WO2000036734A1 - Dispositif moteur plat, son procede d'assemblage et d'entrainement, dispositif a etage et procede d'entrainement associe, systeme et procede d'exposition, et dispositif et procede de production associes - Google Patents

Dispositif moteur plat, son procede d'assemblage et d'entrainement, dispositif a etage et procede d'entrainement associe, systeme et procede d'exposition, et dispositif et procede de production associes Download PDF

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Publication number
WO2000036734A1
WO2000036734A1 PCT/JP1999/007005 JP9907005W WO0036734A1 WO 2000036734 A1 WO2000036734 A1 WO 2000036734A1 JP 9907005 W JP9907005 W JP 9907005W WO 0036734 A1 WO0036734 A1 WO 0036734A1
Authority
WO
WIPO (PCT)
Prior art keywords
motor device
driving
planar motor
driving force
mover
Prior art date
Application number
PCT/JP1999/007005
Other languages
English (en)
Japanese (ja)
Inventor
Keiichi Tanaka
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to AU16854/00A priority Critical patent/AU1685400A/en
Publication of WO2000036734A1 publication Critical patent/WO2000036734A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Ce dispositif moteur plat comprend une partie fixe (60) sur laquelle on a formé une surface mobile (21a), un élément mobile (51) qui se déplace le long de cette surface mobile étant doté de plusieurs aimants permanents (54) disposés au niveau d'intervalles spécifiques dans un sens bidimensionnel, de manière à faire face à la surface mobile, ainsi que de plusieurs coussins à air (56), placés entre les aimants permanents adjacents (54) et conçus pour projeter de l'air sous pression en direction de la surface mobile. Ce dispositif est caractérisé en ce que l'élément mobile (51) peut être supporté tandis qu'il flotte au-dessus de la surface mobile au moyen de la pression statique de l'air sous pression projeté à partir des coussins à air (56) en direction de la surface mobile (21a). Ainsi, on peut mettre en oeuvre un élément mobile, petit, léger, possédant une surface presque équivalente à une région présentant des aimants permanents, ce qui permet d'améliorer la faculté de commande de position de l'élément mobile.
PCT/JP1999/007005 1998-12-16 1999-12-14 Dispositif moteur plat, son procede d'assemblage et d'entrainement, dispositif a etage et procede d'entrainement associe, systeme et procede d'exposition, et dispositif et procede de production associes WO2000036734A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU16854/00A AU1685400A (en) 1998-12-16 1999-12-14 Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35721998 1998-12-16
JP10/357219 1998-12-16

Publications (1)

Publication Number Publication Date
WO2000036734A1 true WO2000036734A1 (fr) 2000-06-22

Family

ID=18452997

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/007005 WO2000036734A1 (fr) 1998-12-16 1999-12-14 Dispositif moteur plat, son procede d'assemblage et d'entrainement, dispositif a etage et procede d'entrainement associe, systeme et procede d'exposition, et dispositif et procede de production associes

Country Status (4)

Country Link
KR (1) KR100856369B1 (fr)
AU (1) AU1685400A (fr)
TW (1) TW439116B (fr)
WO (1) WO2000036734A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004090953A1 (fr) * 2003-04-01 2004-10-21 Nikon Corporation Dispositif a etage, dispositif d'exposition et procede de production dudit dispositif
US6879063B2 (en) 1999-09-02 2005-04-12 Asml Netherlands B.V. Displacement device
JP2005109331A (ja) * 2003-10-01 2005-04-21 Canon Inc ステージ装置およびデバイス製造方法
JP2008098368A (ja) * 2006-10-11 2008-04-24 Ushio Inc ステージ装置
JP2008235710A (ja) * 2007-03-22 2008-10-02 Ushio Inc ステージ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268608A (ja) * 2004-03-19 2005-09-29 Sumitomo Heavy Ind Ltd ステージ装置
CN104074867B (zh) * 2014-06-27 2017-01-04 上海仙丰智能设备有限公司 一种恒压气浮导轨系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5499907A (en) * 1978-01-25 1979-08-07 Hitachi Ltd Dc servomotor for biaxial control
JPS5598191U (fr) * 1978-12-27 1980-07-08
WO1991015333A2 (fr) * 1990-04-06 1991-10-17 International Business Machines Corporation Etage de positionnement x, y et theta electrodynamique et ultrarapide
JPH0731126A (ja) * 1993-07-09 1995-01-31 Yaskawa Electric Corp 平面ステップモータの脱調復帰装置と方法
EP0896936A1 (fr) * 1997-08-11 1999-02-17 Murata Kikai Kabushiki Kaisha Dispositif pour transporter des supports
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5499907A (en) * 1978-01-25 1979-08-07 Hitachi Ltd Dc servomotor for biaxial control
JPS5598191U (fr) * 1978-12-27 1980-07-08
WO1991015333A2 (fr) * 1990-04-06 1991-10-17 International Business Machines Corporation Etage de positionnement x, y et theta electrodynamique et ultrarapide
JPH0731126A (ja) * 1993-07-09 1995-01-31 Yaskawa Electric Corp 平面ステップモータの脱調復帰装置と方法
EP0896936A1 (fr) * 1997-08-11 1999-02-17 Murata Kikai Kabushiki Kaisha Dispositif pour transporter des supports
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6879063B2 (en) 1999-09-02 2005-04-12 Asml Netherlands B.V. Displacement device
WO2004090953A1 (fr) * 2003-04-01 2004-10-21 Nikon Corporation Dispositif a etage, dispositif d'exposition et procede de production dudit dispositif
US7589823B2 (en) 2003-04-01 2009-09-15 Nikon Corporation Stage device, exposure apparatus, and method of manufacturing device
JP2005109331A (ja) * 2003-10-01 2005-04-21 Canon Inc ステージ装置およびデバイス製造方法
JP4510419B2 (ja) * 2003-10-01 2010-07-21 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法
JP2008098368A (ja) * 2006-10-11 2008-04-24 Ushio Inc ステージ装置
JP2008235710A (ja) * 2007-03-22 2008-10-02 Ushio Inc ステージ装置
JP4702313B2 (ja) * 2007-03-22 2011-06-15 ウシオ電機株式会社 ステージ装置

Also Published As

Publication number Publication date
TW439116B (en) 2001-06-07
KR20010099815A (ko) 2001-11-09
KR100856369B1 (ko) 2008-09-04
AU1685400A (en) 2000-07-03

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