AU1685400A - Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof - Google Patents

Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof

Info

Publication number
AU1685400A
AU1685400A AU16854/00A AU1685400A AU1685400A AU 1685400 A AU1685400 A AU 1685400A AU 16854/00 A AU16854/00 A AU 16854/00A AU 1685400 A AU1685400 A AU 1685400A AU 1685400 A AU1685400 A AU 1685400A
Authority
AU
Australia
Prior art keywords
flat motor
exposure
motor device
driving method
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU16854/00A
Inventor
Keiichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU1685400A publication Critical patent/AU1685400A/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU16854/00A 1998-12-16 1999-12-14 Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof Abandoned AU1685400A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10/357219 1998-12-16
JP35721998 1998-12-16
PCT/JP1999/007005 WO2000036734A1 (en) 1998-12-16 1999-12-14 Flat motor device and assembly method thereof, flat motor device driving method, stage device and driving method thereof, exposure system and exposure method, and device and production method thereof

Publications (1)

Publication Number Publication Date
AU1685400A true AU1685400A (en) 2000-07-03

Family

ID=18452997

Family Applications (1)

Application Number Title Priority Date Filing Date
AU16854/00A Abandoned AU1685400A (en) 1998-12-16 1999-12-14 Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof

Country Status (4)

Country Link
KR (1) KR100856369B1 (en)
AU (1) AU1685400A (en)
TW (1) TW439116B (en)
WO (1) WO2000036734A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI248718B (en) 1999-09-02 2006-02-01 Koninkl Philips Electronics Nv Displacement device
JP4362862B2 (en) * 2003-04-01 2009-11-11 株式会社ニコン Stage apparatus and exposure apparatus
JP4510419B2 (en) * 2003-10-01 2010-07-21 キヤノン株式会社 Stage apparatus, exposure apparatus, and device manufacturing method
JP2005268608A (en) * 2004-03-19 2005-09-29 Sumitomo Heavy Ind Ltd Stage equipment
JP2008098368A (en) * 2006-10-11 2008-04-24 Ushio Inc Stage apparatus
JP4702313B2 (en) * 2007-03-22 2011-06-15 ウシオ電機株式会社 Stage equipment
CN104074867B (en) * 2014-06-27 2017-01-04 上海仙丰智能设备有限公司 A kind of constant voltage air-supporting slide rail system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5499907A (en) * 1978-01-25 1979-08-07 Hitachi Ltd Dc servomotor for biaxial control
JPS5598191U (en) * 1978-12-27 1980-07-08
US5153494A (en) * 1990-04-06 1992-10-06 International Business Machines Corp. Ultrafast electro-dynamic x, y and theta positioning stage
JPH0731126A (en) * 1993-07-09 1995-01-31 Yaskawa Electric Corp Method and apparatus for resetting flat stepping motor from step out
JPH1159901A (en) * 1997-08-11 1999-03-02 Murata Mach Ltd Carrier moving device
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same

Also Published As

Publication number Publication date
KR20010099815A (en) 2001-11-09
TW439116B (en) 2001-06-07
KR100856369B1 (en) 2008-09-04
WO2000036734A1 (en) 2000-06-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase