DE19983673B4 - Tintenstrahlaufzeichnungskopf Herstellungsverfahren - Google Patents
Tintenstrahlaufzeichnungskopf Herstellungsverfahren Download PDFInfo
- Publication number
- DE19983673B4 DE19983673B4 DE19983673T DE19983673T DE19983673B4 DE 19983673 B4 DE19983673 B4 DE 19983673B4 DE 19983673 T DE19983673 T DE 19983673T DE 19983673 T DE19983673 T DE 19983673T DE 19983673 B4 DE19983673 B4 DE 19983673B4
- Authority
- DE
- Germany
- Prior art keywords
- ink jet
- recording head
- jet recording
- power generation
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 85
- 238000010248 power generation Methods 0.000 claims abstract description 131
- 238000000034 method Methods 0.000 claims abstract description 49
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 34
- 239000010409 thin film Substances 0.000 claims abstract description 23
- 238000007599 discharging Methods 0.000 claims abstract 2
- 239000000463 material Substances 0.000 claims description 66
- 239000000945 filler Substances 0.000 claims description 24
- 230000008569 process Effects 0.000 claims description 21
- 239000000853 adhesive Substances 0.000 claims description 17
- 230000001070 adhesive effect Effects 0.000 claims description 17
- 238000004026 adhesive bonding Methods 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 8
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 239000005871 repellent Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 10
- 239000000395 magnesium oxide Substances 0.000 description 9
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 9
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 9
- 238000007639 printing Methods 0.000 description 9
- 238000005265 energy consumption Methods 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 239000011651 chromium Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 239000012779 reinforcing material Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000001029 thermal curing Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/1425—Embedded thin film piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10/297919 | 1998-10-20 | ||
| JP29791998A JP3823567B2 (ja) | 1998-10-20 | 1998-10-20 | インクジェット記録ヘッド及びその製造方法及びプリンタ装置 |
| PCT/JP1999/001570 WO2000023277A1 (en) | 1998-10-20 | 1999-03-26 | Ink jet recording head, its manufacturing method, and printer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19983673T1 DE19983673T1 (de) | 2002-02-14 |
| DE19983673B4 true DE19983673B4 (de) | 2008-02-14 |
Family
ID=17852799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19983673T Expired - Fee Related DE19983673B4 (de) | 1998-10-20 | 1999-03-26 | Tintenstrahlaufzeichnungskopf Herstellungsverfahren |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6623110B2 (enExample) |
| JP (1) | JP3823567B2 (enExample) |
| DE (1) | DE19983673B4 (enExample) |
| WO (1) | WO2000023277A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1258355B1 (en) | 1999-12-10 | 2006-05-24 | Fuji Photo Film Co., Ltd. | Ink jet head, method of producing ink jet heads, and printer |
| WO2001042017A1 (en) | 1999-12-10 | 2001-06-14 | Fujitsu Limited | Ink-jet head and printer |
| EP1258353B1 (en) | 1999-12-24 | 2004-06-16 | Fujitsu Limited | Ink-jet record head and method of manufacture thereof |
| DE69935462T2 (de) | 1999-12-24 | 2007-11-08 | Fujifilm Corp. | Verfahren zur Herstellung eines Tintenstrahl-Aufzeichnungskopfs |
| US6886924B2 (en) * | 2002-09-30 | 2005-05-03 | Spectra, Inc. | Droplet ejection device |
| JP3820589B2 (ja) * | 2003-09-26 | 2006-09-13 | 富士写真フイルム株式会社 | 液体吐出ヘッドとその製造方法及びインクジェット記録装置 |
| US8042913B2 (en) * | 2006-09-14 | 2011-10-25 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with deflective flexible membrane |
| US7651204B2 (en) * | 2006-09-14 | 2010-01-26 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
| JP5382905B2 (ja) * | 2008-03-10 | 2014-01-08 | 富士フイルム株式会社 | 圧電素子の製造方法及び液体吐出ヘッドの製造方法 |
| WO2014141925A1 (ja) * | 2013-03-15 | 2014-09-18 | コニカミノルタ株式会社 | インクジェットヘッドおよびその製造方法と、インクジェットプリンタ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0786345A2 (en) * | 1996-01-26 | 1997-07-30 | Seiko Epson Corporation | Ink jet recording head and manufacturing method therefor |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63128948A (ja) * | 1986-11-19 | 1988-06-01 | Sharp Corp | インクジエツトヘツド |
| US4825227A (en) * | 1988-02-29 | 1989-04-25 | Spectra, Inc. | Shear mode transducer for ink jet systems |
| JP3144949B2 (ja) | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電／電歪アクチュエータ |
| US5907338A (en) * | 1995-01-13 | 1999-05-25 | Burr; Ronald F. | High-performance ink jet print head |
| JPH09300608A (ja) * | 1996-05-09 | 1997-11-25 | Minolta Co Ltd | インクジェット記録ヘッド |
| JPH10202874A (ja) * | 1997-01-24 | 1998-08-04 | Seiko Epson Corp | インクジェットプリンタヘッド及びその製造方法 |
| JP3666177B2 (ja) * | 1997-04-14 | 2005-06-29 | 松下電器産業株式会社 | インクジェット記録装置 |
-
1998
- 1998-10-20 JP JP29791998A patent/JP3823567B2/ja not_active Expired - Fee Related
-
1999
- 1999-03-26 DE DE19983673T patent/DE19983673B4/de not_active Expired - Fee Related
- 1999-03-26 WO PCT/JP1999/001570 patent/WO2000023277A1/ja not_active Ceased
-
2001
- 2001-04-20 US US09/807,430 patent/US6623110B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0786345A2 (en) * | 1996-01-26 | 1997-07-30 | Seiko Epson Corporation | Ink jet recording head and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| US20010022602A1 (en) | 2001-09-20 |
| WO2000023277A1 (en) | 2000-04-27 |
| DE19983673T1 (de) | 2002-02-14 |
| JP2000117990A (ja) | 2000-04-25 |
| JP3823567B2 (ja) | 2006-09-20 |
| US6623110B2 (en) | 2003-09-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8607 | Notification of search results after publication | ||
| 8127 | New person/name/address of the applicant |
Owner name: FUJI PHOTO FILM CO., LTD., MINAMI-ASHIGARA, KANAGA |
|
| 8127 | New person/name/address of the applicant |
Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP |
|
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: SEEGER SEEGER LINDNER PARTNERSCHAFT PATENTANWAELTE |
|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |