WO2001018500A1 - Verfahren und vorrichtung zur präzisions-massenflussmessung - Google Patents
Verfahren und vorrichtung zur präzisions-massenflussmessung Download PDFInfo
- Publication number
- WO2001018500A1 WO2001018500A1 PCT/IB2000/001262 IB0001262W WO0118500A1 WO 2001018500 A1 WO2001018500 A1 WO 2001018500A1 IB 0001262 W IB0001262 W IB 0001262W WO 0118500 A1 WO0118500 A1 WO 0118500A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mass flow
- sensor
- fluid
- measuring
- temperature
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Definitions
- the invention relates to a method and a device for mass flow measurement according to the preamble of the independent claims.
- Such sensors are described in the article by F. Mayer et al. , "Scaling of Thermal CMOS Gas Flow Microsensors: Experiment and Simulation", Proc. IEEE Micro Electro Mechanical Systems, p. 116ff (IEEE, 1996), or in F. Mayer et al., “Single-Chip CMOS Anemometer", Proc. IEEE International Electron Devices Meeting, pp. 895ff (IEDM, 1997). They are used to determine the mass flow of media such as gases, liquids or fluids in general. They have a heating element which is arranged between two temperature sensors. The temperature difference between the two temperature sensors is a measure of the mass flow. The mass flow measurement can be falsified by the thermal properties of the fluid. This particularly limits the usability for unknown or changeable gases or liquids.
- the object of the invention is to provide an improved method and an improved device for mass flow measurement. According to the invention, this object is achieved by the features of the independent claims.
- At least one substance-specific parameter for characterizing the heat transfer behavior of the fluid is measured in a mass flow measurement of the type mentioned and used to correct a mass flow measurement signal.
- a mass flow sensor with very high measuring accuracy and more flexible usability is realized.
- the mass flow of any gases can be measured reliably regardless of the thermal properties of the gas.
- the substance-specific parameters are a thermal conductivity K and / or a heat capacity c and / or a product of heat capacity and density c * p and / or a diffusivity ⁇ .
- the type or composition of the fluid is determined from the substance-specific parameter. From this further, e.g. B. tabulated parameters of this fluid for mass flow correction and in particular for a calorific value measurement can be derived.
- At least one state variable of the fluid e.g. B. a pressure and / or a temperature, measured and thus corrects the at least one substance-specific parameter.
- An important exemplary embodiment relates to the measurement of the thermal conductivity K and / or the thermal capacity c or c * p with the aid of a second sensor, which is constructed similarly to the mass flow sensor, but is arranged in a largely flow-free area of the fluid. Further designs, advantages and applications of the invention result from the dependent claims and from the following description with reference to the figures.
- FIG. 2 shows a mass flow sensor with a heat conduction and / or heat capacity sensor integrated according to the invention
- 3, 4a and 4b schematically show modifications of a heat conduction and / or heat capacity sensor with reduced susceptibility to faults.
- a sensor component is used, as shown in FIG. 1.
- This component is described in detail in F. Mayer et al. , "Scaling of Thermal CMOS Gas Flow Microsensors: Experiment and Simulation", Proc. IEEE Micro Electro Mechanical Systems, pp. 116ff (IEEE, 1996). It is arranged on a silicon single crystal 1, in which an opening or depression 2 has been etched out. The opening or depression 2 is spanned by a thin membrane 3 made of a dielectric. A resistance heating element 4 is arranged on the membrane 3. Symmetrical to the heating element 4, two thermocouples 5, 6 are provided, which serve as temperature sensors 5, 6.
- thermocouples 5, 6 and the heating element 4 lie in the direction of flow 7 so that the medium 8 to be measured first the first thermocouple 5, then the heating element. ment 4 and finally sweeps the second thermocouple 6.
- the mass flow of the medium 8 to be measured can be determined with a device according to FIG.
- a temperature signal from a temperature sensor 6 arranged downstream of the heating element 4 is sufficient for the mass flow measurement.
- the temperature difference between the thermocouples 5, 6 is preferably measured, which depends both on the flow rate and on the density or pressure in the medium 8 , The mass flow can then be calculated from the temperature difference using suitable calibration tables.
- the substance-specific parameter is now additionally measured to characterize the heat transfer behavior of the medium or fluid 8, and the mass flow measurement is corrected using the substance-specific parameter.
- the substance-specific parameter is a thermal conductivity K and / or a heat capacity c and / or a product of heat capacity and density c * p and / or a diffusivity ⁇ .
- the type or composition of the fluid 8 can be determined from the measured substance-specific parameter.
- previously known substance-specific parameters e.g. B. determined from tables and the mass flow measurement can be corrected using the measured and known substance-specific parameters.
- at least one state variable e.g.
- a pressure and / or a temperature) of the fluid 8 should additionally be measured and used to correct the measured and / or previously known substance-specific parameters.
- Fig. 2 shows an embodiment with a second sensor 9 for measuring the thermal conductivity K and / or Heat capacity c (per mass) or heat capacity c * p (per volume) of the fluid 8a in the stowed or very slowly flowing area 13.
- the second sensor 9 comprises a second heating element 10 and at least one second temperature sensor 11, 12.
- the second heating element 10 is operated to measure the thermal conductivity K with a constant heating power and / or to measure the heat capacity c or c * p with a pulsed heating power.
- the thermal capacity c or c * p of the accumulated fluid 8a can be determined from the dynamic temperature signal of the sensors 11, 12.
- a measurement signal is preferably formed by adding the temperature signals of a plurality of second temperature sensors 11, 12 arranged symmetrically to the heating element 10.
- the invention also relates to a mass flow sensor 15 of the type mentioned at the outset, which has measuring means 14 for determining the mass flow 15 from at least one temperature signal from at least one temperature sensor 5, 6 and which is designed to carry out the method described above.
- the mass flow sensor 15 is to comprise a second sensor 9 for measuring the thermal conductivity K and / or the thermal capacity c or c * p.
- the mass flow sensor 15, the second sensor 9 and the measuring means 14 are integrated on a single chip 1.
- the chip 1 is typically constructed on the basis of silicon or possibly gallium arsenide or glass. As shown in FIG.
- the chip 1 can be constructed such that the mass flow sensor 15 is exposed to the flow 7 of the fluid 8 and the sensor 9 to the essentially stationary fluid 8a in the storage space 13 in the assembled or inserted state.
- the measuring electronics 14 are located outside the fluid 8, 8a if possible.
- the second sensor 9 can be constructed similarly or largely identically to the mass flow sensor 15 itself. This decisively simplifies and reduces the cost of manufacture, electronic control and measurement signal evaluation and the ability to be integrated on a single chip 1.
- the measurement of the thermal properties of the jammed fluid 8a is still significantly influenced by heat conduction in the chip 1 itself.
- webs and etchings 16 can be provided between the second heating element 10 and the second temperature sensors 11, 12. 3 and 4a and 4b can additionally or alternatively
- Chip 1 may be attached.
- Fig. 4a (supervision) and Fig. 4b
- the heating element 10 is arranged in a meandering manner on a membrane 3 configured in the manner of a bridge.
- the meandering shape creates an essentially flat heating element 10, which is particularly advantageous for measuring the heat capacity c or c * p.
- the mass flow sensor according to the invention is particularly suitable for mass flow measurements in gases 8. It can be used especially for gas meters in fuel supply systems. In particular, a substance-specific parameter of the gas 8 can be measured, the type or composition of the gas 8 characterized, the associated specific calorific value determined from previously known data and the total calorific value of the gas 8 calculated together with the mass flow measurement. Other applications relate to configurations of the mass flow sensor 15 for installation in systems for industrial process gases, in air conditioning systems, in medical devices or in sports and leisure equipment.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10082701T DE10082701D2 (de) | 1999-09-09 | 2000-09-08 | Verfahren und Vorrichtung zur Präzisions-Massenflussmessung |
AU67191/00A AU6719100A (en) | 1999-09-09 | 2000-09-08 | Method and device for precision mass flow measurement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH165799 | 1999-09-09 | ||
CH1657/99 | 1999-09-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001018500A1 true WO2001018500A1 (de) | 2001-03-15 |
Family
ID=4215588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB2000/001262 WO2001018500A1 (de) | 1999-09-09 | 2000-09-08 | Verfahren und vorrichtung zur präzisions-massenflussmessung |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU6719100A (de) |
DE (1) | DE10082701D2 (de) |
WO (1) | WO2001018500A1 (de) |
Cited By (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002095338A2 (de) * | 2001-05-21 | 2002-11-28 | Forschungszentrum Karlsruhe Gmbh | Thermischer strömungssensor |
EP1391703A1 (de) * | 2002-08-22 | 2004-02-25 | Abb Research Ltd. | Thermisches Gasdurchfluss-Messgerät mit Gasqualitätsindikator |
EP1426740A2 (de) * | 2002-11-27 | 2004-06-09 | Sensirion AG | Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids |
EP1543318A1 (de) * | 2002-09-17 | 2005-06-22 | Robert Bosch Gmbh | Sensor und verfahren |
US7222028B2 (en) | 2003-01-23 | 2007-05-22 | Ems-Patent Ag | Increased accuracy gas energy meter |
EP1621882A3 (de) * | 2004-06-03 | 2007-09-12 | UST Umweltsensortechnik GmbH | Verfahren und Anordnung zur Erfassung brennbarer Gase, insbesondere zur Erfassung von Wasserstoff |
DE102007057027A1 (de) | 2007-11-27 | 2009-06-25 | Dräger Medical AG & Co. KG | Vorrichtung und Verfahren zur Messung der Strömungsgeschwindigkeit eines Fluids |
DE102008046514A1 (de) * | 2008-09-10 | 2010-03-11 | Continental Automotive Gmbh | Verfahren, Vorrichtung und System zum Betreiben einer Brennkraftmaschine |
US7905140B2 (en) | 2007-03-01 | 2011-03-15 | Sensirion Ag | Device with flow sensor for handling fluids |
US8011240B2 (en) | 2006-03-31 | 2011-09-06 | Sensirion Ag | Flow sensor with thermocouples |
DE102011081922A1 (de) | 2011-08-31 | 2013-02-28 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Strömumgssensor zur Bestimmung eines Strömungsparameters und Verfahren zur Bestimmung desselben |
DE102011081923A1 (de) | 2011-08-31 | 2013-02-28 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensorchip zur Bestimmung eines Strömungsparameters eines Gases und Verfahren zur Bestimmung desselben |
US8408050B2 (en) | 2008-10-09 | 2013-04-02 | Sensirion Ag | Method for measuring a fluid composition parameter by means of a flow sensor |
EP2703786A1 (de) * | 2011-04-28 | 2014-03-05 | Omron Corporation | Durchsatzmessvorrichtung |
EP2618115A3 (de) * | 2012-01-18 | 2014-05-07 | Hydrometer GmbH | Verfahren und Vorrichtung zum Messen einer Durchflussmenge eines strömenden Gases |
WO2014090557A1 (de) | 2012-12-14 | 2014-06-19 | Endress+Hauser Flowtec Ag | Thermische durchflussmessvorrichtung und verfahren zur korrektur eines durchflusses eines mediums |
US8771598B2 (en) | 2009-01-02 | 2014-07-08 | Sensirion Ag | Ammonia storage system |
WO2014106696A1 (fr) * | 2013-01-04 | 2014-07-10 | Air Liquide Medical Systems | Dispositif à cellule thermosensible de suivi de l'observance d'un traitement médical |
US8935950B2 (en) | 2007-07-13 | 2015-01-20 | Continental Automotive Gmbh | Sensor for measuring hydrocarbon content in a flow of gas in a purge line |
US9341499B2 (en) | 2010-06-04 | 2016-05-17 | Sensirion Ag | Sensor system |
EP3029429A1 (de) | 2014-12-04 | 2016-06-08 | Sensirion AG | Bestimmung einer Flüssigkeitszusammensetzung in einer Massenströmungssteuerung |
WO2016180760A1 (de) * | 2015-05-13 | 2016-11-17 | Innovative Sensor Technology Ist Ag | Verfahren zur bestimmung eines produktes aus wärmekapazität und dichte |
EP3153854A1 (de) * | 2015-10-05 | 2017-04-12 | Sensirion AG | Bestimmung von verbrennungsparametern aus physischen gasparametern |
WO2018050371A1 (de) * | 2016-09-13 | 2018-03-22 | Bundesrepublik Deutschland, Vertreten Durch Das Bundesministerium Für Wirtschaft Und Energie, Dieses Vertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt | Verfahren zum bestimmen einer zusammensetzung eines gasförmigen fluids und gas-zusammensetzungssensor |
EP3367087A2 (de) | 2018-04-30 | 2018-08-29 | Sensirion AG | Sensor zur bestimmung der wärmekapazität von flüssigkeiten |
US10143820B2 (en) | 2014-12-12 | 2018-12-04 | Dynasthetics, Llc | System and method for delivery of variable oxygen flow |
US10159815B2 (en) | 2014-12-12 | 2018-12-25 | Dynasthetics, Llc | System and method for detection of oxygen delivery failure |
EP3421947A1 (de) | 2017-06-30 | 2019-01-02 | Sensirion AG | Betriebsverfahren für eine durchflusssensorvorrichtung |
DE102018108723A1 (de) * | 2018-04-12 | 2019-10-17 | Tdk Corporation | Sensorvorrichtung, Verfahren zum Betreiben einer Sensorvorrichtung und elektronische Baugruppe, die eine Sensorvorrichtung aufweist |
BE1027620A1 (nl) | 2019-10-04 | 2021-04-28 | Ygilis Bvba | Recipiënt en werkwijze voor de opvolging van de hydratatie |
EP3933352A1 (de) * | 2020-07-01 | 2022-01-05 | Sick Ag | Thermische durchflussmessung |
US11226300B2 (en) | 2015-03-05 | 2022-01-18 | Sensirion Ag | Determination of fluid parameters |
EP3589921B1 (de) * | 2017-03-03 | 2023-05-31 | First Sensor AG | Thermischer gaseigenschaftssensor |
WO2024061903A1 (de) * | 2022-09-20 | 2024-03-28 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensoranordnung |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4909078A (en) * | 1987-10-14 | 1990-03-20 | Rosemount Inc. | Fluid flow detector |
EP0484645A1 (de) * | 1990-11-09 | 1992-05-13 | Hewlett-Packard Company | Verfahren und Systeme zur Identifizierung von Flüssigkeiten und Bestimmung der Strömung |
US5339687A (en) * | 1989-02-18 | 1994-08-23 | Endress & Hauser Limited | Flowmeter |
-
2000
- 2000-09-08 DE DE10082701T patent/DE10082701D2/de not_active Ceased
- 2000-09-08 WO PCT/IB2000/001262 patent/WO2001018500A1/de active Application Filing
- 2000-09-08 AU AU67191/00A patent/AU6719100A/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4909078A (en) * | 1987-10-14 | 1990-03-20 | Rosemount Inc. | Fluid flow detector |
US5339687A (en) * | 1989-02-18 | 1994-08-23 | Endress & Hauser Limited | Flowmeter |
EP0484645A1 (de) * | 1990-11-09 | 1992-05-13 | Hewlett-Packard Company | Verfahren und Systeme zur Identifizierung von Flüssigkeiten und Bestimmung der Strömung |
Cited By (66)
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WO2002095338A3 (de) * | 2001-05-21 | 2003-02-13 | Karlsruhe Forschzent | Thermischer strömungssensor |
WO2002095338A2 (de) * | 2001-05-21 | 2002-11-28 | Forschungszentrum Karlsruhe Gmbh | Thermischer strömungssensor |
US6892571B2 (en) | 2001-05-21 | 2005-05-17 | Forschungszentrum Karlsrue Gmbh | Sensor for the measurement of flowspeeds and method for operating the same |
US7399118B2 (en) | 2002-08-22 | 2008-07-15 | Ems-Patent Ag | Thermal gas flowmeter comprising a gas quality indicator |
EP1391703A1 (de) * | 2002-08-22 | 2004-02-25 | Abb Research Ltd. | Thermisches Gasdurchfluss-Messgerät mit Gasqualitätsindikator |
WO2004018976A2 (de) * | 2002-08-22 | 2004-03-04 | Abb Research Ltd. | Thermisches gasdurchfluss-messgerät mit gasqualitätsindikator |
WO2004018976A3 (de) * | 2002-08-22 | 2004-04-22 | Abb Research Ltd | Thermisches gasdurchfluss-messgerät mit gasqualitätsindikator |
DE10243013B4 (de) * | 2002-09-17 | 2013-08-22 | Robert Bosch Gmbh | Sensor und Verfahren |
EP1543318A1 (de) * | 2002-09-17 | 2005-06-22 | Robert Bosch Gmbh | Sensor und verfahren |
EP1426740A3 (de) * | 2002-11-27 | 2005-03-09 | Sensirion AG | Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids |
US7188519B2 (en) | 2002-11-27 | 2007-03-13 | Sensirion Ag | Device and method for measuring the flow and at least one material parameter of a fluid |
EP1426740A2 (de) * | 2002-11-27 | 2004-06-09 | Sensirion AG | Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids |
US7222028B2 (en) | 2003-01-23 | 2007-05-22 | Ems-Patent Ag | Increased accuracy gas energy meter |
EP1621882A3 (de) * | 2004-06-03 | 2007-09-12 | UST Umweltsensortechnik GmbH | Verfahren und Anordnung zur Erfassung brennbarer Gase, insbesondere zur Erfassung von Wasserstoff |
US8011240B2 (en) | 2006-03-31 | 2011-09-06 | Sensirion Ag | Flow sensor with thermocouples |
US7905140B2 (en) | 2007-03-01 | 2011-03-15 | Sensirion Ag | Device with flow sensor for handling fluids |
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US8935950B2 (en) | 2007-07-13 | 2015-01-20 | Continental Automotive Gmbh | Sensor for measuring hydrocarbon content in a flow of gas in a purge line |
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US7823444B2 (en) | 2007-11-27 | 2010-11-02 | Dräger Medical AG & Co. KG | Device and process for measuring the velocity of flow of a fluid using pulse signal generated based on feedback |
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US8312868B2 (en) | 2008-09-10 | 2012-11-20 | Continental Automotive Gmbh | Method, device, and system for operating an internal combustion engine |
FR2935751A1 (fr) * | 2008-09-10 | 2010-03-12 | Continental Automotive Gmbh | Procede, dispositif et systeme de fonctionnement d'un moteur a combustion interne |
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DE102018108723A1 (de) * | 2018-04-12 | 2019-10-17 | Tdk Corporation | Sensorvorrichtung, Verfahren zum Betreiben einer Sensorvorrichtung und elektronische Baugruppe, die eine Sensorvorrichtung aufweist |
US11448532B2 (en) | 2018-04-12 | 2022-09-20 | Tdk Corporation | Sensor device, method for operating a sensor device and electronic assembly comprising a sensor device |
CN112005105A (zh) * | 2018-04-30 | 2020-11-27 | 盛思锐股份公司 | 用于确定天然气热容量的传感器 |
US11474056B2 (en) | 2018-04-30 | 2022-10-18 | Sensirion Ag | Sensor for determining the thermal capacity of natural gas |
WO2019211115A1 (en) | 2018-04-30 | 2019-11-07 | Sensirion Ag | Sensor for determining the thermal capacity of natural gases |
EP3367087A2 (de) | 2018-04-30 | 2018-08-29 | Sensirion AG | Sensor zur bestimmung der wärmekapazität von flüssigkeiten |
CN112005105B (zh) * | 2018-04-30 | 2023-12-01 | 盛思锐股份公司 | 用于确定天然气热容量的传感器 |
BE1027620A1 (nl) | 2019-10-04 | 2021-04-28 | Ygilis Bvba | Recipiënt en werkwijze voor de opvolging van de hydratatie |
EP3933352A1 (de) * | 2020-07-01 | 2022-01-05 | Sick Ag | Thermische durchflussmessung |
WO2024061903A1 (de) * | 2022-09-20 | 2024-03-28 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensoranordnung |
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DE10082701D2 (de) | 2002-08-14 |
AU6719100A (en) | 2001-04-10 |
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