WO2001083084A1 - Ensemble armoire a gaz comprenant un systeme de stockage et de distribution de gaz a base sorbant - Google Patents

Ensemble armoire a gaz comprenant un systeme de stockage et de distribution de gaz a base sorbant Download PDF

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Publication number
WO2001083084A1
WO2001083084A1 PCT/US2001/013922 US0113922W WO0183084A1 WO 2001083084 A1 WO2001083084 A1 WO 2001083084A1 US 0113922 W US0113922 W US 0113922W WO 0183084 A1 WO0183084 A1 WO 0183084A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
dispensing
sorbent medium
storage
physical sorbent
Prior art date
Application number
PCT/US2001/013922
Other languages
English (en)
Inventor
Glenn M. Tom
James V. Mcmanus
Original Assignee
Advanced Technology Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by Advanced Technology Materials, Inc. filed Critical Advanced Technology Materials, Inc.
Priority to AU2001257439A priority Critical patent/AU2001257439A1/en
Priority to JP2001579949A priority patent/JP2003532034A/ja
Priority to EP01930952A priority patent/EP1284806A4/fr
Priority to KR1020027014732A priority patent/KR100858077B1/ko
Publication of WO2001083084A1 publication Critical patent/WO2001083084A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

L'invention concerne un système d'alimentation de gaz comprenant une armoire à gaz (402) définissant une enceinte, comprenant un collecteur de distribution (426) de gaz, et au moins un récipient de stockage et de distribution (433, 460, 462) de gaz à base d'adsorbant monté dans ladite enceinte, et relié au moyen d'une communication d'écoulement gazeux avec le collecteur de distribution (426) de gaz. L'enceinte peut être maintenue dans des conditions de pression basse ou négative afin d'améliorer la sécurité en cas de fuite de gaz provenant des récipients de stockage et de distribution (433, 460, 462) placés dans l'enceinte. Le système d'alimentation de gaz peut être couplé à une unité de consommation de gaz située dans une installation de fabrication de semi-conducteurs, par exemple dans un implanteur ionique, une chambre de gravure, ou un réacteur de dépôt chimique en phase vapeur.
PCT/US2001/013922 2000-05-03 2001-04-27 Ensemble armoire a gaz comprenant un systeme de stockage et de distribution de gaz a base sorbant WO2001083084A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2001257439A AU2001257439A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
JP2001579949A JP2003532034A (ja) 2000-05-03 2001-04-27 収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリ
EP01930952A EP1284806A4 (fr) 2000-05-03 2001-04-27 Ensemble armoire a gaz comprenant un systeme de stockage et de distribution de gaz a base sorbant
KR1020027014732A KR100858077B1 (ko) 2000-05-03 2001-04-27 가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/564,323 2000-05-03
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (1)

Publication Number Publication Date
WO2001083084A1 true WO2001083084A1 (fr) 2001-11-08

Family

ID=24254011

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/013922 WO2001083084A1 (fr) 2000-05-03 2001-04-27 Ensemble armoire a gaz comprenant un systeme de stockage et de distribution de gaz a base sorbant

Country Status (6)

Country Link
EP (1) EP1284806A4 (fr)
JP (1) JP2003532034A (fr)
KR (1) KR100858077B1 (fr)
CN (1) CN1204954C (fr)
AU (1) AU2001257439A1 (fr)
WO (1) WO2001083084A1 (fr)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1569737A2 (fr) * 2002-12-09 2005-09-07 Advanced Technology Materials, Inc. Recipient de stockage et de distribution de fluide en forme de parallelepipede rectangle
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
WO2009148841A3 (fr) * 2008-05-29 2010-03-25 Tescom Corporation Système mobile d'alimentation en gaz
DE102006012209B4 (de) * 2005-06-27 2010-09-02 Foosung Co., Ltd. Verfahren zum Abfüllen eines verflüssigten Gases mit niedriger Temperatur
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
US9004462B2 (en) 2002-07-23 2015-04-14 Entegris, Inc. Method and apparatus to help promote contact of gas with vaporized material
US9383064B2 (en) 2010-01-14 2016-07-05 Entegris, Inc. Ventilation gas management systems and processes
CN107364659A (zh) * 2017-07-31 2017-11-21 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
EP3257014A4 (fr) * 2015-02-12 2018-08-01 Entegris, Inc. Emballage intelligent
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
US10385452B2 (en) 2012-05-31 2019-08-20 Entegris, Inc. Source reagent-based delivery of fluid with high material flux for batch deposition
US10895010B2 (en) 2006-08-31 2021-01-19 Entegris, Inc. Solid precursor-based delivery of fluid utilizing controlled solids morphology
US20220375801A1 (en) * 2021-04-16 2022-11-24 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
WO2023192762A1 (fr) * 2022-03-29 2023-10-05 Praxair Technology, Inc. Procédé et système de distribution de gaz optimisée avec fonctionnalité de sécurité de régulation de pression redondante automatisée

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
JP4652785B2 (ja) * 2004-11-29 2011-03-16 株式会社日立国際電気 基板処理装置
KR100820377B1 (ko) * 2006-07-07 2008-04-10 김재윤 질소가스충진기
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
JP2014207200A (ja) * 2013-04-16 2014-10-30 東京電力株式会社 ナトリウム−硫黄電池における火災の消火方法
CN103638890B (zh) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 高纯安全气体源的制备方法
EP3201512A4 (fr) * 2014-10-03 2018-03-14 Entegris, Inc. Récipient de fourniture de gaz à régulation de pression
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
CN107883184B (zh) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 用于航天器的高压气瓶承载装置
KR102040716B1 (ko) * 2018-07-10 2019-11-06 에이엠티 주식회사 가스통 자동 교체방법
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛
EP3950111A4 (fr) * 2019-03-27 2022-11-30 Eneos Corporation Dispositif d'alimentation en hydrogène gazeux et méthode d'alimentation en hydrogène gazeux
KR102229474B1 (ko) * 2020-08-31 2021-03-17 서갑수 가스 공급 조절 박스
CN116371142B (zh) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 烟气低温吸附再生系统和吸附剂加热输送装置
CN116624753B (zh) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 一种三氟化氯充装方法及系统

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US4378982A (en) * 1981-08-28 1983-04-05 Greene & Kellogg, Inc. Compact oxygen concentrator
US5112367A (en) * 1989-11-20 1992-05-12 Hill Charles C Fluid fractionator
US5213769A (en) * 1991-10-30 1993-05-25 Whitlock Walter H Mixture forming method and apparatus
US5512087A (en) * 1992-05-12 1996-04-30 Newport Petroleum Petroleum vapor control apparatus
US5429662A (en) * 1992-09-14 1995-07-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes George Claude Process and installation for the separation of gas by permeation

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Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9004462B2 (en) 2002-07-23 2015-04-14 Entegris, Inc. Method and apparatus to help promote contact of gas with vaporized material
US10465286B2 (en) 2002-07-23 2019-11-05 Entegris, Inc. Method and apparatus to help promote contact of gas with vaporized material
US9469898B2 (en) 2002-07-23 2016-10-18 Entegris, Inc. Method and apparatus to help promote contact of gas with vaporized material
EP1569737A4 (fr) * 2002-12-09 2006-11-08 Advanced Tech Materials Recipient de stockage et de distribution de fluide en forme de parallelepipede rectangle
EP1569737A2 (fr) * 2002-12-09 2005-09-07 Advanced Technology Materials, Inc. Recipient de stockage et de distribution de fluide en forme de parallelepipede rectangle
TWI471165B (zh) * 2002-12-09 2015-02-01 Advanced Tech Materials 長方體形狀的單體吸附劑、流體－吸附劑的互相作用製程、氣櫃、及製造氣體源套件之方法
DE102006012209B4 (de) * 2005-06-27 2010-09-02 Foosung Co., Ltd. Verfahren zum Abfüllen eines verflüssigten Gases mit niedriger Temperatur
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US10895010B2 (en) 2006-08-31 2021-01-19 Entegris, Inc. Solid precursor-based delivery of fluid utilizing controlled solids morphology
WO2009148841A3 (fr) * 2008-05-29 2010-03-25 Tescom Corporation Système mobile d'alimentation en gaz
RU2495322C2 (ru) * 2008-05-29 2013-10-10 Теском Корпорейшн Мобильная система подачи газа
US8499789B2 (en) 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
US9383064B2 (en) 2010-01-14 2016-07-05 Entegris, Inc. Ventilation gas management systems and processes
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
US10385452B2 (en) 2012-05-31 2019-08-20 Entegris, Inc. Source reagent-based delivery of fluid with high material flux for batch deposition
US10845006B2 (en) 2015-02-12 2020-11-24 Entegris, Inc. Smart package
US10247363B2 (en) 2015-02-12 2019-04-02 Entegris, Inc. Smart package
EP3257014A4 (fr) * 2015-02-12 2018-08-01 Entegris, Inc. Emballage intelligent
CN107364659A (zh) * 2017-07-31 2017-11-21 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
US20220375801A1 (en) * 2021-04-16 2022-11-24 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
US11726465B2 (en) * 2021-04-16 2023-08-15 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
WO2023192762A1 (fr) * 2022-03-29 2023-10-05 Praxair Technology, Inc. Procédé et système de distribution de gaz optimisée avec fonctionnalité de sécurité de régulation de pression redondante automatisée

Also Published As

Publication number Publication date
EP1284806A1 (fr) 2003-02-26
CN1452507A (zh) 2003-10-29
EP1284806A4 (fr) 2006-03-15
KR20030034065A (ko) 2003-05-01
JP2003532034A (ja) 2003-10-28
KR100858077B1 (ko) 2008-09-11
AU2001257439A1 (en) 2001-11-12
CN1204954C (zh) 2005-06-08

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