WO2002042741A1 - Conductive probe for scanning microscope and machining method using the same - Google Patents
Conductive probe for scanning microscope and machining method using the same Download PDFInfo
- Publication number
- WO2002042741A1 WO2002042741A1 PCT/JP2001/008615 JP0108615W WO0242741A1 WO 2002042741 A1 WO2002042741 A1 WO 2002042741A1 JP 0108615 W JP0108615 W JP 0108615W WO 0242741 A1 WO0242741 A1 WO 0242741A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- conductive
- probe
- nanotube
- scanning microscope
- cantilever
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Definitions
- the present invention relates to a scanning microscope probe for imaging the structure of a sample surface using a conductive nanotube as a probe. More specifically, the present invention relates to a conductive deposit, a conductive film, and a conductive film formed of a conductive nanotube and a cantilever. The present invention relates to a probe for a conductive scanning microscope, which is made electrically conductive by a coating film so that a voltage can be applied between the conductive nanotube and a sample or a current can be supplied, and a processing method using the probe.
- a probe that contacts the sample surface and extracts the signal is required.
- a cantilever made of silicon or silicon nitride having a protruding portion (also called a pyramid portion) formed at the tip of the cantilever portion is known.
- cantilevers are manufactured using microfabrication techniques such as lithography and etching. Since the cantilever detects the interatomic force on the sample surface at the tip of the protruding portion, the imaging accuracy is determined by the sharpness of the tip. Therefore, for the sharpening of the tip of the protruding portion serving as a probe, an oxidation step using semiconductor processing technology and an oxide film etching step are used. However, since the current semiconductor processing technology has a limit of miniaturization, there is also a physical limit on the sharpness of the tip of the protruding portion.
- This carbon nanotube has a diameter of about 1 nm to several tens nm, a length of several ⁇ , and an aspect ratio (length / diameter) of about 100 to 100,000.
- an AFM probe it is difficult to create a probe with a diameter of 1 nm, and from this point of view, carbon nanotubes have the best conditions as an AFM probe.
- the present inventors have developed a fixing method for firmly fixing the carbon nanotube to the protruding portion of the cantilever in order to solve this weak point.
- the first fixing method is disclosed in Japanese Patent Application Laid-Open No. 2000-222744 and the second fixing method is disclosed in Japanese Patent Application Laid-Open No. 2000-247712. ing.
- the first fixing method is a method of irradiating an electron beam to the base end of the nanotube to form a coating film, and coating and fixing the nanotube to the cantilever protrusion with this coating film.
- a second fixing method is a method in which the base end of the nanotube is irradiated with an electron beam or energized to fuse and fix the base end of the nanotube to the protruding portion of the cantilever.
- cantilevers are produced using semiconductor processing technology, and therefore are made of silicon or silicon nitride.
- Silicon nitride is an insulator, whereas silicon is a semiconductor. Therefore, even when a conductive nanotube such as a carbon nanotube is fixed to the protruding portion of the force cantilever, a voltage is applied between the conductive 1 "raw nanotube probe and the sample because the cantilever itself has no conductivity. Or the probe could not pass current through it. If the probe is not conductive, this means that there are significant limitations in its application, for example, by using a tunneling microscope (S It cannot be used for TM) because the tunnel microscope detects the tunnel current flowing between the probe and the sample and images the sample.
- S It cannot be used for TM
- an object of the present invention is to search for and construct a conductive nanotube.
- a probe for a conductive scanning microscope capable of applying a voltage between the conductive nanotube and the sample or applying a current between the conductive nanotube and the sample by electrically conducting the probe.
- the invention of claim 1 is a probe for a scanning microscope that obtains information on physical properties of a sample surface by a tip of a conductive nanotube probe fixed to a cantilever, wherein the conductive film formed on the surface of the cantilever; A conductive nanotube whose base end is in contact with the required surface of the conductive nanotube, and the conductivity of an organic gas that covers a portion of the conductive film from the base end of the conductive nanotube to fix the conductive nanotube.
- This is a probe for a conductive scanning microscope, which is composed of a decomposition deposit, wherein the conductive nanotubes and the conductive film are brought into a conductive state by the conductive decomposition deposit.
- the invention of claim 2 provides a probe for a scanning microscope that obtains physical property information of a sample surface by a tip of a conductive nanotube probe fixed to a cantilever, wherein a conductive coating formed on a surface of the cantilever; It consists of a conductive nanotube whose base end is in contact with the required surface of the conductive film and a conductive deposit that covers the base and fixes the conductive nanotube.
- a probe for a conductive scanning microscope wherein a conductive film is made conductive by a conductive deposit.
- the invention according to claim 3 is that the conductive nanotube is further formed on the conductive deposit with a conductive coating film reaching the conductive film to ensure a conductive state between the conductive nanotube and the cantilever. Or a probe for a conductive scanning microscope according to 2.
- a scanning microscope probe for obtaining physical property information of a sample surface by a tip portion of a conductive nanotube probe fixed to a cantilever, wherein a base end portion is arranged in contact with a required portion surface of the cantilever.
- This is a probe for a conductive scanning microscope, characterized in that one is brought into a conductive state.
- the invention according to claim 5 is the conductive scanning microscope probe according to claim 3 or 4, wherein the conductive coating film is formed so as to cover the tip and the tip of the nanotube.
- the invention of claim 6 is the probe for a conductive scanning microscope according to claim 5, wherein the conductive material constituting the conductive coating film is a magnetic material.
- the probe for a conductive scanning microscope according to the fifth aspect, wherein the conductive coating film is formed of a metal film to serve as a metal source.
- a conductive scanning method characterized in that a predetermined voltage is applied between samples, metal ions belonging to the metal source are ion-emitted from the tip of the nanotube to the sample surface by an electric field, and a metal deposit is formed on the sample surface. This is a sample processing method using a probe for a scanning microscope.
- the invention according to claim 8 is the processing method according to claim 7, wherein the diameter of the metal deposit is 50 nm or less.
- the present inventors have conducted intensive studies on the development of a probe for a conductive scanning microscope.
- a method of electrically connecting the conductive nanotube and the cantilever by a conductive film or a conductive coating film has been conceived.
- the basic structure is a structure in which a conductive film is formed on a cantilever, and the conductive film and the conductive nanotube are electrically connected by a conductive deposit. To ensure this conductivity, a conductive coating film is formed on top of the conductive deposits, and the structure that forcibly conducts the conductive nanotubes and the conductive film is used.
- the conductive nanotube is a nanotube having electrical conductivity.
- conductive 1 "raw nanotubes include carbon nanotubes and the like, and insulative nanotubes include BN-based nanotubes and BCN-based nanotubes. A conductive film is formed on the surface of the insulating nanotube. Insulating nanotubes can be converted to conductive nanotubes by conducting.1 "raw nanotubes include those nanotubes that have become conductive by processing.
- the conductive film formed on the cantilever is a film having electrical conductivity, such as a metal film or a carbon film.
- the manufacturing method includes deposition, ion plating, and plating. Various methods such as physical vapor deposition (PVD) such as pattering, chemical vapor-phase reaction (CVD), electric plating and electroless plating can be used.
- PVD physical vapor deposition
- CVD chemical vapor-phase reaction
- electric plating electroless plating
- the conductive film thus formed has the function of an electrode for connecting an external power supply.
- the conductive deposit that fixes the conductive nanotubes to the cantilever is formed by depositing the decomposition gas on the required parts while decomposing the organic gas such as hydrocarbon gas or organometallic gas with the electron beam ion beam etc. .
- the material conductive materials such as carbon deposits and metal deposits are used.
- the decomposition deposit becomes a carbon deposit.
- the carbon deposit is made of graphite, it has conductivity, but when it is made of amorphous carbon, it is widely distributed from conductivity to insulation depending on the film thickness.
- Amorphous carbon becomes conductive when its thickness is small, and becomes insulating when it is thick. Therefore, the conductive nanotubes are fixed to required portions of the cantilever by the conductive ultra-thin carbon deposit, thereby ensuring conduction.
- the decomposition deposit becomes a metal deposit. Since this metal deposit has conductivity, it is used as the conductive deposit of the present invention. Since metal deposits have conductivity regardless of the film thickness, metal deposits are more convenient than carbon deposits to ensure conductivity.
- hydrocarbon-based substance examples include methane-based hydrocarbons, ethylene-based hydrocarbons, acetylene-based hydrocarbons, and cyclic hydrocarbons. Specifically, hydrocarbons having a relatively small molecular weight, such as ethylene and acetylene, are preferred.
- organometallic gas examples include W (CO) and Cu (hfac) 2 (hfac: hexa-fluoro-acetyl-acetonate), (CH 3 ) 2 A 1 H, and A 1 (CH 2 — CH ) (CH 3 ) 2 , [(CH 3 ) 3 A 1] or (C 2 H 5 ) 3 A
- the conductive coating film is formed so as to cover the conductive deposit, and is formed by coating a conductive film from conductive nanotubes. In other words, the conductive nanotube and the conductive film are conducted by the conductive coating film. Even when there is no conductive film, this conductive coating film is formed up to the surface of the cantilever portion and used as an electrode film.
- the conductive coating film may be formed in an extremely narrow area or in a wide area.
- a method of forming a conductive deposit can be adopted. That is, in a narrow region, an organic gas is decomposed by using a beam such as an electron beam or an ion beam, and the decomposed gas is locally deposited to form a conductive coating film.
- various methods such as physical vapor deposition (PVD) such as vapor deposition, ion plating, and sputtering, chemical vapor deposition (CVD), electric plating and electroless plating can be used.
- PVD physical vapor deposition
- CVD chemical vapor deposition
- the conductive coating film is formed by covering the tip and the tip of the nanotube, the property of the conductive substance is imparted to the nanotube probe.
- a nanotube probe can detect the magnetism of the sample surface.
- this probe can function as the steering of a magnetic force microscope (MFM) that detects the magnetic distribution of the sample, etc.
- MFM magnetic force microscope
- This conductive scanning microscope probe metal-coated to the tip is brought close to the sample, and a voltage is applied between the sample and the probe so that the sample becomes a cathode and the probe becomes an anode.
- the metal at the tip of the nanotube is ionized by the ultra-high electric field formed at the top.
- the metal ions collide with the sample surface due to the electric field, and a metal deposit is formed on the sample surface. In this way, by applying a voltage, the sample can be subjected to processing such as movement and deposition of metal atoms.
- FIG. 1 is a schematic explanatory view of a first embodiment of a probe for a conductive scanning microscope according to the present invention.
- FIG. 2 is a schematic explanatory view of a second embodiment of the probe for a conductive scanning microscope according to the present invention.
- FIG. 3 is a schematic explanatory view of a third embodiment of the probe for a conductive scanning microscope according to the present invention.
- FIG. 4 is a schematic explanatory diagram of a fourth embodiment of a conductive scanning microscope microscope door according to the present invention.
- FIG. 5 is a schematic explanatory view of a fifth embodiment of the probe for a conductive scanning microscope according to the present invention. '
- FIG. 6 is a schematic explanatory view of a probe for a conductive scanning microscope according to a sixth embodiment of the present invention.
- FIG. 7 is a schematic explanatory view of forming minute dots on a sample surface using the probe for a conductive scanning microscope according to the present invention.
- FIG. 1 is a schematic explanatory view of a first embodiment of a probe for a conductive scanning microscope according to the present invention.
- the cantilever 4 is a member used as an AFM probe, and includes a cantilever part 6 and a protruding portion 8 formed at the tip thereof.
- This cantilever On the par 4, a conductive film 17 is formed from the cantilever section 6 to the projecting surface 17.
- This conductive film 17 is made of a conductive material such as metal or carbon.
- a base end 16 of a conductive nanotube 12 such as a carbon nanotube is placed in contact with the protruding portion surface 10, and in this embodiment, the base end 16 and the conductive film 17 are in contact with each other. Absent.
- the tip 14 of the conductive nanotube 12 protrudes outward, and the tip 14a serves as a probe tip for signal detection.
- the base end 16 is firmly fixed to the protruding surface 10 by a conductive deposit 18 such as metal or carbon, and the conductive deposit 18 allows the conductive nanotubes 12 to be integrated with the cantilever 4.
- the probe 20 for a conductive scanning microscope (hereinafter referred to as a probe) is completed. 'The stronger the fixation by the conductive deposits 18, the more the conductive nanotubes 12 do not fall off and the durability of the probe 20 improves.
- the conductive deposit 18 is formed so as to cover one end of the conductive film 17. Therefore, the conductive nanotubes 12 and the conductive film 17 are electrically connected by the conductive deposit 18.
- the conductive film 17 of the cantilever portion 6 has a function of an electrode film, and can apply a voltage to the conductive nanotubes 12 or supply electricity to the conductive nanotubes 12 through this electrode.
- FIG. 2 is a schematic explanatory view of a second embodiment of the probe for a conductive scanning microscope according to the present invention.
- the same parts as those in FIG. 1 are denoted by the same reference numerals, and the description thereof will be omitted.
- the conductive film 17 is formed not only on the cantilever portion 6 but also on the entire surface of the protrusion 8.
- the base end 16 of the conductive nanotube 12 is placed in contact with the conductive film 17 on the surface 10 of the protrusion.
- a conductive deposit 18 is formed so as to cover the base end surface, and the conductive nanotube 12 is firmly fixed to the cantilever 4 to complete the probe 20. Since the base end 16 is in contact with the conductive film 17, both are electrically connected. The conductive deposit 18 functions to ensure this conduction.
- FIG. 3 is a schematic explanatory view of a third embodiment of the probe for a conductive scanning microscope according to the present invention.
- the conductive coating film 22 is formed in the second embodiment. That is, the conductive coating film 22 is formed from the conductive nanotubes 12 to the conductive film 17 so as to cover the conductive deposit 18, and the conductive nanotubes 12 and the conductive film 17 are formed. This ensures electrical continuity more reliably.
- FIG. 3 is a schematic explanatory view of a third embodiment of the probe for a conductive scanning microscope according to the present invention.
- the conductive coating film 22 is formed in the second embodiment. That is, the conductive coating film 22 is formed from the conductive nanotubes 12 to the conductive film 17 so as to cover the conductive deposit 18, and the conductive nanotubes 12 and the conductive film 17 are formed. This ensures electrical continuity more reliably.
- FIG. 4 is a schematic explanatory view of a fourth embodiment of the probe for a conductive scanning microscope according to the present invention.
- the conductive film 17 is not formed on the cantilever 4.
- the preparation procedure is as follows: the base end 16 of the conductive nanotube 12 is placed in contact with the protruding surface 10 of the cantilever 4, and a conductive deposit 18 is formed from above and firmly adhered.
- a conductive coating film 22 is formed from above to complete the probe 22.
- the conductive coating film 22 is formed from the conductive nanotubes 12 to the cantilever portion 6 so as to cover the conductive deposit 18, and the conductive coating film 22 on the cantilever portion 6 forms an electrode. Functions as a membrane. Accordingly, the conductive nanotubes 12 and the cantilever 4 are electrically connected by the conductive coating film 22, and a voltage is applied to the conductive nanotubes 12 from the conductive coating film 22 by an external power supply or a current is applied.
- FIG. 5 is a schematic explanatory diagram of a fifth embodiment of the probe for a conductive scanning microscope according to the present invention.
- the conductive coating film 22 of the third embodiment is formed so as to extend so as to cover the distal end portion 14 of the nanotube 12.
- the conductive coating film 22 covers the tip 22a, and imparts the properties of a conductive substance to the probe.
- FIG. 6 is a schematic explanatory diagram of a sixth embodiment of the probe for a conductive scanning microscope according to the present invention.
- the conductive coating film 22 of the fourth embodiment is formed so as to extend so as to cover the distal end portion 14 of the nanotube 12.
- the conductive coating film 22 covers the tip 22a, and imparts the properties of a conductive substance to the needle.
- the function of this probe is the same as that of the fifth embodiment, and a description thereof will be omitted. ⁇
- FIG. 7 is a schematic explanatory view of forming minute dots on a sample surface using the probe for a conductive scanning microscope according to the present invention.
- the probe 20 is a probe for a conductive scanning microscope prepared in the fifth embodiment.
- a power source 26 is connected between the conductive film 17 of the probe 20 and the sample 24, for example, about 10 V. Is applied.
- an ultra-high electric field is applied to the sample surface from the coating film tip 22 a by a dotted line. It is formed as follows. The metal atoms are ionized by the electric field, accelerated in the direction of arrow a by the electric field, and deposited on the sample surface to form minute dots 28.
- the diameter of the nanotube 12 is at least about 1 nm. Since the thin nanotube 12 is used as a metal source, minute dots having a diameter of 50 nm or less can be easily formed. Since nanocircuits and nanostructures can be formed on the sample surface 24a using the minute dots 28, a technique of nanoengineering can be established using the probe 20 of the present invention.
- the conductive nanotubes and the conductive coating are brought into a conductive state by the conductive decomposition deposit, an external power supply is connected to the conductive coating to apply a voltage to the conductive nanotube.
- a conductive scanning microscope probe that can be energized.
- the base of the conductive nanotube is placed in contact with the surface of the required portion of the conductive film so that the conductive film and the conductive nanotube are brought into conduction first, and the conductive film is further coated on the base. A deposit is formed to ensure conduction between the two. Therefore, it is possible to provide a probe for a conductive scanning microscope that can reliably secure voltage application and energization while fixing the conductive nanotube.
- the conductive state between the conductive nanotube and the cantilever can be further assured.
- a probe for a conductive scanning microscope can be provided.
- a conductive coating film is formed on the conductive deposit so as to reach the conductive nanotube and the cantilever surface, and the conductive coating film is used as a conductive film.
- a probe for a conductive scanning microscope which has a simple structure and can secure conductivity at low cost can be provided.
- the conductive coating film is formed so as to cover the tip of the nanotube and the tip, the property of a conductive substance can be imparted to the nanotube probe.
- a probe having this specific property a specific physical property of the sample surface to which this property is sensitive can be detected with high sensitivity.
- the conductive material constituting the conductive coating film is a magnetic metal, scanning the sample surface with this probe can improve the magnetic information at the atomic level of the sample surface. Sensitivity can be detected.
- metal atoms can be freely moved from the probe to the sample surface by applying a voltage to the sample surface.
- a nanocircuit or a nanostructure can be formed on the substrate. According to the invention of claim 8, it is possible to form an extremely small nanostructure having a diameter of 50 nm or less on the sample surface, and it is possible to establish a technique of nanoengineering.
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Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/182,331 US6787769B2 (en) | 2000-11-26 | 2001-09-28 | Conductive probe for scanning microscope and machining method using the same |
EP01972624A EP1336835A4 (en) | 2000-11-26 | 2001-09-28 | CONDUCTIVE PROBE FOR SCANNING MICROSCOPE AND RELATIVE MACHINING METHOD |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-403559 | 2000-11-26 | ||
JP2000403559A JP3811004B2 (ja) | 2000-11-26 | 2000-11-26 | 導電性走査型顕微鏡用プローブ |
Publications (1)
Publication Number | Publication Date |
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WO2002042741A1 true WO2002042741A1 (en) | 2002-05-30 |
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ID=18867658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2001/008615 WO2002042741A1 (en) | 2000-11-26 | 2001-09-28 | Conductive probe for scanning microscope and machining method using the same |
Country Status (6)
Country | Link |
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US (1) | US6787769B2 (ja) |
EP (1) | EP1336835A4 (ja) |
JP (1) | JP3811004B2 (ja) |
KR (1) | KR100491411B1 (ja) |
CN (1) | CN1250957C (ja) |
WO (1) | WO2002042741A1 (ja) |
Cited By (1)
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WO2004102582A1 (en) * | 2003-03-05 | 2004-11-25 | University Of Florida | Carbon nanotube-based probes, related devices and methods of forming the same |
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- 2001-09-28 KR KR10-2002-7008427A patent/KR100491411B1/ko not_active IP Right Cessation
- 2001-09-28 CN CNB018041043A patent/CN1250957C/zh not_active Expired - Fee Related
- 2001-09-28 WO PCT/JP2001/008615 patent/WO2002042741A1/ja active IP Right Grant
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Also Published As
Publication number | Publication date |
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EP1336835A4 (en) | 2005-03-16 |
CN1397010A (zh) | 2003-02-12 |
JP3811004B2 (ja) | 2006-08-16 |
CN1250957C (zh) | 2006-04-12 |
KR100491411B1 (ko) | 2005-05-25 |
US6787769B2 (en) | 2004-09-07 |
EP1336835A1 (en) | 2003-08-20 |
KR20020071004A (ko) | 2002-09-11 |
US20030001091A1 (en) | 2003-01-02 |
JP2002162336A (ja) | 2002-06-07 |
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