WO2002008818A1 - Actionneur a balayage de lumiere sonde - Google Patents

Actionneur a balayage de lumiere sonde Download PDF

Info

Publication number
WO2002008818A1
WO2002008818A1 PCT/JP2001/006332 JP0106332W WO0208818A1 WO 2002008818 A1 WO2002008818 A1 WO 2002008818A1 JP 0106332 W JP0106332 W JP 0106332W WO 0208818 A1 WO0208818 A1 WO 0208818A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable part
probe light
optical element
mass
frequency
Prior art date
Application number
PCT/JP2001/006332
Other languages
English (en)
French (fr)
Inventor
Jun Tominaga
Takeo Fukumura
Nobuya Ezure
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to US10/088,948 priority Critical patent/US6879420B2/en
Priority to JP2002514458A priority patent/JP4807695B2/ja
Priority to EP01951969A priority patent/EP1233295A4/en
Publication of WO2002008818A1 publication Critical patent/WO2002008818A1/ja

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4811Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/121Mechanical drive devices for polygonal mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
PCT/JP2001/006332 2000-07-24 2001-07-23 Actionneur a balayage de lumiere sonde WO2002008818A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/088,948 US6879420B2 (en) 2000-07-24 2001-07-23 Actuator for scanning detecting light
JP2002514458A JP4807695B2 (ja) 2000-07-24 2001-07-23 探査光走査用アクチュエータ
EP01951969A EP1233295A4 (en) 2000-07-24 2001-07-23 ACTUATING DEVICE FOR SAMPLE LIGHT SENSING

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000221620 2000-07-24
JP2000-221620 2000-07-24
JP2000374215 2000-12-08
JP2000-374215 2000-12-08

Publications (1)

Publication Number Publication Date
WO2002008818A1 true WO2002008818A1 (fr) 2002-01-31

Family

ID=26596495

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/006332 WO2002008818A1 (fr) 2000-07-24 2001-07-23 Actionneur a balayage de lumiere sonde

Country Status (4)

Country Link
US (1) US6879420B2 (ja)
EP (1) EP1233295A4 (ja)
JP (1) JP4807695B2 (ja)
WO (1) WO2002008818A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005040720A1 (ja) * 2003-10-27 2005-05-06 Nhk Spring Co., Ltd. 角度検出装置およびこれを用いたスキャン型アクチュエータ
WO2008149851A1 (ja) * 2007-06-04 2008-12-11 Nhk Spring Co., Ltd. 物体検出装置
WO2008149796A1 (ja) * 2007-05-31 2008-12-11 Nhk Spring Co., Ltd. 光走査用アクチュエータ
WO2008152979A1 (ja) * 2007-06-12 2008-12-18 Nhk Spring Co., Ltd. 光走査型センサ
JP2010508497A (ja) * 2006-10-30 2010-03-18 オートノシス インコーポレイテッド ライダー用走査システム
US7813019B2 (en) 2005-03-31 2010-10-12 Nhk Spring Co., Ltd. Optical scanning actuator
US7940443B2 (en) 2007-05-31 2011-05-10 Sanyo Electric Co., Ltd. Laser radar and beam irradiation apparatus therefor
US8580227B2 (en) 2008-01-04 2013-11-12 Korea Advanced Institute Of Science And Technology Method for producing hydrogen using block copolymer and oxidation reaction of metals
US10441463B2 (en) 2014-03-26 2019-10-15 Optimedica Corporation Confocal laser eye surgery system and improved confocal bypass assembly

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8167437B2 (en) * 2004-05-13 2012-05-01 Thomson Licensing Multi-positional smoothing mirror for video projection optics
KR20050114470A (ko) * 2004-06-01 2005-12-06 엘지전자 주식회사 해상도 향상 장치
JP2011186422A (ja) * 2010-02-10 2011-09-22 Sanyo Electric Co Ltd ビーム照射装置
JP5381801B2 (ja) * 2010-02-23 2014-01-08 セイコーエプソン株式会社 画像形成装置
US9377619B2 (en) * 2014-02-03 2016-06-28 New Scale Technologies, Inc. Compact wide-angle optical beam steering assemblies and methods thereof
EP3106894A4 (en) * 2014-02-13 2017-10-25 Konica Minolta, Inc. Mirror unit, distance measuring device, and laser radar, and mobile body and fixed object having these
US10921431B2 (en) 2017-10-19 2021-02-16 Cepton Technologies Inc. Apparatuses for scanning a lidar system in two dimensions
US10502949B2 (en) * 2018-04-04 2019-12-10 Irvine Sensors Corp. Multi-polygon laser scanner comprising pyramidal timing polygon
US11307294B2 (en) 2018-09-14 2022-04-19 Veoneer Us, Inc. Scanning assembly for a detection system
US20210173177A1 (en) * 2019-12-05 2021-06-10 Panasonic Automotive Systems Company Of America, Division Of Panasonic Corporation Of North America Magnetic mirror movement
IT202000002155A1 (it) * 2020-02-04 2021-08-04 Fondazione St Italiano Tecnologia Dispositivo per l’orientamento sferico di un elemento ottico, in particolare per dirigere un fascio di luce, quale un fascio laser
US11614521B2 (en) * 2021-04-21 2023-03-28 Innovusion, Inc. LiDAR scanner with pivot prism and mirror

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03150733A (ja) * 1989-11-06 1991-06-27 Fujitsu Ltd 回転鏡装置
JPH03287222A (ja) * 1990-04-03 1991-12-17 Ricoh Co Ltd トラッキングミラーアクチュエータ装置
JPH058525U (ja) * 1991-07-19 1993-02-05 横河電機株式会社 2次元の光偏向器
JPH05281485A (ja) * 1991-06-28 1993-10-29 Eastman Kodak Co 磁気ポジションセンサ
JPH06331908A (ja) * 1993-05-21 1994-12-02 Sony Corp ミラー式光路偏向装置
JPH1184305A (ja) * 1997-09-09 1999-03-26 N Ii C Sanei Kk 光学走査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3362341B2 (ja) * 1992-03-25 2003-01-07 オムロン株式会社 振動子及び光スキャナ
JP4197776B2 (ja) * 1997-12-26 2008-12-17 オリンパス株式会社 光スキャナ
DE19828679B4 (de) * 1997-06-27 2004-07-08 Pentax Corp. Galvanospiegel-System
JPH1116185A (ja) * 1997-06-27 1999-01-22 Asahi Optical Co Ltd 偏向ミラーの回動位置検出装置
JPH1183988A (ja) * 1997-09-01 1999-03-26 Nhk Spring Co Ltd レーザ光照射レンズ用アクチュエータ
US6108118A (en) * 1998-07-09 2000-08-22 Olympus Optical Co., Ltd. Optical deflector

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03150733A (ja) * 1989-11-06 1991-06-27 Fujitsu Ltd 回転鏡装置
JPH03287222A (ja) * 1990-04-03 1991-12-17 Ricoh Co Ltd トラッキングミラーアクチュエータ装置
JPH05281485A (ja) * 1991-06-28 1993-10-29 Eastman Kodak Co 磁気ポジションセンサ
JPH058525U (ja) * 1991-07-19 1993-02-05 横河電機株式会社 2次元の光偏向器
JPH06331908A (ja) * 1993-05-21 1994-12-02 Sony Corp ミラー式光路偏向装置
JPH1184305A (ja) * 1997-09-09 1999-03-26 N Ii C Sanei Kk 光学走査装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1233295A4 *

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7359827B2 (en) 2003-10-27 2008-04-15 Nhk Spring, Ltd. Angle detecting apparatus and scanning-type actuator using the angle detecting apparatus
WO2005040720A1 (ja) * 2003-10-27 2005-05-06 Nhk Spring Co., Ltd. 角度検出装置およびこれを用いたスキャン型アクチュエータ
KR101076720B1 (ko) 2005-03-31 2011-10-26 니혼 하츠쵸 가부시키가이샤 광 주사용 액츄에이터
US7813019B2 (en) 2005-03-31 2010-10-12 Nhk Spring Co., Ltd. Optical scanning actuator
JP2010508497A (ja) * 2006-10-30 2010-03-18 オートノシス インコーポレイテッド ライダー用走査システム
JPWO2008149796A1 (ja) * 2007-05-31 2010-08-26 日本発條株式会社 光走査用アクチュエータ
WO2008149796A1 (ja) * 2007-05-31 2008-12-11 Nhk Spring Co., Ltd. 光走査用アクチュエータ
US7940443B2 (en) 2007-05-31 2011-05-10 Sanyo Electric Co., Ltd. Laser radar and beam irradiation apparatus therefor
US8164811B2 (en) 2007-05-31 2012-04-24 Nhk Spring Co., Ltd. Optical scanning actuator
US8035875B2 (en) 2007-06-04 2011-10-11 Nhk Spring Co., Ltd. Object detector
WO2008149851A1 (ja) * 2007-06-04 2008-12-11 Nhk Spring Co., Ltd. 物体検出装置
WO2008152979A1 (ja) * 2007-06-12 2008-12-18 Nhk Spring Co., Ltd. 光走査型センサ
US8580227B2 (en) 2008-01-04 2013-11-12 Korea Advanced Institute Of Science And Technology Method for producing hydrogen using block copolymer and oxidation reaction of metals
US10441463B2 (en) 2014-03-26 2019-10-15 Optimedica Corporation Confocal laser eye surgery system and improved confocal bypass assembly

Also Published As

Publication number Publication date
US6879420B2 (en) 2005-04-12
JP4807695B2 (ja) 2011-11-02
EP1233295A4 (en) 2011-12-28
US20030035188A1 (en) 2003-02-20
EP1233295A1 (en) 2002-08-21

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