WO1996028276A1 - Appareil a plateau a deplacement biaxial entraine par un moteur lineaire - Google Patents

Appareil a plateau a deplacement biaxial entraine par un moteur lineaire Download PDF

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Publication number
WO1996028276A1
WO1996028276A1 PCT/JP1996/000604 JP9600604W WO9628276A1 WO 1996028276 A1 WO1996028276 A1 WO 1996028276A1 JP 9600604 W JP9600604 W JP 9600604W WO 9628276 A1 WO9628276 A1 WO 9628276A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear motor
axis
linear
coil element
flexible cable
Prior art date
Application number
PCT/JP1996/000604
Other languages
English (en)
Japanese (ja)
Inventor
Susumu Ito
Kunio Kojima
Original Assignee
Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Ltd filed Critical Fanuc Ltd
Publication of WO1996028276A1 publication Critical patent/WO1996028276A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part

Definitions

  • the present invention generally relates to a biaxial stapling apparatus driven by a linear motor, and in particular, simplifies the processing of wiring and piping for conducting a drive current to the linear motor and supplying a cooling medium.
  • the present invention relates to a two-axis table device having a structure capable of: Conventional technology
  • a table moving mechanism using a linear motor as a drive source for a work table of a machine tool has already been proposed.
  • the general configuration of a linear motor used as a drive source is as shown in the perspective view of FIG. 6, and the linear motor 10 is composed of fixed magnet pieces 12 and 1 with the pole faces of the N and S poles facing upward.
  • 3 is a stationary element 1 extending in a two-row arrangement (may be a single-row arrangement) on a machine base 14 made of a magnetic material (for example, iron plate) as shown in the example shown in FIG.
  • the excitation coil element 15 is moved in a linear direction while maintaining the same operation gap by a well-known linear guide mechanism (not shown) through an appropriate operation gap above the stay element 11. It is provided as possible.
  • the upper surface of the stay element 11 is formed as a substantially flat surface area including the N pole surface and the S pole surface of the fixed magnet pieces 12 and 13. Is formed on a smooth surface by pouring the metal.
  • the exciting coil element 15 has a structure in which an exciting coil (not shown) is built in a rectangular parallelepiped machine frame and is solidified by a resin mold. Fixed 1 By performing an electromagnetic interaction with the magnet pieces 12 and 13, a moving force in a linear direction indicated by an arrow L is obtained.
  • a moving body 16 such as a table of a machine tool or a measuring machine, which is illustrated by a broken line, is fixed to the exciting coil element 15 by a coupling means such as a bolt, the moving body 16 is fixed.
  • Exciting current is supplied to the exciting coil element 15 via a conductive wire (not shown), and an appropriate current is supplied inside the element 15. Pressurized air is introduced from the inlets 17a and 17b, and the heat generated due to eddy current loss and the like generated during the electromagnetic interaction between the exciting coil element 15 and the fixed magnet pieces 12 and 13 is air-cooled. It is common that the configuration is taken.
  • FIGS. 7 and 8 a conventional example in which the X and Y table devices of a machine tool are driven by a linear motor moves linearly in the Y-axis direction above a bed 18.
  • This is a two-axis table device in which a saddle 20 is arranged, and a work table 22 is arranged above the saddle 20 so as to be linearly movable in the X-axis direction.
  • the saddle 20 slides in the Y-axis direction by the guide of a well-known linear guide means 24 composed of a guide rail and a sliding nut arranged in a pair on the left and right, and the work table 22 is moved. Similarly, it slides in the X-axis direction under the guidance of the linear guide means 26 arranged on the left and right pair.
  • a Y-axis driving means 28 composed of a linear motor is provided between the bead 18 and the saddle 20, and between the saddle 20 and the work table 22.
  • An X-axis drive means 30 comprising a linear motor is provided.
  • An excitation coil section 28 b that is fixedly arranged on the upper surface of the node 18 and cooperates with the fixed magnet section 28 a is attached to the bottom side of the saddle 20.
  • the fixed magnet portion 30a of the X-axis driving means 30 is disposed on the upper surface of the saddle 20, and the exciting coil portion 30b cooperating with the fixed magnet portion 30a is It is attached to the bottom side of the work table 22.
  • the exciting coil sections 30b and 2b of the X-axis driving means 30 and the Y-axis driving means 28 attached to the respective linear moving bodies of the saddle 20 and the worktable 22 are provided. Since the supply of excitation current and the supply of a cooling medium (generally, pressurized air for cooling) is required for 8b, cables can move following the movement of the linear moving body. Wiring and piping 32, 34 must be designed.
  • the saddle 20 is not connected to the exciting magnet portion 30 b of the X-axis drive means 30 attached to the bottom surface of the work table 22.
  • Wiring and piping 32 extending from the side so as to have an extra length can be configured with a well-known cable support member, because the U-shaped structure of the cable support member with respect to the low height structure of the linear motor 30 In consideration of the inability to obtain sufficient curvature of the part and the high speed of linear motion, it is often necessary to treat cables separately using, for example, wiring using flexible pipes, piping, etc. There is a problem that makes designing difficult.
  • An object of the present invention is to provide a two-axis table capable of achieving cable processing by effectively utilizing a belt-shaped flexible cable supporting member while enjoying the advantage of using a linear motor as a driving means for linear motion. In order to provide the equipment.
  • the arrangement structure of the fixed magnet portion and the excitation coil portion of the two linear motors constituting the X-axis drive means and the Y-axis drive means is devised, and one belt-shaped flexible cable support member is provided.
  • This is a new configuration that uses only this to form a two-axis table unit and improves cable handling.
  • a first table section linearly moving in the I-axis direction via the first linear motor means above the fixed bed, and a first table section above the first table section.
  • a second table section that linearly moves in a second axis direction orthogonal to the first predetermined axis direction via the second linear motor.
  • At least a fixed magnet element of the second linear motor that drives a second table disposed above the first table has a configuration mounted on a bottom surface of the second table.
  • Flexible cable supporting means having one end coupled to the first table so as to be movable with the first table;
  • a linear motor in which the exciting coil element in the second linear stage is fixed to the first taper portion and a conductive wire and a pipe hose are statically wired and piped from the flexible cable supporting member to the exciting coil element; It is intended to provide a two-axis table device driven by the evening.
  • the exciting coil elements of the first linear motor and the second linear motor are fixed to both upper and lower surfaces of the first table, respectively, and the upper and lower surfaces of the first table are fixed.
  • a two-axis table device having a configuration in which a slider in the linear guide means is provided, and a fixed bed on the other side and a guide rail of the linear guide means on the second table side is provided.
  • the excitation coil element of the first linear motor may be provided on the fixed bed, and the excitation coil element of the second linear motor may be provided on the upper surface of the intermediate first table portion. Since the exciting coil element of the first linear motor is a completely stationary element, the supply of conductive wiring and cooling fluid to the exciting coil element can be independently performed by fixed wiring.
  • the excitation coil element is positioned below the second table unit. Since the single flexible cable supporting member having one end connected to the first table portion can be disposed so as to be movable together with the first table portion, there is no space between the first and second table portions. There is no need to provide any cable processing means. For this reason, it has become possible to simplify the processing of cables such as conductive wires and piping while maintaining a configuration in which the table height is kept low by using a linear motor as a table drive source.
  • FIG. 1 is a schematic front view showing a basic configuration of a first embodiment of a biaxial stapling apparatus driven by a linear motor according to the present invention
  • Figure 2 is a schematic side view of the device
  • FIG. 3 is a schematic front view showing a basic configuration of a second embodiment of a two-axis table device driven by a linear motor according to the present invention
  • FIG. 4 is a schematic side view of the two-axis table device shown in FIG. 3,
  • FIG. 5 is a schematic perspective view showing a preferred embodiment of the arrangement of the slider in the linear guide means
  • Fig. 6 is a cross-sectional view schematically showing the configuration of a conventional two-axis table device driven by a linear motor.
  • Figure 7 is a schematic side view of the device shown in Figure 6,
  • FIG. 8 is a perspective view showing a general configuration of a linear motor. BEST MODE FOR CARRYING OUT THE INVENTION
  • the biaxial table device includes a fixed bed portion 38 and a second fixed table portion provided above the fixed bed portion 38.
  • 1 has a table section 40 and a second table section 42 disposed above the first table section 40, and the first table section 40 is guided to the fixed bed section 38.
  • a linear guide means 4 4 consisting of a rail 44 a and a guide slider 44 b provides one linear direction, that is, as shown in FIG.
  • the second table section 42 is moved in one linear direction, that is, the Y direction by the linear guide means 46 composed of the guide rail 46a and the guide slider 46b with respect to the first table section 40. It is provided so that it can slide linearly in the X-axis direction shown in Fig. 1 perpendicular to the axial direction.
  • the fixed magnet element 48 a of the first linear motor 48 a constituting the drive source for linearly moving the first table section 40 in the Y-axis direction
  • the excitation coil element 48 b cooperating with the fixed magnet element 48 a is provided on the upper surface in a stationary arrangement, and is attached to the bottom side of the first table section 40.
  • wiring of conductive wires and piping for supplying a cooling medium (usually a pressurized air flow) are required for the exciting coil element 48 b attached to the first table section 40.
  • the fixed magnet element 50 a force of the second table section 42 is used.
  • the excitation coil element 50b which is fixed to the bottom surface and cooperates with the fixed magnet element 50a, is attached to the upper surface side of the first table section 40. For this reason, it is necessary to provide a conductive wire and a pipe for supplying a cooling medium to the exciting coil element 5 Ob mounted on the upper surface of the first table section 40.
  • the first and second linear motors 48, 5 are concentrated on the first table section 40 interposed between the fixed bed 38 and the uppermost second table section 42. Since the excitation coil elements 48b and 5Ob of No. 0 are attached, the conductive wire and the cooling fluid supply hose for these are connected to the first table section 40 by a flexible cable having one end fixed thereto. This is achieved by wiring and arranging the conductive wire 62 and the fluid supply hose 64 housed in the support member 60.
  • the other end of the flexible cable supporting member 60 passes through the side portion of the fixing pad 38 and is connected to an appropriate fixing position. It is only necessary to connect the conductive wire 62 and the fluid supply hose 64 stored in the tube to an external conductive wire or a pipe from the fluid supply source.
  • the flexible cable supporting member 60 is the first cable from the fixed bead 38 side.
  • the buckle portion 40 is arranged with a predetermined margin so as to form a U-shape, and is configured to be pulled and moved in accordance with the linear movement of the first table portion 40.
  • the first and second linear modes are used.
  • Cable processing such as wiring and piping for 50 can also be performed using the flexible cable support member 60 disposed between the first table section 40 and the fixed bed 38.
  • the flexible cable supporting member 60 is fixed as a stationary element. Since the bed 38 can be arranged so as to bypass the side surface, the cable processing can be performed without any trouble in the U-shaped arrangement of the flexible cable supporting means 60.
  • FIGS. 3 and 4 there is shown a configuration of a two-axis table device according to another embodiment of the present invention.
  • the fixed table 38, the first table section 40, and the second table section 42 are the same as in the first embodiment described above.
  • the linear guide means 44, 46 for guiding the linear movement of the first table section 40 and the second table section 42 have the same structurally identical structure, With respect to the linear guide means 44 of the first table 40 which slides linearly in the Y-axis direction with respect to the rail 38, the guide rail 44a is fixed to the bottom surface of the first table portion 40, and the slider 4 4 b is fixed to the upper surface of the fixed bed 38. The reason for such a slight change in configuration will be described later.
  • the fixed magnet element 48a in the first linear motor driving the first table section 40, the fixed magnet element 48a is connected to the first table section 40.
  • the excitation coil element 48 b cooperating with the fixed magnet element 48 a is mounted on the bottom surface of the fixed bed 38 so as to be immovably arranged.
  • the exciting coil element 48 b is immovably arranged on the fixed bed 38 which is a fixed structure as described above. Therefore, there is no movable requirement for the conductive wire or cooling fluid hose wiring and piping for the exciting coil element 48b.
  • the laid wiring 63, 65 extending from the outside may be directly connected to an appropriate connector means or a hose joint provided at one end of the exciting coil element 48b.
  • the second linear motor 50 for driving the uppermost second table section 42 in the X-axis direction is provided with the completely same structure and the same arrangement as the first linear motor 50 of the first embodiment described above.
  • the cable treatment for wiring and piping of the hose 64 of the same to the excitation coil element 5 Ob is performed.
  • a conductive wire 62 for supplying a current and a cooling medium to the second linear motor 50 and a fluid supply hose 64 are housed inside the flexible cable supporting member 60. Therefore, the cable processing is further simplified than the cable processing in the first embodiment described above.
  • the excitation coil 80a of the drive liner motor is connected like the first table section 40 in the first embodiment or the fixed bed 38 in the second embodiment.
  • the structure of the linear guide means attached to the moving body 82 or the structure to which the built-in excitation coil element 80 is attached is provided with a guide slider 84 a rather than a guide rail. I like it. This is because a large magnetic attraction force acts between the fixed magnet element and the exciting coil element when driving the linear motion due to the electromagnetic interaction of the linear motor, and especially the exciting coil element 80 Because it is mounted in the central area, a local magnetic attraction acts on this area.
  • the element of the straight line planning means 84 is a sliding element which is a single element rather than a long guide rail.
  • the configuration in which the armature 84 side is attached to the surface of the moving body 82 together with the excitation coil element 80 is not affected by the local deformation, and the mechanical rigidity of the linear guide means It is preferable from the viewpoint of the service life.
  • the present invention has been described based on the two embodiments. However, these are the most preferable embodiments, and it goes without saying that various modifications and changes can be made within the scope of the present invention.
  • the arrangement of the flexible cable support members 60 may be different from the arrangement in the illustrated example.
  • a two-axis table device having two linear moving elements, that is, a first table portion and a second table portion, two X-axis driving units and two Y-axis driving units
  • This is a two-axis table device that devises the arrangement structure of the fixed magnet part and the excitation coil part of the linear motor and performs cable processing using only one belt-shaped flexible cable support member.
  • the height of the shaft table device is prevented from becoming bulky by using a linear motor, and both the conductive di and the fluid supply hose can be achieved only by using a single flexible cable support member. Since cable processing can be performed, simplification around the table can be achieved, making it easier to design the table and reducing manufacturing costs.In addition, complicated cable creeping, wiring, etc. From no Two Cities, obtained biaxially table device or high application performance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un appareil à plateau à déplacement biaxial servant au traitement des câbles et comprenant un moteur linéaire, un premier plateau (40) surmontant une plateforme fixe (38) et un second plateau (42). Cet appareil se compose d'un bâti amélioré placé entre deux aimants fixes (48a et 50a) de deux moteurs linéaires (48 et 50) pour l'entraînement en déplacement biaxial, selon l'axe X ou selon l'axe Y et de bobines à excitation (48b et 50b), à l'aide d'un seul élément de support de câble souple du type courroie (60).
PCT/JP1996/000604 1995-03-14 1996-03-11 Appareil a plateau a deplacement biaxial entraine par un moteur lineaire WO1996028276A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7054348A JPH08243866A (ja) 1995-03-14 1995-03-14 リニアモータにより駆動される２軸テーブル装置
JP7/54348 1995-03-14

Publications (1)

Publication Number Publication Date
WO1996028276A1 true WO1996028276A1 (fr) 1996-09-19

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ID=12968131

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1996/000604 WO1996028276A1 (fr) 1995-03-14 1996-03-11 Appareil a plateau a deplacement biaxial entraine par un moteur lineaire

Country Status (3)

Country Link
JP (1) JPH08243866A (fr)
KR (1) KR960033649A (fr)
WO (1) WO1996028276A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002060037A1 (fr) * 2001-01-25 2002-08-01 Koninklijke Philips Electronics N.V. Bobine avec moyens de refroidissement
JP7514098B2 (ja) 2020-03-31 2024-07-10 日本トムソン株式会社 昇降装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507324B2 (ja) * 2000-01-20 2010-07-21 株式会社安川電機 リニアスライダ
JP2002300766A (ja) * 2001-03-30 2002-10-11 Hitachi Metals Ltd 揺動モータおよびステージ装置
JP2004112864A (ja) * 2002-09-13 2004-04-08 Nippon Thompson Co Ltd リニアモータを内蔵したｘｙステージ装置
JP2006245299A (ja) * 2005-03-03 2006-09-14 Canon Inc ステージ装置及び露光装置
DE102006038416A1 (de) * 2006-08-17 2008-02-21 Siemens Ag Geräteschlitten mit integriertem Motorteil
CN105904299A (zh) * 2016-05-11 2016-08-31 周玉红 一种钢板平整度高精度磨平组件
JP2020168704A (ja) * 2019-04-05 2020-10-15 ファナック株式会社 保持部材および工作機械

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335537U (fr) * 1986-08-27 1988-03-07
JPH0193976U (fr) * 1987-12-16 1989-06-21
JPH04189436A (ja) * 1990-11-20 1992-07-07 Sumitomo Heavy Ind Ltd ２次元モータステージ装置
JPH0557558A (ja) * 1991-08-29 1993-03-09 Matsushita Electric Ind Co Ltd 移動案内装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335537U (fr) * 1986-08-27 1988-03-07
JPH0193976U (fr) * 1987-12-16 1989-06-21
JPH04189436A (ja) * 1990-11-20 1992-07-07 Sumitomo Heavy Ind Ltd ２次元モータステージ装置
JPH0557558A (ja) * 1991-08-29 1993-03-09 Matsushita Electric Ind Co Ltd 移動案内装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002060037A1 (fr) * 2001-01-25 2002-08-01 Koninklijke Philips Electronics N.V. Bobine avec moyens de refroidissement
US6545377B2 (en) 2001-01-25 2003-04-08 Koninklijke Philips Electronics N.V. Coil with cooling means
JP7514098B2 (ja) 2020-03-31 2024-07-10 日本トムソン株式会社 昇降装置

Also Published As

Publication number Publication date
JPH08243866A (ja) 1996-09-24
KR960033649A (ko) 1996-10-22

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