) and an evening sensor for sensing that the abutting portions are touched, wherein the spring is provided after the correcting member comes into contact with the corrected portion of the component. Deflection, before then The evening sensor detects that the two stages are in contact with each other, and thereafter, the second stage can move by the correction operation amount.
• a reference position measuring means for measuring a position of a reference portion of the component may be further provided. In this case, it is possible to measure the position of the reference part in the component and manage the relative positional relationship of the inspected part from that position.
• the reference portion may be based on the center position of the hole or the like in addition to the flat surface in the component.
• Another part inspection and correction device of the present invention includes a step of measuring a physical quantity related to the shape and Z or dimension of a part formed into a certain shape and dimension, and a step of measuring whether the value of the measured physical quantity is within an allowable range. And the step of determining whether A step of correcting the shape and the Z dimension of the part by applying a quantitatively controlled plastic working to a part of the part, and a step of re-measuring and re-determining the physical quantity of the part after the correction. And a step of repeating the correction step and the re-measurement / re-determination step again if the result of the re-determination is outside the allowable range again. It is characterized in that it is performed automatically while the parts are fixed on a single device.
• Some mechanical components perform actions related to various physical quantities (eg, magnetic flux density, light reflection, etc.). And the physical quantity is the mechanical property of the part
• the physical quantity can be adjusted to an appropriate value by inspecting the physical quantity and modifying a part of the part related to the physical quantity, it is preferable in terms of improving the performance and yield of the part. Also in this case, if the inspection and the correction are performed on the same device, it is possible to save the trouble of transferring components between the inspection device and the correction device and fixing the components to the device each time. In addition, since parts are inspected and corrected while they are fixed once, there is no variation in fixing work, and inspection and correction can be performed accurately.
• a component inspection and correction apparatus comprising: fixing means for fixing a component to be inspected; measuring means for measuring a value of a physical quantity having a relationship with the shape and Z or dimension of the component to be inspected; Determining means for determining whether or not the value of the measured physical quantity is within an allowable range; and forming a shape and / or size of the part by subjecting a part of the part to be inspected to plastic working which is quantitatively controlled. And a correction unit for correcting the physical quantity measured by the measurement unit within the allowable range.
• the measurement by the measurement unit, the determination by the determination unit, and the correction by the correction unit are automatically performed. It is characterized by repeating.
• FIG. 1 (A) is a front view showing a structure of a component inspection and correction device according to an embodiment of the present invention
• FIG. 1 (B) is a block diagram showing a configuration of a control system of the device. is there.
• FIG. 2 is a side view of the component inspection / correction apparatus of FIG.
• FIG. 3 is a plan view of the component inspection / correction apparatus of FIG.
• Fig. 4 is an enlarged view of a part of the part inspection and correction device of Fig. 1, where Fig. 4 (A) is a front view, Fig. 4 (B) is a side view, and Fig. 4 (C) is a plan view. It is.
• FIG. 5 is a side view showing an initial state (non-operating state) of the correcting means.
• FIG. 6 is a front view showing an initial state of the correction means.
• FIG. 7 is a side view showing a state where the straightening device has actually started bending the L piece M4 of the part.
• FIG. 8 is a side view showing a correction operation state of the correction device.
• FIG. 9 is a plan view showing a correction operation state of the correction device.
• FIG. 10 is a view showing the shape of the part to be inspected
• FIG. 10 (A) is a front view
• FIG. 10 (B) is a side view
• FIG. 10 (C) is a plan view.
• FIG. 11 is a flowchart of a control unit of the component inspection and correction method according to the embodiment of the present invention.
• FIG. 12 is a flowchart of a control unit of the component inspection and correction method according to the embodiment of the present invention.
• FIG. 13 is a flowchart of a control unit of the component inspection and correction method according to the embodiment of the present invention.
• FIG. 14 is a diagram showing a main structure of the component inspection and correction device, where FIG. 14 (A) is a front view and FIG. 14 (B) is a plan view.
• FIG. 15 is a diagram for explaining a method of obtaining the position of the reference part of the component.
• FIG. 16 is a diagram showing the shape of the part to be inspected, FIG. 16 (A) is an overall perspective view, and FIG. 16 (B) is a partial side sectional view.
• FIG. 17 is a perspective view showing a structure of a main part of a component inspection and correction device according to another embodiment of the present invention.
• FIG. 18 is a perspective view showing a state at the time of measurement of a main part of the apparatus in FIG.
• FIG. 19 is a diagram showing the state of the main part of the apparatus of FIG. 17 at the time of correction
• FIG. 19 (A) is a perspective view of the main part
• FIG. 19 (B) is a partial side sectional view of the main part.
• FIG. 20 is a perspective view showing a structure of a main part of a component inspection and correction device according to another embodiment of the present invention.
• FIG. 21 is a partial side sectional view of a main part of the device in FIG. 20 at the time of correction.
• FIG. 22 is a flowchart of a control unit of the component inspection and correction device. BEST MODE FOR CARRYING OUT THE INVENTION
• FIG. 10 is a diagram showing the shape of the component to be inspected
• FIG. 10 (A) is a front view
• FIG. 10 (B) is a side view
• FIG. 10 (C) is a plan view.
• the part M has three mutually perpendicular plane pieces Ml, M2, and M4 that extend in the XYZ directions.
• the surface on the ZY plane in the figure is called base M1.
• the surface extending from the upper side of the base Ml on the XY plane is called the upper surface M2.
• S piece M3 a portion extending in the + X direction from the upper surface M2 and having a short axis A3 described later planted therein.
• S piece M3 a portion extending in the + X direction from the upper surface M2 and having a short axis A3 described later planted therein.
• a surface extending from the side of the upper surface M2 in the Z direction on the ZX plane is referred to as an L piece M4.
• a long axis A4 described later is implanted in the L piece M4.
• a short axis (short axis) A3 extending in the 1Z direction is implanted at the tip of the S piece M3.
• a long axis (long axis) A4 extending in the Y direction is planted almost at the center of the L piece M4.
• the positional dimensions of the major axis A4 and the minor axis A3 are inspected. Then, based on the result, the L piece M4 and the S piece M3 are bent and corrected so that the major axis A4 and the minor axis A3 have a predetermined positional dimensional relationship. That is, the L piece M 4 is bent in the soil Y direction with respect to the upper surface M 2 to correct the position dimension of the long axis A 4, and the S piece M 3 is bent in the soil Z direction with respect to the upper surface M 2 Correct the position of the short axis A3 (see below for details).
• FIG. 1A shows the structure of a component inspection and correction device according to an embodiment of the present invention.
• FIG. 1 () is a block diagram showing a configuration of a control system of the device.
• FIG. 2 is a side view of the component inspection / correction apparatus of FIG.
• FIG. 3 is a plan view of the component inspection / correction apparatus of FIG.
• Fig. 4 is an enlarged view of a part of the part inspection and correction device of Fig. 1; Fig. 4 ( ⁇ ) is a front view, Fig. 4 ( ⁇ ) is a side view, and Fig. 4 (C) is a plan view. is there.
• the parts inspection and correction device 1 includes a fixing means 10 for fixing the part to be inspected, a measuring means 50 for measuring the dimensions of the part, and a determination as to whether or not the result measured by the measuring means 50 is within an allowable range (tolerance). And a correction means 70 for applying a controlled plastic working to a part of the part to correct the shape of the part.
• the fixing means 10, the measuring means 50, and the correcting means 70 are all arranged on the table 3.
• the fixing unit 10, the measuring unit 50, and the correcting unit 70 are electrically connected to the control unit 200, and are controlled by the control unit.
• the determination means 210 is included in the control unit 200.
• the fixing means 10 uses the reference surface of the base Ml of the component ⁇ as the first reference surface as seen in FIG. 4 (A) and the lower surface of the upper surface M2 as seen in FIG. Secure to the device.
• the fixing means 10 includes a pedestal 11 on which the component M is mounted, a horizontal clamper 13 for clamping the base M1 of the component M mounted on the pedestal 11, and a It has a vertical clamper 15 that clamps the upper surface M2, and.
• the pedestal 11 has an L-shaped side surface, a horizontally long rectangular parallelepiped lower part 17, and a vertically elongated rectangular parallelepiped upper part 19 rising from the upper surface of the lower part 17.
• Consists of The upper portion 19 is provided with a protruding portion 21 extending from the same portion to the right (Y direction) in FIG. 4 (A).
• the cross-sectional shape of the protrusion 21 is triangular, and the tip is an acute angle.
• the part M is placed on the upper surface of the upper portion 19 and the protrusion 21. Then, one side of the upper part 19 (the left side in FIG. 4B) is applied to the base M 1 of the part M.
• the upper surface 19 and the upper surface of the protrusion 21 (upper side in FIG. 4B) become the second reference surface 19b on which the upper surface M2 of the component is placed.
• the first reference plane 19a and the second reference plane 19b are orthogonal to each other.
• the upper part 19 and the lower part 17 are provided with Z through holes 23 penetrating in the Z direction. Also, open the X through hole 25 extending in the X direction from the surface opposite to the first reference surface 19 a of the upper part 19 (the surface on the right side in FIG. 4B) until it communicates with the Z through hole 23. Have been. Further, a through hole 27 extending in the Y direction is formed on the upper surface and the end surface (the surface on the front side of the paper) of the upper portion 19 until it communicates with the Z through hole 23.
• the base Ml of the part is set to the first reference plane 19 a side of the upper part 19 of the pedestal 19 (the left side of FIG. 4 (B)) in FIG.
• the short axis A3 of the S piece M3 passes on the side of the upper part 19.
• the base Ml of the component M is brought into contact with the first reference surface 19a of the upper portion 19 of the pedestal, the upper surface M2 is placed on the second reference surface 19, and the component M is placed on the pedestal 11 .
• the part M is fixed to the first reference plane 19a by the horizontal clamper 13 (see FIG. 3), and is fixed to the second reference plane 19b by the vertical clamper 15 (see FIG. 2). Fix it.
• the horizontal clamper 13 is, as shown in FIG. 3, a cylinder 31 provided with a telescopic piston rod 33.
• the cylinder 31 is fixed on the table.
• the piston rod 33 is extended and retracted from the cylinder 31 in the X-axis direction.
• the horizontal clamper 13 is arranged such that when the piston rod 33 is extended, the rod tip surface faces the first reference surface 19 a of the pedestal upper portion 19.
• the vertical clamper 15 is composed of a cylinder 35 having a telescopic piston rod 39 and an arm 37.
• the end of the cylinder 35 is rotatably fixed to the table 3.
• the arm 37 is L-shaped, and one end 37 a is rotatably connected to the piston rod 39, and the other end 37 b is rotatably connected to the pedestal 41 on the table.
• a pressing member 43 is attached to a side surface of the arm 37.
• the pressing member 43 does not contact the S piece M3 extending from the upper surface M2 of the component M, and the S piece M3 is deformable.
• the base M1 and the upper surface M2 of the component M placed on the pedestal 11 are clamped and fixed so as not to move. Measurement and correction are performed while maintaining this state.
• the measuring means 50 is composed of two parallel gauges 51 and 53 extending in the X direction and one gauge 55 extending in the Z direction.
• the X gauge 51 measures the position of the long axis A 4 in the X direction
• the X gauge 53 measures the position of the short axis A 3 in the X direction.
• the Z gauge 55 measures the position of the major axis A 4 in the Z direction.
• the two X gauges 51 and 53 are attached to the base 57.
• the base 57 can be moved in the X direction on the table by a moving mechanism.
• the moving mechanism includes a cylinder 59 having a telescopic piston rod 61 and a guide 63.
• the cylinder 59 is fixed on the table.
• the base 57 is connected to the piston rod 61 of the cylinder 59,
• the ton rod 61 is driven in the X-axis direction along the guide 63 by expansion and contraction.
• each of the X gauges 51 and 53 is provided with a surface 19 c (the opposite side to the first reference surface 19 a of the upper base 19 of the fixing means 10). (Right side of Fig.
• the X-gauge for the short axis and the X-gauge for the long axis also have an expansion / contraction function, and the relative positions of the short axis and the long axis can be determined by the amount of expansion / contraction of each gauge.
• Z gauge 55 is attached to base 65 fixed to the table, and extends vertically so as to pass through Z through hole 23 of pedestal 11.
• the Z gauge 55 is elastic, and when extended, its tip passes through the Z through hole 23 and hits the lower surface of the long axis M 4 of the component placed on the pedestal 11. Then, the position of the major axis M4 in the Z direction is measured.
• Figure 1 (B) shows the results measured by the gauges 51, 53, and 55 (the relative positions of the major axis A4 and the minor axis A3 in the X direction and the major axis A4 in the Z direction).
• Is sent to the control unit 200 determination means 210.
• the determination means 210 the orthogonality of the major axis A4 and the minor axis A3 and the relative positional relationship of each axis component with respect to the base M1 are calculated.
• the S piece M 3 is bent in the soil Z direction to correct the position of the short axis A 3 by the correction means
• the L piece M 4 is bent in the soil Y direction to correct the position of the long axis A 4. to correct.
• FIG. 5 is a side view showing an initial state (non-operating state) of the correction means.
• FIG. 6 is a front view showing an initial state of the correction means.
• the straightening means 70 bends a controlled part of the part (L piece M4 and S piece M3) by applying a controlled amount of displacement. Then, the judgment means 210 judges whether or not the measurement result falls within an allowable range (tolerance), and repeats the correction work until the measurement result falls within the range (to be described later in detail). At this time, in order to feed back the measurement result of the part to be corrected by the previous correction to the next correction work, it is necessary to accurately know the Y direction correction operation amount of the L piece M4 and the Z direction correction operation amount of the S piece M3. is necessary.
• the straightening is performed for each of the L piece M4 and the S piece M3 of the component, and each is provided with a straightening device having the same structure.
• a device for correcting the L piece M 4 by moving it in the Y direction will be described.
• the correction device 70 includes a correction nail (correction member) 71, a first stage 73 on which the correction nail 71 is mounted, and a first stage 73. And a second stage 75 to be mounted.
• the first stage 73 and the second stage 75 are connected via a floating mechanism.
• the correction nail 71 has a rectangular parallelepiped shape, and a groove 77 extending in the X direction is formed on the upper surface.
• the tip of the L piece M 4 enters into the groove 77 and is hooked.
• the width W 1 of the groove 77 (—l mm in the example).
• the correction nail 71 is fixed to the upper surface of the first stage 73.
• the first stage 73 is mounted on the second stage 75 via a linear guide 79 (floating mechanism) (see Fig. 6) so as to be movable in the soil correction direction Y in both soil directions.
• the first stage 73 is provided with a contact block 81 extending in a direction (X direction) orthogonal to the direction of movement of the stage (Y direction). Both side surfaces of the contact block 81 are parallel, and each surface extends in the X direction.
• the lower surface of the contact block 81 is provided with a pin 83 extending in the Z direction.
• the contact block 81 protrudes from the second stage 75 as shown in FIG.
• the second stage 75 is mounted on a base 85 so as to be movable in a Y direction, which is a correction direction, via a linear guide 87 (see FIG. 6).
• the second stage 75 is driven in the Y direction by a pole screw 89 fixed to the base 85.
• Blocks 91 and 93 are fixed to the upper surface of the second stage 75 so as to face each other.
• Each block 91, 93 consists of a wide upper part 91a, 93a and a narrow lower part 91b, 93b, with an upper space 95 between the upper parts of the two blocks.
• a lower space 97 is opened between the lower parts.
• the contact block 81 of the first stage 73 is located in the upper space 95 between the blocks, and the pins 83 are located in the lower space 97.
• a left-handed port (abutting portion) 990 extending in the + Y direction is passed through the upper part 91 a of the left block 91 in FIG. 5 and is fixed to the block 91 with a nut 101.
• a right push port (abutting portion) 103 extending in one Y direction is passed through an upper portion 93 a of the right block 93, and is fixed to the block 93 with a nut 105.
• the two push bolts 99, 103 are located coaxially, and the tip of each push bolt projects into the upper space 95.
• the tip surface of each push port is flat, and oppose each other with a gap W2 at substantially equal intervals on both side surfaces of the contact block 81 in the same space 95.
• the width of the gap W2 is 1 mm in one example.
• Each block 91, 93 is provided with two proximity sensors 107 (see FIG. 6).
• the output of the proximity sensor 107 is sent to the control unit.
• the proximity sensor for example, an eddy current type proximity sensor can be used.
• the proximity sensor 107 detects that the tip surfaces of the left and right pushing ports 99 and 103 are in contact with the respective side surfaces of the contact block 81. In this case, since the front end face of each push port and the side surface of the contact block abut on a part of a certain width, the contact between the two can be reliably detected. This is because, when trying to directly detect that the correction nail 71 is in contact with the portion to be corrected (L piece) M4, a plurality of sensors must be arranged in a small space, and the mechanical structure and applicable sensors There are difficulties in both aspects of choice.
• a left guide pin 109 extending in the Y direction is slidably inserted through the lower part 91 b of the left block 91, and a right guide extending in the Y direction is inserted through the lower part 93b of the right block 93.
• the pin 111 is slidably inserted. Both guides The pins 109 and 111 are located coaxially, and the tip of each guide pin projects into the lower space 97. E-rings 113 and 115 are attached to the outer end of each guide pin 109 and 111, and the inner end has a diameter larger than that of the pin. Discs 1 17 and 1 19 are provided.
• Coil panels 121 and 123 are interposed between the disks 117 and 119 and the side walls of the block lower portions 91b and 93b along the guide bins 109 and 111.
• the coil panels 1 2 1 and 1 2 3 are biased so that the discs 1 1 1 and 1 1 9 of each guide pin 1 09 and 1 1 1 abut on the pin 83, and are brought into contact with the end faces of the push ports 99 and 103.
• the distance of the gap W2 from each side of the contact block 81 is to be kept equal. That is, the coil springs 121 and 123 act to keep the first stage 73 (the contact block 81) at a fixed position (neutral point) with respect to the second stage 75 (the pushing ports 99 and 103). It has. At this time, the neutral position in the Y direction is set as the initial position.
• the second screw 75 is fed in the + Y direction by rotating the pole screw 89.
• the first stage 73 mounted on the second stage 75 is also pushed by the contact block 81, the pin 83, and the spring 121, and is simultaneously sent in the + Y direction.
• the correction nail 71 on the first stage 73 also moves in the + Y direction with respect to the L piece M4 of the part M.
• FIG. 7 is a side view showing a state where the straightening device has actually started bending the L piece M4 of the part.
• the side surface of the correction nail 71 has already hit the L piece M 4 of the part M.
• the pole screw 89 is further rotated to move the second stage 75 further in the + Y direction
• the side of the groove 77 of the correction claw 71 is fixed to the L piece M 4 of the fixed part M.
• the first stage 73 stops.
• the spring 1 2 1 is not strong enough to deform the part M.
• the first stage 73 and the second stage 75 can be relatively moved in the Y direction by the amount of bending of the panel 121, so that even if the first stage 73 stops, the second stage 75 7 5 can move in + Y direction. During this time, the first stage 73 is moving in one Y direction on the linear guide 87 fixed to the second stage 75.
• the gap W 2 ′ between the tip surface of the left pushing port 99 of the second stage 75 and the left side surface of the contact block 81 of the first stage 73 is formed. It becomes smaller gradually.
• a coil spring 121 mounted on the left guide pin 109 is compressed between the left block 91 and the disk 117 of the left guide pin 109. Since the left guide pin 109 is slidably passed through the left block 91, the pin 109 is relatively pushed in one Y direction by the pin 83, and the left guide pin 109 is The E-ring 1 1 3 at the outer end is separated from the outer side of the block 9 1.
• the first stage 73 maintains the position where the movement has stopped until the push port 99 and the contact block 81 contact the side surface after the movement of the first stage 73 stops.
• the second stage 75 is moving. In this state, the first stage 73 attempts to move in the + Y direction, but the rigidity of the L piece M 4 of the part is greater than the force of the coil springs 12 1 and 12 3. The amount of fluctuation is absorbed by the contraction of the coil spring 122, and the portion to be corrected does not deform.
• FIG. 8 is a side view showing a correction operation state of the correction device.
• FIG. 9 is a plan view showing a correction operation state of the correction device.
• the L piece M4 which is the part to be corrected of the component, is in a state where it has been securely locked to the side surface of the groove 77 of the correction claw 71 as described above. That is, after the side surface of the groove 7 7 of the correction claw 7 1 is retained for a certain time by the L piece M 4 of the part M, the left-handed port 9 9 is moved to the side surface of the contact block 8 1. Hit. Therefore, it is possible to mechanically know that the correction part (correction nail) has come into contact with the correction target part (L piece).
• the second stage 75 is sent in the + Y direction by further rotating the pole screw 89. Then, the side surface (left surface) of the contact block 81 of the first stage 73 is pushed by the tip surface of the left pushing port 99 of the second stage 75, and the first stage 73 becomes the second stage. It moves on the linear guide 87 along with the stage 75 in the + Y direction.
• the correction nail 71 on the same stage also moves in the + Y direction, and the tip of the L piece M 4 hooked in the groove of the nail 71 deviates in the + Y direction.
• the amount, that is, the amount of movement after the first stage 73 and the second stage 75 start synchronous movement is the effective correction operation amount.
• the effective correction operation amount indicates the amount of movement of the second stage 75. Since the second stage 75 is sent by the rotation of the pole screw 89, the pole screw 89 is rotated until a predetermined movement amount is reached.
• the correction of the parts is performed for the S piece M3 and the L piece M4, and each of them is provided with a correction device 70 having the same structure.
• the L piece M 4 which is the part to be corrected is bent in the Y direction by the Y direction correction apparatus 70 Y, and the S piece M 3 is bent in the soil Z direction by the Z direction correction device 70 Z.
• the correction is performed after the part M is fixed at a predetermined position by the fixing means 10 and the initial position is measured by the measuring means 50.
• the shape of the part M is a three-dimensional and complicated structure, and the fixing means 10 and the measuring means 50 are also fixed on the table 3. Further, the size of the correction means 70 is large. Due to these facts, each of the correction devices 70Y, 70 ⁇ is operated by the moving mechanism fixed on the table 3 so as not to interfere with each means, and the standby position (non-operation position). It is arranged to move between and.
• the straightening device 70 ⁇ is configured such that the tip of the L piece ⁇ 4 of the part ⁇ fixed to the pedestal 11 of the fixing means 10 is It is in the groove.
• the correction direction of the device 70 is the soil direction, and the correction claw 71 moves in the soil direction on the device 70.
• the moving mechanism 13 1 is composed of a cylinder 13 5 having a piston rod 13 3 that can be expanded and contracted in the X direction, and a guide 13 7.
• the tip of the piston rod 1 33 is connected to the base 85 of the ⁇ correction device 70 ⁇ .
• the straightening device 70 when in the working position, The tip of the S piece M3 of the fixed part M is in the groove of the correction nail 71 of the device.
• the correction direction of the device 70Z is the Z direction, and the correction claw 71 moves in the soil Z direction on the device 70Z.
• the Z-correcting device 70 Z is moved by the moving mechanism 144 (see FIG. 3) from the same position to the standby position, away from the pedestal 11, in the depth direction of the groove 77 of the correcting claw 71. Move in the same X direction (see Figure 1).
• the Z correction device 70 The base 85 of the Z is fixed to an upright base 141 (see FIG. 1) so that the correction direction is the Z direction.
• the moving mechanism 144 includes a cylinder 147 having a piston rod 145 that can be expanded and contracted in the X direction, and a guide 149.
• the tip of the piston rod 1 4 5 is connected to the upright base 1 4 1.
• FIGS. 11 to 13 are flowcharts of the control unit of the component inspection and correction method according to the embodiment of the present invention.
• the component M to be inspected is set on the pedestal 11 of the fixing means 10 of the apparatus by the above-described method.
• the part M is fixed to the pedestal 11 by the fixing means 10.
• the base M 1 of the component M is fixed to the first reference surface 19 a of the pedestal upper portion 19 with the horizontal clamper 13, and then the upper surface M of the component M is fixed with the vertical clamper 15. 2 is fixed to the second reference plane 19 b of the upper part 19 of the pedestal.
• the Z position of the major axis A4 of the component M is measured by the measuring means 50. That is, the Z gauge 55 is extended in the Z through hole 23 of the pedestal 11 and is applied to the long axis A4, and the position is measured. Then, in S5, it is determined whether or not the measurement result is within a tolerance (in one example, ⁇ 25 urn). If the measurement result is within the tolerance, the position of the major axis A4 is determined to be a correct position, and the process proceeds to measure the X position of the major axis A4 and the minor axis A3 (described later in detail). But smells S5 If the measurement result is not within the tolerance, the correction work of AB is performed. In addition, each straightening device 70Y, 70mm is in a standby position in a normal state.
• a tolerance in one example, ⁇ 25 urn
• the ⁇ position of the long axis ⁇ 4 is corrected by moving the L piece ⁇ 4 in the ⁇ direction with the L piece straightening device ( ⁇ straightening device) 70 ⁇ .
• the movement mechanism 131 of the correction device 70 is operated to move the correction device 70 from the standby position to the operating position. Then, in S52, it is determined whether or not the correction work is the first time. In the case of the first time, the flow proceeds to S53, and the correction operation amount is set to a specified amount (for example, 150 xm).
• the correction operation amount is the effective movement amount of the second stage 75 of the correction device 70Y (the movement amount after the first stage 73 and the second stage 75 start synchronized movement, that is, the correction claw 77 Indicates the amount of stage movement after hitting L-piece M4).
• the straightening device 70Y is operated to bend the L piece M4 in a predetermined direction (soil Y direction) by a specified amount (_150 ⁇ im).
• the relationship between the Z position of the major axis A4 and the movement amount of the second stage 75 for bending the L piece M4 is determined in advance, and based on these relationships, the position of the major axis A4 is set to an appropriate position.
• the correction operation amount is determined so that
• the correction device 70Y is moved from the standby position to the operating position. Then, in S52, it is determined whether the correction is the first time. In this case, since the correction is the second time, the process proceeds to S56, and the difference between the second measurement result of the Z position of the major axis A4 and the first measurement result (actual deformation amount ⁇ ) Is determined to be within the target range (1 10 to 49 urn in one example).
• the value of 49 m is a value obtained by subtracting 1 / m from a value obtained by multiplying 2 by 25 zm of the positional dimension of the major axis A4.
• the process proceeds to S57, in which the second correction operation amount is set to the same correction operation amount (15 Om) as the first correction operation amount.
• the correction device 70Y is operated to perform the correction work, and then in S55, the correction device 70Y is moved to the standby position.
• the process proceeds to S58, and it is determined whether the difference ⁇ is less than the target range. If the difference ⁇ is smaller than the target range, the process proceeds to S59, and the correction operation amount is calculated by adding a predetermined amount (in one example, 30 m) to the first correction operation amount (-150 m) (-180 And In other words, since the springback of the material of the part is larger than the initially expected amount, the amount of correction operation per correction is increased.
• a predetermined amount in one example, 30 m
• the process proceeds to S60, and the correction operation amount is set to the first correction amount (one 150 m) by a predetermined amount (one 150 m). 30 n) is subtracted (one 120 urn). In other words, since the springback of the material of the part is smaller than the initially expected amount, the amount of correction operation per correction is reduced.
• the X position of the long axis and the short axis is corrected by moving the S piece M 3 in the Z direction with the S piece correcting device (Z correcting device) 70 Z.
• the position of the short axis A3 is changed by moving the S piece M3.
• the position (dimensional relationship) of the short axis A3 with respect to the long axis A4 is set to a predetermined value. I do.
• the S piece straightening device (Z straightening device) 70 Z The Z correction device 70 Z is moved from the standby position to the operating position by operating the moving mechanism 144 of the motor. Then, in S72, it is determined whether or not the correction work is the first time, and in the case of the first time, the flow proceeds to S73, and the correction operation amount is set to the specified amount (for example, 150 ⁇ m). .
• the correction operation amount indicates an effective movement amount of the second stage 75 of the correction device 70Z.
• the straightening device 70Z is operated to bend the S piece M3 in a predetermined direction (the soil Z direction) by a specified amount (1-1500m).
• the moving mechanism 144 is operated in S75 to move the correcting device 70Z to the standby position. After that, returning to S7 again, the X position of the long axis and the short axis is measured. Then, in S8, it is determined whether the measurement result is within the tolerance.
• the process proceeds to S78 and determines whether the difference ⁇ ⁇ ⁇ ⁇ is less than the target range. If the difference ⁇ is less than the target range, the process proceeds to S79, and the correction operation amount is calculated by adding a predetermined amount (in one example, ⁇ 30 ⁇ ) to the first correction operation amount (1-1550111) ( (180 nm). On the other hand, if the difference ⁇ X is not less than the target range in S78, the process proceeds to S80, and the correction operation amount is set to the first correction operation amount ( ⁇ 150 m) by a predetermined amount ( ⁇ 3 0 m) is subtracted (-120 m).
• a predetermined amount in one example, ⁇ 30 ⁇
• the correction operation amount is set to the first correction operation amount ( ⁇ 150 m) by a predetermined amount ( ⁇ 3 0 m) is subtracted (-120 m).
• FIG. 14 is a diagram showing a main structure of the component inspection and correction device, where FIG. 14 (A) is a front view and FIG. 14 (B) is a plan view.
• FIG. 15 is a diagram for explaining a method of obtaining the position of the reference part of the component.
• the part M shown in FIG. 10 is inspected and corrected.
• the positions of the major axis A4 and the minor axis A3 are substantially based on the fixing surface of the part M (actually, the base Ml and the upper surface M2, see FIG. 10).
• the center position of the circular hole B formed in the base Ml of the part M in the Z direction was used as the reference position.
• the positional relationship between the reference position and the major axis A4 is measured.
• the shape of the hole B is a perfect circle.
• the means for measuring the center position of the hole B in the base M in the Z direction is a measuring sensor composed of a light emitting element and a light receiving element, as shown in Fig. 14 (B). And a moving mechanism 303 for moving the sensor in the Z direction.
• a photoelectric switch having a light-emitting element 305 and a light-receiving element 307 can be used.
• the light emitting element 305 and the light receiving element 307 are attached to the tip of a holding member 309 having a U-shaped cross section in the XY plane.
• the operation of the sensor 301 is controlled by the control unit, and the output is input to the control unit.
• the holding member 309 is disposed so as to sandwich the base M1 of the component M, as shown in FIG. 14B, and the light emitting element 305 is provided on one surface (outer surface) of the base M1 and on the opposite side.
• the light receiving element 307 is located on the surface (inner surface). Note that the arrangement of the light emitting element 305 and the light receiving element 307 may be reversed.
• the moving mechanism 303 is provided with a pole screw 311 extending in the Z direction and a pole screw 311. It has a pole bearing 3 13 driven vertically. The lower end of the poll screw 311 is connected to the stepping motor 315. When the stepping motor 3 15 drives and the poll screw 3 11 rotates, the pole bearing 3 13 moves up and down (Z direction) along the pole screw 3 11.
• the holding member 309 of the sensor 301 is fixed to the pole bearing 313, and moves in the vertical direction (Z direction in the soil) along with the pole bearing 313 along with the pole bearing 313.
• the moving mechanism 301 is controlled by the control unit.
• the moving mechanism 303 is actuated, and the sensor 301 is moved so that the optical axis extending between the light emitting element 305 and the light receiving element 307 is positioned below the hole B in the Z direction.
• the light beam output from the light emitting element 305 is blocked by the base M1 and does not reach the light receiving element 307.
• the stepping motor 315 is driven to rotate the pole screw 311 to raise the sensor 301 in the Z-axis direction.
• the center position of the hole B in the Z direction can be obtained by dividing the length of the hole B in the Z direction by two.
• the length of the hole B in the Z direction is represented by a value obtained by subtracting the position H1 of the lower edge of the hole B from the position H2 of the upper edge of the hole B. Therefore, the center position HC of the hole B in the Z direction can be obtained by (H2-H1) Z2.
• the center HC in the Z direction can be obtained by the above-described method regardless of the position of the optical axis of the sensor 301 within the diameter of the hole B in the X direction. From the point of measurement accuracy, it is preferable to perform the measurement near the center of the hole B (a part with a radius of about 20% from the center).
• the position of the major axis A4 in the Z direction is measured by the Z gauge 55 of the measuring means 50 (see FIG. 4).
• These results show the relationship between the center position H C of the hole B, which is the reference position, in the Z direction and the position of the long axis A4 in the Z direction.
• This positional relationship is determined, and if the positional relationship between the two is not the desired positional relationship, the L piece M4 on which the long axis A4 is planted is corrected by the correcting means 70, and the position of the long axis A4 in the Z direction is corrected. To correct.
• the position of the long axis A4 in the Z direction after the correction is measured, and it is determined whether or not the relation between the Z direction position and the center position of the hole B in the Z direction is a desired positional relation. At this time, as described above, correction, measurement, and determination are repeated until the positional relationship falls within a predetermined tolerance.
• FIG. 16 is a diagram showing the shape of the part to be inspected.
• FIG. 16 (A) is an overall perspective view
• FIG. 16 (B) is a partial side sectional view.
• the part W is made of a steel plate for pressing, and a face plate that spreads in the X and Y directions.
• Two side pieces W2 and W3 erected in the + Z direction from two sides opposing in the X direction and two sets erected in one Z direction from two opposing sides in the Y direction of the same plate It has a work-to-piece Yl, ⁇ 2.
• the face plate on the top of the figure is called base W1.
• the base W1 has two positioning holes ⁇ 1 and ⁇ 2 arranged in the X direction (the function of these holes will be described later).
• Each yoke pair piece Yl, ⁇ 2 has an outer yoke piece 111, Y21, and opposing yoke pieces ⁇ 12, ⁇ ⁇ 22 facing the inside of the yoke piece.
• Each yoke piece has a concave portion opened inside, as shown in FIG. 16 (I), and a magnet Ml (M2) is fitted into the concave portion and fixed.
• the inner surface of the magnet Ml (M2) faces the inner surface of the opposing yoke pieces Y12 and Y22 with a space S having a width CL therebetween (see Fig. 16 (B)).
• FIG. 17 is a perspective view showing a structure of a main part of a component inspection and correction device according to another embodiment of the present invention.
• FIG. 18 is a perspective view showing a state of the main part of the apparatus shown in FIG. 17 at the time of measurement.
• FIG. 19 is a view showing the state of the main part of the device in FIG. 17 at the time of correction
• FIG. 19 (A) is a perspective view of the main part
• FIG. 19 (B) is a partial side sectional view of the main part. .
• the magnetic flux density in the space S between the two pieces Y1 and Y2 is inspected, and if necessary, the magnetic flux density is adjusted to fall within an appropriate range.
• the bending and straightening of the opposed yoke pieces Y12 and Y22 are performed.
• a case is shown in which one of the yokes and the piece # 1 is inspected and straightened. Each figure shows only the main components for simplicity.
• the component inspection and correction device 400 includes fixing means 410 for fixing the component W to be inspected, measuring means 420 for measuring the magnetic flux density in the space S of the yoke pair 1, and measuring means A means for determining whether the result measured in 420 is within the allowable range, and a quantitatively controlled plastic working on the opposing yoke piece Y12 of the part W to shape the shape of the part W Correction means 430 for correction.
• the determination means the same determination means 210 (see FIG. 1) as in the above-described component inspection and correction apparatus 1 can be used.
• the fixing means 410 fixes the component W, and is driven in the ⁇ X direction between the measurement position and the correction position (the driving mechanism is not shown).
• the magnetic flux density in the space S between the yoke and the piece Y1 is measured by the measuring means 420.
• the opposed yoke piece Y12 is bent and corrected in the soil Y direction by the correction means 4330.
• the fixing means 4 10 has a pedestal 4 11 on which the base W 1 of the component W is mounted, and a clamper 4 13 for clamping the base W 1.
• the pedestal 4 1 1 extends in the XY plane, and is vertically elongated in the X direction.
• the upper reference surface 4 1 a and the side reference extending in the -Z direction from the outer side (one Y direction side) of the upper reference surface 4 1 1 a. It has a face 4 11 b.
• the base W1 is placed on the upper reference surface 411a, and at the same time, the inner surface of the yoke pair Y2 is brought into contact with the side reference surface 411b to position the component W in the Y direction.
• the clamper 4 13 also extends in the XY plane, has a vertically long lower surface in the X direction, and is located such that the lower surface faces the upper reference surface 4 11 a of the pedestal 4 11.
• the clamper 4 13 is driven in the soil Z direction (the drive mechanism is not shown).
• the clamper 4 13 descends to the lowest position in the 1 Z direction (the direction indicated by the arrow in the figure), the lower surface contacts the upper reference surface 4 1 1 a of the pedestal 4 1 1.
• a groove 4 15 into which the two side pieces W 2 and W 3 of the component W enter is formed on the lower surface of the clamper 4 13, a groove 4 15 into which the two side pieces W 2 and W 3 of the component W enter is formed.
• the measuring means 420 includes a Gauss meter 421 fixed to the device 400.
• the Gauss meter 421 has a probe 42 a that extends in the XZ plane and is elongated in the X direction. As shown in Fig. 18, when the part W is fixed to the fixing means (not shown) and driven in the + X direction to the measurement position, the probe of the Gauss meter 4 21 in the space S between the yoke and the piece Y 1 4 2 1a is fitted, and the magnetic flux density in the space S is measured.
• the correcting means 430 has a pedestal 431 having a substantially rectangular parallelepiped shape, and a correcting claw 433 arranged on the pedestal 431.
• the correcting means 430 can move in the ⁇ Y direction (the moving mechanism is not shown).
• the width of the groove 435 is wider than the thickness of the opposing yoke piece ⁇ 1 2 of the part W of the part W.
• the thickness of the side walls 433a and 433b on both sides of the groove 435 is equal and smaller than the width CL of the space S.
• the side walls 433a and 433b of the groove 435 sandwich the opposite yoke piece Y12 from both sides at the correction position.
• FIG. 20 is a perspective view showing a structure of a main part of a component inspection and correction device according to another embodiment of the present invention.
• FIG. 21 is a partial side cross-sectional view of a main part of the device of FIG. 20 at the time of correction.
• the component inspection and correction device 400 inspects the magnetic flux density in the space S between the one yoke and the piece Y 1 and corrects the bending of the opposing yoke piece Y 12 of the same piece Y 1.
• the inspection and correction device 500 inspects the magnetic flux density in the space of both the pair Y1 and Y2 and the bending of the opposing yoke Y1 2 and Y2 2 of these pieces Y1 and Y2. Straightening can be performed with the part W fixed.
• This component inspection and correction device 500 basically has the same structure as the component inspection and correction device 400, and includes fixing means 5100 for fixing the component W to be inspected, and each yoke pair piece Y1, Measuring means 520 for measuring the magnetic flux density in the space S of Y2; determining means 210 for determining whether or not the result measured by the measuring means 520 is within an allowable range (see FIG. 1); It comprises correction means 5330 for correcting the shape of the part W by subjecting the opposed yoke pieces # 12 and # 22 of the part W to quantitatively controlled plastic working.
• the fixing means 5 like the fixing means 4 20, includes a pedestal 5 11 and a clamper 5 13.
• the pedestal 5 11 and the clamper 5 13 project from a structure (not shown).
• On the upper reference surface 511a of the pedestal 5111 two positioning pins 517 arranged in the X direction are erected.
• the positioning pin 5 17 is passed through the positioning hole P 1 of the base W 1 of the component W, and the base W 1 is placed on the upper reference surface 5 11 a.
• On the lower surface of the clamper 5 13, a groove 5 15 into which two side pieces W 2, W 3 of the component W and two positioning pins 5 17 are inserted is formed.
• the fixing means 5100 fixes the component W and is driven in the ⁇ X direction between the measurement position and the correction position (the drive mechanism is not shown).
• the magnetic flux density in the space S between the yoke pair pieces Y1 and Y2 is measured by the measurement means 520. So Then, at the straightening position, the opposing yoke pieces Y12, Y22 are bent in the soil Y direction by the straightening means 5330.
• the correction position as shown in FIG. 21, between the inner surfaces of the opposed yoke pieces Y 12 and Y 22 and both side surfaces of the pedestal 5 11 1 of the fixing means 5 10.
• the fixing means 510 and the correcting means 5330 are positioned so that a gap is formed.
• the measuring means 5 220 includes two Gaussian lights 5 2 1 and 5 2 2. Each of the houses is arranged symmetrically with respect to the X axis. The distance in the Y direction between the probes 52 1 a and 52 2 a for each Gaussian is equal to the distance between the spaces S between the two yokes of the part W and the pieces Y 1 and Y 2.
• the correction means 5330 has two correction claws 533, 534.
• the structure of each of the correction nails 5 3 3 and 5 3 4 is the same as the structure of the correction nail 4 3 3 of the parts inspection and correction device 400. That is, grooves 535, 536 extending in the X direction are formed on the upper surfaces of the correction nails 533, 534. The side walls on both sides of the grooves 535, 536 sandwich the opposing yoke pieces Y12, Y22 from both sides.
• Each correction nail is independently driven and can move in the soil Y direction (the moving mechanism is not shown).
• the opposing yoke piece 12 is bent in the same direction. This narrows the width CL of the space S.
• the opposing yoke piece Y 12 is bent in the same direction. This increases the width CL of the space S.
• the correction claw 534 is driven in the + Y direction, the opposing yoke piece ⁇ 22 is bent in the same direction. This increases the width CL of the space S.
• the correction claw 5 3 4 is driven in the vertical direction, the opposing yoke piece 12 is bent in the same direction. As a result, the width CL of the space S is narrow.
• FIG. 22 is a flowchart of the control unit of the component inspection and correction device.
• the component W is fixed to the fixing means 5110.
• the magnetic flux in the space S of the two yoke pair pieces Y l and ⁇ 2 in S 103 Measure the density.
• each measured magnetic flux density is within the allowable range, and if it is within the allowable range, no correction is required, and the fixing of the component W is released in S 105. I do. However, if the magnetic flux density in one or both yoke pair pieces is not within the allowable range, the following correction work is performed.
• the correction claw 533 of the correction means 5330 is moved in the + ⁇ direction by a specified amount, and the opposing yoke piece ⁇ 12 is bent in the + ⁇ direction to reduce the width CL.
• the width CL of the space between the yoke and the piece ⁇ 1 needs to be increased. Therefore, the correction claw 533 of the correction means 5330 is moved by a predetermined amount in one direction, and the opposing yoke piece 12 is bent in the negative direction to increase the width CL. If the magnetic flux density in the space S between the yoke pair piece Y2 is not within the predetermined range, the same correction is performed. If it is necessary to correct only one yoke pair, the other yoke pair remains fixed at the correction position.
• the process returns to S102, moves the fixing means 510 in the X direction to the measurement position, and performs measurement again at S103.
• the measurement result is determined in S104, and if the result is out of the allowable range, the process proceeds to S106 and S107 to perform the correction work again. This operation of correction, measurement, and judgment is repeated until the measurement result falls within the allowable range.
• the fixing means 5110 is released, and the inspection and correction of one part is completed.
• the straightening work may be performed so as to balance the magnetic flux density in the space S of the two yoke pair pieces Yl and ⁇ 2.
• the component W acts on the physical quantity (in this example, the magnetic flux density)
• the physical quantity is inspected, and a part of the component related to the physical quantity (the opposing yoke piece in this example) is corrected.
• the physical quantity an appropriate value. This can be expected to improve the performance and yield of components.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Straightening Metal Sheet-Like Bodies (AREA)

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• 2002
  • 2002-12-27 JP JP2002380651A patent/JP4023795B2/ja not_active Expired - Fee Related
• 2003
  • 2003-05-13 WO PCT/JP2003/005929 patent/WO2003097265A1/ja not_active Ceased
  • 2003-05-13 AU AU2003234795A patent/AU2003234795A1/en not_active Abandoned

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