WO2002095338A3 - Thermischer strömungssensor - Google Patents

Thermischer strömungssensor Download PDF

Info

Publication number
WO2002095338A3
WO2002095338A3 PCT/EP2002/004323 EP0204323W WO02095338A3 WO 2002095338 A3 WO2002095338 A3 WO 2002095338A3 EP 0204323 W EP0204323 W EP 0204323W WO 02095338 A3 WO02095338 A3 WO 02095338A3
Authority
WO
WIPO (PCT)
Prior art keywords
support membrane
sensor
flow sensor
aim
thermal flow
Prior art date
Application number
PCT/EP2002/004323
Other languages
English (en)
French (fr)
Other versions
WO2002095338A2 (de
Inventor
Werner Schomburg
Dirk Dittmann
Klaus Schlote-Holubek
Original Assignee
Karlsruhe Forschzent
Werner Schomburg
Dirk Dittmann
Klaus Schlote-Holubek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karlsruhe Forschzent, Werner Schomburg, Dirk Dittmann, Klaus Schlote-Holubek filed Critical Karlsruhe Forschzent
Publication of WO2002095338A2 publication Critical patent/WO2002095338A2/de
Publication of WO2002095338A3 publication Critical patent/WO2002095338A3/de
Priority to US10/716,937 priority Critical patent/US6892571B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element

Abstract

Die Erfindung betrifft einen Sensor zur Messung von Strömungsgeschwindigkeiten und ein Verfahren zu dessen Betrieb. Aufgabe der Erfindung ist es, den Sensor so auszugestalten, dass von außen einwirkende Kräfte und Temperaturänderungen nur noch in sehr geringem Maße Einfluss auf das Sensorsignal haben. Gelöst wird diese Aufgabe durch eine Trägermembran im wesentlichen in Form einer Fahne und die nur zu einem kleinen Teil ihres Umfangs als Halteelement ausgebildet ist, wobei die Halteelemente so angeordnet sind, dass nur ein Randbereich der Trägermembran mechanischen Spannungen ausgesetzt wird, und eine elektrische Leiterbahn mit Zuleitungen auf der Trägermembran.
PCT/EP2002/004323 2001-05-21 2002-04-19 Thermischer strömungssensor WO2002095338A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/716,937 US6892571B2 (en) 2001-05-21 2003-11-20 Sensor for the measurement of flowspeeds and method for operating the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10124964.0 2001-05-21
DE10124964A DE10124964B4 (de) 2001-05-21 2001-05-21 Sensor zur Messung von Strömungsgeschwindigkeiten und Verfahren zu dessen Betrieb

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/716,937 Continuation-In-Part US6892571B2 (en) 2001-05-21 2003-11-20 Sensor for the measurement of flowspeeds and method for operating the same

Publications (2)

Publication Number Publication Date
WO2002095338A2 WO2002095338A2 (de) 2002-11-28
WO2002095338A3 true WO2002095338A3 (de) 2003-02-13

Family

ID=7685755

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/004323 WO2002095338A2 (de) 2001-05-21 2002-04-19 Thermischer strömungssensor

Country Status (3)

Country Link
US (1) US6892571B2 (de)
DE (1) DE10124964B4 (de)
WO (1) WO2002095338A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1431718A3 (de) 2002-12-20 2007-11-14 Heraeus Sensor Technology Gmbh Strömungssensorelement in Dünnfilmtechnik und seine Verwendung
EP2759811A3 (de) 2005-10-24 2014-09-10 Heraeus Sensor Technology Gmbh Strömungssensorelement und dessen Selbstreinigung
DE102006030786A1 (de) * 2006-06-30 2008-01-03 Heraeus Sensor Technology Gmbh Strömungssensorelement und dessen Selbstreinigung
US7921726B2 (en) * 2006-06-12 2011-04-12 Precision Pumping Systems, Inc. Fluid sensor with mechanical positional feedback
EP2251651A3 (de) * 2007-04-26 2012-02-22 Heraeus Sensor Technology Gmbh Anordnung eines Schichtwiderstandes einer anemometrischen Messeinrichtung in einem Abgasrohr
DE102008037206B4 (de) * 2008-08-11 2014-07-03 Heraeus Sensor Technology Gmbh 300°C-Flowsensor
CN109839211B (zh) * 2019-04-03 2020-09-22 沈银峰 一种分布式光纤水体温度及流速分布的测量装置
RU200149U1 (ru) * 2020-06-25 2020-10-08 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" Термоанемометрический датчик расхода жидкостей и газов для экологического мониторинга

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912974A (en) * 1987-12-08 1990-04-03 Mitsubishi Denki Kabushiki Kaisha Thermal flow sensor
WO2001018500A1 (de) * 1999-09-09 2001-03-15 Sensirion Ag Verfahren und vorrichtung zur präzisions-massenflussmessung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2919433A1 (de) * 1979-05-15 1980-12-04 Bosch Gmbh Robert Messonde zur messung der masse und/oder temperatur eines stroemenden mediums und verfahren zu ihrer herstellung
US4651564A (en) * 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
JPS60236024A (ja) * 1984-05-09 1985-11-22 Nippon Soken Inc 直熱型空気流量センサ
US4776214A (en) * 1985-08-09 1988-10-11 Motorola, Inc. Mass air flow sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912974A (en) * 1987-12-08 1990-04-03 Mitsubishi Denki Kabushiki Kaisha Thermal flow sensor
WO2001018500A1 (de) * 1999-09-09 2001-03-15 Sensirion Ag Verfahren und vorrichtung zur präzisions-massenflussmessung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MATSUURA T ET AL: "Deformation control of microbridges for flow sensors", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 60, no. 1-3, 1 May 1997 (1997-05-01), pages 197 - 201, XP004134621, ISSN: 0924-4247 *

Also Published As

Publication number Publication date
DE10124964A1 (de) 2002-12-05
WO2002095338A2 (de) 2002-11-28
US6892571B2 (en) 2005-05-17
US20040159151A1 (en) 2004-08-19
DE10124964B4 (de) 2004-02-05

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