JPS566136A - Sample moving unit for vacuum device - Google Patents

Sample moving unit for vacuum device

Info

Publication number
JPS566136A
JPS566136A JP8019879A JP8019879A JPS566136A JP S566136 A JPS566136 A JP S566136A JP 8019879 A JP8019879 A JP 8019879A JP 8019879 A JP8019879 A JP 8019879A JP S566136 A JPS566136 A JP S566136A
Authority
JP
Japan
Prior art keywords
bellows
rod
extension ring
spring force
movable table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8019879A
Other languages
Japanese (ja)
Inventor
Yukio Kenbo
Tomohiro Kuji
Kazushi Yoshimura
Nobuhiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8019879A priority Critical patent/JPS566136A/en
Publication of JPS566136A publication Critical patent/JPS566136A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE: To make it possible to move, hold and position a sample stage in a sample chamber with high precision, by providing an extension ring between bellows.
CONSTITUTION: Movable table 15 is fitted with extension ring 10 halfway between bellows 8 connected to a sample chamber and to extension ring 10, microswitches 11 and 12 that detect the relative position of rod 7 are fixed. Consequently, moving rod 7 drives motor 16 by motor control circuit 17 when position detecting bar 13 meets microswitch 11, and movable table 15 moves to the right in consequence to contract bellows part 8a, so that the spring force of bellows part 8b will be retained by extension ring 10. None of the spring force of bellows 8, therefore, acts on rod 7 and the load is held light covering the entire movement range of rod 7, thereby attaining the purpose.
COPYRIGHT: (C)1981,JPO&Japio
JP8019879A 1979-06-27 1979-06-27 Sample moving unit for vacuum device Pending JPS566136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8019879A JPS566136A (en) 1979-06-27 1979-06-27 Sample moving unit for vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8019879A JPS566136A (en) 1979-06-27 1979-06-27 Sample moving unit for vacuum device

Publications (1)

Publication Number Publication Date
JPS566136A true JPS566136A (en) 1981-01-22

Family

ID=13711680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8019879A Pending JPS566136A (en) 1979-06-27 1979-06-27 Sample moving unit for vacuum device

Country Status (1)

Country Link
JP (1) JPS566136A (en)

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