WO1999013495A2 - Armoire hermetique pour stocker des plaquettes de semi-conducteurs - Google Patents

Armoire hermetique pour stocker des plaquettes de semi-conducteurs Download PDF

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Publication number
WO1999013495A2
WO1999013495A2 PCT/US1998/018949 US9818949W WO9913495A2 WO 1999013495 A2 WO1999013495 A2 WO 1999013495A2 US 9818949 W US9818949 W US 9818949W WO 9913495 A2 WO9913495 A2 WO 9913495A2
Authority
WO
WIPO (PCT)
Prior art keywords
capsules
load
capsule
platform
cabinet
Prior art date
Application number
PCT/US1998/018949
Other languages
English (en)
Other versions
WO1999013495A3 (fr
Inventor
George E. Niemirowski
John M. Harrell
P. V. Patel
Adam F. Niemirowski
Original Assignee
Novus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novus Corporation filed Critical Novus Corporation
Publication of WO1999013495A2 publication Critical patent/WO1999013495A2/fr
Publication of WO1999013495A3 publication Critical patent/WO1999013495A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Definitions

  • the present invention relates generally to semiconductor wafer
  • atmosphere may have a detrimental effect on dies inlaid on the wafers.
  • a primary object of the invention is to provide a sealed cabinet for
  • a further object of the invention is to provide a sealed cabinet for
  • the cabinet includes a housing having a plurality of vertically
  • a load-in station for supporting a plurality of capsules, a load-in station
  • cabinet also includes an elevator mechanism for selectively positioning
  • capsules placed at the load-in station on a shelf and for selectively
  • the cabinet is
  • a control system is provided for
  • FIGURE 1 is a front view of an apparatus for storing capsules in
  • FIGURE 2 is a rear view of the apparatus shown with the outer
  • FIGURE 3 is a left side view of the apparatus shown with outer
  • FIGURE 4 is a sectional view taken generally along lines 4-4 of
  • FIGURE 3
  • FIGURES 4a-4e are sectional views similar to FIGURE 4, showing
  • FIGURE 5 is a sectional view taken generally along lines 5-5 of
  • FIGURE 6 is a perspective view of the load-in station of the
  • FIGURE 7 is a perspective view of the load-in station in a retracted
  • FIGURE 8 is a top plan view of the carriage of the load-in station in
  • FIGURE 9 is a partial cut-away top plan view of the carriage in an
  • FIGURE 1 0 is a simplified block diagram of the cabinet control
  • FIGURE 1 1 is a flow chart illustrating operation of the load-in
  • Semiconductor wafer production typically involves the handling of
  • capsules are usually standardized devices used in the
  • FIGURE 1 is a front view of a mini-environment stocker cabinet (or
  • the cabinet 1 0 has an operator interface 1 2, which includes a keyboard 1 8, a monitor
  • the cabinet 1 0 also includes a load-in
  • sealed wafer carrying capsule 1 6 is placed at the load-in station for
  • Load transfer means 1 7 is used to move the
  • FIGURE 2 the rear view of the cabinet, the rear wall 24 has
  • capsule 1 6 is shown in position for being taken from the uppermost
  • gripper 28 captures the capsule handle, and the elevator mechanism 32
  • FIGURE 3 the side wall 40 of the cabinet is shown partially
  • drawing is shown on a transfer station 34a, ready for removal of wafers through a transfer port 42 by a process tool mechanism (not shown) .
  • FIGURE 4 is a section view of cabinet taken just above the plane
  • a capsule 1 6 is shown on the load-in platform 1 4 just prior to
  • Reference character 1 6a indicates the
  • Reference character 1 6d indicates the capsule
  • FIGURES 4a-4e are sequential views showing a single capsule 1 6
  • One of two wafer handling tools (not shown) serviced by device 1 0.
  • Another wafer handling tool (also not shown) can be serviced by transfer
  • FIGURE 4a shows the capsule 1 6 positioned on the extended load-
  • the apparatus 1 0 awaits commands from by the system
  • controller whose operator uses interface 1 2 and keyboard 1 8 to direct
  • elevator mechanism 32 is shown in position over the capsule 1 6, ready
  • FIGURE 4c shows the capsule 1 6 at an intermediate position
  • the cabinet central axis where it can be raised vertically to one of the
  • FIGURE 4d shows the capsule 1 6 having been moved by horizontal
  • FIGURE 4e shows the capsule 1 6 at transfer port 34b, where the
  • elevator means 32 will lower the capsule onto the nest and gripper
  • mechanism 32 can then move to the vertical park position and wait for
  • FIGURE 5 is a sectional view of the cabinet at the upper storage
  • capsules 1 6a, 1 6b, 1 6c, and 1 6d indicated by capsules 1 6a, 1 6b, 1 6c, and 1 6d.
  • cabinet can be sized to store any number
  • FIGURES 6-9 illustrate the load-in station 1 4 in greater detail.
  • station 14 includes a frame 1 1 2 mounted in the cabinet and a carriage
  • the carriage mechanism 142 is movable
  • the mechanism 142 includes a loading platform or plate 114, an intermediate plate 118,
  • Carriage blocks 120 are affixed to
  • the carriage blocks 120 roll
  • the opening 111 can be closed by the movable door or window
  • FIGURE 6 the window 15 is shown in a retracted position
  • FIGURE 7 shows the carriage mechanism in a retracted position
  • sensors 170 preferably optical sensors emitting optical beams 174.
  • FIGURE 8 shows the carriage in the retracted position so that all
  • FIGURE 9 shows the carriage in the extended position in a partial
  • the drive mechanism 122 rotates clockwise, driving belt
  • a pulley 130 is
  • a lug 128a is mounted on the underside of the plate 118.
  • the lug 152 protrudes through the slot 138 in the plate 118 and is
  • the upper plate 114 is attached to the underside of the upper plate 114.
  • the upper plate 114 is attached to the underside of the upper plate 114.
  • the cabinet can be configured to include four transfer
  • the cabinet can be designed to include multiple buttons
  • the shelves in the cabinet can be adjusted to accommodate
  • the shelves can be various sized capsules, e.g., 1 3 or 25 wafer capsules.
  • the shelves can be various sized capsules, e.g., 1 3 or 25 wafer capsules.
  • the shelf nest is also changeable to
  • capsules for various sized wafers e.g., 1 50, 200, or 300
  • a significant advantage of the inventive cabinet is that it requires
  • the cabinet uses a compact arm, which allows for further
  • the gripper used in the cabinet has a compact design and has low
  • the gripper is interchangeable with other grippers,
  • the elevator mechanism is designed to have reduced
  • the cabinet has a modularized design which allows for multiple
  • the cabinet is adaptable to be fitted with various types of doors
  • the cabinet can be provided with an optional load lock (air lock
  • the cabinet is also adaptable for various types of
  • the cabinet is designed for transferring wafers while transferring
  • the modular design of the cabinet also reduces downtime and
  • the cabinet includes easy access doors and panels for repairs,
  • the cabinet design is also ergonomically sound.
  • the operator interface 1 2 (shown in FIGURE 1 ) is used to control
  • process tool will communicate via serial link to the cabinet control
  • memory can initiate the desired sequence of movements.
  • the monitor 20 will be updated periodically to show the current
  • indicators 22 act as backup alerts for system status.
  • FIGURE 1 0 is a simplified block diagram of the cabinet control
  • the control system 230 includes
  • a load-in door subsystem 222 and a transfer door subsystem 224 each controlled by a dedicated controller 222c, 224c having its own unique
  • Each subsystem 222, 224 will receive commands from the
  • main controller 232 prefaced by the subsystem's unique address code.
  • the control system also includes an X-axis elevator subsystem
  • Each of the elevator subsystems will also have its own controller
  • main controller 232 is preferably accomplished via a daisy chain
  • All the motion components are preferably controlled by servo
  • each servo motor is preferably controlled and
  • combination is preferably mounted as a package on the carriage of its
  • FIGURE 1 1 illustrates typical communications between the main
  • controller 232 and the load-in station 1 4, showing the sequence of
  • the system host controller of the process tool (not shown) communicates only with the stocker main
  • sequence 250 with start signal 252 is
  • command string 254 is sent to the load door controller 222c to extend
  • Main controller 232 then repeatedly queries the load door
  • controller 222c to determine if the platform is extended at 256, until
  • controller 222c reports back that the platform is extended in response to
  • Main controller 232 then signals to the operator
  • the main controller 232 then repeatedly queries
  • load controller 222c to determine whether the capsule is on the platform
  • controller 222c reports back that the capsule is on the
  • the main controller 232 issues an "open load window"
  • the main controller 232 queries the controller 222c to determine
  • the main controller then queries the controller 222c to determine
  • the main controller then reports the status "capsule ready for transfer"
  • the shelves inside the stocker cabinet 1 0 are preferably connected
  • the female connector for each location is preferably mounted to the
  • a 24 capsule stocker will have 1 2 conductors, 1 0 for
  • the control system is modularized for ease of repair or replacement
  • the controller for each component preferably has its own interlock
  • control system is designed with parameters that minimize

Abstract

L'invention concerne un dispositif permettant de stocker des capsules contenant des plaquettes de semi-conducteurs dans un environnement protégé et hermétique. Ce dispositif comprend un boîtier présentant une pluralité de rayons disposés verticalement et destinés à soutenir une pluralité de capsules, un point de chargement à travers lequel les capsules peuvent être insérées en vue d'être stockées, et une ouverture de transfert à travers laquelle les capsules stockées dans le dispositif peuvent être récupérées. Le dispositif comprend également un mécanisme de levage permettant de placer de manière sélective les capsules situées dans le poste de chargement sur un rayon et pour déplacer ces capsules de manière sélective des rayons vers l'ouverture de transfert. Ce dispositif peut être clos hermétiquement au niveau du point de chargement et de l'ouverture de transfert.
PCT/US1998/018949 1997-09-12 1998-09-11 Armoire hermetique pour stocker des plaquettes de semi-conducteurs WO1999013495A2 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US5876697P 1997-09-12 1997-09-12
US5877897P 1997-09-12 1997-09-12
US5878797P 1997-09-12 1997-09-12
US60/058,787 1997-09-12
US60/058,766 1997-09-12
US60/058,778 1997-09-12

Publications (2)

Publication Number Publication Date
WO1999013495A2 true WO1999013495A2 (fr) 1999-03-18
WO1999013495A3 WO1999013495A3 (fr) 1999-05-06

Family

ID=27369542

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/018949 WO1999013495A2 (fr) 1997-09-12 1998-09-11 Armoire hermetique pour stocker des plaquettes de semi-conducteurs

Country Status (1)

Country Link
WO (1) WO1999013495A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460112B (zh) * 2010-02-01 2014-11-11 Daifuku Kk Items storage equipment
JP2015146447A (ja) * 2009-05-18 2015-08-13 ブルックス オートメーション インコーポレイテッド 基板用容器貯蔵システムと相互作用する一体システム
US9842756B2 (en) 2009-05-18 2017-12-12 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
US9881823B2 (en) 2002-06-19 2018-01-30 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10957569B2 (en) * 2002-10-11 2021-03-23 Murata Machinery Ltd. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
EP0552756A1 (fr) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Enceinte pour ranger des articles en espace propre
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3067325B2 (ja) * 1991-10-17 2000-07-17 神鋼電機株式会社 クリーンルーム用気密ストッカー

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
EP0552756A1 (fr) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Enceinte pour ranger des articles en espace propre
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9881823B2 (en) 2002-06-19 2018-01-30 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10141212B2 (en) 2002-06-19 2018-11-27 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10147627B2 (en) 2002-06-19 2018-12-04 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10381251B2 (en) 2002-06-19 2019-08-13 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10957569B2 (en) * 2002-10-11 2021-03-23 Murata Machinery Ltd. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
JP2015146447A (ja) * 2009-05-18 2015-08-13 ブルックス オートメーション インコーポレイテッド 基板用容器貯蔵システムと相互作用する一体システム
US9842756B2 (en) 2009-05-18 2017-12-12 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
TWI460112B (zh) * 2010-02-01 2014-11-11 Daifuku Kk Items storage equipment

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