WO2003019648A1 - Systeme de traitement de semi-conducteurs - Google Patents

Systeme de traitement de semi-conducteurs Download PDF

Info

Publication number
WO2003019648A1
WO2003019648A1 PCT/JP2002/008747 JP0208747W WO03019648A1 WO 2003019648 A1 WO2003019648 A1 WO 2003019648A1 JP 0208747 W JP0208747 W JP 0208747W WO 03019648 A1 WO03019648 A1 WO 03019648A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
chamber
pcs
chambers
control section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/008747
Other languages
English (en)
French (fr)
Inventor
Masaki Narushima
Hiroaki Saeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to US10/487,241 priority Critical patent/US7090741B2/en
Publication of WO2003019648A1 publication Critical patent/WO2003019648A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0454—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers surrounding a central transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0461—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the presence of two or more transfer chambers

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
PCT/JP2002/008747 2001-08-31 2002-08-29 Systeme de traitement de semi-conducteurs Ceased WO2003019648A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/487,241 US7090741B2 (en) 2001-08-31 2002-08-29 Semiconductor processing system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001264840A JP4821074B2 (ja) 2001-08-31 2001-08-31 処理システム
JP2001-264840 2001-08-31

Publications (1)

Publication Number Publication Date
WO2003019648A1 true WO2003019648A1 (fr) 2003-03-06

Family

ID=19091381

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/008747 Ceased WO2003019648A1 (fr) 2001-08-31 2002-08-29 Systeme de traitement de semi-conducteurs

Country Status (3)

Country Link
US (1) US7090741B2 (ja)
JP (1) JP4821074B2 (ja)
WO (1) WO2003019648A1 (ja)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100327801B1 (ko) * 1999-09-14 2002-03-15 구자홍 광디스크 장치에서의 디스크 로딩 확인방법
US7959395B2 (en) 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
JP2004335743A (ja) * 2003-05-08 2004-11-25 Ulvac Japan Ltd 真空処理装置用真空チャンバー
US20050092255A1 (en) * 2003-11-04 2005-05-05 Taiwan Semiconductor Manufacturing Co. Ltd. Edge-contact wafer holder for CMP load/unload station
JP4503356B2 (ja) 2004-06-02 2010-07-14 東京エレクトロン株式会社 基板処理方法および半導体装置の製造方法
JP2006066686A (ja) * 2004-08-27 2006-03-09 Matsushita Electric Ind Co Ltd 不純物導入方法および不純物導入装置
JP5116466B2 (ja) * 2005-03-30 2013-01-09 パナソニック株式会社 不純物導入装置及び不純物導入方法
US20100270004A1 (en) * 2005-05-12 2010-10-28 Landess James D Tailored profile pedestal for thermo-elastically stable cooling or heating of substrates
CN101167173B (zh) * 2005-06-10 2011-06-22 应用材料股份有限公司 线性真空沉积系统
WO2007008940A2 (en) 2005-07-11 2007-01-18 Brooks Automation, Inc. Intelligent condition-monitoring and dault diagnostic system
US9104650B2 (en) 2005-07-11 2015-08-11 Brooks Automation, Inc. Intelligent condition monitoring and fault diagnostic system for preventative maintenance
JP5336184B2 (ja) 2005-07-11 2013-11-06 ブルックス オートメーション インコーポレイテッド 自動位置合わせ基板搬送装置
JP4925650B2 (ja) * 2005-11-28 2012-05-09 東京エレクトロン株式会社 基板処理装置
KR100784154B1 (ko) * 2006-04-14 2007-12-10 주식회사 디엠에스 반도체 및 ｌｃｄ 제조장치의 고밀도 클러스터 툴
US8322299B2 (en) * 2006-05-17 2012-12-04 Taiwan Semiconductor Manufacturing Co., Ltd. Cluster processing apparatus for metallization processing in semiconductor manufacturing
US8398355B2 (en) * 2006-05-26 2013-03-19 Brooks Automation, Inc. Linearly distributed semiconductor workpiece processing tool
US7880155B2 (en) * 2006-06-15 2011-02-01 Brooks Automation, Inc. Substrate alignment apparatus comprising a controller to measure alignment during transport
JP4801522B2 (ja) * 2006-07-21 2011-10-26 株式会社日立ハイテクノロジーズ 半導体製造装置及びプラズマ処理方法
GB0617498D0 (en) * 2006-09-06 2006-10-18 Boc Group Plc Method of pumping gas
US20080099451A1 (en) * 2006-10-30 2008-05-01 Richard Lewington Workpiece rotation apparatus for a plasma reactor system
US7960297B1 (en) * 2006-12-07 2011-06-14 Novellus Systems, Inc. Load lock design for rapid wafer heating
KR100847888B1 (ko) * 2006-12-12 2008-07-23 세메스 주식회사 반도체 소자 제조 장치
US20080276867A1 (en) * 2007-05-09 2008-11-13 Jason Schaller Transfer chamber with vacuum extension for shutter disks
WO2008141106A1 (en) * 2007-05-09 2008-11-20 Applied Materials, Inc. Transfer chamber with vacuum extension for shutter disks
DE102008019023B4 (de) * 2007-10-22 2009-09-24 Centrotherm Photovoltaics Ag Vakuum-Durchlaufanlage zur Prozessierung von Substraten
US8052419B1 (en) 2007-11-08 2011-11-08 Novellus Systems, Inc. Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation
CN102280399B (zh) * 2007-11-09 2013-11-13 佳能安内华股份有限公司 在线型晶圆输送装置
JP4494524B2 (ja) * 2007-11-09 2010-06-30 キヤノンアネルバ株式会社 インライン型ウェハ搬送装置
US9117870B2 (en) * 2008-03-27 2015-08-25 Lam Research Corporation High throughput cleaner chamber
TWI472882B (zh) * 2008-05-06 2015-02-11 諾菲勒斯系統公司 光阻剝離方法及設備
US8033771B1 (en) 2008-12-11 2011-10-11 Novellus Systems, Inc. Minimum contact area wafer clamping with gas flow for rapid wafer cooling
JP2010171344A (ja) * 2009-01-26 2010-08-05 Tokyo Electron Ltd 真空処理装置
US8602706B2 (en) 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
WO2011105183A1 (en) * 2010-02-26 2011-09-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor element and deposition apparatus
US8893642B2 (en) 2010-03-24 2014-11-25 Lam Research Corporation Airflow management for low particulate count in a process tool
US8834155B2 (en) * 2011-03-29 2014-09-16 Institute of Microelectronics, Chinese Academy of Sciences Wafer transfer apparatus and wafer transfer method
USD671901S1 (en) * 2011-04-13 2012-12-04 Novellus Systems, Inc. Pedestal cover
US8371567B2 (en) 2011-04-13 2013-02-12 Novellus Systems, Inc. Pedestal covers
KR101400157B1 (ko) * 2011-07-29 2014-05-30 세메스 주식회사 기판처리장치, 기판처리설비 및 기판처리방법
JP2013033965A (ja) * 2011-07-29 2013-02-14 Semes Co Ltd 基板処理装置、基板処理設備、及び基板処理方法
WO2013103594A1 (en) 2012-01-06 2013-07-11 Novellus Systems, Inc. Adaptive heat transfer methods and systems for uniform heat transfer
DE102012104013A1 (de) * 2012-05-08 2013-11-14 Schmid Vacuum Technology Gmbh Hochvakuumanlage und Verfahren zum Evakuieren
KR20140023807A (ko) * 2012-08-17 2014-02-27 삼성전자주식회사 반도체 소자를 제조하는 설비
JP6024372B2 (ja) * 2012-10-12 2016-11-16 Tdk株式会社 基板処理装置および基板処理チャンバモジュール
KR101575129B1 (ko) * 2014-01-13 2015-12-08 피에스케이 주식회사 기판 이송 장치 및 방법, 그리고 기판 처리 장치
US9453614B2 (en) * 2014-03-17 2016-09-27 Lam Research Corporation Systems and methods for cooling and removing reactants from a substrate processing chamber
JP6296164B2 (ja) * 2014-09-08 2018-03-20 株式会社安川電機 ロボットシステムおよび搬送方法
WO2016092007A1 (en) * 2014-12-11 2016-06-16 Evatec Ag Chamber for degassing substrates
CN106292194B (zh) * 2015-05-24 2018-03-30 上海微电子装备（集团）股份有限公司 硅片传输系统
US10014196B2 (en) 2015-10-20 2018-07-03 Lam Research Corporation Wafer transport assembly with integrated buffers
US9502275B1 (en) 2015-10-20 2016-11-22 Lam Research Corporation Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs
US20170125269A1 (en) * 2015-10-29 2017-05-04 Aixtron Se Transfer module for a multi-module apparatus
KR102345172B1 (ko) 2016-03-08 2021-12-31 에바텍 아크티엔게젤샤프트 기판 탈가스용 챔버
JP6779636B2 (ja) * 2016-03-11 2020-11-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
US10347547B2 (en) 2016-08-09 2019-07-09 Lam Research Corporation Suppressing interfacial reactions by varying the wafer temperature throughout deposition
EP3794633A1 (en) * 2018-05-15 2021-03-24 Evatec AG Substrate vacuum treatment apparatus and method therefore
US11194259B2 (en) * 2018-08-30 2021-12-07 Taiwan Semiconductor Manufacturing Co., Ltd. Equipment module with enhanced protection from airborne contaminants, and method of operation
CN110931377B (zh) * 2018-09-20 2023-11-03 台湾积体电路制造股份有限公司 反射率测量系统与方法
PL3921123T3 (pl) 2019-02-08 2025-03-10 Yaskawa America, Inc. Automatyczne uczenie przy użyciu bariery
US10998209B2 (en) 2019-05-31 2021-05-04 Applied Materials, Inc. Substrate processing platforms including multiple processing chambers
JP2021147691A (ja) * 2020-03-23 2021-09-27 東京エレクトロン株式会社 半導体装置の製造方法及び基板処理システム
US12080571B2 (en) 2020-07-08 2024-09-03 Applied Materials, Inc. Substrate processing module and method of moving a workpiece
US11749542B2 (en) 2020-07-27 2023-09-05 Applied Materials, Inc. Apparatus, system, and method for non-contact temperature monitoring of substrate supports
US11817331B2 (en) 2020-07-27 2023-11-14 Applied Materials, Inc. Substrate holder replacement with protective disk during pasting process
US11600507B2 (en) 2020-09-09 2023-03-07 Applied Materials, Inc. Pedestal assembly for a substrate processing chamber
US11610799B2 (en) 2020-09-18 2023-03-21 Applied Materials, Inc. Electrostatic chuck having a heating and chucking capabilities
KR102866529B1 (ko) * 2020-10-28 2025-09-30 삼성전자주식회사 반도체 소자의 제조 장치
TW202230583A (zh) * 2020-12-22 2022-08-01 日商東京威力科創股份有限公司 基板處理系統及微粒去除方法
JP7702856B2 (ja) * 2020-12-22 2025-07-04 東京エレクトロン株式会社 基板処理システム及びパーティクル除去方法
US12195314B2 (en) 2021-02-02 2025-01-14 Applied Materials, Inc. Cathode exchange mechanism to improve preventative maintenance time for cluster system
US11674227B2 (en) 2021-02-03 2023-06-13 Applied Materials, Inc. Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure
US12002668B2 (en) 2021-06-25 2024-06-04 Applied Materials, Inc. Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4851101A (en) * 1987-09-18 1989-07-25 Varian Associates, Inc. Sputter module for modular wafer processing machine
US5186718A (en) * 1989-05-19 1993-02-16 Applied Materials, Inc. Staged-vacuum wafer processing system and method
JPH08288294A (ja) * 1991-06-28 1996-11-01 Sony Corp 電気的接続部形成方法、複数のチェンバーを有する処理装 置及び半導体装置の製造方法
JPH08340036A (ja) * 1995-06-09 1996-12-24 Tokyo Electron Ltd 処理装置
US5882413A (en) * 1997-07-11 1999-03-16 Brooks Automation, Inc. Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0793348B2 (ja) * 1989-05-19 1995-10-09 アプライド マテリアルズ インコーポレーテッド 多重チャンバ真空式処理装置及び多重チャンバ真空式半導体ウェーハ処理装置
US5310410A (en) * 1990-04-06 1994-05-10 Sputtered Films, Inc. Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus
US5286296A (en) * 1991-01-10 1994-02-15 Sony Corporation Multi-chamber wafer process equipment having plural, physically communicating transfer means
JP3335831B2 (ja) * 1996-01-29 2002-10-21 株式会社日立製作所 真空処理装置
JPH10270527A (ja) 1997-03-21 1998-10-09 Ulvac Japan Ltd 複合型真空処理装置
JP3988805B2 (ja) * 1997-10-02 2007-10-10 大日本スクリーン製造株式会社 基板搬送方法及びその装置
US6257827B1 (en) * 1997-12-01 2001-07-10 Brooks Automation Inc. Apparatus and method for transporting substrates
JPH11230036A (ja) * 1998-02-18 1999-08-24 Ebara Corp 真空排気システム
JP2000208589A (ja) 1998-11-09 2000-07-28 Tokyo Electron Ltd 処理装置
JP2000299367A (ja) 1999-04-15 2000-10-24 Tokyo Electron Ltd 処理装置及び被処理体の搬送方法
US6440261B1 (en) * 1999-05-25 2002-08-27 Applied Materials, Inc. Dual buffer chamber cluster tool for semiconductor wafer processing
JP2002261148A (ja) 2001-03-05 2002-09-13 Tokyo Electron Ltd 処理システム及び被処理体の予熱方法
US6568896B2 (en) * 2001-03-21 2003-05-27 Applied Materials, Inc. Transfer chamber with side wall port

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4851101A (en) * 1987-09-18 1989-07-25 Varian Associates, Inc. Sputter module for modular wafer processing machine
US5186718A (en) * 1989-05-19 1993-02-16 Applied Materials, Inc. Staged-vacuum wafer processing system and method
JPH08288294A (ja) * 1991-06-28 1996-11-01 Sony Corp 電気的接続部形成方法、複数のチェンバーを有する処理装 置及び半導体装置の製造方法
JPH08340036A (ja) * 1995-06-09 1996-12-24 Tokyo Electron Ltd 処理装置
US5882413A (en) * 1997-07-11 1999-03-16 Brooks Automation, Inc. Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer

Also Published As

Publication number Publication date
JP2003077976A (ja) 2003-03-14
US20050006230A1 (en) 2005-01-13
JP4821074B2 (ja) 2011-11-24
US7090741B2 (en) 2006-08-15

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