JPS55124042A - Spring force offsetting method of bellows in vacuum apparatus - Google Patents
Spring force offsetting method of bellows in vacuum apparatusInfo
- Publication number
- JPS55124042A JPS55124042A JP3180379A JP3180379A JPS55124042A JP S55124042 A JPS55124042 A JP S55124042A JP 3180379 A JP3180379 A JP 3180379A JP 3180379 A JP3180379 A JP 3180379A JP S55124042 A JPS55124042 A JP S55124042A
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- rod
- spring
- support plate
- movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
PURPOSE: To move the sample itself with good accuracy and enable positioning to be done by offsetting the spring force generated in the bellows through the movement of a rod thereby easing the load to be exerted upon the driving part of the rod.
CONSTITUTION: Only the bellows of one side is illustrated, but the constitution of the other bellows side is similar. The one end of a spring 9 wound to a diameter larger than that of a rod 3 is firmly secured to the bellows 4 and the other end to a support plate 11 by way of a spring bracket 10. A sufficiently large hole is beforehand pierced in the support plate 11 so as not to interfere with the rod 3. The support plate 11 is fixed on a drive table 12 and can be moved by a motor 13. Now, if it is assumed that the bellows 4 and spring 9 are in the position showing natural lengths and that the spring constants of the both are equal, then if the rod 3 moves by x in the axial direction, the movement displacement amount is detected by a position detector 7 but the support plate undergoes movement feed so that the detection amount by the position detector 8 becomes 2x based on the detection amount by the detector 7 simultaneously at the time when the rod 3 moves.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3180379A JPS55124042A (en) | 1979-03-20 | 1979-03-20 | Spring force offsetting method of bellows in vacuum apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3180379A JPS55124042A (en) | 1979-03-20 | 1979-03-20 | Spring force offsetting method of bellows in vacuum apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55124042A true JPS55124042A (en) | 1980-09-24 |
Family
ID=12341236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3180379A Pending JPS55124042A (en) | 1979-03-20 | 1979-03-20 | Spring force offsetting method of bellows in vacuum apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55124042A (en) |
-
1979
- 1979-03-20 JP JP3180379A patent/JPS55124042A/en active Pending
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