KR960033649A - A two-axis table device driven by a linear motor - Google Patents

A two-axis table device driven by a linear motor Download PDF

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Publication number
KR960033649A
KR960033649A KR1019960000367A KR19960000367A KR960033649A KR 960033649 A KR960033649 A KR 960033649A KR 1019960000367 A KR1019960000367 A KR 1019960000367A KR 19960000367 A KR19960000367 A KR 19960000367A KR 960033649 A KR960033649 A KR 960033649A
Authority
KR
South Korea
Prior art keywords
table portion
linear motor
axis
linearly moves
fixed bed
Prior art date
Application number
KR1019960000367A
Other languages
Korean (ko)
Inventor
스스무 이또
구니오 고지마
Original Assignee
이나바 세이우에몬
화낙 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이나바 세이우에몬, 화낙 가부시끼가이샤 filed Critical 이나바 세이우에몬
Publication of KR960033649A publication Critical patent/KR960033649A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)

Abstract

본 발명은 모터를 이용한 2축 테이블 장치의 케이블 처리를 개선하는 것을 목적으로 하며, 고정 헤드(38)의 상방에 두개의 직선 이동 요소, 즉 제1테이블부(40), 제2테이블부(42)를 가진 2축(X축, Y축) 테이블 장치의 X축 구동 수단, Y축 구동 수단을 구성하는 두 개의 리니어 모터(48,50)의 고정 자석 요소(48a,50a)와 여자코일 요소(48b,50b)의 배치 구조를 연구하는 동시에 하나의 띠 형 가요성 케이블 지지부재(60)만을 이용하여 케이블 처리를 행하는 2축 테이블 장치를 형성한 것이다.An object of the present invention is to improve the cable treatment of a two-axis table apparatus using a motor. In the present invention, two linear moving elements, that is, a first table portion 40, a second table portion 42 50a of the two linear motors 48, 50 constituting the X-axis driving means and the Y-axis driving means of the two-axis (X, Y axis) table apparatus having the exciting coil elements 48b, and 50b, and a two-axis table device for performing cable processing using only one band-type flexible cable support member 60 is formed.

Description

리니어 모터에 의해 구동되는 2축 테이블 장치A two-axis table device driven by a linear motor

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 관한 2축 테이블 장치의 제1실시예의 기본적인 구성을 도시하는 개략적 단면도FIG. 1 is a schematic sectional view showing a basic configuration of a first embodiment of a two-axis table device according to the present invention

제2도는 그 장치의 개략적 측면도2 shows a schematic side view of the device

제3도는 본 발명에 관한 2축 테이블 장치의 제2실시예의 기본적인 구성을 도시하는 개략적 단면도3 is a schematic sectional view showing a basic configuration of a second embodiment of a two-axis table device according to the present invention

제4도는 그 장치의 개략적 측면도4 shows a schematic side view of the device

제5도는 직선 안내 수단에 있어서의 미끄럼 이동자의 배치의 적합한 실시예를 도시하는 개략적 사시도5 is a schematic perspective view showing a preferred embodiment of the arrangement of the slider in the linear guide means;

Claims (2)

고정 베드의 상방에서 제1리니어 모터 수단을 거쳐서 제1축방향으로 직선이동하는 제1테이블부와, 상기 제1테이블부의 상방에서 제2리니어 모터를 거쳐서 상기 제1소정 축방향과 직교한 제2축방향으로 직선 이동하는 제2테이블부를 구비한 리니어 모터에 의해 구동되는 2축 테이블 장치에 있어서, 적어도 상기 제1테이블부의 상방에 배치된 제2테이블부를 구동하는 상기 제2리니어 모터에 있어서의 고정 자석 요소는 상기 제2테이블부의 저면에 설치하고, 또 상기 제1테이블부의 상방에 배치된 제2테이블부를 구동하는 상기 제2리니어 모터에 있어서의 고정 자석 요소는 제2테이블부의 저면에 설치하고, 또 상기 제1테이블부와 함께 이동 가능하게 상기 제1테이블부에 일단을 결합한 가요성 케이블지지 부재를 설치하고, 상기 제2리니어 모터에 있어서의 여자 코일 요소를 제2테이블부에 고정하는 동시에 상기 여자 코일 요소에 상기 가요성 케이블지지 부재로부터 도전선, 배류 호스를 정지 배선, 배관한 것을 특징으로 하는 리니어 모터에 의해 구동되는 2축 테이블 장치A first table portion that linearly moves in the first axial direction from above the fixed bed through the first linear motor means and a second table portion that linearly moves from the upper side of the fixed bed to the second table portion in the second direction perpendicular to the first predetermined axis direction And a second table portion that linearly moves in the axial direction. The two-axis table device is driven by at least a second table portion disposed above the first table portion, The magnet element is provided on the bottom surface of the second table portion and the stationary magnet element in the second linear motor for driving the second table portion disposed above the first table portion is provided on the bottom surface of the second table portion, And a flexible cable supporting member having one end connected to the first table portion so as to be movable together with the first table portion is provided, The coil elements at the same time fixed on the second table unit the flexible element to the exciting coil St. cable conductor from the supporting member, the stop baeryu hose wire, driven by a linear motor, characterized in that the pipes 2-axis table unit 제1항에 있어서, 상기 제1리니어 모터 및 제2리니어 모터의 각각의 모터에 있어서의 여자 코일 요소를 상기 제1테이블부의 표리면에 고정하고, 상기 표리면에 상기 제1테이블부의 직선 안내 수단에 있어서의 미끄럼이동자를 설치하고, 상대편측 고정 베드 및 제2테이블부에 상기 직선 안내 수단의 안내 레일을 설치한 구성을 특징으로 하는 리니어 모터에 의해 구동되는 2축 테이블 장치The motorcycle according to claim 1, wherein the exciting coil elements of the respective motors of the first linear motor and the second linear motor are fixed to the front and rear surfaces of the first table portion, And a guide rail of the linear guide means is provided on the mating fixed bed and the second table portion. The two-axis table device ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960000367A 1995-03-14 1996-01-10 A two-axis table device driven by a linear motor KR960033649A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-54348 1995-03-14
JP7054348A JPH08243866A (en) 1995-03-14 1995-03-14 Two-axis table device driven by linear motor

Publications (1)

Publication Number Publication Date
KR960033649A true KR960033649A (en) 1996-10-22

Family

ID=12968131

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960000367A KR960033649A (en) 1995-03-14 1996-01-10 A two-axis table device driven by a linear motor

Country Status (3)

Country Link
JP (1) JPH08243866A (en)
KR (1) KR960033649A (en)
WO (1) WO1996028276A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200316740A1 (en) * 2019-04-05 2020-10-08 Fanuc Corporation Holder and machine tool

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507324B2 (en) * 2000-01-20 2010-07-21 株式会社安川電機 Linear slider
EP1356570A1 (en) * 2001-01-25 2003-10-29 Koninklijke Philips Electronics N.V. Coil with cooling means
JP2002300766A (en) * 2001-03-30 2002-10-11 Hitachi Metals Ltd Swing motor and stage device
JP2004112864A (en) * 2002-09-13 2004-04-08 Nippon Thompson Co Ltd Xy stage apparatus with built-in linear motor
JP2006245299A (en) * 2005-03-03 2006-09-14 Canon Inc Stage device and exposure device
DE102006038416A1 (en) * 2006-08-17 2008-02-21 Siemens Ag Device slide with integrated motor part
CN105904299A (en) * 2016-05-11 2016-08-31 周玉红 High-precision smoothing assembly for flatness of steel plate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335537U (en) * 1986-08-27 1988-03-07
JPH0193976U (en) * 1987-12-16 1989-06-21
JPH04189436A (en) * 1990-11-20 1992-07-07 Sumitomo Heavy Ind Ltd Two-dimensional motor stage device
JPH0557558A (en) * 1991-08-29 1993-03-09 Matsushita Electric Ind Co Ltd Mobile guide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200316740A1 (en) * 2019-04-05 2020-10-08 Fanuc Corporation Holder and machine tool

Also Published As

Publication number Publication date
WO1996028276A1 (en) 1996-09-19
JPH08243866A (en) 1996-09-24

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