JPS5499907A - Dc servomotor for biaxial control - Google Patents

Dc servomotor for biaxial control

Info

Publication number
JPS5499907A
JPS5499907A JP621478A JP621478A JPS5499907A JP S5499907 A JPS5499907 A JP S5499907A JP 621478 A JP621478 A JP 621478A JP 621478 A JP621478 A JP 621478A JP S5499907 A JPS5499907 A JP S5499907A
Authority
JP
Japan
Prior art keywords
servomotor
air
support
bearing mechanism
biaxial control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP621478A
Other languages
Japanese (ja)
Inventor
Ryuichi Kyomasu
Nobuhiro Takasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP621478A priority Critical patent/JPS5499907A/en
Publication of JPS5499907A publication Critical patent/JPS5499907A/en
Pending legal-status Critical Current

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  • Linear Motors (AREA)

Abstract

PURPOSE: To move a speciment table by a low force, by using an air bearing mechanism.
CONSTITUTION: Numerous air ejection ports are provided on the top of a support rest 22. Air is ejected from the ports to support a flange 21 out of contact with the support rest, namely, the air bearing mechanism is provided. Therefore, when a mold part 14 moves in the directions X, Y, the resistance to the movement is very low. As a result, the specimen table 24 (XY table) can be moved by a low force.
COPYRIGHT: (C)1979,JPO&Japio
JP621478A 1978-01-25 1978-01-25 Dc servomotor for biaxial control Pending JPS5499907A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP621478A JPS5499907A (en) 1978-01-25 1978-01-25 Dc servomotor for biaxial control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP621478A JPS5499907A (en) 1978-01-25 1978-01-25 Dc servomotor for biaxial control

Publications (1)

Publication Number Publication Date
JPS5499907A true JPS5499907A (en) 1979-08-07

Family

ID=11632264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP621478A Pending JPS5499907A (en) 1978-01-25 1978-01-25 Dc servomotor for biaxial control

Country Status (1)

Country Link
JP (1) JPS5499907A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110469A (en) * 1985-11-08 1987-05-21 Sony Corp X-y linear motor
WO2000036734A1 (en) * 1998-12-16 2000-06-22 Nikon Corporation Flat motor device and assembly method thereof, flat motor device driving method, stage device and driving method thereof, exposure system and exposure method, and device and production method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110469A (en) * 1985-11-08 1987-05-21 Sony Corp X-y linear motor
WO2000036734A1 (en) * 1998-12-16 2000-06-22 Nikon Corporation Flat motor device and assembly method thereof, flat motor device driving method, stage device and driving method thereof, exposure system and exposure method, and device and production method thereof

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