JPS566136A - Sample moving unit for vacuum device - Google Patents
Sample moving unit for vacuum deviceInfo
- Publication number
- JPS566136A JPS566136A JP8019879A JP8019879A JPS566136A JP S566136 A JPS566136 A JP S566136A JP 8019879 A JP8019879 A JP 8019879A JP 8019879 A JP8019879 A JP 8019879A JP S566136 A JPS566136 A JP S566136A
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- rod
- extension ring
- spring force
- movable table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
PURPOSE: To make it possible to move, hold and position a sample stage in a sample chamber with high precision, by providing an extension ring between bellows.
CONSTITUTION: Movable table 15 is fitted with extension ring 10 halfway between bellows 8 connected to a sample chamber and to extension ring 10, microswitches 11 and 12 that detect the relative position of rod 7 are fixed. Consequently, moving rod 7 drives motor 16 by motor control circuit 17 when position detecting bar 13 meets microswitch 11, and movable table 15 moves to the right in consequence to contract bellows part 8a, so that the spring force of bellows part 8b will be retained by extension ring 10. None of the spring force of bellows 8, therefore, acts on rod 7 and the load is held light covering the entire movement range of rod 7, thereby attaining the purpose.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8019879A JPS566136A (en) | 1979-06-27 | 1979-06-27 | Sample moving unit for vacuum device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8019879A JPS566136A (en) | 1979-06-27 | 1979-06-27 | Sample moving unit for vacuum device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS566136A true JPS566136A (en) | 1981-01-22 |
Family
ID=13711680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8019879A Pending JPS566136A (en) | 1979-06-27 | 1979-06-27 | Sample moving unit for vacuum device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS566136A (en) |
-
1979
- 1979-06-27 JP JP8019879A patent/JPS566136A/en active Pending
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