WO2003061886A1 - Machine d'usinage par ultrasons et pointe utilisee pour ledit usinage - Google Patents

Machine d'usinage par ultrasons et pointe utilisee pour ledit usinage Download PDF

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Publication number
WO2003061886A1
WO2003061886A1 PCT/JP2003/000138 JP0300138W WO03061886A1 WO 2003061886 A1 WO2003061886 A1 WO 2003061886A1 JP 0300138 W JP0300138 W JP 0300138W WO 03061886 A1 WO03061886 A1 WO 03061886A1
Authority
WO
WIPO (PCT)
Prior art keywords
ultrasonic
spindle
tip
tool
processing
Prior art date
Application number
PCT/JP2003/000138
Other languages
English (en)
Japanese (ja)
Inventor
Yoshihiro Take
Masayoshi Kawanami
Original Assignee
Takesho Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takesho Co., Ltd. filed Critical Takesho Co., Ltd.
Publication of WO2003061886A1 publication Critical patent/WO2003061886A1/fr

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B37/00Boring by making use of ultrasonic energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B31/00Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02Chucks
    • B23B31/24Chucks characterised by features relating primarily to remote control of the gripping means
    • B23B31/26Chucks characterised by features relating primarily to remote control of the gripping means using mechanical transmission through the working-spindle
    • B23B31/261Chucks characterised by features relating primarily to remote control of the gripping means using mechanical transmission through the working-spindle clamping the end of the toolholder shank
    • B23B31/263Chucks characterised by features relating primarily to remote control of the gripping means using mechanical transmission through the working-spindle clamping the end of the toolholder shank by means of balls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/15506Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling the tool being inserted in a tool holder directly from a storage device (without transfer device)

Definitions

  • the present invention relates to a processing apparatus provided with an ultrasonic transducer used for processing hard and brittle materials, and more particularly to an ultrasonic processing machine suitable for applying automatic tool change (AT C).
  • An ultrasonic processing machine that enables such precision processing, generally, has a structure in which an ultrasonic transducer is connected to a spindle, which is a rotating spindle, and a drill or the like for fine processing is attached to this transducer. .
  • a drill or the like for fine processing is attached to this transducer.
  • ultrasonic energy is added to the high-speed rotating drill from the ultrasonic transducer, enabling efficient precision machining of hard and brittle materials, which was conventionally difficult.
  • Japanese Patent Application Laid-Open No. Hei 4 1 1 1 7 9 9 proposes an ultrasonic processing machine which meets the above-mentioned request.
  • This ultrasonic processing machine has an ultrasonic vibration that can be moved relative to the workpiece in the X, Y, and Z directions with respect to the workpiece held by the main table of the processing table and the main axis of the processing machine.
  • An ultrasonic armature consisting of a child and a cone for expanding and transmitting the same, and a tool unit having a tool fixed to the tip of a horn for vibration transmission are provided, and the cone and the horn can be removed by screws.
  • the ultrasonic attachment is moved to the tool changing means by NC control, the horn is removed from the cone on the attachment side, and the required tool unit horn is newly tightened to the cone, whereby the processing tool It can be replaced and so-called automatic tool change (AT C) can be achieved.
  • ultrasonic waves having several tens of thousands of vibrations or more per second are transmitted, and mechanical vibration is added to the processing tool by the resonance phenomenon to perform processing. Therefore, it is important that the ultrasonic transducer, the support horn, and the processing tool have their natural frequencies matched and the balance attached so as to achieve the desired purpose. If the balance of the horn and the processing tool is even slightly deviated or there is a gap at the connecting part, the necessary ultrasonic energy will not be transmitted to the processing tool, or the core shake will affect the processing accuracy. It causes the cause of
  • the problem to be solved by the present invention is to facilitate automatic tool change of the ultrasonic processing machine, and to make balance adjustment of the ultrasonic transducer, the support horn and the processing tool easy, and to cause oscillation before mounting on the processing machine. After confirmation, oscillation defects and abnormal heat generation are prevented, and accurate positioning To improve processing efficiency and processing accuracy. Disclosure of the invention
  • the inventor of the present invention has made it possible to construct an ultrasonic transducer, a support horn, and a processing tool, which are most difficult to adjust the balance, as a union, and to make this an attachment type.
  • the idea came to the completion of the present invention.
  • an ultrasonic processing machine comprising a spindle body and a tip unit detachably attached to the spindle body, wherein the tip unit is attached to an ultrasonic transducer and a support horn, and the support horn is attached to the support horn. It is characterized in that the processing tool is connected.
  • the tip unit By configuring the tip unit as a unit equipped with an ultrasonic transducer, a support horn, and a processing tool, it is easy to adjust the balance of the ultrasonic transducer, the support horn, and the processing tool, check the oscillation before mounting on an actual machine and process it. Can be implemented. Moreover, by providing a plurality of such units so as to correspond to several patterns, this tip unit is automatically replaced in accordance with a preset program, and after being attached to a real machine, It becomes possible to immediately carry out machining operations, and continuous automatic operation of the ultrasonic processing machine becomes possible.
  • the balance adjustment of the ultrasonic transducer, the support horn, and the processing tool is much faster than the adjustment on the actual machine, for example, by adjusting the ultrasonic resonance balance and the position of the cutting edge on the ultrasonic tool resetter. Accurate adjustment work can be realized.
  • a tapered surface to be fitted to each other at the lower portion of the spindle body and the upper portion of the housing of the distal end unit, fixing of the lower portion of the spindle body and the upper portion of the distal end portion is a two-face constraint type.
  • the spindle body and the tip end can be mounted with high accuracy by means of a touch, and the structure of the automatic end changer can be simplified.
  • a tapered surface which is inclined with respect to the rotation axis, is formed in each of the housings that form the outer surface of the tip end unit.
  • a so-called two-face restraint type is used in which positioning is performed in two planes with the flange face orthogonal to the rotation axis, and for fixing, a known chuck system that can lock and unlock by moving the clamp rod in the spindle body vertically it can.
  • a clamp rod having a hollow core is provided inside the spindle main body, and the electrical connection parts provided on the upper and lower portions of the spindle main body are the shafts of the clamp rod. It is preferable to have a structure in which the connection is made via a lead wire passing through the core.
  • the non-rotating portion on the spindle main body side via the spindle rotating at high speed, and the ultrasonic transducer of the distal end nitte attached to the spindle main body rotating at high speed with the spindle are electrically conductive brushes. It will be easy to connect electrically by
  • the tip unit of the present invention is a tip unit detachably attached to the spindle body of the ultrasonic processing machine, and the ultrasonic transducer and the support horn are attached to the housing and processed into the support horn. It is characterized in that a tool is connected.
  • the support horn and the processing tool can be connected by means such as a collet chuck or press fitting, in order to ensure the transmission of the ultrasonic vibration, the end face of the support horn and the end face of the processing tool Should be in close contact with each other, preferably by screw connection.
  • this tip unit is mounted on a tool presetter equipped with the same mechanism as the spindle main body to adjust the position of the cutting edge before attaching the tip unit to the actual machine, and oscillation is performed using the same ultrasonic oscillator as the actual machine. It is desirable that testing be done to adjust the ultrasonic resonance frequency and amplitude. As a result, after installation on the actual machine, machining operations can be performed immediately, and the automatic tool changer can be used to freely replace a plurality of prepared tip toolings in a fully automatic and continuous ultrasonic wave. As processing becomes possible, not only working time can be shortened significantly, but also labor saving and high precision processing can be realized. Brief description of the drawings
  • FIG. 1 is a front view showing an ultrasonic processing machine according to an embodiment of the present invention.
  • FIG. 2 is a side view of the ultrasonic processing machine of FIG.
  • FIG. 3 is a cross-sectional view showing an internal structure of a spindle body of the ultrasonic processing machine of FIG. 1 and a tip unit attached thereto.
  • FIG. 4 is an enlarged view of the upper end of the clamp rod of the spindle body of FIG. 3;
  • FIG. 5 is an enlarged view of the tip unit of FIG.
  • FIG. 6 is an enlarged view of a distal end attachment portion of the spindle body of FIG. 3;
  • FIG. 7 is a view showing a state in which the tip unit is removed from the spindle body of FIG. 3;
  • FIG. 1 is a front view showing an ultrasonic processing machine according to an embodiment of the present invention
  • FIG. 2 is a side view of the ultrasonic wave processing machine shown in FIG.
  • an X-axis table 112 is provided on a pedestal 111, and a Y-axis table 114 is provided on a frame 113 erected at the rear.
  • a Z-axis motor 116 is disposed on a column 115 provided on the Y-axis table 114, and a spindle body A is attached in front of the column 115.
  • the spindle main body A can be horizontally moved to the left and right by the slide mechanism of the Y-axis table 114, and can be raised and lowered along the column 115 by the Z-axis motor 116.
  • a tip end B is mounted at the end of the spindle body A.
  • a tool change base 1 1 7 is disposed below the frame 1 1 3.
  • a plurality of tip end units B a for replacement are set in the tool change base 1 1 7.
  • FIG. 3 is a cross-sectional view showing the internal structure of the spindle main body A of FIG. 1 and a tip end unit B attached thereto
  • FIG. 4 is an enlarged view of the upper end portion of the clamp rod of the spindle main body A of FIG.
  • 10 is a drive motor of spindle body A, 1 1-1 and 1 1-2 are The rotation force of the drive motor 10 is transmitted to the spindle 13 via the pulley 11 1, the belt 12 and the pulley 1 1-2.
  • the spindle 13 is incorporated in the spindle casing 17 and, at its center, a vertically long clamp rod 14 is provided.
  • a shaft core portion 14 a is formed in a hollow, and in the hollow shaft core portion 14 a, a lead (not shown) is provided.
  • the clamp rod 14 is slidably held by the inner surface 1 3 d of the spindle 1 3 and the inner surface 1 1 a of the hole formed in the pulley 1 1-2, and is provided in the inner space of the spindle 1 3 It is pushed downward by panel 15.
  • the numeral 16 is a bearing for supporting the spindle 13.
  • an ultrasonic brush case 18 is formed at the upper end portion of the clamp rod 14 and bistone 1 for pushing up the clamp port 14 is provided below it.
  • 9 and cylinder 20 are provided.
  • a negative electrode rotor 44 is engaged with a screw at the top of the clamp rod 14 and a ring 45 is attached to the outer periphery of the electrode rotor 44.
  • a ring-shaped projection 1 9 a provided inside the biston 19 abuts on the ring 45 and pushes it up.
  • the clamp port 14 is also pushed upward.
  • the ring-shaped projection 19 a separates from the ring 45 and the clamp rod 14 is pushed downward again by the disc spring 15.
  • the electrode rotor 4 2 is attached to the insulator 4 6, and the conductor in the hollow shaft core 1 4 a from the electrode rotor 4 2 via the screw 4 2 a and the terminal block 4 2 b Connected to the By this, the ultrasonic oscillator
  • the positive pole of the output power supply (not shown) is a power supply brush 4 1 electrode rotor 4 2 screw 4 2 a terminal block 4 2 b b clamp rod 14 shaft core portion 1 4 a wire terminal 2 1 (See Figure 6)-Terminal 3 3 a (See Figures 5 and 6)-Conductor 3 2 a (See Figures 5 and 6) to be connected to the ultrasonic transducer 35.
  • FIG. 5 is an enlarged view of the tip unit B of FIG. 3
  • FIG. 6 is an enlarged view of a tip unit attachment portion of the spindle body A of FIG.
  • the front end B has a housing 30, an ultrasonic transducer 35 mounted on the housing 30, a support horn 36, and a processing tool 37 connected with a support horn 36 by a screw 38.
  • the upper opening inner surface of the housing 30 is formed with an engagement surface 30 c with the lock ball 31 which is expanded and contracted by the clamp rod 14.
  • a taper surface 30a is formed on the upper periphery of the housing 30, which conforms to the tapered surface 13a of the spindle 13 shown in FIG. 3, and further, from the lower end of the tapered surface 30a, the horizontal direction is continuous.
  • a flange receiving surface 30 b is formed at a position corresponding to the flange receiving surface 13 b formed at the lower end of the spindle 13.
  • the ultrasonic transducer 35 and the support horn 36 are attached to the housing 30, and after connecting the processing tool 3 7 to the end of the support horn 36, the spindle body A
  • the tool is mounted on a tool presetter equipped with the same mechanism as above to adjust the position of the cutting edge, and then perform an oscillation test using the same ultrasonic oscillator as the actual machine to adjust the ultrasonic resonance frequency and amplitude. After these adjustments are made, it is set as the tip unit B a for replacement on the tool change stand 1 1 7 of the ultrasonic processing machine 100 shown in FIG.
  • processing can be performed immediately, Tool Exchange Table By freely replacing a plurality of tip units B a set in l7, continuous ultrasonic processing can be performed fully automatically.
  • FIG. 7 is a view showing a state in which the distal end unit B is removed from the spindle main body A.
  • the tip end end B selected from among the end ends B set in advance in the tool change stand 1 1 7 and already adjusted in balance is subjected to the spindle in the reverse order of the above.
  • 13 Insert into the recess 13 c formed at the lower end of 13 and push it up.
  • the positioning is performed by the two-face restraint of the tapered surface 1 3 a, 3 0 a, and the flange receiving surface 1 3 b, 3 0 b, and the lock ball 3 is further lowered by pushing down the clamp port 1 4. 1 is moved to the position shown by the solid line in Fig. 6, the tip end B is locked and it can be used.
  • the tip unit B can be extremely easily replaced with one touch, and moreover, the tip unit B which has been subjected to the edge position adjustment and vibration test in advance By using it, the positioning accuracy of the tool attachment to the spindle body is improved, and since no oscillation failure occurs, high-precision ultrasonic processing is possible.
  • the ultrasonic vibration and the supporting horn are attached to the housing, and the processing tool is connected to the supporting horn, so that the ultrasonic vibration is generated. Adjustment of balance, support horn and processing tool Can be done outside the actual machine, and this will improve processing efficiency and accuracy. Furthermore, by forming the taper surface to be fitted to each other on the lower part of the spindle body and the upper part of the housing of the tip module, fixing the lower part of the spindle body to the top of the tip module is a two-face constraint type. It becomes possible to replace the tip unit with one touch very easily.
  • a clamp rod with a hollow core is provided inside the spindle body, and the electrical connections provided at the top and bottom of the spindle body are connected through the lead wire passing through the core of the clamp rod.
  • the ultrasonic processing machine of the present invention is an ultrasonic processing machine used for processing non-metallic hard and brittle materials such as ceramic materials, metallic hard and brittle materials such as titanium alloys and heat-resistant alloys, and in particular automatic tool change (ATC) It is an ultrasonic processor suitable for applying C).
  • ATC automatic tool change

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Drilling And Boring (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

Selon l'invention, une machine d'usinage par ultrasons présente un corps principal de broche (A) et une pointe (B) montée amovible sur le corps principal. La pointe (B) est structurée de sorte qu'un oscillateur à ultrasons (35) et une bigorne de support (36) sont montés sur un logement (30) et un outil (13a) est relié à la bigorne de support (36). Des faces tronconiques (13a, 30a) s'ajustant l'une à l'autre sont formées respectivement sur une partie inférieure du corps principal de broche (A) et sur une partie supérieure du logement (30) de la pointe (B). Etant donné que la fixation de la partie inférieure de la broche (A) et que la partie supérieure de la pointe (B) est du type assujettissement à deux faces, le changement automatique de la pointe (B) est possible. Des pointes (Ba) ajustées à l'avance sont placées en position, la pointe (B) est changée librement à l'aide d'un dispositif de changement d'outil automatique, et l'usinage par ultrasons continu, totalement automatique est rendu possible. Ainsi, non seulement le temps d'usinage est réduit de manière significative, mais également une économie de main d'oeuvre et un usinage de haute précision peuvent être obtenus.
PCT/JP2003/000138 2002-01-18 2003-01-10 Machine d'usinage par ultrasons et pointe utilisee pour ledit usinage WO2003061886A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002-010356 2002-01-18
JP2002010356A JP2005224865A (ja) 2002-01-18 2002-01-18 超音波スピンドル加工機およびこれに用いる先端ユニット

Publications (1)

Publication Number Publication Date
WO2003061886A1 true WO2003061886A1 (fr) 2003-07-31

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TW (1) TW200302149A (fr)
WO (1) WO2003061886A1 (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006002675A1 (fr) * 2004-07-02 2006-01-12 Sauer Gmbh Outil a tete oscillante
WO2007130161A1 (fr) * 2006-05-03 2007-11-15 Purdue Research Foundation ensemble porte-outil et procÉdÉ d'usinage assistÉ par modulation
JP2009539633A (ja) * 2006-06-14 2009-11-19 パウル ミュラー ゲーエムベーハー ウント コンパニー カーゲー ウンターネーメンスベタイリグンゲン 引張り棒と導電体とを備えた主軸
WO2010037360A1 (fr) * 2008-10-04 2010-04-08 Abemaka Gmbh Dispositif pour usiner des pièces au moyen d'un outil
EP2460610A1 (fr) * 2009-06-15 2012-06-06 Minoru Kanematsu Mécanisme pour outil de saisie, mandrin, mécanisme de serrage ou analogue
CN102794673A (zh) * 2012-08-03 2012-11-28 刘钊 一种加工中心普通拉刀主轴自动打刀记数检测装置
DE102011052252A1 (de) * 2011-07-28 2013-01-31 Herrmann Ultraschalltechnik Gmbh & Co. Kg Werkzeugkopf sowie Verfahren zur spanenden Bearbeitung
US8694133B2 (en) 2009-09-05 2014-04-08 M4 Sciences, Llc Control systems and methods for machining operations
CN103978560A (zh) * 2014-05-27 2014-08-13 华侨大学 一种快换式超声振动辅助锯切装置
CN104400017A (zh) * 2014-09-25 2015-03-11 广州市昊志机电股份有限公司 一种超声波直联主轴
TWI513536B (fr) * 2013-03-07 2015-12-21
DE102009008227C5 (de) * 2009-02-10 2016-10-13 Sauer Ultrasonic Gmbh Schnittstelle für einen Werkzeugaktor bzw. für ein Werkzeug, insbesondere zum Verbinden mit einer Werkzeugmaschine
US10245652B2 (en) 2012-11-05 2019-04-02 M4 Sciences Llc Rotating tool holder assembly for modulation assisted machining
CN110170668A (zh) * 2019-06-27 2019-08-27 深圳市特力威科技有限公司 用于超声波刀把的供电主轴
US10864580B2 (en) 2018-01-23 2020-12-15 Quantum Impact, LLC Method and apparatus for machining a workpiece
US10875138B1 (en) 2016-08-09 2020-12-29 M4 Sciences Llc Tool holder assembly for machining system

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WO2008156116A1 (fr) * 2007-06-19 2008-12-24 Kazumasa Ohnishi Dispositif de découpe ou d'affûtage
JP2011088216A (ja) * 2008-02-12 2011-05-06 Uwave:Kk 超音波工具ホルダ
KR101142858B1 (ko) * 2008-10-22 2012-05-08 장금순 연마장치
CA2792882C (fr) 2010-03-11 2015-01-27 Edison Welding Institute, Inc. Module d'usinage ultrasonique
CN102190434A (zh) * 2010-03-18 2011-09-21 赵紫元 超薄多孔光学玻璃加工工艺
CN101745658A (zh) * 2010-03-24 2010-06-23 中国电子科技集团公司第二研究所 超声打孔机
JP5646734B2 (ja) 2010-04-29 2014-12-24 エジソン・ウェルディング・インスティチュート,インコーポレーテッド 可搬式装置と共に使用するための超音波機械加工用組立体
TWI408025B (zh) * 2010-08-27 2013-09-11 Alan Xiao 同軸驅動超音波主軸
TW201244873A (en) * 2011-05-06 2012-11-16 Mold Wang Prec Co Ltd Automatic clamping device for ultrasonic machining
JP2013039627A (ja) * 2011-08-11 2013-02-28 Takemasa:Kk 超音波加工機の自動工具交換装置
TWI562871B (en) * 2014-11-07 2016-12-21 Tongtai Machine & Tool Co Ltd Machine tool with high frequency vibration and control method of sensing/feedback signals
TWM534055U (en) * 2016-09-22 2016-12-21 bao-yuan Zhang Rotational main shaft having cooling device
TWI666087B (zh) 2017-03-29 2019-07-21 國立中興大學 一種切削刀把
TWI691377B (zh) * 2019-06-26 2020-04-21 李慧玲 刀把供電主軸(二)

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Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8240396B2 (en) 2004-07-02 2012-08-14 Sauer Gmbh Tool with an oscillating head
WO2006002675A1 (fr) * 2004-07-02 2006-01-12 Sauer Gmbh Outil a tete oscillante
US7587965B2 (en) 2005-05-03 2009-09-15 Purdue Research Foundation Tool holder assembly and method for modulation-assisted machining
WO2007130161A1 (fr) * 2006-05-03 2007-11-15 Purdue Research Foundation ensemble porte-outil et procÉdÉ d'usinage assistÉ par modulation
JP2009539633A (ja) * 2006-06-14 2009-11-19 パウル ミュラー ゲーエムベーハー ウント コンパニー カーゲー ウンターネーメンスベタイリグンゲン 引張り棒と導電体とを備えた主軸
WO2010037360A1 (fr) * 2008-10-04 2010-04-08 Abemaka Gmbh Dispositif pour usiner des pièces au moyen d'un outil
DE102009008227C5 (de) * 2009-02-10 2016-10-13 Sauer Ultrasonic Gmbh Schnittstelle für einen Werkzeugaktor bzw. für ein Werkzeug, insbesondere zum Verbinden mit einer Werkzeugmaschine
EP2460610A1 (fr) * 2009-06-15 2012-06-06 Minoru Kanematsu Mécanisme pour outil de saisie, mandrin, mécanisme de serrage ou analogue
EP2460610A4 (fr) * 2009-06-15 2014-12-10 Minoru Kanematsu Mécanisme pour outil de saisie, mandrin, mécanisme de serrage ou analogue
US8694133B2 (en) 2009-09-05 2014-04-08 M4 Sciences, Llc Control systems and methods for machining operations
DE102011052252A1 (de) * 2011-07-28 2013-01-31 Herrmann Ultraschalltechnik Gmbh & Co. Kg Werkzeugkopf sowie Verfahren zur spanenden Bearbeitung
CN102794673A (zh) * 2012-08-03 2012-11-28 刘钊 一种加工中心普通拉刀主轴自动打刀记数检测装置
US10245652B2 (en) 2012-11-05 2019-04-02 M4 Sciences Llc Rotating tool holder assembly for modulation assisted machining
TWI513536B (fr) * 2013-03-07 2015-12-21
CN103978560A (zh) * 2014-05-27 2014-08-13 华侨大学 一种快换式超声振动辅助锯切装置
CN104400017A (zh) * 2014-09-25 2015-03-11 广州市昊志机电股份有限公司 一种超声波直联主轴
US10875138B1 (en) 2016-08-09 2020-12-29 M4 Sciences Llc Tool holder assembly for machining system
US10864580B2 (en) 2018-01-23 2020-12-15 Quantum Impact, LLC Method and apparatus for machining a workpiece
US11660684B2 (en) 2018-01-23 2023-05-30 Quantum Impact, LLC Method and apparatus for machining a workpiece
CN110170668A (zh) * 2019-06-27 2019-08-27 深圳市特力威科技有限公司 用于超声波刀把的供电主轴
CN110170668B (zh) * 2019-06-27 2024-03-22 深圳市特力威科技有限公司 用于超声波刀把的供电主轴

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Publication number Publication date
JP2005224865A (ja) 2005-08-25
TW200302149A (en) 2003-08-01

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