WO1999013495A3 - Armoire hermetique pour stocker des plaquettes de semi-conducteurs - Google Patents

Armoire hermetique pour stocker des plaquettes de semi-conducteurs Download PDF

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Publication number
WO1999013495A3
WO1999013495A3 PCT/US1998/018949 US9818949W WO9913495A3 WO 1999013495 A3 WO1999013495 A3 WO 1999013495A3 US 9818949 W US9818949 W US 9818949W WO 9913495 A3 WO9913495 A3 WO 9913495A3
Authority
WO
WIPO (PCT)
Prior art keywords
capsules
storage
semiconductor wafers
station
load
Prior art date
Application number
PCT/US1998/018949
Other languages
English (en)
Other versions
WO1999013495A2 (fr
Inventor
George E Niemirowski
John M Harrell
P V Patel
Adam F Niemirowski
Original Assignee
Novus Corp
George E Niemirowski
John M Harrell
P V Patel
Adam F Niemirowski
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novus Corp, George E Niemirowski, John M Harrell, P V Patel, Adam F Niemirowski filed Critical Novus Corp
Publication of WO1999013495A2 publication Critical patent/WO1999013495A2/fr
Publication of WO1999013495A3 publication Critical patent/WO1999013495A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

L'invention concerne un dispositif permettant de stocker des capsules contenant des plaquettes de semi-conducteurs dans un environnement protégé et hermétique. Ce dispositif comprend un boîtier présentant une pluralité de rayons disposés verticalement et destinés à soutenir une pluralité de capsules, un point de chargement à travers lequel les capsules peuvent être insérées en vue d'être stockées, et une ouverture de transfert à travers laquelle les capsules stockées dans le dispositif peuvent être récupérées. Le dispositif comprend également un mécanisme de levage permettant de placer de manière sélective les capsules situées dans le poste de chargement sur un rayon et pour déplacer ces capsules de manière sélective des rayons vers l'ouverture de transfert. Ce dispositif peut être clos hermétiquement au niveau du point de chargement et de l'ouverture de transfert.
PCT/US1998/018949 1997-09-12 1998-09-11 Armoire hermetique pour stocker des plaquettes de semi-conducteurs WO1999013495A2 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US5878797P 1997-09-12 1997-09-12
US5876697P 1997-09-12 1997-09-12
US5877897P 1997-09-12 1997-09-12
US60/058,778 1997-09-12
US60/058,787 1997-09-12
US60/058,766 1997-09-12

Publications (2)

Publication Number Publication Date
WO1999013495A2 WO1999013495A2 (fr) 1999-03-18
WO1999013495A3 true WO1999013495A3 (fr) 1999-05-06

Family

ID=27369542

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/018949 WO1999013495A2 (fr) 1997-09-12 1998-09-11 Armoire hermetique pour stocker des plaquettes de semi-conducteurs

Country Status (1)

Country Link
WO (1) WO1999013495A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100520706C (zh) 2002-06-19 2009-07-29 布鲁克斯自动技术公司 半导体制造用竖直传送带与空中升降机组合式自动物料搬运系统
KR101544699B1 (ko) * 2002-10-11 2015-08-18 무라다기카이가부시끼가이샤 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량
US8882433B2 (en) 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
KR101755047B1 (ko) * 2009-05-18 2017-07-06 크로씽 오토메이션, 인코포레이티드 기판 컨테이너 보관 시스템과 연결하기 위한 일체형 시스템
JP5370775B2 (ja) * 2010-02-01 2013-12-18 株式会社ダイフク 物品保管設備

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
JPH05105206A (ja) * 1991-10-17 1993-04-27 Shinko Electric Co Ltd クリーンルーム用気密ストツカー
EP0552756A1 (fr) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Enceinte pour ranger des articles en espace propre
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
JPH05105206A (ja) * 1991-10-17 1993-04-27 Shinko Electric Co Ltd クリーンルーム用気密ストツカー
EP0552756A1 (fr) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Enceinte pour ranger des articles en espace propre
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Also Published As

Publication number Publication date
WO1999013495A2 (fr) 1999-03-18

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