Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/16—Production of nozzles
  • B41J2/1621—Manufacturing processes
  • B41J2/1623—Manufacturing processes bonding and adhesion
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/14—Structure thereof only for on-demand ink jet heads
  • B41J2/14201—Structure of print heads with piezoelectric elements
  • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/16—Production of nozzles
  • B41J2/1607—Production of print heads with piezoelectric elements
  • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/16—Production of nozzles
  • B41J2/1621—Manufacturing processes
  • B41J2/1626—Manufacturing processes etching
  • B41J2/1629—Manufacturing processes etching wet etching
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/16—Production of nozzles
  • B41J2/1621—Manufacturing processes
  • B41J2/1631—Manufacturing processes photolithography
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/16—Production of nozzles
  • B41J2/1621—Manufacturing processes
  • B41J2/1632—Manufacturing processes machining
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/14—Structure thereof only for on-demand ink jet heads
  • B41J2/14201—Structure of print heads with piezoelectric elements
  • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
  • B41J2002/1425—Embedded thin film piezoelectric element
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
  • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
  • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
  • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
  • B41J2/01—Ink jet
  • B41J2/135—Nozzles
  • B41J2/14—Structure thereof only for on-demand ink jet heads
  • B41J2002/14379—Edge shooter
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T29/00—Metal working
  • Y10T29/42—Piezoelectric device making

Definitions

• the present invention relates to an ink jet recording head, a method of manufacturing the same, and a printer device, and more particularly to an ink jet that discharges ink by vibrating a diaphragm provided as one wall of a pressure chamber using an ink discharge energy generating unit.
• the present invention relates to a recording head, a manufacturing method thereof, and a printing apparatus.
• printers have been widely used as external output devices for personal computers.
• This printer is generally of a wire drive type and an ink jet type.
• the ink jet recording head used in the ink jet type printing apparatus generates noise compared to a head that performs printing by magnetically driving a roller and pressing the platen via an ink ribbon and paper. It is attracting attention as being suitable for use in offices. Background art
• Conventional inkjet recording heads are equipped with nozzles, ink chambers, ink supply systems, ink tanks, and trans-users, and eject the ink particles from the nozzles by transmitting the displacement and pressure generated by the trans-users to the ink chambers. Characters and images are recorded on a recording medium such as paper.
• a generally well-known method uses a thin plate-like piezoelectric element having one side adhered to the outer wall of an ink chamber as a trans-user. For this piezoelectric element. A loose voltage is applied to bend the composite plate consisting of the piezoelectric element and the outer wall of the ink chamber, and the displacement and pressure generated by the bending are transmitted to the ink chamber via the outer wall of the ink chamber.
• FIG. 1 is a side view of a printing apparatus (ink jet recording apparatus) provided with an ink jet recording head 2.
• the recording medium 1 is subjected to processing such as printing by a printer device.
• Ink jet recording head 2 is inserted into recording medium 1.
• the ink tank 3 supplies ink to the inkjet recording head 2.
• the carriage 4 has an ink jet recording head 2 and an ink tank 3 mounted thereon.
• the feed roller 5 and the pinch roller 6 convey the recording medium 1 to the ink jet recording head 2 by nipping the recording medium 1.
• the discharge roller 7 and the pinch roller 8 pinch the recording medium 1 and convey it in the discharge direction.
• the stat force 9 stores the discharged recording medium 1, and the platen 10 presses the recording medium 1.
• the ink jet recording head 2 is configured to eject ink by pressure generated by expanding and contracting a piezoelectric element by applying a voltage, thereby performing processing such as printing on the recording medium 1.
• FIG. 2 is a perspective sectional view of the ink jet recording head 2.
• the ink jet recording head 2 includes a plurality of piezoelectric bodies 11, individual electrodes 12 formed on the piezoelectric bodies 11, and a nozzle plate 13 provided with nozzles 17. And a main body 16 made of metal or resin having an ink chamber 14 (pressure chamber) formed corresponding to each nozzle 17.
• the nozzles 13 and the diaphragm 15 are disposed so as to face the ink chambers 14, and the periphery of the ink chamber 14 of the main body 16 and the diaphragm 15 are firmly fixed. . Further, by applying a voltage to the piezoelectric body 11 and driving it, the diaphragm 15 is configured to be deformed as shown by a dotted line in the figure. Further, the voltage application to each piezoelectric body 11 is performed based on an electric signal from a printing apparatus main body (not shown).
• the piezoelectric body 11 is formed on the vibration plate 15, but the plate-like piezoelectric body 11 corresponds to the ink chamber forming position of the vibration plate 15.
• a piezoelectric member is formed on the entire upper surface of the diaphragm 15 in advance, and the piezoelectric member is removed except for a position corresponding to the ink chamber forming position. Forming 1 1 was being done.
• the piezoelectric body 11 is used as a means for displacing the diaphragm 15.
• an ink jet recording head using a heating element instead of the piezoelectric body 11 is also provided.
• An ink jet recording head using this heating element is located at the diaphragm 15.
• a heating element is provided at the place where the heating element is placed, a material having a different coefficient of thermal expansion is laminated, and the diaphragm 15 is displaced by thermal expansion generated by heating the heating element, thereby discharging ink. It has been.
• an ink discharge energy generation unit a device that generates energy for displacing the vibration plate 15 including the piezoelectric element 11 and the heating element described above.
• the conventional inkjet recording head 2 described with reference to FIG. 2 has the following problems. That is, in the configuration in which the piezoelectric body is attached to the diaphragm,
• the piezoelectric body When attaching a piezoelectric body to a diaphragm, the piezoelectric body is thin and the piezoelectric body is easily broken.
• the thickness of the adhesive layer is not uniform, making it difficult to flatten the diaphragm, and may not be properly deformed when driven.
• the adhesive absorbs the displacement of the piezoelectric body.
• the present invention has been made in view of the above points, and an object of the present invention is to provide an ink jet recording head capable of reducing power consumption while maintaining high reliability, a method for manufacturing the same, and a pudding apparatus. Aim.
• the present invention provides a main body, which is provided corresponding to a nozzle for discharging ink and has a plurality of pressure chambers inside which is filled with ink, formed of a vibrable material.
• a diaphragm that constitutes one wall surface of the pressure chamber; and an ink that is disposed on the diaphragm corresponding to the pressure chamber and that urges the diaphragm to deform and urge the ink in the pressure chamber.
• an ink jet recording head having an ink discharge energy generating section for discharging from the nozzle, at least the ink discharge energy generating section is formed by using a thin film forming technique.
• the ink discharge energy generating portion is formed using a thin film forming technique, so that it is thin and fine.
• the ink ejection energy generating portion can be formed with high accuracy and high reliability. Thus, low power consumption can be achieved and high-resolution printing can be performed.
• an ink is formed by sequentially forming an individual electrode layer, an energy generation layer, and a vibration layer on a substrate by using a thin film forming technique.
• an ink jet recording head in the step of forming an energy generating section, an individual electrode layer, an energy generating layer, and a vibration layer are sequentially formed on a substrate by using a thin film forming technique to generate ink ejection energy. Since the portion is formed, a thin ink ejection energy generating portion can be formed with high accuracy and high reliability. In addition, since other bonding members such as an adhesive do not intervene between the layers, it is possible to form an ink discharge energy generating portion having high flatness, and the bonding material is displaced by the piezoelectric material as in the conventional case. There is no such thing as absorbing. Therefore, an ink jet recording head that can achieve low power consumption and high printing resolution can be realized.
• a predetermined region of the substrate is removed to form an opening to expose the ink discharge energy generating portion from the substrate. Therefore, the portion other than the exposed portion is kept protected by the substrate. Therefore, even if the ink ejection energy generating section is thinned, this protection can be reliably performed.
• the above-described ink discharge energy generating section is joined to the main body section in which the pressure chamber is formed. Therefore, a flat vibration plate can be disposed in the pressure chamber, and an ink jet recording head that has good adhesion between the piezoelectric body and the vibration plate and that can perform efficient driving without variation is manufactured. can do.
• the present invention provides the method for manufacturing an ink jet recording head, wherein the method is carried out between the energy generating portion forming step and the removing step, and the method for discharging ink on the vibrating layer in advance.
• the joining step can be constituted by a second joining step of joining the second half of the main body member formed with the first half to the first half of the main body member.
• the energy generating unit A first bonding step is performed between the forming step and the removing step, that is, before the removing step, and the first body member half having the first pressure chamber half formed on the vibrating layer is removed.
• the substrate has a structure formed by the first body member half.
• the first main body member half since the first main body member half is present on the back side of the opening forming position, it is possible to prevent the ink discharge energy generating portion from being damaged at the time of forming the opening. Can be. Although the mechanical strength of the ink ejection energy generating portion exposed from the opening is reduced by forming the opening, the first main body member half functioning as a reinforcing material is provided on the back side of the opening forming position. Due to the presence of the body, it is possible to prevent the ink ejection energy generating section from being damaged even after the opening is formed.
• the step of forming an energy generating section may further comprise: forming the ink discharge layer after forming the individual electrode layer and before forming the energy generating layer. It is also possible to have a dividing step in which the individual electrode layer is divided at the position where the energy generating section is formed, and the individual electrode is formed.
• the dividing step is performed after forming the individual electrode layer and before forming the energy generating layer, and is performed individually at the formation position of the ink discharge energy generating section.
• the individual electrodes are formed before the opening is formed. Therefore, the individual electrodes are easily formed compared to the method of dividing the individual electrode layer through the opening. Can be formed.
• the present invention provides the method for manufacturing an ink jet recording head, wherein the energy generating section forming step comprises: after the removing step, after the individual electrode layer and the energy generating layer exposed to the opening. May be divided at the formation position of the ink ejection energy generating section, and a dividing step of forming individual electrodes may be provided.
• the removing step is completed.
• a dividing step is performed later, and the individual electrode layer and the energy generating layer exposed in the opening are divided together at the formation position of the ink discharge energy generating section to form an individual electrode, thereby forming the adjacent ink discharging energy generating section.
• the present invention also provides the method for manufacturing an ink jet recording head, wherein, in the energy generating section forming step, after the removing step is completed, only the individual electrode layer exposed to the opening is provided by the ink. It is also possible to adopt a configuration in which there is a dividing step of forming individual electrodes by dividing at the formation position of the ejection energy generating section.
• the dividing step is performed after the removing step is completed, and only the individual electrode layer exposed at the opening is divided at the formation position of the ink discharge energy generating section.
• an individual electrode layer is formed on the entire surface of the substrate, an energy generating layer is formed thereon, and after the removal step is completed, a dividing step is performed to divide the individual electrode layer through the opening.
• a dividing step is performed to divide the individual electrode layer through the opening.
• the ink discharging energy generating section may be formed so as to extend over a plurality of the pressure chambers.
• the strength of the ink discharge energy generating section is improved by forming the ink discharge energy generating section so as to extend over a plurality of pressure chambers in the energy generating section forming step. Can be done. That is, when the ink discharge energy generating section is formed in the pressure chamber forming area, the pressure chamber is a space, so that the ink discharge energy generating section is configured to be held only by a thin diaphragm, and the strength is reduced.
• the ink discharge energy generating portion is held by the substrate around the pressure chamber, and the strength of the ink discharge energy generating portion is reduced. Can be improved.
• a method for manufacturing an ink jet recording head comprises the steps of sequentially forming an energy generation layer and a vibration layer serving as an ink ejection energy generation section on a substrate by using a thin film formation technique. Forming an opening by removing at least a region of the substrate corresponding to a deformation region of the ink discharge energy generating portion, thereby exposing the ink discharge energy generating portion from the substrate. A removing step, after the removing step is completed, an individual electrode forming step of forming an individual electrode at a position corresponding to the ink ejection energy generating section through the opening, and a pressure chamber for ejecting ink in advance is formed. And a joining step of joining the formed main body member to the diaphragm.
• the energy generating layer and the vibration layer serving as the ink discharge energy generating section are sequentially formed on the substrate by using a thin film forming technique.
• the energy generating layer can be grown in a single crystal state according to the lattice constant of the substrate (the lattice constant is not the same but has internal strain).
• a metal electrode layer (individual electrode layer) without a crystal lattice is interposed between the substrate and the energy generation layer, the lattice is deformed when the energy generation layer is formed, and good ejection energy can be obtained. Nah, there are cases.
• the individual electrode formation step was performed on the surface of the energy generating layer exposed from the opening, and the required electrode constant was obtained by forming the individual electrode. Forming the ink ejection energy generation part And good discharge energy can be obtained. Therefore, it is possible to perform highly reliable printing.
• a dividing position at which the dividing process is performed in the dividing step may be set to a position between the adjacent pressure chambers.
• the dividing position for dividing the individual electrode layer in the dividing step is set to a position between the adjacent pressure chambers, thereby ensuring protection of the diaphragm. Can be.
• the ink discharge energy generating section (including the individual electrode layer) is held only by the thin diaphragm. Therefore, if the individual electrode layers are divided in the pressure chamber formation region, there is a possibility that the diaphragm may be damaged such as cracks.
• the division position of the individual electrode layer is not a pressure chamber but a position on the substrate.
• the structure is formed by straddling, and the diaphragm can be reliably protected.
• a method for manufacturing an ink jet recording head of the present invention comprises: an individual electrode forming step of forming an individual electrode layer on a substrate by using a thin film forming technique; An individual energy generating layer forming step for forming an individual energy generating layer in the first step, and a charging step of disposing a filler in a gap between the individual energy generating layers formed in the individual energy generating layer forming step; After the filling step, an energy generating section forming an ink discharge energy generating section by performing a vibration layer forming step of forming a vibration layer on the individual energy generating layer and the filler material.
• a removing step of exposing the ink discharge energy generating section and a joining step of joining a main body member having a pressure chamber for ejecting ink in advance to the vibration plate are performed.
• the ink ejection energy By arranging the filler in the gap between the energy generating portions, a configuration that is flat and not restricted by bending can be obtained, and smooth ink discharge can be performed. That is, if the diaphragm is formed on the ink discharge energy generating portion having the unevenness where the filler does not exist, the vibration plate bends at the step portion of the unevenness, and this portion restrains the deformation of the ink discharge energy generating portion. O There is a risk that ink ejection will be hindered.o
• the upper surface is flattened.
• the diaphragm By forming the diaphragm on this flat surface, the upper surface is flattened and bent. An unrestricted configuration is obtained.
• the same material as the substrate may be used as the filler.
• the same material as that of the substrate is used as the filler, so that when the opening is formed in the removal step performed later, the gap between the ink ejection energy generating parts is reduced. Is also removed at the same time. For this reason, each of the ink ejection energy generating units has an independent configuration, and the ink ejection energy generating unit can have improved squeezing performance.
• a material having a Young's modulus smaller than that of the energy generating layer and 90 GPa or less may be used as the filler.
• the filler can be provided in the gap between the ink ejection energy generating portions.
• the filler does not hinder the deformation (displacement) of the ink discharge energy generating section, and the ink can be reliably discharged.
• a material having elasticity and ink resistance may be used as the filler.
• the removal step may cause a pinhole or the like to be formed on the diaphragm exposed from the opening.
• the ink in the pressure chamber may ooze out of the pinhole, and short-circuiting or other defects may occur in the electrical portion of the ink discharge energy generating section (piezoelectric body).
• the ink discharge energy generating section pieoelectric body
• the driving (deformation and displacement) of the ink discharge energy generating section is not impaired, and the ink is stained. Can be prevented.
• the removing step may be performed after the bonding step.
• the main body is located on the back side of the substrate. It is in a joined state. For this reason, it is possible to prevent the ink discharge energy generating section formed on the substrate from being damaged when forming the opening, and to improve the yield and reliability.
• the nozzle plate disposing step may be performed before or after the joining step.
• the present invention provides the method for manufacturing an ink jet recording head, wherein, after performing the removing step, a heat radiating part forming step of disposing a material having a high heat transfer property in an opening formed in the substrate. May be further implemented.
• the heat radiating portion forming step is performed after the removing step, and a material having a high heat transfer property is provided in the opening formed in the substrate. It is possible to efficiently radiate the heat generated in the discharge energy generating section, and high-speed printing is possible.
• the present invention provides an ink jet recording head for deforming a piezoelectric body by an electric signal to discharge ink in a pressure chamber.
• a configuration in which the formed piezoelectric body is provided can be adopted.
• the present invention uses an ink jet recording head comprising a pressure chamber and a piezoelectric material, wherein the piezoelectric material is deformed by an electric signal to discharge the ink inside the pressure chamber.
• an ink jet recording head using the piezoelectric body formed by the removing step of removing the ink.
• FIG. 1 is a main part configuration diagram of an example of a printer device.
• FIG. 2 is a partially cutaway perspective view of an ink jet recording head as an example of the related art.
• FIG. 3 is a partially cutaway perspective view of an ink jet recording head according to the first embodiment of the present invention.
• FIG. 4 is a view for explaining a method of manufacturing an ink jet recording head according to the first embodiment of the present invention.
• FIG. 5 is a partially cutaway perspective view of an ink jet recording head according to a second embodiment of the present invention.
• FIG. 6 is a view for explaining a method of manufacturing an ink jet recording head according to the second embodiment of the present invention.
• FIG. 7 is a partially cutaway perspective view of an ink jet recording head according to a third embodiment of the present invention.
• FIG. 8 is a view for explaining a method for manufacturing an ink jet recording head according to the third embodiment of the present invention.
• FIG. 9 is a partial cut-away view of an inkjet recording head according to a fourth embodiment of the present invention. It is a perspective view.
• FIG. 10 is a view for explaining a method for manufacturing an ink jet recording head according to the fourth embodiment of the present invention. '
• FIG. 11 is a view for explaining a method of manufacturing an ink jet recording head according to a fifth embodiment of the present invention.
• FIG. 12 is a view for explaining a method for manufacturing an ink jet recording head according to the sixth embodiment of the present invention.
• FIG. 13 is a view for explaining a method of manufacturing an ink jet recording head according to the seventh embodiment of the present invention.
• FIG. 14 is a view for explaining a method of manufacturing an ink jet recording head according to the eighth embodiment of the present invention.
• FIG. 15 is a partially cutaway perspective view of an inkjet recording head according to a fifth embodiment of the present invention.
• FIG. 3 is a view showing an ink jet recording head 4 OA according to a first embodiment of the present invention
• FIG. 4 illustrates a method of manufacturing the ink jet recording head according to the first embodiment of the present invention
• FIG. 4 is a diagram for illustrating a method of manufacturing the inkjet recording head 4OA shown in FIG. 3 in the present embodiment.
• a piezoelectric body is used as an energy generating means for performing ink ejection.
• a heating element may be used instead of the piezoelectric body.
• the ink jet recording head 4 OA is roughly composed of a substrate 20, a diaphragm 23, a main body 28, a nozzle plate 30, And an ink ejection energy generating section 32 A (hereinafter referred to as an energy generating section).
• the main body 28 has a structure in which dry films are laminated as described later. Inside the main body 28, a plurality of pressure chambers 29 (ink chambers) and ink passages 3 serving as ink supply paths are provided. 3 and are formed. In addition, the upper part of the pressure chamber 29 in the figure is an open part, and an ink discharge hole 41 is formed on the lower surface.
• a nozzle plate 30 is provided on the lower surface of the main body 28 in the drawing, and a diaphragm 23 is provided on the upper surface.
• the nozzle plate 30 is made of, for example, stainless steel, and the nozzle 31 is formed at a position facing the ink discharge hole 41.
• the vibration plate 23 is a flexible plate-shaped material formed of, for example, chromium (Cr), and the substrate 20 and the energy generation unit 32A are disposed above the vibration plate 23.
• the substrate 20 is made of, for example, magnesium oxide (MgO), and an opening 24 is formed at the center position.
• the energy generating section 32 A is formed on the diaphragm 23 exposed by the opening 24.
• the energy generation section 32 A is composed of the vibration plate 23 (which also functions as a common electrode), the individual electrodes 26, and the piezoelectric body 27.
• the energy generation section 32 A is formed at a position corresponding to the formation position of a plurality of pressure chambers 29 formed in the main body section 28.
• the individual electrode 26 is made of, for example, platinum (Pt) and is formed on the upper surface of the piezoelectric body 27. Further, the piezoelectric body 27 is a crystal body that generates piezoelectricity, and in the present embodiment, the piezoelectric body 27 is formed independently at the position where each of the pressure chambers 29 is formed (that is, the adjacent energy generation section). 32 A is not continuous).
• the piezoelectric body 27 is distorted by a piezoelectric phenomenon. appear.
• the diaphragm 23 is also deformed accordingly.
• the distortion generated in the piezoelectric body 27 at this time is configured so that the diaphragm 23 is deformed as shown by a broken line in the figure, that is, deformed into a shape protruding toward the pressure chamber 29. Accordingly, the ink in the pressure chamber 29 is pressurized by the deformation of the vibration plate 23 due to the distortion of the piezoelectric body 27, and is discharged to the outside through the ink discharge holes 41 and the nozzles 31, thereby recording. The printing is performed on the medium.
• the ink jet recording head 4 OA includes a diaphragm 23 and an energy generation section 32 (individual electrodes 26 and piezoelectric bodies 27) formed by a thin film forming technique. (The detailed manufacturing method will be described later.)
• the diaphragm 23 and the energy generating section 32 using the thin film forming technology, it is possible to form the thin and miniaturized energy generating section 32 with high accuracy and high reliability. Can be. Therefore, the power consumption of the ink jet recording head 4 O A can be reduced, and high-resolution printing can be performed.
• the piezoelectric body 27 is divided for each energy generating section 32. That is, each energy generating section 32 can be displaced without being restricted by the adjacent energy generating section 32. Therefore, it is possible to reduce the applied voltage required for ink ejection, and it is also possible to reduce the power consumption of the ink jet recording head 40 A.
• a substrate 20 is prepared.
• a single crystal of magnesium oxide (MgO) having a thickness of 0.3 is used as the substrate 20.
• the individual electrode layer 21 (hereinafter simply referred to as an electrode layer) and the energy generating layer 22 (in the present embodiment, a piezoelectric material is used.
• the vibration plate 23 is sequentially formed (part of the energy generation portion forming step).
• an electrode layer 21 is formed on a substrate 20 as shown in FIG. 4 (B), and then a piezoelectric layer 22 is formed on the electrode layer 21 as shown in FIG. 4 (C). Is formed, and a vibrator 23 is formed on the piezoelectric layer 22.
• platinum (Pt) is used as the material of the electrode layer 21, and Ni—Cr, Cr and the like are used as the material of the diaphragm 23.
• the substrate 2 is successively placed such that the layers 21 to 23 are on the lower side as shown in FIG. 0 is turned upside down, and the substantially central portion of the substrate 20 is removed by etching.
• the opening 24 is formed by (removal step).
• the position where the opening 24 is formed is selected so as to correspond to a deformation area where the diaphragm 23 is deformed by at least the energy generating section 32 A (see FIG. 3).
• the electrode layer 21 is exposed from the substrate 20 through the opening 24, as shown in FIG. 4 (F). .
• the electrode layer 21 and the piezoelectric layer 22 exposed to the opening 24 are then placed at predetermined positions (the shape of the pressure chamber 29). (The position corresponding to the formation position) to form an energy generation section 32A (a division step. This division step is a part of the energy generation section formation step).
• the width of the energy generating section 32 A is set so that when the main body section 28 is bonded to the substrate 20 in a bonding process performed later, the energy generating section 32 A spans the plurality of pressure chambers 29. Have been.
• the electrode layer 21 is divided into individual electrodes, so that ink discharge control can be performed for each pressure chamber 29. Further, the piezoelectric layer 22 is divided to form individual piezoelectric bodies 27.
• the main body portion 28 having the pressure chamber 29 and the nozzle plate 30 are formed by performing a process different from the above-described process.
• the main body 28 with the pressure chamber 29 is laminated with a dry film (Tokyo Ohka's solvent-type dry film PR series) on a nozzle plate 30 (with an alignment mark). It is formed (nozzle ⁇ arrangement process).
• the specific method of forming the main body 28 is as follows. That is, the ink from the pressure chamber 29 is guided to the nozzle 31 (20 / m diameter, straight hole) on the nozzle plate 30 (thickness 20 / m), and the ink flow is aligned in one direction.
• the pattern of the ink passage 33 (60 m diameter; depth 60 Aim) is exposed using the alignment mark of the nozzle plate 30, and then the pressure chamber 29 (width 100 m, length 100 m) is exposed. 1700 m, thickness 60) was exposed using the alignment mark of the nozzle plate 30 in the same manner as the ink passage 33, and then left naturally for 10 minutes (room temperature) and heat-cured (600). (° C, 10 minutes), and remove unnecessary portions of the dry film by solvent development.
• the main body 28 provided with the nozzle plate 30 formed as described above is shown in FIG. As shown in (2), it is joined to diaphragm 23 (joining and fixing). At this time, the joining process is performed so that the pressure chamber 29 and the energy generation section 32A are accurately opposed to each other.
• the electrode layer 21, the piezoelectric layer 22, and the diaphragm 23 are sequentially formed on the substrate 20 by using a thin film forming technique such as a sputtering method to generate energy. Since the portion 32A is formed, the energy generating portion 32A, which is thinner than in the past, can be formed with high accuracy and high reliability.
• the energy generating portion 32A having high flatness as in the conventional case.
• the adhesive does not absorb the displacement of the piezoelectric body. Therefore, an ink jet recording head 4OA that can achieve low power consumption and high resolution printing can be realized.
• the diaphragm 23 is flattened, the adhesion between the piezoelectric body 27 and the diaphragm 23 is improved, and an ink jet recording head 4 OA capable of performing efficient driving without variation is realized. be able to.
• the energy generating section 32A is exposed from the substrate 20 by removing a predetermined region of the substrate 20 to form an opening 24.
• the energy generator 32A can be protected compared to a configuration in which 1 etc. is simply exposed (see Fig. 2). Therefore, even if the energy generating section 32A is thinned, it is not damaged, and the reliability of the ink jet recording head 4OA can be improved.
• a dividing step is performed, and the electrode layer 21 and the piezoelectric layer 22 exposed to the opening 24 are divided together to separate the individual electrodes 26 and the piezoelectric bodies 27.
• the adjacent energy generating portions 32A have a completely independent configuration. Therefore, when voltage is applied, the deformability (driveability) of the energy generating section 32A is improved, and it is possible to discharge ink with good responsiveness.
• the energy generation section 32 A is formed so as to extend over the plurality of pressure chambers 29, the energy generation section 32 A is provided on the substrate 2 on the outer periphery of the pressure chamber 29. It will be held by 0. Therefore, the strength of the energy generating section 32 A can be improved, and the reliability of the inkjet recording head 40 A can be improved.
• an inkjet recording head 40B and a method of manufacturing the same according to a second embodiment of the present invention will be described with reference to FIGS.
• FIG. 5 is a view showing an ink jet recording head 40B according to a second embodiment of the present invention
• FIG. 6 is a method for manufacturing an ink jet recording head 40B according to a second embodiment of the present invention.
• the piezoelectric body 27 is not divided, and only the individual electrodes 26 are divided and formed corresponding to the pressure chambers 29. It is the configuration that was done. Therefore, the configuration is such that the piezoelectric body 27 exists between the adjacent individual electrodes 26. As will be described in detail later, the individual electrode 26 is formed after forming the opening 24.
• the electrode layer 21 is first formed on the upper surface of the substrate 20 (see FIG. 4B).
• the sputtering method is first formed on the upper surface of the substrate 20.
• the method is characterized in that the piezoelectric layer 22 is formed by using (FIG. 6 (B)). That is, in this embodiment, the piezoelectric layer 22 is formed directly on the upper surface of the substrate 20 without forming the electrode layer 21. At this time, the upper surface of the substrate 20 is set to be the [100] plane.
• the individual electrode forming step for forming the individual electrode 26 is performed after the removal step is completed (that is, the opening 24 is formed). After that).
• the piezoelectric layer 22 As described above, by forming the piezoelectric layer 22 directly on the upper surface of the substrate 20 without forming the electrode layer 21, when the opening 24 is formed, as shown in FIG. As a result, the piezoelectric body 27 (piezoelectric layer 22) is exposed in the opening 24. Individual The electrode 26 is formed on the upper surface of the piezoelectric body 27 (piezoelectric layer 22) through the opening 24 by using a thin film forming technique. At this time, the formation position of the individual electrode 26 is set to a position corresponding to the predetermined formation position of the energy generation section 32B.
• the piezoelectric body 27 (piezoelectric layer 22) and the vibrating plate 23 are sequentially formed on the substrate 20 by using a thin film forming technique, so that the piezoelectric body 27 (piezoelectric layer 2 2) can be grown in a single crystal state according to the lattice constant of the substrate 20 (the lattice constant is not the same and has internal strain).
• the piezoelectric body 27 when a metal electrode layer (electrode layer 21) having no crystal lattice is interposed between the substrate 20 and the piezoelectric body 27 (piezoelectric layer 22), the piezoelectric body 27 When the (piezoelectric layer 22) is formed, its lattice may be deformed, and good ejection energy may not be obtained.
• the individual electrodes 26 are formed on the surface of the piezoelectric body 27 (piezoelectric layer 22) exposed from the opening 24.
• the piezoelectric body 27 (piezoelectric layer 22) having the following lattice constant can be formed. As a result, good ejection energy can be obtained, and thus highly reliable printing processing can be performed.
• FIG. 7 is a view showing an ink jet recording head 40C according to a third embodiment of the present invention
• FIG. 8 is a method for manufacturing an ink jet recording head 40C according to a third embodiment of the present invention.
• the inkjet recording head 40C according to the present embodiment has a piezoelectric body 27 (piezoelectric layer 2B) similarly to the inkjet recording head 40B according to the second embodiment. 2) is not divided, and only the individual electrode 26 is divided and formed corresponding to the pressure chamber 29.
• FIGS. 8A to 8E are the same as in the first embodiment. Therefore, the electrode layer 21 is exposed in the opening 24 formed by performing the removing step.
• the dividing step is performed, and only the electrode layer 21 exposed at the opening 24 is formed at the position where the energy generating section 32 C is formed (FIGS. 7 and 8). (See (F))) to form individual electrodes 26. Further, when the individual electrode 26 is formed, the dividing position of the electrode layer 21 is set to a position between the adjacent pressure chambers 29.
• a division step is performed after the removal step is completed, and only the electrode layer 21 exposed in the opening 24 is divided to form the individual electrodes 26, thereby generating energy with little internal distortion.
• Part 32C can be formed.
• the piezoelectric layer 22 is directly formed on the substrate 20. A portion where the piezoelectric layer 22 is stacked on the individual electrode 26 and a portion where the piezoelectric layer 22 is stacked are generated.
• the electrode layer 21 is formed on the entire upper surface of the substrate 20, the piezoelectric layer 22 is formed thereon, and the electrode layer 21 is divided after the removal step is completed.
• the piezoelectric layer 22 with less internal distortion can be formed, and the reliability of the manufactured inkjet recording head 40C can be improved.
• the dividing position at which the electrode layer 21 is divided in the dividing step is set to a position between the adjacent pressure chambers 29, the dividing process can be reliably performed. That is, since the pressure chamber 29 is a space, the electrode layer 21 and the piezoelectric layer 22 are configured to be held only by the thin diaphragm 23. Therefore, if the electrode layer 21 is divided on the formation area of the pressure chamber 29 as a space, damage such as cracks may occur in the diaphragm 23.
• the division position of the electrode layer 21 is not the pressure chamber 29 but the position on the main body 28. Become. That is, the energy generating section 32 C is formed so as to straddle the pressure chamber 29. Thus, it is possible to prevent the diaphragm 23 from being damaged.
• FIG. 9 is a view showing an ink jet recording head 40D according to a fourth embodiment of the present invention
• FIG. 10 is a diagram showing the production of an ink jet recording head 40D according to a fourth embodiment of the present invention. It is a figure for explaining a method.
• the ink jet recording head 40D is configured such that the main body part 28 has a first main body half 28A and a second main body half 28B. It is characterized in that it is configured to be joined.
• an M surface having an upper surface of [100] and a thickness of approximately 300 rn g Prepare a board 20 made of ⁇ . Then, on the upper surface of the substrate 20, an electrode layer 21 made of Pt is formed with a thickness of about 0.1 mm by using a sputtering method.
• a dividing step was performed before the piezoelectric layer 22 was formed, and as shown in FIG. 10 ( ⁇ ), the electrode was formed at the position where the energy generating section 32 C was formed (see FIG. 9).
• the layer 21 is divided to form individual electrodes 26 (size: 80 ⁇ m ⁇ 190 0m, pitch: 169 9ji).
• the individual electrodes 26 are formed by using photoetching, and together with the formation of the individual electrodes 26, an alignment mark (not shown) used in a bonding step described later is also formed.
• the piezoelectric layer 2 2 is formed on the substrate 20, as shown in FIGS. 10 (C) and (D)
• the piezoelectric layer 2 2 is formed sequentially using thin film formation technology.
• a first main body half 28A is formed on the diaphragm 23 using the alignment mark formed on the electrode layer 21 earlier.
• the first half 28A of the main body is formed by laminating a dry film (a solvent type dry film PR series manufactured by Tokyo Ohka Chemical Co., Ltd.) and exposing it as many times as necessary to form an image. At this time, the first pressure chamber half 29A and the half of the ink passage 33 are also formed.
• the substrate 20 is turned over so that the first main body half 28 A is positioned below, and A masking process is performed from the side of the plate 10 using the alignment mark of the electrode layer 21 so that only the portion corresponding to the pressure chamber 29 is exposed.
• the substrate 10 made of Mg ⁇ is colorless and transparent, the masking process can be easily performed.
• the substrate 10 is subsequently etched with an acidic etchant (for example, a 50% phosphoric acid solution) to form an opening 24 as shown in FIG. 10 (F). (Removal step).
• an acidic etchant for example, a 50% phosphoric acid solution
• the individual electrode 26 is formed by performing the dividing process immediately after the electrode layer 21 is formed on the substrate, so that the individual electrode 26 is formed by forming the opening 24. The structure is exposed. Therefore, the individual electrode 26 can be easily formed as compared with the method of dividing the individual electrode layer 26 through the opening 24 described above.
• the second main body half 28 B on which the nozzle plate 30 is disposed is joined to the first main body half 28 A ( Second bonding step).
• the second main body half 28B is formed in a step different from the above-described step.
• a nozzle plate 30 (with an alignment mark) is laminated with a dry film (solvent-type dry film PR series manufactured by Tokyo Ohka) on the nozzle plate 30. It is formed by doing. At this time, the second half of the pressure chamber 29 B and the half of the ink passage 33 are also formed.
• the alignment marks provided on each main body half 28A, 28B are provided. Position and join using. As a result, the main body halves 28 A and 28 B can be joined with high positioning accuracy.
• the first and second half-body halves 28 A and 28 B made of dry film are joined by, for example, heating at 150 ° C. for 14 hours under a pressure of 15 kgf / cm 2. Performed under curing conditions.
• first and second main body halves 28A, 28B are joined, so that the first and second main body halves 28A, 28B cooperate with each other.
• the first and second pressure chamber halves 29 A and 29 B are also joined to form a power chamber 29, thereby forming an ink jet recording head 4 shown in FIG. 0 D is produced.
• the first joining step is performed before the removing step, and the first body member half 28 A is joined to the diaphragm 23.
• the substrate 10 has a configuration reinforced by the first body member half 28 A. Therefore, when the opening 24 is formed in the removing step, the first body member half 28 A is present as a reinforcing material on the back side of the position where the opening is formed: diaphragm 23, individual electrode 26, and the piezoelectric body 27 can be prevented from being damaged when the opening is formed.
• the mechanical strength of the energy generating portion 32 C exposed from the opening 24 is reduced by forming the opening 24, but it functions as a reinforcing material on the back side of the opening forming position. Since the first main body member half 28 A is present, it is possible to prevent the energy generation part 32 C from being damaged not only at the time of forming the opening but also after the formation of the opening 24. Can be.
• an electrode layer 21 (thickness of 0.1 mm) made of Pt is formed on a substrate 20 ([100] plane, thickness 300 ⁇ m) made of MgO by sputtering. 1 ⁇ m). Then, an alignment mark and an individual electrode 26 are formed on the formed electrode layer 21 by photoetching (individual electrode forming step).
• the alignment mark is used later for positioning in the formation and joining steps of the pressure chamber 29, and the plurality of individual electrode portions 26 (size; 80 / m X 190 m) are 16 It is formed at a 9 ⁇ m pitch (Fig. 11 (A), (B)).
• a piezoelectric material is laminated on the electrode layer 21 on which the individual electrode portions 26 are formed in a thickness of about 3 m by a sputtering method, and then the individual piezoelectric members 34 are etched by etching. And forming a frame 35 (individual energy generation layer forming step).
• the individual piezoelectric body 34 is formed to have the same size as the individual electrode section 26, and the frame 35 is formed to surround the outer periphery of the substrate 20.
• a filler 36 is formed between the bodies 34 (filling step).
• masking is performed on the individual piezoelectric members 34 and the frame 35, and M g O serving as a filler 36 is provided only between the individual piezoelectric members 34.
• the same material as that of the substrate 20 is selected as the material of the filler 36. Also, the sputtering control is performed so that the thickness of the filler 36 is the same as the thickness of the individual piezoelectric body 34 and the frame 35 described above. Therefore, in the state where the filler 36 is formed, the surface formed by the individual piezoelectric members 34, the frame 35, and the filler 36 in cooperation with each other is a flattened surface.
• a vibrating member 23 made of Cr is applied to cover the individual piezoelectric members 34, the frame 35, and the filler 36 with a thickness of 2 ⁇ m. Sputtered. As a result, an energy generating portion 32D (see FIG. 11H) is formed on the substrate 20.
• the vibration plate 23 By performing the charging step and forming the filler 36 between the adjacent individual piezoelectric members 34 as in the present embodiment, it is possible to perform a smooth ink discharge. That is, when the vibration plate 23 is formed on the individual piezoelectric body 34 having the unevenness where the filler does not exist, the vibration plate 23 bends at a step portion of the unevenness, and this portion is the energy generation portion 3. There is a possibility that the deformation of 2D is restricted and ink ejection is hindered.
• the filler 36 in the charging step, the surfaces of the individual piezoelectric bodies 34, the frame 35, and the filler 36 formed in cooperation with each other are flattened.
• a configuration that is flat and not restricted by bending can be obtained.
• the first main body half 28 A is then disposed on the diaphragm 23 in the same manner as in the fourth embodiment described above (see FIG. 1). 1 (D)), a removal step is performed thereafter, and an opening 24 is formed in the substrate 20.
• the filler 36 since the same material as the material of the substrate 20 is selected for the filler 36, when the opening 24 is formed in the removing step, the filler at the position corresponding to the opening 24 is formed.
• the material 36 is removed together with the substrate 20. That is, the energy generating sections 32D exposed from the opening 24 are in an independent state. As described above, since each energy generating section 32D has an independent configuration, drivability of each energy generating section 32D can be improved, and power consumption can be reduced.
• the second main body half 28B on which the nozzle plate 30 is disposed is joined to the first main body half 28A in the same manner as in the fourth embodiment described above, whereby the main body is formed.
• a part 28 is formed, whereby an ink jet recording head is formed.
• the filler 36 has the same material as the material of the substrate 20.
• other materials can be used.
• a material having a low Young's modulus as the filler 36, even if the filler 36 is disposed in the gap between the adjacent energy generating sections 32D, the filler 36 There is no hindrance to the deformation (displacement) of the energy generator 32D. Therefore, by using a material having a low Young's modulus as the filler 36, it is possible to reduce power consumption and to perform reliable ink discharge.
• the removal step may cause a pinhole or the like to be formed on the diaphragm 23 exposed from the opening 24.
• the ink in the pressure chamber 29 may seep out from the pinhole, and a failure such as a short may occur in the electric portion of the energy generating section 32D (in particular, the individual piezoelectric body 34).
• the driving (deformation, displacement) of the energy generating section 32D is not impaired, that is, it is possible to prevent ink seepage while reducing power consumption.
• FIGS. 1 A method for manufacturing an ink jet recording head according to a sixth embodiment of the present invention will be described with reference to FIGS.
• the description of the same steps as those of the method for manufacturing an inkjet recording head according to the fourth and fifth embodiments will be omitted.
• an electrode layer 21 is formed on a substrate 20 made of MgO by a sputtering method, and an alignment mark and a plurality of individual electrode portions 26 are formed by photoetching (FIG. 1). 2 (A), (B)).
• a piezoelectric material is laminated on the electrode layer 21 on which the individual electrode portions 26 are formed in a thickness of about 3 ⁇ m by a sputtering method, and then the individual piezoelectric members 34 and the frame are etched.
• the body 35 is formed (Fig. 12 (C)).
• the filler 36 is disposed after the individual piezoelectric members 34 and the frame 35 are formed.
• the individual piezoelectric members 34 and the frame 35 are provided.
• the diaphragm 37 is formed directly on the individual piezoelectric body 34 and the frame 35 without disposing the filler 36 (FIG. 12 (D)).
• the vibration plate 37 has a cross-sectional shape like a corrugated plate according to the unevenness of the individual piezoelectric body 34. Becomes Note that the subsequent steps (FIGS. 12 (E) to 12 (H)) are the same as in the fifth embodiment, and a description thereof will not be repeated.
• the ink jet recording head manufactured according to the present embodiment has a configuration in which the diaphragm 37 is interposed between the adjacent energy generating sections 32E. Therefore, the driving of each energy generation unit 32E is defective compared to the ink jet recording head manufactured according to the fifth embodiment. However, better driving can be realized as compared with a configuration in which the piezoelectric bodies 27 are continuous like the ink jet recording heads 40 C and 40 D previously shown in FIGS. 7 and 9.
• FIGS. 13 (A) to (F) and FIGS. 14 (A) to (F) are the same as those shown in FIGS. Since this is the same as the step (F), the description is omitted.
• the second main body half 28B is disposed after the removal step is performed to form the opening 24 in the substrate 20.
• the second main body half 28 B is joined to the first main body half 28 A to form the main body 28, and then the removing step is performed. Real An application opening 24 is formed.
• the main body part 28 (first and second parts) is provided on the back side of the substrate 20 ′.
• the two main body halves 28 A, 28 B) are joined together. Therefore, it is possible to prevent the energy generating portion 32D formed on the substrate 20 from being damaged when forming the opening portion 24, and it is possible to improve the yield and the reliability.
• the nozzle plate 30 is arranged in advance on the second main body half 28 B and then joined to the first pressure chamber half 28 A (FIG. 13 (G)).
• the nozzle plate 30 is connected to the second body. It is to be installed on the half body 28B (see Figs. 14 (G) and (H)).
• the disposing step of disposing the nozzle plate 30 on the main body part 28 is performed before the joining step of joining the first and second half body parts 28A and 28B. May be performed later.
• FIG. 15 shows an inkjet self-recording head 40E according to a fifth embodiment of the present invention.
• the same components as those of the ink jet recording head 40 B according to the second embodiment described above with reference to FIG. 5 are denoted by the same reference numerals, and description thereof will be omitted.
• the main body portion 28 is formed by laminating a dry film, but the ink jet recording head 40E according to the second embodiment is formed.
• the main body 42 is formed by laminating a dry film on a plate material such as a silicon substrate instead of the pressure chamber in which the main body 42 is laminated on the nozzle plate 38.
• the edge to be the joining surface with the nozzle plate 38 is cut by a dicing machine.
• the substrate 20 was cut at a distance of 0.1 from the upper edge of the opening 24 of the substrate 20.
• the ink ejection hole 41 extending between the pressure chamber 29 and the nozzle 39 was formed beforehand when forming the dry film.
• An ink jet recording head 40E shown in FIG. 15 was formed. As in the present embodiment, even with a side shoot type inkjet recording head 40E, a head with low power consumption and high yield can be easily manufactured.

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• Particle Formation And Scattering Control In Inkjet Printers (AREA)

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• 1998
  • 1998-10-20 JP JP29791998A patent/JP3823567B2/ja not_active Expired - Fee Related
• 1999
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• 2001
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