WO2002082592A1 - Support de circuit intégré - Google Patents
Support de circuit intégré Download PDFInfo
- Publication number
- WO2002082592A1 WO2002082592A1 PCT/JP2002/002945 JP0202945W WO02082592A1 WO 2002082592 A1 WO2002082592 A1 WO 2002082592A1 JP 0202945 W JP0202945 W JP 0202945W WO 02082592 A1 WO02082592 A1 WO 02082592A1
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- WIPO (PCT)
- Prior art keywords
- socket
- surface resistivity
- socket according
- carbon
- resin
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R33/00—Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
- H01R33/74—Devices having four or more poles, e.g. holders for compact fluorescent lamps
- H01R33/76—Holders with sockets, clips, or analogous contacts adapted for axially-sliding engagement with parallely-arranged pins, blades, or analogous contacts on counterpart, e.g. electronic tube socket
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
Definitions
- the present invention relates to an IC socket for mounting or measurement used in the field of electric and electronic equipment, and more particularly, to a surface resistivity that is strictly controlled to a desired level, and to provide electrical insulation and mechanical properties.
- the present invention relates to an IC socket having excellent heat resistance, chemical resistance, dimensional stability, and the like.
- an IC socket refers to a mounting socket used for mounting a semiconductor die on a wiring board as a type of connector in the field of electronics mounting technology, and an electrical measurement used for initial screening of the semiconductor die.
- the IC socket of the present invention is formed of a thermoplastic resin material, it can be provided with commonly used accessories such as pins for conduction. Background art
- IC sockets for mounting are often used inside general electronic devices.
- a socket is used as a type of connector to mount an LSI package on a wiring board.
- the LSI is mounted on the wiring board using a socket, and the wiring board module is inspected. If the LSI is defective, it can be replaced with another LSI. Also, in existing modules, the LSI can be removed from the socket and replaced with the latest LSI.
- IC sockets for mounting are required to have shapes and functions compatible with LSI packages.
- Sockets must have specifications that correspond to the pitch and shape of the LSI package terminals.
- the pin grid array (PGA) has rod-shaped terminals and the pole grid array (BGA) has spherical terminals. The shape of the connection part and the fitting method must be adjusted to each terminal.
- mounting IC sockets must have functions such as miniaturization, high reliability, high density (narrow pitch), transmission speed, and low noise. Have been.
- an IC socket for measurement is used for inspections such as burn-in (burn-in) tests.
- the burn-in test is one of the screening methods for removing the initial failure of a semiconductor device.
- the burn-in test applies an accelerating stress higher in temperature and higher than the operating condition of the device to accelerate the occurrence of the failure. This test removes non-defective products.
- a bare chip or packaged depice is placed in an IC socket, and a power supply voltage and input signal, which are used as an acceleration stress, are applied from outside in a high-temperature bath for a certain period of time. After that, remove the device from the socket and determine whether it is good or defective.
- FIG. 1 is a cross-sectional view of an example of a measurement IC socket.
- the bare chip ⁇ having the bare chip body 11 and the bump 12 is placed on the mounting base of the IC socket.
- the IC socket includes a socket body 21, contact probe pins 22, a lid 23, and the like.
- As the pin 22, for example, a bending pin or a pinching pin is used to make contact with a terminal such as a bump so that conduction can be achieved. Close the lid 23 and perform the burn-in test. After the burn-in test is completed, the non-defective base chip is mounted on a board by multi-chip mounting.
- FIG. 2 shows a top view of an example of a burn-in socket for a fine pole grid array (FBGA) package.
- FIG. 3 is a sectional view of the socket.
- the socket U is composed of contact pins 31, a lid 32, a spring 33, and a body (bottom) 34 arranged at a constant pitch.
- FIG. 3 shows the pin 3 1 ′ that is connected to the test apparatus.
- FB GA package The cage 35 is placed on the mounting table so as to contact the pins 31.
- the shape, pitch, and number of the pins 31 are designed so that they can come into contact with many spherical terminals of the FBGA.
- IC sockets are required to have excellent electrical insulation, withstand voltage, mechanical properties, heat resistance, chemical resistance, dimensional stability, and the like.
- Some IC sockets are made of ceramic or metal whose surface is insulated, but in many cases are made of synthetic resin.
- synthetic resin IC sockets have high heat resistance such as, for example, polyetherimide, polyphenylene sulfide, polysulfone, polyester ether sulfone, and polybutylene terephthalate. It is formed using a plastic resin (Japanese Patent Application Laid-Open Nos. Hei 7-179758, Hei 8-17641, Japanese Patent Laid-open Hei 8-17642, Open 2 0 0—1 5 0 0 9 4 public announcement).
- Synthetic resin IC sockets require a high degree of insulation resistance and generally have high surface resistivity. IC sockets with too high surface resistivity tend to accumulate static electricity on their surface. In particular, when the semiconductor device comes into contact with the IC socket in the semiconductor device inspection process, the IC socket is easily charged due to frictional charging.
- the number of input / output pins on the chip has increased, and the pitch has become narrower.
- a multi-pin PGA, BGA, bare chip, etc. is attached to the IC socket, if it comes into contact with the surface of the IC socket, these semiconductor devices are easily damaged by static electricity. Also, if dust floating in the air adheres to the surface of the IC socket due to static electricity, the dust contaminates the semiconductor device.
- a method of forming an IC socket using a synthetic resin to which an antistatic agent is added is considered.
- the antistatic agent present on the surface of the IC socket is easily removed by washing or rubbing, so that It is difficult to obtain a sufficient antistatic effect. If a large amount of antistatic agent is added to maintain the antistatic effect, the antistatic agent bleeds on the surface of the IC socket, causing sticking of dust. In addition, the bleeding antistatic agent may pollute the surrounding environment due to elution or volatilization.
- the surface resistivity can be reduced.
- a resin composition in which a conductive filler such as a conductive car pump rack, graphite, carbon fiber, metal fiber, metal powder, or the like having a very low electrical resistivity is blended with a synthetic resin has a problem in that the proportion of the conductive filler is limited. The electrical resistivity changes rapidly due to subtle fluctuations in the dispersion state.
- An object of the present invention is to provide an IC socket made of a synthetic resin whose surface resistivity is strictly controlled to a desired level, and which is excellent in electrical insulation, mechanical properties, heat resistance, chemical resistance, dimensional stability, and the like. It is in.
- an IC comprising a resin composition obtained by combining a thermoplastic resin with a carbon precursor having a specific volume resistivity and a conductive filler is combined. I came up with a socket.
- the surface resistivity can be reduced.
- a moderately reduced IC socket can be manufactured stably.
- an IC socket having extremely small variation in the surface resistivity depending on the location is manufactured. Can be.
- the IC socket has a deflection temperature under load of 170 ° C or more from the viewpoint of heat resistance, and for that purpose, various crystalline or amorphous thermoplastic resins having excellent heat resistance are used. Is preferred.
- the present invention has been completed based on these findings.
- thermoplastic resin (A) of 40 to 94% by mass, a carbon precursor having a volume resistivity of 10 2 to 10 10 ⁇ ⁇ cm (B) 5 to 30% by mass, and a volume resistance rate 1 0 2 ⁇ ⁇ cm below the conductive filler (C) 1 ⁇ 3 0 wt% IC socket formed by molding the thermoplastic resin composition containing a is provided.
- FIG. 1 is a cross-sectional view showing an example of use of an example of an IC socket used for a burn-in test.
- FIG. 2 is a top view showing an example of an open-top type IC socket for a burn-in test.
- FIG. 3 is a sectional view of a side surface of the IC socket shown in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
- thermoplastic resin used in the present invention examples include polybutylene terephthalate, polyethylene terephthalate, polyamide, polyphenylene ether, modified polyphenylene ether, polyphenylene sulfide, polyether ether ketone, polyether ketone, and polyphenylene.
- thermoplastic resins can be used alone or in combination of two or more.
- examples of the mixture include a blend of polybutylene terephthalate and polyethylene terephthalate, a blend of polyphenylene ether and polyamide, and a blend of polyphenylene ether and polybutylene terephthalate.
- thermoplastic resins at least one selected from the group consisting of a crystalline resin (Al) having a melting point of 220 ° C or more and an amorphous resin (A2) having a glass transition temperature of 170 or more Some heat resistant resins are preferred.
- the crystalline resin having a melting point of 220 ° C. or more include polybutylene terephthalate (224 to 228), polyethylene terephthalate (24) 8 to 260 ° C), nylon 6 (220 to 228 ° C), nylon 66 (260 to 265 ° C), nylon 46 (290, polyphenylene sulfide) (280-295 ° C), polyetheretherketone (334 ° C), wholly aromatic polyester (450 ° C or more), polymethylpentene (235 ° C), polytetrafur Polyethylene (327.C), tetrafluoroethylenehexafluoropropylene propylene-fluoroalkoxy vinyl ether copolymer (290-300 ° C),
- 3 ⁇ 4Polymer (260-270 ° C), polyvinyl fluoride (250-282 ° C), tetrafluoroethylene perfluoroalkylvinyl ether copolymer (302-310 ° C), etc. It is not limited.
- the amorphous resin having a glass transition temperature of 170 ° C. or higher together with the glass transition temperature include polyphenylene ether (2200, polyarylate (193 ° C.)). , Polysulfone (190 ° C), polyethersulfone (225-230 ° C), polyetherimide (217 :), polyamideimide (280-285 ° C), etc. But are not limited to these.
- thermoplastic resins amorphous resins such as polyethersulfone, polysulfone, and polyetherimide, and crystalline resins such as polyphenylene sulfide and polyetheretherketone are particularly preferable.
- the mixing ratio of the thermoplastic resin is 40 to 94% by mass based on the total amount of the thermoplastic resin composition. If the mixing ratio of the thermoplastic resin is too large, the surface resistivity of the IC socket becomes high, and it becomes difficult to obtain an IC socket having a desired surface resistivity. If the mixing ratio of the thermoplastic resin composition is too small, the surface resistivity of the IC socket becomes too low, and the electrical insulation becomes too low.
- the mixing ratio of the thermoplastic resin is preferably 50 to 90% by mass, and more preferably 60 to 85% by mass.
- Carbon precursor volume resistivity for use in the present invention is in the range of 1 0 2 ⁇ 1 0 1 ⁇ ⁇ ⁇ cm , for example, an organic material in an inert atmosphere, at a temperature of 4 0 0 ⁇ 9 0 O t It can be obtained by firing.
- carbon precursors include, for example, (1) petroleum tar, petroleum pitch, coal coal Tar or pitch such as coal or coal pitch, aromatization and polycondensation, and if necessary, oxidize and infusibilize in an oxidizing atmosphere, and then heat in an inert atmosphere ⁇ Firing method, (2) Thermoplastic resin such as polyacrylnitrile, polyvinyl chloride, etc. is made infusible in an oxidizing atmosphere, and then heated and fired in an inert atmosphere. (3) Phenol resin, furan It can be manufactured by a method of heating and curing a thermosetting resin such as a resin, followed by heating and baking in an inert atmosphere.
- the carbon precursor means a substance which is not completely carbonized and has a carbon content of 97 mass% or less obtained by such a calcination treatment.
- the carbon content of the carbon precursor can be easily controlled by appropriately setting the firing temperature.
- the volume resistivity for use in the present invention 1 0 2 ⁇ : L 0 carbon content of the carbon precursor 1 ⁇ ⁇ ⁇ cm is preferably 8 0-9 7 wt%. If the carbon content of the carbon precursor is too small, the volume resistivity will be too large, and it will be difficult to reduce the surface resistivity of the obtained IC socket to 10 13 ⁇ / port or less. If the carbon content of the carbon precursor is too high, the volume resistivity will be too low, and the surface resistivity of the resulting IC socket will be too low, and even the slightest change in the compounding amount of the carbon precursor will result in the surface resistivity of the IC socket. Changes rapidly.
- the volume resistivity of the carbon precursor is preferably 1 0 2 ⁇ 1 0 1 () ⁇ ⁇ cm, and more favorable Mashiku 1 0 4 ⁇ 1 0 9 ⁇ ⁇ cm.
- Carbon precursors are typically used in the form of particles or fibers.
- the average particle diameter is preferably 1 mm or less. If the average particle size of the carbon precursor particles is too large, it becomes difficult to form an IC socket having a good appearance.
- the average particle size of the carbon precursor particles is preferably from 0.5 to 1 mm, more preferably from 0.5 to 500 m, and still more preferably from 1 to 100 m. In most cases, carbon precursor particles with an average particle size of about 5 to 50 are used By doing so, good results can be obtained.
- the carbon precursor used in the present invention is a fiber
- its average diameter is preferably 0.1 mm or less. If the average diameter of the carbon precursor fiber exceeds 0.1 mm, it becomes difficult to form an IC socket having a good appearance. Even if the carbon precursor fiber is a long fiber, it is cut during kneading with a thermoplastic resin and becomes a short fiber to be dispersed, but a short fiber is preferable from the viewpoint of dispersibility.
- the mixing ratio of the carbon precursor is 5 to 30% by mass based on the total amount of the thermoplastic resin composition. If the proportion of the carbon precursor is too large, the surface resistivity of the IC socket is too low no longer, the surface resistivity desired level, preferably controlled within the range of 1 0 5 ⁇ 1 0 13 ⁇ ⁇ mouth It becomes difficult. On the other hand, if the proportion of the carbon precursor is too small, it becomes difficult to sufficiently lower the surface resistivity of the IC socket.
- the compounding ratio of the carbon precursor is preferably 6 to 28% by mass, and more preferably 10 to 25% by mass.
- the conductive filler material having a volume resistivity to be used is less than 1 0 2 ⁇ ⁇ cm in the present invention is not limited especially, for example, carbon fibers, graphite, conductive carbon black, metal powder soil force S .
- conductive carbon materials such as carbon fiber, graphite, conductive carbon black, and mixtures thereof are preferable from the viewpoint of controllability and reproducibility of surface resistivity.
- Such a conductive carbon material is in the form of particles (including powder and scale) and fibers.
- carbon fibers used in the present invention there are no particular restrictions on the carbon fibers used in the present invention, and cell-based carbon fibers, polyacrylonitrile (PAN) -based carbon fibers, lignin-based carbon fibers, pitch-based (charcoal pitch-based, petroleum pitch-based)
- PAN polyacrylonitrile
- lignin-based carbon fibers lignin-based carbon fibers
- pitch-based charcoal pitch-based, petroleum pitch-based
- the carbon fibers preferably have an average diameter of 0.1 mm or less. If the average diameter of the carbon fiber exceeds 0.1 mm, IC sockets with good appearance can be molded. It becomes difficult.
- the carbon fibers are preferably short fibers having an average fiber length of 50 m or more. When carbon fibers having an average fiber length of 50 m or less are used, the effect of improving mechanical properties such as creep characteristics, elastic modulus, and strength is small.
- the conductive carbon black used in the present invention is not particularly limited as long as it has conductivity, and examples thereof include acetylene black, oil furnace black, thermal black, and channel black. These can be used alone or in combination of two or more.
- the graphite used in the present invention is not particularly limited, and natural graphite such as artificial graphite, flaky graphite, squamous graphite, and ground graphite obtained by graphitizing coke, tar, pitch and the like at a high temperature can be used.
- the volume resistivity of the conductive filler used in the present invention is less than 1 0 2 ⁇ ⁇ cm, the lower limit of its is usually the volume resistivity of the metal material such as a metal powder or metal fibers.
- the mixing ratio of the conductive filler is 1 to 30% by mass based on the total amount of the thermoplastic resin composition. If the proportion of conductive filler is too large, too low surface resistivity of the IC socket, the surface resistivity of the desired level, preferably controlled within the range of 1 0 5 ⁇ 1 0 13 ⁇ / mouth It becomes difficult. If the proportion of the conductive filler is too small, it is difficult to sufficiently lower the surface resistivity of the IC socket.
- the mixing ratio of the conductive filler is preferably 2 to 28% by mass, and more preferably 3 to 15% by mass. It is difficult to strictly control the surface resistivity to a desired level by using the conductive filler alone, and the variation in the surface resistivity depending on the location increases. By using the conductive filler in the above mixing ratio with the carbon precursor, an IC socket having a desired surface resistivity and less variation can be stably manufactured. 4. Other fillers
- the IC socket of the present invention may further contain various other fillers for the purpose of further increasing mechanical strength and heat resistance.
- the fibrous filler include inorganic fibers such as glass fiber, asbestos fiber, silica fiber, alumina fiber, zirconia fiber, boron nitride fiber, silicon nitride fiber, boron fiber, potassium titanate fiber; Metal fibrous materials such as stainless steel, aluminum, titanium, steel, and brass; and high-melting organic fibrous materials such as polyamide, fluorine resin, polyester resin, and acrylic resin. From the viewpoint of electrical insulation, a fibrous filler having no conductivity, such as glass fiber, is preferable.
- Granular fillers include, for example, myriki, silica, talc, alumina, kaolin, calcium sulfate, calcium carbonate, titanium oxide, ferrite, clay, glass powder, zinc oxide, nickel carbonate, iron oxide, quartz powder, magnesium carbonate, Barium sulfate and the like can be mentioned.
- fillers can be used alone or in combination of two or more. Further, the filler may be treated with a sizing agent or a surface treatment agent as necessary.
- a sizing agent or surface treating agent include functional compounds such as epoxy compounds, isocyanate compounds, silane compounds, and titanate compounds. These compounds may be used after subjecting the filler to a surface treatment or a convergence treatment in advance, or may be added at the same time when the composition is adjusted.
- the IC socket of the present invention can contain various additives.
- the additives include impact modifiers such as epoxy group-containing olefin copolymers, resin modifiers such as ethylene glycidyl methacrylate, and mold corrosion inhibitors such as zinc carbonate and nickel carbonate.
- Lubricants such as erythritol tetrastearate, thermosetting resins, antioxidants, ultraviolet absorbers, nucleating agents such as boron nitride, flame retardants, and coloring agents such as dyes and pigments. be able to.
- These additives can be added in appropriate amounts as needed.
- thermoplastic resin composition of the present invention can be prepared by equipment and a method generally used for preparing a thermoplastic resin composition.
- each raw material component is premixed by a Henschel mixer, tumbler mixer, etc., and if necessary, glass fiber etc.
- the mixture is kneaded using a single-screw or twin-screw extruder, and extruded into pellets for molding.
- a method of mixing some of the necessary components into a master patch and then mixing with the remaining components.Also in order to enhance the dispersibility of each component, part of the raw materials used are ground, mixed with uniform particle diameters, and melt-extruded. It is also possible to do so.
- the IC socket can be manufactured by injection molding of a thermoplastic resin composition, but other molding methods such as extrusion molding may be employed depending on the shape.
- the IC socket includes a mounting IC socket and a measuring IC socket.
- connector type IC sockets with general specifications used inside general electronic equipment are mainly used.
- Many IC sockets for measurement are IC sockets with special specifications that are used by semiconductor manufacturers as part of semiconductor manufacturing process equipment.
- IC sockets include those with a combination of a main body (bottom) and a lid.
- the IC socket of the present invention includes those provided with conventional parts such as contact pins. Specific examples of such IC sockets are shown in FIGS. 1-3, but are not limited thereto.
- IC sockets made of the thermoplastic resin composition of the present invention include burn-in sockets, pin grid array (PGA) sockets, poll grid array (BGA) sockets, dual in-line package (DIP) sockets, and bare chips.
- Mounting sockets flip-chip mounting sockets, quad flat package (QFP) sockets, small outline package (SOP) sockets, and shrink pitch sockets for high-density mounting.
- PGA pin grid array
- BGA poll grid array
- DIP dual in-line package
- Mounting sockets flip-chip mounting sockets, quad flat package (QFP) sockets, small outline package (SOP) sockets, and shrink pitch sockets for high-density mounting.
- QFP quad flat package
- SOP small outline package
- shrink pitch sockets for high-density mounting.
- Burn-in sockets of various shapes such as spring probe type, fan-out terminal type, claim shell type, and open top type, are known.
- the surface resistivity of the IC socket of the present invention is preferably 1 0 5 ⁇ 1 0 13 ⁇ / mouth, more Preferably 1 0 6 ⁇ 1 0 12 ⁇ / mouth, more preferably from 1 0 7 ⁇ 1 0 11 ⁇ ⁇ mouth. If the surface resistivity of an IC socket is too high, static electricity tends to accumulate on its surface. In particular, when the semiconductor device and the IC socket touch each other in the semiconductor device inspection process, the IC socket is easily charged due to frictional charging. If the surface resistivity of the IC socket is too low, the electrical insulation of the IC socket itself may be reduced.
- the ratio (AX / MIN) between the maximum surface resistivity (MAX) and the minimum surface resistivity (MIN) of the IC socket of the present invention is preferably 10 or less. If this ratio is too large, the variation in surface resistivity depending on the location becomes too large, and it becomes difficult to strictly control frictional charging and accumulation of static electricity.
- the IC zoquette of the present invention preferably has a deflection temperature under load of 170 ° C. or higher. Considering the usage environment of semiconductor devices and burn-in test conditions, the IC socket also needs to have high heat resistance.
- the deflection temperature under load can be adopted as a practical standard indicating the heat resistance of the IC socket.
- the deflection temperature under load is preferably 190 or more, more preferably 20 or more.
- the upper limit of the deflection temperature under load depends on the components and the composition ratio of the thermoplastic resin composition, but is about 350 ° C.
- thermoplastic resin having a melting point of 220 ° C or higher and an amorphous resin having a glass transition temperature of 170 ° C or higher should be selected from the group consisting of: It is preferable to use at least one selected heat-resistant resin. By using such a heat-resistant resin, an IC socket excellent in electrical insulation, mechanical properties, heat resistance, chemical resistance, dimensional stability, and the like can be easily obtained.
- a thermoplastic resin having a melting point of 220 ° C or higher and an amorphous resin having a glass transition temperature of 170 ° C or higher should be selected from the group consisting of: It is preferable to use at least one selected heat-resistant resin.
- volume resistivity When the volume resistivity was 10 8 ⁇ ⁇ cm or more, it was measured at an applied voltage of 100 V according to JIS K-6911. When the volume resistivity was less than 10 8 ⁇ ⁇ cm, it was measured in accordance with JIS K-7194 (Testing method for resistivity of conductive plastics by 4-probe method).
- the deflection temperature under load was measured according to ASTM D-648 (1.82 MPa).
- the surface resistivity ( ⁇ mouth) of the molded IC socket was measured at an applied voltage of 100 V using Mitsubishi Chemical's Hirester UP and a probe for micro samples (guard electrode diameter 10 mm: UR-SS probe). .
- the measurement was performed at any five points on the molded product. The average values for the measurement plates were shown. For the IC socket, five points were measured, the maximum value (MAX) and the minimum value (MIN) were measured, and the ratio of the maximum value Z and the minimum value (MAX / MIN) was calculated.
- this cord-like molded product was pulverized so that the ratio of the diameter to the length became about 1.5, and the obtained pulverized product was heated at 93 with 0.53% by mass of polyvinyl alcohol (saponified). It was dropped into an aqueous solution, stirred and dispersed, and cooled to obtain a spherical pitch molded body. Furthermore, filtration was performed to remove water, and naphthene in the pitch compact was extracted and removed with about 6 times as much n-hexane as the spherical pitch compact.
- the spherical pitch compact obtained in this way is Oxidation treatment was performed by holding for 1 hour at o to obtain an oxidized pitch.
- This oxidized pitch was heat-treated at 580 for 1 hour in a nitrogen stream, and then pulverized to obtain carbon precursor particles having an average particle diameter of about 25 im.
- the carbon content of the carbon precursor particles was 91.0% by mass.
- a measurement sample was prepared by the following method.
- the oxidized pitch was pulverized and sieved with a mesh having openings of about 100 m to remove particles of 100 m or more.
- 13 g of the crushed oxidized pitch powder was filled in a cylindrical mold having a cross-sectional area of 80 cm 2 and molded at a pressure of 196 MPa to obtain a molded body.
- This compact was heat-treated in a nitrogen stream at 580 ° C. for 1 hour, which is the same temperature as the heat treatment temperature in the above-described method for producing carbon precursor particles, to obtain a sample for measuring the volume resistivity of the carbon precursor.
- the volume resistivity of this sample was measured in accordance with JISK-7194, it was 3 ⁇ 10 7 ⁇ ⁇ cm.
- Table 1 The components shown in Table 1 were uniformly dry-blended using a tumbler mixer, supplied to a 45 mm ⁇ twin-screw kneading extruder (PCM-45, manufactured by Ikegai Iron & Steel Co., Ltd.), and melt-extruded to prepare pellets. After the obtained pellets were dried, a flat plate for measuring the surface resistivity and a test piece for measuring the deflection temperature under load were prepared using an injection molding machine (IS-75, manufactured by Toshiba Machine Co., Ltd.), and the surface resistivity and deflection under load were measured. The temperature was measured.
- PCM-45 twin-screw kneading extruder
- Table 1 shows the results.
- the surface resistivity is, for example, 1 ⁇ 10 9 ⁇ , it is represented by 1 ⁇ +09 ⁇ .
- the surface resistivity of an IC socket is Shows the surface resistivity of a stable semiconductive region with small dispersion in the range of (8E + 09) to (3E + 10) ⁇ .
- the deflection temperature under load of this IC socket was 220, indicating sufficient heat resistance.
- the surface resistivity of a flat plate made of a thermoplastic resin composition in which a carbon precursor and PAN-based carbon fiber are blended with PES, PEI, and PPS, respectively, is (2E + 08) to (2E + 09) ⁇ . Indicates the surface resistivity of the semiconductive region The resistivity also showed a stable surface resistivity in a stable semiconductive region with small variations in the range of (1E + 09) to (1E + 10) ⁇ .
- the deflection temperature under load of each resin composition was 200 ° C. or higher, indicating sufficient heat resistance.
- the surface resistivity of a flat plate made of a thermoplastic resin composition in which a carbon precursor, PAN-based carbon fiber, and pitch-based carbon fiber are blended with PEEK is 5E + 09 ⁇
- the surface resistivity of the IC socket is The surface resistivity of the stable semiconductive region without fluctuation in the range of (2E + 10) to (7E + 10) ⁇ / port was shown.
- the deflection temperature under load was 3 05, indicating sufficient heat resistance.
- an IC socket made of synthetic resin whose surface resistivity is strictly controlled to a desired level and which is excellent in electrical insulation, mechanical properties, heat resistance, chemical resistance, dimensional stability and the like. You.
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Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020037010786A KR100827265B1 (ko) | 2001-04-03 | 2002-03-27 | Ic 소켓 |
JP2002580443A JP4022473B2 (ja) | 2001-04-03 | 2002-03-27 | Icソケット |
EP02708673A EP1376782B1 (en) | 2001-04-03 | 2002-03-27 | Ic socket |
US10/471,118 US7198734B2 (en) | 2001-04-03 | 2002-03-27 | IC socket |
DE60233559T DE60233559D1 (de) | 2001-04-03 | 2002-03-27 | Ic-fassung |
AT02708673T ATE441950T1 (de) | 2001-04-03 | 2002-03-27 | Ic-fassung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2001105212 | 2001-04-03 | ||
JP2001-105212 | 2001-04-03 |
Publications (1)
Publication Number | Publication Date |
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WO2002082592A1 true WO2002082592A1 (fr) | 2002-10-17 |
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ID=18957937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2002/002945 WO2002082592A1 (fr) | 2001-04-03 | 2002-03-27 | Support de circuit intégré |
Country Status (9)
Country | Link |
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US (1) | US7198734B2 (ja) |
EP (1) | EP1376782B1 (ja) |
JP (1) | JP4022473B2 (ja) |
KR (1) | KR100827265B1 (ja) |
CN (1) | CN1311594C (ja) |
AT (1) | ATE441950T1 (ja) |
DE (1) | DE60233559D1 (ja) |
MY (1) | MY131225A (ja) |
WO (1) | WO2002082592A1 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005226031A (ja) * | 2004-02-16 | 2005-08-25 | Kureha Chem Ind Co Ltd | 機械加工用素材及びその製造方法 |
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JP2021187883A (ja) * | 2020-05-26 | 2021-12-13 | 住友化学株式会社 | 液晶ポリマー樹脂組成物、及び、その製造方法、並びに、半導体搬送用キャリア |
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- 2002-03-27 CN CNB028077644A patent/CN1311594C/zh not_active Expired - Fee Related
- 2002-03-27 DE DE60233559T patent/DE60233559D1/de not_active Expired - Lifetime
- 2002-03-27 MY MYPI20021098A patent/MY131225A/en unknown
- 2002-03-27 WO PCT/JP2002/002945 patent/WO2002082592A1/ja active Application Filing
- 2002-03-27 JP JP2002580443A patent/JP4022473B2/ja not_active Expired - Fee Related
- 2002-03-27 US US10/471,118 patent/US7198734B2/en not_active Expired - Fee Related
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US8158242B2 (en) | 2004-02-16 | 2012-04-17 | Kureha Corporation | Stock shape for machining and production process thereof |
US8158240B2 (en) | 2004-02-16 | 2012-04-17 | Kureha Corporation | Stock shape for machining |
JP2005226031A (ja) * | 2004-02-16 | 2005-08-25 | Kureha Chem Ind Co Ltd | 機械加工用素材及びその製造方法 |
JP2009512979A (ja) * | 2005-10-21 | 2009-03-26 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 基板に取り付けられるのに適しているコンポーネント、及び表面実装デバイスを取り付ける方法 |
KR101242653B1 (ko) * | 2005-10-21 | 2013-03-19 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 기판에 실장되는 지지 컴포넌트, 인쇄 회로 기판, 및 표면실장형 디바이스의 실장 방법 |
JP2016194046A (ja) * | 2015-03-31 | 2016-11-17 | 三菱レイヨン株式会社 | 樹脂ペレット、樹脂ペレットの製造方法、成形体及び成形体の製造方法 |
JP2019526163A (ja) * | 2016-05-12 | 2019-09-12 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company | ポリイミド組成物およびポリイミド試験ソケットハウジング |
WO2019078364A1 (ja) | 2017-10-20 | 2019-04-25 | 株式会社フェローテックセラミックス | セラミックス、プローブ案内部品、プローブカードおよびパッケージ検査用ソケット |
KR20200072524A (ko) | 2017-10-20 | 2020-06-22 | 가부시키가이샤 페로텍 머티리얼 테크놀로지즈 | 세라믹스, 프로브 안내 부품, 프로브 카드 및 패키지 검사용 소켓 |
US11940466B2 (en) | 2017-10-20 | 2024-03-26 | Ferrotec Material Technologies Corporation | Ceramic, probe guiding member, probe card, and socket for package inspection |
WO2019093370A1 (ja) | 2017-11-10 | 2019-05-16 | 株式会社フェローテックセラミックス | セラミックス、プローブ案内部品、プローブカードおよびパッケージ検査用ソケット |
KR20200080292A (ko) | 2017-11-10 | 2020-07-06 | 가부시키가이샤 페로텍 머티리얼 테크놀로지즈 | 세라믹스, 프로브 안내 부품, 프로브 카드 및 패키지 검사용 소켓 |
US11485686B2 (en) | 2017-11-10 | 2022-11-01 | Ferrotec Material Technologies Corporation | Ceramic, probe guiding member, probe card, and socket for package inspection |
WO2021210720A1 (ko) * | 2020-04-17 | 2021-10-21 | 부경대학교 산학협력단 | 우수한 방열성 및 내구성을 가지는 반도체 테스트 소켓용 복합재료의 제조방법 및 이에 의해 제조된 반도체 테스트 소켓용 복합재료 |
Also Published As
Publication number | Publication date |
---|---|
ATE441950T1 (de) | 2009-09-15 |
MY131225A (en) | 2007-07-31 |
EP1376782B1 (en) | 2009-09-02 |
US7198734B2 (en) | 2007-04-03 |
KR20030090644A (ko) | 2003-11-28 |
JPWO2002082592A1 (ja) | 2004-07-29 |
CN1311594C (zh) | 2007-04-18 |
KR100827265B1 (ko) | 2008-05-07 |
JP4022473B2 (ja) | 2007-12-19 |
EP1376782A4 (en) | 2005-01-05 |
EP1376782A1 (en) | 2004-01-02 |
US20040082205A1 (en) | 2004-04-29 |
DE60233559D1 (de) | 2009-10-15 |
CN1502152A (zh) | 2004-06-02 |
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