WO2002032589A3 - Poröse schichten und ein verfahren zu deren herstellung mittels spin-coating - Google Patents

Poröse schichten und ein verfahren zu deren herstellung mittels spin-coating Download PDF

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Publication number
WO2002032589A3
WO2002032589A3 PCT/EP2001/012153 EP0112153W WO0232589A3 WO 2002032589 A3 WO2002032589 A3 WO 2002032589A3 EP 0112153 W EP0112153 W EP 0112153W WO 0232589 A3 WO0232589 A3 WO 0232589A3
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WO
WIPO (PCT)
Prior art keywords
spin
coating
production
porous layers
layers
Prior art date
Application number
PCT/EP2001/012153
Other languages
English (en)
French (fr)
Other versions
WO2002032589A2 (de
Inventor
Thomas W Bein
Svetlana Ivanova Mintova
Original Assignee
Thomas W Bein
Svetlana Ivanova Mintova
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomas W Bein, Svetlana Ivanova Mintova filed Critical Thomas W Bein
Priority to EP01987698A priority Critical patent/EP1333936A2/de
Priority to US10/399,100 priority patent/US20040028809A1/en
Priority to AU2002221711A priority patent/AU2002221711A1/en
Publication of WO2002032589A2 publication Critical patent/WO2002032589A2/de
Publication of WO2002032589A3 publication Critical patent/WO2002032589A3/de

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J29/00—Catalysts comprising molecular sieves
    • B01J29/03—Catalysts comprising molecular sieves not having base-exchange properties
    • B01J29/035—Microporous crystalline materials not having base exchange properties, such as silica polymorphs, e.g. silicalites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31695—Deposition of porous oxides or porous glassy oxides or oxide based porous glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/02—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a matt or rough surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Die vorliegende Erfindung betrifft poröse Schichten, ein Verfahren zu deren Herstellung sowie die Verwendung dieser Schichten in der Mikroelektronik, in Sensoren, bei katalytischen Reaktionen, bei Trennverfahren sowie in optischen Schichten. Die erfindungsgemäßen Schichten werden durch Auftragen einer Suspension poröser Partikel auf ein Substrat mittels Spin-Coating hergestellt.
PCT/EP2001/012153 2000-10-19 2001-10-19 Poröse schichten und ein verfahren zu deren herstellung mittels spin-coating WO2002032589A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01987698A EP1333936A2 (de) 2000-10-19 2001-10-19 Poröse schichten und ein verfahren zu deren herstellung mittels spin-coating
US10/399,100 US20040028809A1 (en) 2000-10-19 2001-10-19 Porous layers and method for production thereof by means of spin-coating
AU2002221711A AU2002221711A1 (en) 2000-10-19 2001-10-19 Porous layers and method for production thereof by means of spin-coating

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052075A DE10052075A1 (de) 2000-10-19 2000-10-19 Poröse Schichten und ein Verfahren zu deren Herstellung mittels Spin-Coating
DE10052075.8 2000-10-19

Publications (2)

Publication Number Publication Date
WO2002032589A2 WO2002032589A2 (de) 2002-04-25
WO2002032589A3 true WO2002032589A3 (de) 2003-06-05

Family

ID=7660471

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/012153 WO2002032589A2 (de) 2000-10-19 2001-10-19 Poröse schichten und ein verfahren zu deren herstellung mittels spin-coating

Country Status (5)

Country Link
US (1) US20040028809A1 (de)
EP (1) EP1333936A2 (de)
AU (1) AU2002221711A1 (de)
DE (1) DE10052075A1 (de)
WO (1) WO2002032589A2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2827856B1 (fr) * 2001-07-25 2004-06-04 Saint Gobain Quartz Fibre minerale munie d'un revetement microporeux ou mesoporeux
DE10146687C1 (de) 2001-09-21 2003-06-26 Flabeg Solarglas Gmbh & Co Kg Glas mit einer porösen Antireflex-Oberflächenbeschichtung sowie Verfahren zur Herstellung des Glases und Verwendung eines derartigen Glases
WO2003039791A1 (en) * 2001-11-02 2003-05-15 The Trustees Of Princeton University Methods for the preparation of metallic alloy nanoparticles and compositions thereof
US7303985B2 (en) * 2003-11-17 2007-12-04 Intel Corporation Zeolite-carbon doped oxide composite low k dielectric
EP1574491B1 (de) * 2004-03-11 2009-05-13 Corning Incorporated Keramikzusammensetzung mit einem Silsesquioxanpolymer
DE102004028305B3 (de) * 2004-06-11 2006-01-12 J. Eberspächer GmbH & Co. KG Poröses Verdampfermedium und Verfahren zur Herstellung eines porösen Verdampfermediums
DE102004032962B4 (de) * 2004-07-07 2007-11-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit einer auf einen Träger aufgebrachten Zeolithbeschichtung sowie Verfahren zum Herstellen dieser Zeolithbeschichtung
US7303989B2 (en) * 2004-11-22 2007-12-04 Intel Corporation Using zeolites to improve the mechanical strength of low-k interlayer dielectrics
US7955645B2 (en) * 2004-11-24 2011-06-07 Sensirion Ag Method for applying selectively a layer to a structured substrate by the usage of a temperature gradient in the substrate
DE102005020168A1 (de) * 2005-04-28 2006-11-02 Schott Ag Entspiegelungsschicht und Verfahren zu deren Aufbringung
US8399057B2 (en) * 2005-06-08 2013-03-19 The Regents Of The University Of California Ordered vertically oriented porous inorganic films produced through solution processing
DE102005038044A1 (de) * 2005-08-10 2007-02-15 Sortech Ag Schichtverbund und seine Herstellung
US7427570B2 (en) 2005-09-01 2008-09-23 Micron Technology, Inc. Porous organosilicate layers, and vapor deposition systems and methods for preparing same
DE102006041469B3 (de) * 2006-09-02 2008-01-31 Schott Ag Verfahren und Beschichtungslösung zur Herstellung einer wischfesten Antireflexionsschicht auf einem Borosilikatglaskörper
DE102007010544A1 (de) 2007-03-05 2008-09-11 Wacker Chemie Ag Schichten aus heterosubstituerten Silsesquioxanen
EP2230545A1 (de) 2009-03-19 2010-09-22 BRITISH TELECOMMUNICATIONS public limited company Passive entfernte Luftstrom- und Kabeldetektion
EP2430653B1 (de) * 2009-05-08 2019-03-13 1366 Technologies Inc. Poröse ablöseschicht zur selektiven entfernung abgelagerter filme
US8491962B2 (en) * 2010-04-02 2013-07-23 National Taiwan University Method for manufacturing a low-k layer
EP2424270B1 (de) * 2010-08-23 2014-05-21 Knowles Electronics Asia PTE. Ltd. Lautsprechersystem mit verbessertem Ton
DE102010054858C5 (de) 2010-12-17 2024-04-11 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh Verfahren und Vorrichtung zur Herstellung einer reflexionsmindernden Beschichtung
CN102774851A (zh) * 2012-08-06 2012-11-14 黑龙江省科学院高技术研究院 一种纳米silicalite-1型全硅分子筛的制备方法
US8794373B1 (en) * 2013-03-15 2014-08-05 Bose Corporation Three-dimensional air-adsorbing structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4795543A (en) * 1987-05-26 1989-01-03 Transducer Research, Inc. Spin coating of electrolytes
US5151110A (en) * 1990-09-11 1992-09-29 University Of New Mexico Molecular sieve sensors for selective detection at the nanogram level
WO1997033684A1 (en) * 1996-03-14 1997-09-18 Exxon Chemical Patents Inc. Procedure for preparing molecular sieve films
US6066401A (en) * 1998-02-25 2000-05-23 National Research Council Of Canada Wide-band two-layer antireflection coating for optical surfaces
WO2002007191A2 (en) * 2000-07-13 2002-01-24 The Regents Of The Universty Of California Silica zeolite low-k dielectric thin films

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05115828A (ja) * 1991-10-30 1993-05-14 Canon Inc 塗布装置
FR2708482B1 (fr) * 1993-07-29 1995-09-29 Inst Francais Du Petrole Procéédé de fabrication de catalyseurs sur supports incluant une étape de centrifugation du support après enduction.
US5591517A (en) * 1993-08-31 1997-01-07 Sumitomo Osaka Cement Co., Ltd. Antireflection film
CN1057611C (zh) * 1993-08-31 2000-10-18 住友水泥株式会社 抗反射膜
GB9413863D0 (en) * 1994-07-08 1994-08-24 Exxon Chemical Patents Inc Molecular sieves and processes for their manufacture
US6528034B1 (en) * 1999-11-09 2003-03-04 Board Of Trustees Of Michigan State University Ultra-stable lamellar mesoporous silica compositions and process for the prepration thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4795543A (en) * 1987-05-26 1989-01-03 Transducer Research, Inc. Spin coating of electrolytes
US5151110A (en) * 1990-09-11 1992-09-29 University Of New Mexico Molecular sieve sensors for selective detection at the nanogram level
WO1997033684A1 (en) * 1996-03-14 1997-09-18 Exxon Chemical Patents Inc. Procedure for preparing molecular sieve films
US6066401A (en) * 1998-02-25 2000-05-23 National Research Council Of Canada Wide-band two-layer antireflection coating for optical surfaces
WO2002007191A2 (en) * 2000-07-13 2002-01-24 The Regents Of The Universty Of California Silica zeolite low-k dielectric thin films

Also Published As

Publication number Publication date
DE10052075A1 (de) 2002-05-02
AU2002221711A1 (en) 2002-04-29
US20040028809A1 (en) 2004-02-12
EP1333936A2 (de) 2003-08-13
WO2002032589A2 (de) 2002-04-25

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