WO2003038141A3 - Verfahren zur herstellung einer uv-absorbierenden transparenten abriebschutzschicht - Google Patents

Verfahren zur herstellung einer uv-absorbierenden transparenten abriebschutzschicht Download PDF

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Publication number
WO2003038141A3
WO2003038141A3 PCT/EP2002/011728 EP0211728W WO03038141A3 WO 2003038141 A3 WO2003038141 A3 WO 2003038141A3 EP 0211728 W EP0211728 W EP 0211728W WO 03038141 A3 WO03038141 A3 WO 03038141A3
Authority
WO
WIPO (PCT)
Prior art keywords
producing
wear protection
transparent wear
protection layer
absorbing transparent
Prior art date
Application number
PCT/EP2002/011728
Other languages
English (en)
French (fr)
Other versions
WO2003038141A2 (de
Inventor
Manfred Neumann
Mario Krug
Nicolas Schiller
Thomas Kuehnel
Original Assignee
Fraunhofer Ges Forschung
Manfred Neumann
Mario Krug
Nicolas Schiller
Thomas Kuehnel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Manfred Neumann, Mario Krug, Nicolas Schiller, Thomas Kuehnel filed Critical Fraunhofer Ges Forschung
Priority to US10/493,061 priority Critical patent/US20050003104A1/en
Priority to AU2002358477A priority patent/AU2002358477A1/en
Publication of WO2003038141A2 publication Critical patent/WO2003038141A2/de
Publication of WO2003038141A3 publication Critical patent/WO2003038141A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung UV-absorbierender transparenter Abriebschutzschichten durch Vakuumbeschichtung, bei dem gleichzeitig oder zeitlich unmittelbar nacheinander mindestens eine anorganische Verbindung, die Schichten mit hoher Abriebfestigkeit bildet, und eine anorganische Verbindung, die Schichten mit hoher UV-Absorption bildet, jeweils durch reaktive oder teilreaktive plasmagestützte Hochratebedampfung auf einem Substrat abgeschieden werden.
PCT/EP2002/011728 2001-10-31 2002-10-19 Verfahren zur herstellung einer uv-absorbierenden transparenten abriebschutzschicht WO2003038141A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10/493,061 US20050003104A1 (en) 2001-10-31 2002-10-19 Method for producing a uv-absorbing transparent wear protection layer
AU2002358477A AU2002358477A1 (en) 2001-10-31 2002-10-19 Method for producing a uv-absorbing transparent wear protection layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10153760A DE10153760A1 (de) 2001-10-31 2001-10-31 Verfahren zur Herstellung einer UV-absorbierenden transparenten Abriebschutzschicht
DE10153760.3 2001-10-31

Publications (2)

Publication Number Publication Date
WO2003038141A2 WO2003038141A2 (de) 2003-05-08
WO2003038141A3 true WO2003038141A3 (de) 2003-10-23

Family

ID=7704344

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/011728 WO2003038141A2 (de) 2001-10-31 2002-10-19 Verfahren zur herstellung einer uv-absorbierenden transparenten abriebschutzschicht

Country Status (4)

Country Link
US (1) US20050003104A1 (de)
AU (1) AU2002358477A1 (de)
DE (1) DE10153760A1 (de)
WO (1) WO2003038141A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7315577B2 (en) * 2003-09-15 2008-01-01 Intel Corporation Multiple antenna systems and method using high-throughput space-frequency block codes
DE10356823A1 (de) * 2003-12-05 2005-07-07 Bayer Materialscience Ag Verfahren zum Beschichten eines Substrats
RU2007134366A (ru) * 2005-02-15 2009-03-27 Эр Пи Оу ПТИ ЛИМИТЕД (AU) Фотолитографическое формирование микрорельефа в полимерных материалах
DE102006051496B4 (de) * 2006-10-31 2008-09-25 Advanced Micro Devices, Inc., Sunnyvale Halbleiterbauelement mit einem porösen Materialschichtstapel mit kleinem ε mit reduzierter UV-Empfindlichkeit und Verfahren zu dessen Herstellung
DE102008010674A1 (de) 2008-02-22 2009-08-27 Fachhochschule Ansbach Lichtschutzbeschichtung und Verfahren zur Herstellung derselben
DE102009019146B4 (de) * 2009-04-29 2014-07-24 THEVA DüNNSCHICHTTECHNIK GMBH Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen
EP2616765B1 (de) * 2010-09-13 2020-11-11 Micro-Epsilon Optronic GmbH Optisches messsystem zum bestimmen von abständen
DE102011017403A1 (de) * 2011-04-18 2012-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Barriereschichtsystems
EP3114174B1 (de) * 2014-03-04 2017-11-29 Covestro Deutschland AG Mehrschichtaufbau mit gutem uv- und kratzschutz
CA3146522A1 (en) * 2019-07-30 2021-02-04 Alfonso TADDEO Vegetable components, dehydrated, sealed and waterproofed, applied for decorative purpose on garments, objects and furnishing components and its method of implementation/manufacturing-procedures

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850628A (ja) * 1981-09-18 1983-03-25 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
US4416217A (en) * 1981-07-31 1983-11-22 Ulvac Seimaku Kabushiki Kaisha Apparatus for forming an inhomogeneous optical layer
EP0529268A2 (de) * 1991-08-28 1993-03-03 Leybold Aktiengesellschaft Harte Entspiegelungsschicht für Kunststofflinsen
JPH06179961A (ja) * 1992-12-14 1994-06-28 Canon Inc 光学薄膜
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
EP0801146A1 (de) * 1996-04-17 1997-10-15 Ce.Te.V. Centro Tecnologie Del Vuoto Verfahren zum Aufbringen einer organischen-anorganischen Mischschicht
US5753319A (en) * 1995-03-08 1998-05-19 Corion Corporation Method for ion plating deposition
EP0887433A1 (de) * 1997-06-26 1998-12-30 General Electric Company Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode
WO2000055388A2 (en) * 1999-03-17 2000-09-21 General Electric Company Method and apparatus for arc deposition

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984581A (en) * 1973-02-28 1976-10-05 Carl Zeiss-Stiftung Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers
DD220974A1 (de) * 1983-08-19 1985-04-10 Hans Lauth Verfahren zur herstellung laserstrahlungsfester absorptionsfreier oxidischer schichten
DE3818341C2 (de) * 1987-06-04 1993-10-28 Olympus Optical Co Teildurchlässiger Spiegel aus Kunststoff
US5156882A (en) * 1991-12-30 1992-10-20 General Electric Company Method of preparing UV absorbant and abrasion-resistant transparent plastic articles
DE19548160C1 (de) * 1995-12-22 1997-05-07 Fraunhofer Ges Forschung Verfahren zur Herstellung organisch modifizierter Oxid-, Oxinitrid- oder Nitridschichten durch Vakuumbeschichtung und danach beschichtetes Substrat
US5733319A (en) * 1996-04-25 1998-03-31 Urologix, Inc. Liquid coolant supply system
DE19824364A1 (de) * 1998-05-30 1999-12-02 Bosch Gmbh Robert Verfahren zum Aufbringen eines Verschleißschutz-Schichtsystems mit optischen Eigenschaften auf Oberflächen
DE19901834A1 (de) * 1999-01-19 2000-07-20 Leybold Systems Gmbh Verfahren zum Beschichten von Substraten aus Kunststoff
US6599584B2 (en) * 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4416217A (en) * 1981-07-31 1983-11-22 Ulvac Seimaku Kabushiki Kaisha Apparatus for forming an inhomogeneous optical layer
JPS5850628A (ja) * 1981-09-18 1983-03-25 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
EP0529268A2 (de) * 1991-08-28 1993-03-03 Leybold Aktiengesellschaft Harte Entspiegelungsschicht für Kunststofflinsen
JPH06179961A (ja) * 1992-12-14 1994-06-28 Canon Inc 光学薄膜
US5753319A (en) * 1995-03-08 1998-05-19 Corion Corporation Method for ion plating deposition
EP0801146A1 (de) * 1996-04-17 1997-10-15 Ce.Te.V. Centro Tecnologie Del Vuoto Verfahren zum Aufbringen einer organischen-anorganischen Mischschicht
EP0887433A1 (de) * 1997-06-26 1998-12-30 General Electric Company Abscheidung von Siliziumdioxyd mittels einer von Plasma aktivierten Verdampfungsmethode
WO2000055388A2 (en) * 1999-03-17 2000-09-21 General Electric Company Method and apparatus for arc deposition

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
AKIO KUROYANAGI: "CRYSTALLOGRAPHIC CHARACTERISTICS AND ELECTRICAL PROPERTIES OF AL-DOPED ZNO THIN FILMS PREPARED BY IONIZED DEPOSITION", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 66, no. 11, 1 December 1989 (1989-12-01), pages 5492 - 5497, XP000085592, ISSN: 0021-8979 *
PATENT ABSTRACTS OF JAPAN vol. 007, no. 134 (P - 203) 11 June 1983 (1983-06-11) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 523 (C - 1256) 4 October 1994 (1994-10-04) *

Also Published As

Publication number Publication date
WO2003038141A2 (de) 2003-05-08
US20050003104A1 (en) 2005-01-06
AU2002358477A1 (en) 2003-05-12
DE10153760A1 (de) 2003-05-22

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