WO1999042729A1 - Pompe a vide - Google Patents

Pompe a vide Download PDF

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Publication number
WO1999042729A1
WO1999042729A1 PCT/JP1999/000739 JP9900739W WO9942729A1 WO 1999042729 A1 WO1999042729 A1 WO 1999042729A1 JP 9900739 W JP9900739 W JP 9900739W WO 9942729 A1 WO9942729 A1 WO 9942729A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
housing
rotor shaft
vacuum pump
cooling
Prior art date
Application number
PCT/JP1999/000739
Other languages
English (en)
Japanese (ja)
Inventor
Kiyozumi Fukui
Original Assignee
Teijin Seiki Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Seiki Co., Ltd. filed Critical Teijin Seiki Co., Ltd.
Publication of WO1999042729A1 publication Critical patent/WO1999042729A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps

Definitions

  • the present invention relates to a vacuum pump, for example, a positive displacement pump that exhausts a compressible fluid mixed with air or other gas.
  • the main vacuum pump used together with a mechanical pump and vacuum pump for evacuation etc. to obtain a low-pressure working space is a roots type, a black type, and a screw-type type. Pumps of volume displacement type are often used.
  • the gas transfer chamber between the pump housing and the rotor reduces its volume at a predetermined compression rate during transfer from the intake port side to the exhaust port side, and one after another. And exhaust port, and exhaust is performed.
  • the vacuum equipment system is connected to a large-capacity mechanical coupling pump (such as a Roots pump) to the vacuum chamber, for example, when evacuating a vacuum chamber for semiconductor manufacturing.
  • a multi-stage positive displacement main vacuum pump (for example, a twin screw pump) is connected to the exhaust side, and the mechanical booth is operated until the pressure in the vacuum chamber becomes about 1 OT orr or less.
  • the pump is evacuated, the pump is evacuated only by the main vacuum pump, and then the mechanical booster pump and the main vacuum pump are both operated to obtain the desired degree of vacuum. It is an inversion mode.
  • the exhaust side of the main vacuum pump is at a considerably high temperature as described above, but the size of the semiconductor to be manufactured is small, and therefore the capacity of the main vacuum pump is also small. Among them, measures to the extent that a water jacket was provided for cooling and cooling was not a serious obstacle.
  • the main vacuum pump needs to have a large capacity in acceleration. Become.
  • the mechanical booster pump should be operated at an early stage (near atmospheric pressure) in order to obtain a predetermined pumping speed, that is, the mechanical booster pump and the main vacuum pump. It is also necessary to operate the and simultaneously for most of the time.
  • the housing exposed to the atmosphere is maintained at a relatively low temperature during operation.
  • the mouth surrounded by a high-vacuum gas transfer chamber is only capable of transmitting heat to the housing side by radiation and slightly cooling the air at the shaft end. It is not unusual for a temperature difference exceeding 200 ° C to occur between the data.
  • the present invention has been made in view of the problems to be solved as described above, and has as its object to provide a vacuum pump capable of continuous operation even at a large capacity, high speed, and a high compression ratio. Aim. Disclosure of the invention
  • the invention described in claim 1 has a housing having an intake port and an exhaust port and having a rotor storage chamber formed therein, and a suction port side and an exhaust port side.
  • the vacuum pump in the vacuum pump having a fluid transfer chamber formed to be transferred to one side in the axial direction of the rotor, the vacuum pump extends into the rotor shaft and opens on one side in the axial direction.
  • the housing on the atmosphere side is maintained at a relatively low temperature during operation, while the rotor surrounded by the fluid transfer chamber in a high vacuum state has a high temperature due to the compression exhaust on the exhaust port side.
  • the cooling passage that entered the rotor shaft from the exhaust port side to the folded position inside the rotor was As a result, the rotor shaft is effectively cooled on the exhaust port side, so that the temperature rise on the exhaust port side of the rotor is suppressed within an appropriate range.
  • the rotor shaft has a deep hole having a bottom surface in the rotor and extending in the axial direction of the rotor shaft.
  • a cylindrical wall portion inserted loosely into a deep hole of the rotor shaft, and an outer passage portion and an inner passage portion of the cooling passage are folded between a bottom portion of the deep hole and the cylindrical wall portion.
  • the outer passage portion and the inner passage portion of the cooling passage are separated from each other in the axial direction of the rotor shaft, and
  • the cooling passages are connected to the external cooling liquid regardless of the rotation of the rotor. It can be easily connected to circulation passages.
  • a temperature sensor for detecting at least one of the housing, the rotor, and the temperature of the rotor shaft is provided.
  • FIG. 1 is a sectional view showing one embodiment of a vacuum pump according to the present invention.
  • FIG. 2 is a sectional view of an essential part of the vacuum pump of FIG.
  • Fig. 3 shows how the temperature sensor installed on the vacuum pump in Fig. 1 is installed.
  • (A) is for detecting the outer peripheral surface temperature of the rotor shaft, and (b) is for housing. The figure shows the case where the temperature of the target is detected.
  • FIGS. 1 and 2 show an embodiment in which the vacuum pump according to the present invention is applied to a twin-screw screw pump.
  • reference numeral 10 denotes a screw pump (vacuum pump), which has a pump housing 11.
  • the pump housing 11 is formed with an intake port 12 and an exhaust port 13 and an internal port storage chamber 14 communicating with these.
  • Reference numerals 21 and 22 denote male and female screw rotors rotatably accommodated in the pump housing 11 with a small gap (for example, about 50 m).
  • 1.22 of the male screw mouth 21 is in the form of a male screw
  • the female screw rotor 22 is in the form of a female screw in the reverse screw direction to the mouth 21. Is formed.
  • These screw openings 21 and 22 are arranged adjacent to each other in parallel inside the pump housing 11 with a small gap (for example, about 50 m), and are driven by driving means described later. Are driven in mutually opposite directions.
  • a plurality of helical fluid transfer chambers are formed between the pump housing 11 and the rotors 21 and 22 and are partitioned by portions adjacent to the rotors 21 and 22.
  • the volume of the fluid transfer chamber is increased to a predetermined value in the transfer section on the suction side where the fluid transfer chamber communicates with the suction port 12 to perform the suction action.
  • the volume is reduced to the minimum value so that the discharge action is performed.
  • the male screw euro rotor 21 protrudes to both ends in the axial direction
  • the female screw rotor 22 protrudes to both ends in the axial direction coaxially and integrally with the mouth shaft 23. They are formed coaxially and integrally with the rotor shaft 24.
  • the rotor shafts 23 and 24 are rotatably supported by the pump housing 11 via the bearings 26 to 29 at both ends thereof at both ends, so that the rotor shafts 23 and 24 are rotatable.
  • 22 are rotatable.
  • the bearings 26 and 27 have the function of restricting the axial displacement of the rotors 21 and 22 with respect to the pump housing 11, and the bearings 28 and 29 have the function of restricting the rotor 21 and the pump housing 11.
  • 2.2 Displacement in the axial direction Specifically, the rotors 21 and 22, whose axial displacement at one end is restricted by the bearings 26 and 27, expand with thermal expansion and move to the other end. Is displaced).
  • bearings 28 and 29 are not always necessary, and even if the rotor shaft 21 is cantilevered by the housing via the bearings 26 and 27 on the exhaust port 13 side. Good.
  • Numeral 30 denotes a driving means for driving the screw rotors 21 and 22; an electric motor 31 connected to the rotor shaft 23 of the male screw rotor 21; And synchronous gears 32, 33 fixed to 23, 24, respectively.
  • the synchronous gears 32 and 33 are engaged with each other in a transmission mechanism housing 15 formed in the pump housing 11 and have a function of rotating the rotors 21 and 22 synchronously.
  • a cooling mechanism 40 cools the rotors 21 and 22 from the exhaust port 13 side.
  • the cooling mechanism 40 passes through one end in the axial direction of the rotor shafts 23, 24, that is, through the end portion and the intermediate portion on the side of the exhaust port 13, and is cooled.
  • external cooling liquid supply / drain means 45 for circulating water is
  • the cooling passage portion 41 formed in the rotor shaft 23 extends in the axial direction of the opening, and opens near the end of the rotor shaft 23 on the exhaust port 13 side. It has an outer passage section 4 1a and an inner passage section 4 1b, and forms a cooling passage in which both passage sections 4 1a and 4 1b are turned back inside and connected to the rotor 21. .
  • the cooling passage portions 42 formed in the rotor shaft 24 extend in the rotor axis direction and open near the end of the rotor shaft 24 on the exhaust port 13 side.
  • An outer passage portion 42 a and an inner passage portion 42 b are provided, and a cooling passage is formed by connecting the two passage portions 42 a and 42 b back inside the rotor 22.
  • the rotor shafts 23 and 24 form deep holes 23 a and 24 a extending in the axial direction so as to have a bottom surface in the rotors 21 and 22, respectively.
  • 24 a are provided with cylindrical walls 23 b, 24 b, and outer passages 4 la, 42 a and inner passages 41 b, 42 b of cooling passages 41. Is connected between the bottom of the deep hole 23a.24a and the cylindrical wall 23b, 24b.
  • outer passage portions 4 la and 42 a and the inner passage portions 4 lb and 42 b of the cooling passages 41 and 42 are located at predetermined positions spaced apart in the axial direction of the rotor shafts 23 and 24. And open on the outer peripheral surface of the rotor shafts 23 and 24, respectively.
  • the passage connecting portions 43, 44 are formed by a pair of annular members provided on the rotor shafts 23, 24 with the above-mentioned openings at both ends of the cooling passage portions 41, 42 interposed therebetween.
  • a pair of annular seal members 51, 52 arranged on both sides in the axial direction with 24 d interposed therebetween and each annular seal member 51, 52 into an annular side wall portion 23c, 2
  • a plurality of springs 53, 54 (elastic members) pressed against 3d, 24c or 24d, and an annular side wall 2 around the mouth and shaft 23.
  • joint housing part 55 provided on the pump housing to house the annular seal member 51 and the spring 53 as a whole, and around the rotor shaft 24
  • the coupling housing part 56 provided on the pump housing so as to house the annular side wall parts 24c and 24d, the annular sealing member 52 and the spring 53 as a whole.
  • the annular seal members 51 and 52 are provided with an outer peripheral groove made of a metal or a hard material equivalent to the metal which is in sliding contact with the annular side walls 23c, 23d, 24c and 24d, respectively.
  • Consists of Reference numerals 57 and 58 denote annular rings formed between the pair of annular side wall portions 23c, 23d, 24c and 24d and the joint housing portions 55 and 56, respectively.
  • a passage communicates with both ends of each cooling passage 41 or 42.
  • the cooling mechanism 40 further includes a temperature sensor for detecting at least one of the pump housing 11, the rotors 21 and 22 and the rotor shafts 23 and 24, for example, a third sensor. It has a temperature sensor 61 as shown in Fig. (A) or Fig. 3 (b).
  • the temperature sensor 61 detects the temperature of the rotor shaft 24 or the pump housing 11 near the exhaust port 13. Based on the detected temperature, the coolant supply / drain means 45 is used.
  • the cooling liquid supplied / discharged by the pump is supplied / discharged through the cooling passage sections 41 and 42, and is supplied through a predetermined circulation path. It is circulating.
  • the male screw rotor 21 is driven by the electric motor 31 of the driving means 30, and the transmission gear 3 2
  • the plurality of spiral fluid transfer chambers increase the volume to a predetermined value in the transfer section on the suction side.
  • the air is transferred with a predetermined volume, and in the transfer section on the discharge side, the volume is reduced to perform the discharge function.
  • the fluid transfer chamber is continuously and continuously opened to the atmosphere side on the exhaust port 13 side to be exhausted.However, heat and leakage generated by the compression for this exhaust and leakage are caused. Due to the loss cycle where gas entering the pump housing 11 through the exhaust port 13 from the atmosphere side through the exhaust port 13 is exhausted again to the atmosphere side, the exhaust port 13 side is extremely hot. And
  • the pump housing 11 is connected to the outside air at one axial end of the rotor shafts 23 and 24.
  • the heat can be dissipated and the temperature is relatively low, heat is hardly transmitted from the high-temperature screw rotors 21 and 22 to the pump housing 11 side.
  • the vacuum pump enters the rotor shaft 23.24 from the end on the exhaust port 13 side to the folded position inside the rotors 21 and 22.
  • the rotor shafts 23, 24 are not substantially cooled on the intake port 12 side, but are effectively cooled only on the exhaust port 13 side, via the cooling passage portions 4 and 42 that are inserted. Become.
  • the temperature rise on the exhaust port 13 side of the rotors 21 and 22 is suppressed within an appropriate range, and the rotors 21 and 22 are maintained as a whole within a predetermined temperature range, and a large capacity Even at high speeds and high compression ratios, seizure is unlikely to occur, and the vacuum pump can be operated continuously for a long time.
  • the gap between each part is small, that is, a vacuum pump with high airtightness and high performance is provided. Obtainable.
  • the rotor shafts 23 and 24 are provided with deep holes 23 a and 24 a having a bottom surface inside the rotors 21 and 22 and extending in the rotor axial direction.
  • cylindrical walls 23b, 24b loosely inserted into these holes are provided to form outer passages 41a, 42a of the cooling passages 41, 42.
  • the inner passage portions 4 lb and 42 b are folded back and connected between the bottom of the deep hole 23a and 24a and the inner ends of the cylindrical walls 23b and 24b. Therefore, the long and narrow cooling passage portions 41 and 42 that are folded back in and out can be easily formed from simple components, and the production cost can be reduced.
  • the outer passages 41a and 42a and the inner passages 4lb and 42b of the cooling passages 41 and 42 are separated from each other in the axial direction of the rotor shafts 23 and 24. Since two annular liquid passages are formed on the outer peripheral surfaces of the rotor shafts 23 and 24 and communicate with the openings between the rotor shafts 23 and 24 and the pump housing 11, Regardless of the rotation of the rotor 21.2.2, the cooling passage portions 41 and 42 can be easily connected to the cooling liquid supply / discharge means 45 including a cooling liquid circulation passage outside. .
  • a temperature sensor for detecting at least one of the pump housing 11, the mouth 21. 2, and at least one of the rotor shafts 23, 24.
  • a supply / drain means 45 for supplying / discharging the coolant in the cooling passages 41, 42 based on the detected temperature is provided. 1, 22, the rotor shafts 23, 24, and the bearings 26, 27 can be more effectively cooled.
  • the rotor shaft is effectively cooled only on the exhaust port side through the cooling passage that enters the rotor shaft from the end on the exhaust port side to the turning position inside the rotor.
  • the structure is such that a cylindrical wall is inserted into the deep hole in the rotor shaft, a long and narrow cooling passage that is folded inside and outside can be easily formed from simple parts, and the manufacturing cost can be reduced. Can be reduced.
  • the cooling passage opened on the outer peripheral surface of the rotor shaft is communicated through two annular liquid passages between the rotor shaft and the housing, thereby enabling the rotation of the rotor.
  • the cooling passage can be easily connected to an external coolant circulation passage, etc., and the temperature sensor for detecting at least one of the housing, ⁇ -rotor and rotor shafts

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention porte sur une pompe à vide comprenant un corps (11), des arbres (23, 24) rotor supportés sur le corps (11) au niveau de ses deux extrémités, et des rotors (21, 22) dont la rotation s'effectue en même temps que celle des arbres (23, 24) à l'intérieur d'une chambre (14) de rotor de façon à aspirer le fluide compressible depuis un port (12) d'aspiration pour l'amener dans la chambre (14) du rotor et le comprimer de sorte qu'il s'évacue par un port (13) d'évacuation. Des canaux (41, 42) de refroidissement, comportant des voies externes (41a, 42a) et des voies internes (41b, 42b) donnant sur un côté des arbres (23, 24) rotor, et formés par le raccordement de ces deux voies dans une forme de bouclage à l'intérieur des rotors (21 et 22), sont ménagés dans les arbres (23 et 24) rotor. Par cette configuration, il est possible de supprimer la montée de température du côté du port d'évacuation, et d'avoir un fonctionnement continu même si la capacité, la vitesse et le rapport de compression augmentent.
PCT/JP1999/000739 1998-02-23 1999-02-19 Pompe a vide WO1999042729A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10/39876 1998-02-23
JP3987698A JPH11236891A (ja) 1998-02-23 1998-02-23 真空ポンプ

Publications (1)

Publication Number Publication Date
WO1999042729A1 true WO1999042729A1 (fr) 1999-08-26

Family

ID=12565195

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/000739 WO1999042729A1 (fr) 1998-02-23 1999-02-19 Pompe a vide

Country Status (3)

Country Link
JP (1) JPH11236891A (fr)
TW (1) TW402665B (fr)
WO (1) WO1999042729A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963172A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
WO2001048383A1 (fr) * 1999-12-27 2001-07-05 Leybold Vakuum Gmbh Pompe a vide a vis refroidie
EP1113176A3 (fr) * 1999-12-27 2002-07-03 Leybold Vakuum GmbH Pompe à vide avec joint d'étanchéité d'arbre

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3808983B1 (fr) * 2019-10-15 2024-01-03 Ebara Corporation Pompe à vide avec chauffage dans le couvercle latéral

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4983008A (fr) * 1972-12-18 1974-08-09
JPS6155187U (fr) * 1984-09-17 1986-04-14
JPS63117192A (ja) * 1986-11-04 1988-05-21 Sanyo Electric Co Ltd 回転圧縮機の冷却装置
JPH02245493A (ja) * 1989-03-20 1990-10-01 Hitachi Ltd スクリュー真空ポンプ
JPH03995A (ja) * 1989-05-26 1991-01-07 Hitachi Ltd スクリュー流体機械

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4983008A (fr) * 1972-12-18 1974-08-09
JPS6155187U (fr) * 1984-09-17 1986-04-14
JPS63117192A (ja) * 1986-11-04 1988-05-21 Sanyo Electric Co Ltd 回転圧縮機の冷却装置
JPH02245493A (ja) * 1989-03-20 1990-10-01 Hitachi Ltd スクリュー真空ポンプ
JPH03995A (ja) * 1989-05-26 1991-01-07 Hitachi Ltd スクリュー流体機械

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963172A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
WO2001048385A1 (fr) * 1999-12-27 2001-07-05 Leybold Vakuum Gmbh Pompe a vide a vis pourvue d'un circuit de refrigerant
WO2001048383A1 (fr) * 1999-12-27 2001-07-05 Leybold Vakuum Gmbh Pompe a vide a vis refroidie
EP1113176A3 (fr) * 1999-12-27 2002-07-03 Leybold Vakuum GmbH Pompe à vide avec joint d'étanchéité d'arbre
US6758660B2 (en) 1999-12-27 2004-07-06 Leybold Vakuum Gmbh Screw vacuum pump with a coolant circuit

Also Published As

Publication number Publication date
JPH11236891A (ja) 1999-08-31
TW402665B (en) 2000-08-21

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