WO1998026449A2 - Procede de purification d'acides servant au traitement des semi-conducteurs - Google Patents

Procede de purification d'acides servant au traitement des semi-conducteurs Download PDF

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Publication number
WO1998026449A2
WO1998026449A2 PCT/US1997/022736 US9722736W WO9826449A2 WO 1998026449 A2 WO1998026449 A2 WO 1998026449A2 US 9722736 W US9722736 W US 9722736W WO 9826449 A2 WO9826449 A2 WO 9826449A2
Authority
WO
WIPO (PCT)
Prior art keywords
acid
parts per
resin
per billion
citric acid
Prior art date
Application number
PCT/US1997/022736
Other languages
English (en)
Other versions
WO1998026449A3 (fr
Inventor
Thomas B. Hackett
Original Assignee
Ashland Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ashland Inc. filed Critical Ashland Inc.
Priority to JP52695398A priority Critical patent/JP2001505918A/ja
Priority to EP97951629A priority patent/EP0966421A4/fr
Priority to AU55219/98A priority patent/AU5521998A/en
Publication of WO1998026449A2 publication Critical patent/WO1998026449A2/fr
Publication of WO1998026449A3 publication Critical patent/WO1998026449A3/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C51/00—Preparation of carboxylic acids or their salts, halides or anhydrides
    • C07C51/41—Preparation of salts of carboxylic acids
    • C07C51/412—Preparation of salts of carboxylic acids by conversion of the acids, their salts, esters or anhydrides with the same carboxylic acid part
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C51/00—Preparation of carboxylic acids or their salts, halides or anhydrides
    • C07C51/42—Separation; Purification; Stabilisation; Use of additives
    • C07C51/47—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption

Definitions

  • These acids include carboxylic acids having at least one of
  • carboxylic acid groups include C 2 to C 6 dicarboxylic acids, hydroxycarboxylic acids and aminocarboxylic acids. Specific examples of C 2 to C ⁇
  • acids includes oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, maleic acid, fumaric acid.
  • hydroxy carboxylic acids includes malic acid, tartaric
  • aminocarboxylic acids include glutamate, glutamate, citric acid, and citric acid.
  • aminocarboxylic acids include glutamate, glutamate, citric acid, and glutamate.
  • EDTA ethylenediaminetetracetic acid
  • HEDTA HEDTA
  • a preferred acid is citric acid.
  • a preferred derivative is ammonium citrate.
  • the acids are well known, for instance malonic acid is used as an
  • Oxalic acid is also used for automobile radiator cleaners, general metal and equipment cleaning, as a purifying
  • stripping agent for permanent press resins for textile bleaching and in rare earth
  • Citric acid is known as an effective ingredient in the cleaning industry and is typically used in bathtub and faucet cleaners, liquid laundry detergent, and oven
  • citric acid solutions are known to remove corrosion
  • citric acid is used to a limited extent in the
  • citric acid is not of the desired quality.
  • citric acid has been purified by a strong acid cation ion exchange resin. The resultant citric acid is superior to previously available food
  • Citric acid is made commercially by the fermentation of molasses. Ion exchange resins have been used to recover citric acid after fermentation(EP 324210) as
  • cationic impurities which include iron, calcium, and barium at levels that are
  • This invention provides, in general,
  • citric acid malonic acid, oxalic acid and ammonium citrate.
  • Ammonium citrate can be made by reacting purified citric acid with high purity
  • CMP Post-Chemical Mechanical Polishing
  • One aspect of this invention is a highly purified citric acid composition for use
  • Citric acid compositions of the present invention have less than 100 ppb iron cations, 20 ppb calcium cations, and 100 ppb barium cations,
  • the citric acid of the present invention is prepared by exposing technical grade citric acid in deionized water to a
  • styrene-divinyl benzene cation exchange resin having sulfonic acid or hydrochloric acid
  • this invention provides a method of cleaning wafers after chemical mechanical polishing
  • Example 1 Industrial grade citric acid was dissolved in water to make a 28.8% solution.
  • the starting material (See Table below -5874-56-1) has high levels of
  • the citric acid was converted to ammonium citrate by neutralization with high purity ammonium hydroxide.
  • Example 2 ADM USP grade citric acid, anhydrous fine granular was dissolved in ultrapure
  • citric acid is suitable
  • Example 4 A procedure similar to Example 2 was used to purify citric acid except the flow rate through the column was 4 BV/Hr.
  • the calcium level in the industrial grade of citric acid solution was 5.6 ppm. After contacted with Amberlyst 35, the calcium level in citric acid had been reduced to 47 ppb. This level is suitable for use in semiconductor applications.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Detergent Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

L'invention porte sur un procédé d'obtention d'acides et de leurs dérivés d'une haute pureté, et en particulier d'acide citrique et de citrate d'ammonium. Ces compositions purifiées s'avèrent utiles dans la fabrication de circuits intégrés dans l'industrie des semi-conducteurs. La purification fait appel à des résines échangeuses d'ions d'acides forts.
PCT/US1997/022736 1996-12-09 1997-12-08 Procede de purification d'acides servant au traitement des semi-conducteurs WO1998026449A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP52695398A JP2001505918A (ja) 1996-12-09 1997-12-08 半導体プロセス用酸の精製法
EP97951629A EP0966421A4 (fr) 1996-12-09 1997-12-08 Procede de purification d'acides servant au traitement des semi-conducteurs
AU55219/98A AU5521998A (en) 1996-12-09 1997-12-08 A method for purification of acids for use in semiconductor processing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3258896P 1996-12-09 1996-12-09
US60/032,588 1996-12-09

Publications (2)

Publication Number Publication Date
WO1998026449A2 true WO1998026449A2 (fr) 1998-06-18
WO1998026449A3 WO1998026449A3 (fr) 1998-10-01

Family

ID=21865724

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/022736 WO1998026449A2 (fr) 1996-12-09 1997-12-08 Procede de purification d'acides servant au traitement des semi-conducteurs

Country Status (5)

Country Link
EP (1) EP0966421A4 (fr)
JP (1) JP2001505918A (fr)
KR (1) KR20000057463A (fr)
AU (1) AU5521998A (fr)
WO (1) WO1998026449A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7087564B2 (en) * 2004-03-05 2006-08-08 Air Liquide America, L.P. Acidic chemistry for post-CMP cleaning
US20050209328A1 (en) * 2004-03-19 2005-09-22 Allgood Charles C Alphahydroxyacids with ultra-low metal concentration
KR102274555B1 (ko) 2019-08-26 2021-07-06 호서대학교 산학협력단 초고순도 질산을 얻기 위한 시약 정제 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2674848A1 (fr) * 1991-04-02 1992-10-09 Bioprox Ste Angevine Biotechno Preparation d'un concentre d'acide lactique a partir d'un residu de l'industrie des ferments, concentre obtenu et son utilisation dans l'industrie alimentaire.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1290212A (fr) * 1961-02-27 1962-04-13 Melle Usines Sa Procédé de décoloration et de purification de solutions impures d'acides organiques
DE1642861C3 (de) * 1967-01-30 1973-10-11 Politechnika Slaska Im.W. Pstrowskiego, Gleiwitz (Polen) Verfahren und Vorrichtung zur Durch fuhrung von industriellen Sorptionsvor gangen
JPH05339197A (ja) * 1992-06-10 1993-12-21 Asahi Glass Co Ltd しゅう酸の分離回収方法
US5662769A (en) * 1995-02-21 1997-09-02 Advanced Micro Devices, Inc. Chemical solutions for removing metal-compound contaminants from wafers after CMP and the method of wafer cleaning

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2674848A1 (fr) * 1991-04-02 1992-10-09 Bioprox Ste Angevine Biotechno Preparation d'un concentre d'acide lactique a partir d'un residu de l'industrie des ferments, concentre obtenu et son utilisation dans l'industrie alimentaire.

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ALDRICH, Catalog Handbook of Fine Chemicals, 1994, page 98. *
See also references of EP0966421A2 *

Also Published As

Publication number Publication date
EP0966421A2 (fr) 1999-12-29
EP0966421A4 (fr) 2000-03-29
JP2001505918A (ja) 2001-05-08
AU5521998A (en) 1998-07-03
KR20000057463A (ko) 2000-09-15
WO1998026449A3 (fr) 1998-10-01

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