WO2001036851A1 - Regulateur de pression constante - Google Patents

Regulateur de pression constante Download PDF

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Publication number
WO2001036851A1
WO2001036851A1 PCT/JP2000/007971 JP0007971W WO0136851A1 WO 2001036851 A1 WO2001036851 A1 WO 2001036851A1 JP 0007971 W JP0007971 W JP 0007971W WO 0136851 A1 WO0136851 A1 WO 0136851A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve chamber
diaphragm
pressure
main body
diaphragms
Prior art date
Application number
PCT/JP2000/007971
Other languages
English (en)
Japanese (ja)
Inventor
Toshihiro Hanada
Kenro Yoshino
Original Assignee
Asahi Organic Chemicals Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chemicals Industry Co., Ltd. filed Critical Asahi Organic Chemicals Industry Co., Ltd.
Publication of WO2001036851A1 publication Critical patent/WO2001036851A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane
    • G05D16/0644—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator
    • G05D16/0652—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator using several membranes without spring

Definitions

  • the present invention relates to a constant-pressure regulator that maintains a constant fluid pressure on the secondary side (downstream side) even when the fluid pressure on the primary side (upstream side) fluctuates.
  • the present invention relates to a constant pressure regulator capable of obtaining stable pressure control with a compact suitably used for a water line or various chemical liquid lines and generating less dust.
  • FIG. 5 Conventional constant-pressure regulators are generally as shown in Fig. 5.
  • reference numeral 30 denotes a main body, and a lower portion is provided with a first valve chamber 35, and a fluid inlet 37 communicating with the first valve chamber 35 and a fluid communicating with the second valve chamber 36 on the side surface.
  • An outlet 38 is provided.
  • the upper part of the main body 30 forms a second valve chamber 36 together with the diaphragm 32.
  • Numeral 31 denotes a lid, which forms an air chamber 39 with the diaphragm 32, and has an air port 42 communicating with the air chamber 39 at the upper part. Note that a constant air pressure is always applied to the air chamber 39.
  • a port 33 is attached to the center of the diaphragm 32, and a plug 34 having a diameter larger than the diameter of the flow path 41 of the main body 30 is attached to the tip of the rod 33. I have.
  • the fluid pressure in the second valve chamber 36 is kept substantially the same as the pressure applied to the air chamber 39 by the balance of the force applied to the diaphragm 32.
  • the pressure on the secondary side also increases, and the fluid pressure becomes larger than the pressure in the air chamber 39, so that the diaphragm 32 is pushed upward.
  • the port 33 and the plug 34 attached to the diaphragm 32 also move upward with this, and the opening area of the control section 40 formed between the plug 34 and the main body is small. In other words, the pressure loss of the fluid passing through the control unit 40 increases, and the secondary pressure in the second valve chamber 36 drops again to substantially the same pressure as the pressure in the air chamber.
  • the rod penetrates the inside of the flow path, so if the fluid pressure on the primary side fluctuates frequently or if the pressure fluctuates greatly, b.
  • the pressure was unstable due to the tilting of the rod and that the rod and the body contacted each other, causing wear and dust.
  • it is necessary to reduce the diameter of the flow path, but in such a structure, if the diameter of the flow path is reduced, the diameter of the rod must also be reduced.
  • there were also problems such as insufficient strength of the rod and difficulty in processing and assembling. Disclosure of the invention
  • the present invention has been made in view of the above-described problems of the conventional constant-pressure regulator, and therefore provides a compact and high-precision constant-pressure regulator that can be used even in a highly corrosive chemical liquid line or a chemical liquid line that dislikes dust generation. It is intended to provide.
  • the configuration of the present invention comprises a first valve chamber, a step provided above the first valve chamber, and a flow communicating with the first valve chamber.
  • a cylindrical body having a body flow inlet, a lid body having a second valve chamber and a body flow outlet communicating therewith and joined to an upper part of the body, and an annular protrusion provided on a peripheral edge portion are provided as first parts.
  • An air chamber surrounded by the inner peripheral surface of the step portion of the main body and the first and second diaphragms, and the second diaphragm Pressure receiving area of the first diaphragm is larger than the pressure receiving area of the first diaphragm.
  • a communication port is provided in the main body for communication.
  • first and second diaphragms, sleeves and body are integrally formed.
  • the diaphragm is made of polytetrafluoroethylene.
  • an orifice portion is provided between the second valve chamber and a fluid outlet communicating with the second valve chamber.
  • FIG. 1 is a longitudinal sectional view of the constant pressure regulator of the present invention.
  • FIG. 2 is a longitudinal sectional view showing a state in which the primary pressure is increased in FIG. 1.
  • FIG. 3 is a second embodiment in which the first and second diaphragms, the sleeve and the main body are all integrally formed.
  • FIG. 4 is a longitudinal sectional view showing a third embodiment in which an orifice portion is provided between a second valve chamber and a fluid outlet communicating with the second valve chamber.
  • FIG. 5 is a longitudinal sectional view of a conventional constant-pressure regulator.
  • FIG. 6 is a graph showing characteristics of the constant-pressure regulator according to the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is a longitudinal sectional view of a constant pressure regulator according to the present invention.
  • FIG. 2 is a longitudinal sectional view showing a state where the primary pressure has increased in the constant-pressure regulator of the present invention.
  • reference numeral 1 denotes a cylindrical main body, and a fluid supply port 7 communicating with a first valve chamber 9 provided inside the main body 1 and an air supply communicating with the air chamber 11 on the side surface.
  • the first valve chamber 9 has a joining portion (annular notch) 13 to which the annular projection 17 of the first diaphragm 3 is joined.
  • a step portion 21 that forms an air chamber 11 together with the first diaphragm 3 and the second diaphragm 4 is provided above the first valve chamber 9. Note that the step portion 21 does not necessarily need to be formed integrally with the main body 1, but may be formed by another annular part.
  • Reference numeral 2 denotes a lid, which has a second valve chamber 10 inside, an outlet 8 communicating with the second valve chamber 10 on the outer peripheral side surface, and a bolt or the like at the upper end of the main body 1. (Not shown).
  • An annular groove 14 into which the annular protrusion 18 of the second diaphragm 4 is fitted is provided at the lower end of the lid 2 at the peripheral edge of the second valve chamber 10.
  • the first diaphragm 3 is made of tetrafluoroethylene (PTFE) and is formed in a donut shape.
  • An annular joint 15 is provided at the center, and a rectangular cross section is formed at the outer peripheral edge.
  • An annular projection 17 is provided.
  • a cylindrical sleeve 5 is screwed onto the inner peripheral surface of the annular joint 15 of the first diaphragm 3, while the annular protrusion 17 is inside the main body 1. It is joined to the provided joint 13.
  • the second diaphragm 4 is also made of PTFE, and is provided with an annular joint 16 at the center and an annular protrusion 18 having a rectangular cross section at the outer peripheral edge, similarly to the first diaphragm 3. .
  • the annular projection 18 is fitted into the annular groove 14 of the lid 2 and is sandwiched between the main body 1 and the lid 2 by joining the lid 2 to the upper end surface of the main body 1. .
  • the pressure receiving area of the second diaphragm 4 is designed to be sufficiently larger than that of the first diaphragm 3.
  • a threaded portion 19 is provided on the outer peripheral surface of the cylindrical sleeve 5, and the threaded portion 19 is connected to the annular joint 15 of the first and second diaphragms 3, 4.
  • the two diaphragms are integrated and held movably in the axial direction by being screwed to 16.
  • the interior of the sleeve 5 is a fluid flow path.
  • Reference numeral 6 denotes a plug, which is fixed to the bottom of the first valve chamber 9 by screwing or the like.
  • the tip of the plug 6 forms a fluid control unit 20 with the lower end surface of the sleeve 5, and the opening area of the fluid control unit 20 changes as the sleeve 5 moves up and down. It is designed to keep the pressure inside the second valve chamber 10, ie, the secondary pressure, constant.
  • the air chamber 11 is formed so as to be surrounded by a stepped portion 21 of the main body 1 and first and second diaphragms 3 and 4. Compressed air or an inert gas or the like is introduced into the air chamber 11 from the air supply port 12 and is always kept at a constant pressure.
  • the first and second diaphragms 3 and 4 integrated by the sleeve 5 have the stepped portion 21 provided on the main body 1 and the second
  • the air chamber 11 is arranged in a space surrounded by the valve chamber 10 and the air chamber 11 is thereby formed.
  • Fluorine resin such as PTFE and PFA is preferably used for the material of the main body.
  • the material of the first and second diaphragms is not particularly limited, and may be a rubber or metal in which a fluororesin such as PTFE is suitably used.
  • the first diaphragm 3 receives an upward force due to the pressure inside the first valve chamber 9, that is, the primary pressure, and a downward force due to the pressure inside the air chamber 11.
  • the second diaphragm 4 receives a downward force due to the pressure inside the second valve chamber 10, that is, the secondary pressure, and an upward force due to the pressure inside the air chamber 11, and the fishing of these four forces is performed.
  • the position of the sleeve 5 joined to the first and second diaphragms 3 and 4 is determined by the engagement.
  • the fluid control part 20 is formed between the sleeve 5 and the plug 6, and the area thereof controls the fluid pressure on the secondary side.
  • the secondary pressure and flow rate also increase temporarily.
  • an upward force acts on the first diaphragm 3 and a downward force acts on the second diaphragm 4 due to the fluid pressure, but the pressure receiving area of the second diaphragm 4 is larger than that of the first diaphragm 3.
  • the downward force will be greater, resulting in pushing down the sleeve 5 (as shown in Figure 2).
  • the opening area of the fluid control unit 20 decreases, the fluid pressure on the secondary side instantaneously drops to the original pressure, and the balance between the internal pressure of the air chamber 11 and the fluid pressure is maintained again. It is.
  • a fixed throttle or valve (not shown) is attached downstream of the constant pressure regulator of the present invention. If the downstream side of the fixed throttle or valve is open to the atmosphere, the differential pressure across the fixed throttle or valve will always be kept constant, and the flow rate corresponding to the flow coefficient of the fixed throttle or valve will always be maintained. Was It will be.
  • the pressure and flow rate on the secondary side also temporarily decrease.
  • downward and upward forces act on the first and second diaphragms 3 and 4, respectively, due to the internal pressure of the air chamber 11, but even in this case, the pressure receiving area of the second diaphragm 4 is larger, so The upward force prevails and pushes the position of sleeve 5 upward.
  • the opening area of the fluid control unit 20 increases (the state shown in FIG. 1), and the fluid pressure on the secondary side instantaneously rises to the original pressure, and again depends on the internal pressure of the air chamber 11 and the fluid pressure. Power balance is maintained and the original flow is maintained.
  • the secondary pressure will be maintained at the corresponding value. If there is no change in the fixed throttle or valve installed downstream, the set flow rate should be changed. Can be.
  • Fig. 6 shows how the secondary pressure changes when a fixed throttle (orifice diameter 2 mm) is installed downstream of the constant pressure regulator of the present invention and the primary pressure of the regulator is changed. The result of the measurement is shown.
  • the solid line and the broken line show the case where the pressure in the air chamber is 0.04 MPa and 0.08 MPa, respectively. In both cases, even if the primary pressure rises, the secondary pressure remains almost the same as the pressure in the air chamber.
  • FIG. 3 is a longitudinal sectional view showing a second embodiment of the present invention.
  • the difference from the first embodiment is that the first and second diaphragms, sleeve and main body are all integrally formed.
  • the air chamber is formed
  • the step 21 of the main body is a separate part from the main body.
  • the operation of the valve is the same as described above, and a description thereof will be omitted.
  • FIG. 4 is a longitudinal sectional view showing a third embodiment of the present invention.
  • the difference from the first embodiment is that an orifice portion 22 is provided between the second valve chamber 10 and the fluid outlet 8 communicating therewith. If the downstream side of the orifice section 22 is open to the atmosphere, the differential pressure across the orifice section is always kept constant even if the pressure on the primary side fluctuates.
  • the flow rate through 22 becomes constant and can be used as a constant flow valve.
  • the operation of the valve is the same as described above, and a description thereof will be omitted.
  • the constant-pressure regulator according to the present invention has the structure as described above, and the use of the constant-pressure regulator has the following excellent effects.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

L'invention concerne un régulateur de pression constante à haute précision pouvant être utilisé dans une ligne de produits chimiques liquides hautement corrosifs et amatophobes, comprenant un corps principal (1) présentant une première chambre (9) à soupape ainsi qu'une entrée (7) d'écoulement de fluide, un corps de couvercle (2) présentant une seconde chambre (10) à soupape ainsi qu'une sortie (8) d'écoulement de fluide, une première membrane (3) fixée sur le bord périphérique supérieur de la première chambre à soupape, une seconde membrane (4) maintenue par et entre le corps principal et le couvercle, un manchon (5) relié à des parties de raccordement annulaires (15 et 16) ménagées au niveau des centres des première et seconde membranes et mobiles en sens axial, ainsi qu'un obturateur (6) fixé à la partie inférieure de la première chambre à soupape et formant une partie (20) de régulation de fluide entre l'obturateur et une partie terminale inférieure du manchon, une chambre d'air (11) étant prévue laquelle est entourée par la surface périphérique intérieure du corps principal et les première et seconde membranes, un orifice (12) d'alimentation en air communiquant avec la chambre d'air est prévu, et la zone de réception de pression de la seconde membrane (4) est supérieure à celle de la première membrane (3).
PCT/JP2000/007971 1999-11-18 2000-11-10 Regulateur de pression constante WO2001036851A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11/328512 1999-11-18
JP32851299A JP3734394B2 (ja) 1999-11-18 1999-11-18 定圧レギュレータ

Publications (1)

Publication Number Publication Date
WO2001036851A1 true WO2001036851A1 (fr) 2001-05-25

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PCT/JP2000/007971 WO2001036851A1 (fr) 1999-11-18 2000-11-10 Regulateur de pression constante

Country Status (4)

Country Link
JP (1) JP3734394B2 (fr)
KR (1) KR100430169B1 (fr)
TW (1) TW464739B (fr)
WO (1) WO2001036851A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2229829A1 (es) * 2001-10-23 2005-04-16 Universidad De Sevilla Valvula microfluidica para alta presion.
US20170128713A1 (en) * 2011-07-25 2017-05-11 Carefusion 303, Inc. Connector with a dual diaphragm valve

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2552227T3 (es) * 2001-07-16 2015-11-26 Teijin Limited Catalizador para la preparación de un poliéster y a un procedimiento para preparar un poliéster usando el catalizador
JP4471541B2 (ja) * 2001-07-18 2010-06-02 旭有機材工業株式会社 定圧レギュレータ
JP4776120B2 (ja) * 2001-09-26 2011-09-21 旭有機材工業株式会社 背圧弁
JP4117549B2 (ja) * 2003-02-14 2008-07-16 旭有機材工業株式会社 真空レギュレータ
JP4258757B2 (ja) * 2003-04-21 2009-04-30 旭有機材工業株式会社 真空レギュレータ
JP5369429B2 (ja) * 2007-11-19 2013-12-18 株式会社ニコン 定圧弁の弁構造
CN105736781A (zh) * 2016-04-01 2016-07-06 上海澳升清洁科技有限公司 一种减压节流阀及使用方法
JP6929098B2 (ja) 2017-03-30 2021-09-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359362U (fr) * 1989-10-11 1991-06-11
JPH04126324A (ja) * 1990-09-17 1992-04-27 Seiko Epson Corp 流体制御装置及びその製造方法
JPH04244687A (ja) * 1990-10-01 1992-09-01 Robert Bosch Gmbh 電気空気式の多方向制御弁
JPH0522081B2 (fr) * 1987-09-11 1993-03-26 Konan Electric Co
JPH0720726Y2 (ja) * 1990-03-29 1995-05-15 エヌテーシー工業株式会社 筒状弁式の減圧・逃し弁
JPH09503569A (ja) * 1994-01-25 1997-04-08 フォルシュングスツェントルム カールスルーエ ゲゼルシャフト ミット ベシュレンクテル ハフツング マイクロダイヤフラムポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522081B2 (fr) * 1987-09-11 1993-03-26 Konan Electric Co
JPH0359362U (fr) * 1989-10-11 1991-06-11
JPH0720726Y2 (ja) * 1990-03-29 1995-05-15 エヌテーシー工業株式会社 筒状弁式の減圧・逃し弁
JPH04126324A (ja) * 1990-09-17 1992-04-27 Seiko Epson Corp 流体制御装置及びその製造方法
JPH04244687A (ja) * 1990-10-01 1992-09-01 Robert Bosch Gmbh 電気空気式の多方向制御弁
JPH09503569A (ja) * 1994-01-25 1997-04-08 フォルシュングスツェントルム カールスルーエ ゲゼルシャフト ミット ベシュレンクテル ハフツング マイクロダイヤフラムポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2229829A1 (es) * 2001-10-23 2005-04-16 Universidad De Sevilla Valvula microfluidica para alta presion.
US20170128713A1 (en) * 2011-07-25 2017-05-11 Carefusion 303, Inc. Connector with a dual diaphragm valve
US9974943B2 (en) * 2011-07-25 2018-05-22 Carefusion 303, Inc. Connector with a dual diaphragm valve

Also Published As

Publication number Publication date
KR20010093116A (ko) 2001-10-27
TW464739B (en) 2001-11-21
JP3734394B2 (ja) 2006-01-11
KR100430169B1 (ko) 2004-05-03
JP2001141083A (ja) 2001-05-25

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