Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
  • B01D53/34—Chemical or biological purification of waste gases
  • B01D53/46—Removing components of defined structure
  • B01D53/68—Halogens or halogen compounds
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
  • B01D53/34—Chemical or biological purification of waste gases
  • B01D53/46—Removing components of defined structure
  • B01D53/68—Halogens or halogen compounds
  • B01D53/685—Halogens or halogen compounds by treating the gases with solids

Definitions

• the present invention relates to a method for treating an exhaust gas containing a halogen compound (for example, a halogen gas or a halogenated acidic gas such as hydrogen halide), and more particularly to a halogen compound discharged from a dry etching step or the like in a semiconductor process.
• a halogen compound for example, a halogen gas or a halogenated acidic gas such as hydrogen halide
• the present invention relates to a method for removing exhaust gas containing harmful substances to render the gas harmless.
• the halogen-based gas discharged from the dry etching process is
• halogen-based gases 1 and 2 are particularly problematic. Since these substances are harmful to humans and the environment, it is natural that complete treatment of exhaust gas is desired.In addition, since they are corrosive gases, they must be used together with water present in the system to form a vacuum system. There is a problem of corrosion of equipment (dry pump, metal part of rotary pump, metal pipe, etc.).
• detoxifying agent such as metal oxides (for example, mention Fe 2 0 3.)
• metal oxides for example, mention Fe 2 0 3.
• water is not preferable because it causes corrosion in the system. Also, like the metal oxide, the alkali and the oxidizing agent react with the acidic gas to release water, which is not preferable. On the other hand, activated carbon cannot process acid gas.
• An object of the present invention is to provide a method for effectively removing a halogen-based compound such as an acid gas and a halogen gas from an exhaust gas as described above.
• the present invention comprises contacting an exhaust gas containing an ⁇ -based compound such as a halogen gas and / or a hydrogen halide gas (a halogenated acid gas) with a simple metal, wherein
• an ⁇ -based compound such as a halogen gas and / or a hydrogen halide gas (a halogenated acid gas)
• a simple metal such as a halogen gas and / or a hydrogen halide gas (a halogenated acid gas)
• the present invention relates to a method for treating exhaust gas.
• this simple metal and a halogen compound react, for example, as in the following formula, and are corrosive and harmful. Not only can the compounds be removed, but water is not generated by the reaction, and corrosion in the system can be effectively prevented.
• the treatment method of the present invention it is desirable to use at least one selected from the group consisting of tin, lead, zinc, zirconium, iron, nickel, molybdenum, manganese, tantalum and cobalt as the simple metal. Also, it is advantageous to promote the reaction by bringing the exhaust gas containing the ⁇ -gen compound into contact with the simple metal at 20 to 300 V (preferably 100 to 300).
• the shape of the single metal that can be used is granular, bar-shaped, plate-shaped or the like, and is not particularly limited as long as operability is good. If the particle size of these metals is within the range where the ventilation resistance does not increase when passing exhaust gas, the contact area can be as large as possible. Shape is desirable. These metals may be used alone or in combination of two or more.
• the above-mentioned simple metal may be filled in a packed tower in accordance with the gas load, and the gas may be introduced for contact.
• a) and c) are provided to protect the vacuum pump from corrosion, and b) to prevent the emission of exhaust gas to the environment.
• the exhaust gas remover (treating agent)
• the above-mentioned simple metal and activated carbon can be used in combination.
• this simple metal and a halogen compound react as shown in the above formula, for example, and are corrosive harmful halogen compounds. Not only can be removed, but also water is not generated by the reaction, so that corrosion in the system can be effectively prevented.
• the height of the bed should be 10 cm in a 50 cm ⁇ SUS packed tower that can be heated from the outside.
• tin granular, 2-3 ⁇ .
• a nitrogen-diluted halogen-based gas was introduced into the packed tower at a flow rate of 1 LZ for 2 hours (all halogen-based gas concentrations were set to 1). Then, the outlet gas from the packed tower was analyzed as follows.
• Unprocessed rate ⁇ %) ⁇ (Amount of halogen-based gas that could not be processed) 10
• Rukoto can effectively remove halogen-containing gas, c Example 2
• the fluorine-based it is advantageous to increase the reaction temperature
• Example 2 The same SUS packed tower as in Example 1 was filled with zirconium (sponge, 2 to 500) so as to have a bed height of 10 cm. Otherwise, the same reaction as in Example 1 was performed. The results are shown in Table 2 below.
• Example 2 The same SUS packed tower as in Example 1 was filled with lead (granulated, 2 to 5 masses) so as to have a bed height of 10 cm. Other than that, the same reaction as in Example 1 was performed. Are shown in Table 3 below.
• hydrofluoric ⁇ can sufficiently remove even more 2CTC, HF at a high temperature, C 1 2 is seen to be much removed further to a high temperature.
• Example 2 The same SUS packed tower as in Example 1 was filled with zinc (granular, 3 to 7 countries ⁇ ) to a layer thickness of 10 cm. Otherwise, the same reaction as in Example 1 was performed. The results are shown in Table 4 below.
• Example 5 The same SUS packed tower as in Example 1 was filled with iron (granular, 2-3 ram0) so as to have a bed height of 10 cm. Otherwise, the same reaction as in Example 1 was performed. The results are shown in Table 5 below. Table 5
• Example 6 The same SUS packing tower as in Example 1 was filled with molybdenum (granular) so as to have a bed height of 10 cm. Otherwise, the same reaction as in Example 1 was performed. The results are shown in Table 6 below.
• Example 7 The same SUS packing tower as that of Example 1 was filled with nickel (particulate, 2 to 5 amino acids) so as to have a layer height of lOcni. Otherwise, the same reaction as in Example 1 was carried out. C The results are shown in Table 7 below.
• Example 2 The same SUS packed tower as in Example 1 was filled with manganese (particulate, 2 to 5 rara0) so as to form a layer of Ocra. Otherwise, the same reaction as in Example 1 was carried out. C The results are shown in Table 8 below.
• Example 1 The same SUS mound tower as in Example 1 was filled with tantalum (rabbit, 2 to 5 mm) so as to be 10 cm thick. Otherwise, the same reaction as in Example 1 was carried out. C The results are shown in Table 9 below.
• any of the halogen-based gases can be sufficiently removed at a high temperature.
• Example 1 The same SUS packed tower as in Example 1 was filled with cobalt (particulates, small particles: 100 or less) so as to have a bed height of 10 cm. Otherwise, the same reaction as in Example 1 was performed. The results are shown in Table 10 below.

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• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Health & Medical Sciences (AREA)
• Biomedical Technology (AREA)
• Environmental & Geological Engineering (AREA)
• Analytical Chemistry (AREA)
• General Chemical & Material Sciences (AREA)
• Oil, Petroleum & Natural Gas (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Treating Waste Gases (AREA)

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• 1996
  • 1996-09-04 JP JP25383696A patent/JP4037475B2/ja not_active Expired - Lifetime
• 1997
  • 1997-09-01 EP EP97937860A patent/EP0963779B1/en not_active Expired - Lifetime
  • 1997-09-01 DE DE69734784T patent/DE69734784T2/de not_active Expired - Lifetime
  • 1997-09-01 WO PCT/JP1997/003050 patent/WO1998009715A1/ja not_active Ceased
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  • 1997-09-04 TW TW086112728A patent/TW408031B/zh not_active IP Right Cessation
• 1999
  • 1999-03-04 KR KR1019997001812A patent/KR100299627B1/ko not_active Expired - Lifetime

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