KR960033649A - 리니어 모터에 의해 구동되는 2축 테이블 장치 - Google Patents

리니어 모터에 의해 구동되는 2축 테이블 장치 Download PDF

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Publication number
KR960033649A
KR960033649A KR1019960000367A KR19960000367A KR960033649A KR 960033649 A KR960033649 A KR 960033649A KR 1019960000367 A KR1019960000367 A KR 1019960000367A KR 19960000367 A KR19960000367 A KR 19960000367A KR 960033649 A KR960033649 A KR 960033649A
Authority
KR
South Korea
Prior art keywords
table portion
linear motor
axis
linearly moves
fixed bed
Prior art date
Application number
KR1019960000367A
Other languages
English (en)
Korean (ko)
Inventor
스스무 이또
구니오 고지마
Original Assignee
이나바 세이우에몬
화낙 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이나바 세이우에몬, 화낙 가부시끼가이샤 filed Critical 이나바 세이우에몬
Publication of KR960033649A publication Critical patent/KR960033649A/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
KR1019960000367A 1995-03-14 1996-01-10 리니어 모터에 의해 구동되는 2축 테이블 장치 KR960033649A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7054348A JPH08243866A (ja) 1995-03-14 1995-03-14 リニアモータにより駆動される２軸テーブル装置
JP95-54348 1995-03-14

Publications (1)

Publication Number Publication Date
KR960033649A true KR960033649A (ko) 1996-10-22

Family

ID=12968131

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960000367A KR960033649A (ko) 1995-03-14 1996-01-10 리니어 모터에 의해 구동되는 2축 테이블 장치

Country Status (3)

Country Link
JP (1) JPH08243866A (fr)
KR (1) KR960033649A (fr)
WO (1) WO1996028276A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200316740A1 (en) * 2019-04-05 2020-10-08 Fanuc Corporation Holder and machine tool

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507324B2 (ja) * 2000-01-20 2010-07-21 株式会社安川電機 リニアスライダ
KR20030007477A (ko) 2001-01-25 2003-01-23 코닌클리케 필립스 일렉트로닉스 엔.브이. 냉각 수단을 가진 코일
JP2002300766A (ja) * 2001-03-30 2002-10-11 Hitachi Metals Ltd 揺動モータおよびステージ装置
JP2004112864A (ja) * 2002-09-13 2004-04-08 Nippon Thompson Co Ltd リニアモータを内蔵したｘｙステージ装置
JP2006245299A (ja) * 2005-03-03 2006-09-14 Canon Inc ステージ装置及び露光装置
DE102006038416A1 (de) * 2006-08-17 2008-02-21 Siemens Ag Geräteschlitten mit integriertem Motorteil
CN105904299A (zh) * 2016-05-11 2016-08-31 周玉红 一种钢板平整度高精度磨平组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335537U (fr) * 1986-08-27 1988-03-07
JPH0193976U (fr) * 1987-12-16 1989-06-21
JPH04189436A (ja) * 1990-11-20 1992-07-07 Sumitomo Heavy Ind Ltd ２次元モータステージ装置
JPH0557558A (ja) * 1991-08-29 1993-03-09 Matsushita Electric Ind Co Ltd 移動案内装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200316740A1 (en) * 2019-04-05 2020-10-08 Fanuc Corporation Holder and machine tool

Also Published As

Publication number Publication date
JPH08243866A (ja) 1996-09-24
WO1996028276A1 (fr) 1996-09-19

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Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application