Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B08—CLEANING
  • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
  • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
  • B08B3/04—Cleaning involving contact with liquid
  • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B08—CLEANING
  • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
  • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
  • B08B3/04—Cleaning involving contact with liquid
  • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
  • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid

Definitions

• the present invention relates to a cleaning method and a cleaning apparatus used for industrial cleaning of various parts and the like.
• Halogenated! Hydrogen-based compounds have long had an adverse effect on the human body, such as liver damage and carcinogenicity, as is evident by legal regulations such as the Ordinance on Prevention of Organic Solvent Poisoning. Have been. Recently, not only the human body, but also environmental impacts such as groundwater pollution and destruction of the ozone layer have been regarded as problems. For this reason, there is a strong demand for cleaning agents and cleaning methods that can be replaced with hydrogen halide solvents and that do not affect the human body or the environment. Accordingly, various alternative cleaning agents have been proposed as cleaning agents that can replace halogenated hydrocarbon solvents, and cleaning methods using each of them have been studied.
• the cleaning performance largely depends on the cleaning ability of the cleaning liquid, but the factors that compensate for it are the cleaning time, the temperature of the cleaning liquid, the vibration of the cleaning liquid, the injection, the stirring, and the flow between the cleaning liquid and the object to be cleaned.
• the cleaning performance has been improved by these factors.
• conventional methods of applying water to cleaning objects include irradiating the object to be cleaned in the cleaning liquid with ultrasonic waves, injecting the cleaning liquid, and introducing compressed air or the like into the cleaning liquid to remove bubbles.
• a method of generating the object, a method of rotating a basket or the like containing the object to be cleaned (spin cleaning), a method of swinging the object to be cleaned, and the like have been used.
• the method of swinging the object to be cleaned has a problem that, similarly to spin cleaning, it is difficult to increase the relative speed between the object to be cleaned and the cleaning liquid, and it is difficult to expect a sufficient cleaning effect. . If the swing speed of the object to be cleaned is too high, the object to be cleaned is likely to be damaged.
• the cleaning liquid is sprayed from two opposing directions
• the spray nozzle is swung to widen the spray angle, or ultrasonic cleaning and spinning are performed. Combination with cleaning is performed.
• the liquid speed cancels out at the intermediate point, becomes almost zero, and a position where cleaning is insufficient occurs. I will. Even if the nozzle is swung, the cleaning effect cannot be obtained sufficiently except for the surface facing the nozzle. Even if the ultrasonic cleaning and the spin cleaning are combined, there arises a problem that an object to be cleaned existing in the basket cannot be sufficiently cleaned.
• first and second spray nozzles at each corner of the cleaning tank so as to generate a swirling flow in the cleaning tank in the clockwise and counterclockwise directions around the object to be cleaned.
• this method has a problem that the cleaning liquid in the central portion of the washing tank hardly flows, so that the object to be cleaned disposed in the central portion cannot be sufficiently provided with a cleaning effect.
• the flow of the cleaning liquid is limited to a swirling flow along the side wall of the cleaning tank, when the cleaning is performed by arranging a plurality of large substrates or the like in parallel, the cleaning liquid is supplied to the gap between the substrates. There is a problem that it is difficult.
• mist is generated when the compressed air expands and bursts, causing various problems.
• water treatment equipment as a post-treatment that requires a large investment
• solvent-based cleaning process that does not require power is attracting attention as a cleaning process that can replace halogenated hydrocarbon solvents, but solvent-based cleaning agents are flammable Many have points, and the occurrence of mist as described above may lead to an extremely unfavorable situation in terms of safety.
• a drying step is often performed following the cleaning step, and the generation of the mist as described above affects the drying performance.
• the conventional methods for improving the cleaning performance by mechanical force all have limited positions where the force is applied, or cause a bias in the position where the mechanical force is applied.
• a force cannot be exerted on the entire surface of the object to be washed, which is housed in an overlapped manner with a basket or the like, so that the washing is uneven.
• An object of the present invention is to provide a cleaning method and a cleaning apparatus capable of uniformly cleaning the entire surface of an object to be cleaned irrespective of a part or position of the object to be cleaned. Disclosure of the invention
• a first cleaning method is a method for cleaning by immersing an object to be cleaned in a cleaning tank containing a cleaning liquid, wherein a plurality of fluids for forcibly flowing the cleaning liquid toward the object to be cleaned are jetted.
• a fluid ejection nozzle is arranged in parallel and substantially in the same direction along one tank wall of the cleaning tank, and the plurality of fluid ejection nozzles are divided into two, and the plurality of fluids divided into two are divided.
• a second cleaning method is a method of immersing an object to be cleaned in a cleaning tank containing a cleaning liquid for cleaning, wherein a plurality of fluid jets for injecting a fluid for forcibly flowing the cleaning liquid toward the object to be cleaned are provided.
• a nozzle is disposed in the cleaning tank so as to surround the object to be cleaned, and the timing of jetting the fluid from the plurality of fluid ejection nozzles toward the object to be cleaned is sequentially. It is characterized in that self-cleaning is performed while changing the forced flow direction of the cleaning liquid in order by injecting while switching.
• a third cleaning method is a method of immersing an object to be cleaned in a cleaning tank containing a cleaning liquid for cleaning, wherein at least one fluid for injecting a fluid for forcibly flowing the cleaning liquid toward the object to be cleaned is provided.
• the cleaning is performed while changing the direction of the forced flow of the cleaning liquid by disposing an injection nozzle in the cleaning tank and moving the fluid injection nozzle.
• the third cleaning method is characterized in that the forced flow direction of the cleaning liquid is substantially reversed by moving the fluid jet nozzle in a substantially horizontal direction.
• a fourth cleaning method is a method in which an object to be cleaned is immersed in a cleaning tank in which a cleaning liquid is contained and an ultrasonic oscillator is disposed, and the ultrasonic wave is transmitted from the ultrasonic oscillator.
• a fluid ejection nozzle for ejecting a fluid forcibly flowing in a direction substantially opposite to the direction is disposed in the cleaning tank, and alternately switches between ultrasonic oscillation from the ultrasonic oscillator and fluid ejection from the fluid ejection nozzle. In addition, the cleaning is performed.
• first, second, third and fourth cleaning methods described above are characterized in that a single fluid of the cleaning liquid or a mixed fluid of the cleaning liquid and a gas is jetted from the fluid jet nozzle.
• a first cleaning apparatus includes: a cleaning tank in which a cleaning liquid is contained, and an object to be cleaned is immersed in the cleaning liquid; and a cleaning tank in the cleaning tank, wherein the cleaning liquid is contained along one tank wall of the cleaning tank.
• a plurality of fluid ejection nozzles which are arranged in substantially the same direction and eject fluid for forcibly flowing the washing liquid toward the object to be washed, divided into a first group and a second group;
• Injection timing control means for alternately switching the fluid injection timing from the first group of fluid injection nozzles and the fluid injection timing from the second group of fluid injection nozzles, and substantially inverting the forced flow direction of the cleaning liquid; It is characterized by having.
• the second cleaning device is provided with a cleaning tank for storing a cleaning liquid and immersing the object to be cleaned in the cleaning liquid, and disposed in the cleaning tank so as to surround the object to be cleaned.
• a plurality of fluid ejection nozzles for injecting a fluid forcibly flowing toward an object toward the object to be cleaned, and sequentially switching fluid ejection timings from the plurality of fluid ejection nozzles, Injection timing control means for sequentially changing the forced flow direction of the cleaning liquid.
• the third cleaning device is provided with a cleaning tank in which the cleaning liquid is contained and the cleaning liquid is immersed in the cleaning liquid, and is disposed movably in the cleaning tank, and the cleaning liquid is directed toward the cleaning object. It is characterized by comprising at least one fluid ejecting nozzle for ejecting a fluid to be forcibly flown, and a nozzle moving means for moving the fluid ejecting nozzle to change a forced flowing direction of the cleaning liquid.
• the third cleaning device is characterized in that the fluid ejection nozzle is moved in a substantially horizontal direction by the nozzle movement, and the forced flowing direction of the cleaning liquid is substantially reversed.
• the fourth cleaning device includes a cleaning tank in which a cleaning liquid is contained and an object to be cleaned is immersed in the cleaning liquid; an ultrasonic oscillator disposed in the cleaning tank; and an ultrasonic oscillator disposed in the cleaning tank.
• a fluid ejecting nozzle for ejecting a fluid for forcibly flowing the cleaning liquid in a direction substantially opposite to an ultrasonic oscillation direction from the ultrasonic oscillator, and an ultrasonic oscillation from the ultrasonic oscillator and fluid ejection from the fluid ejecting nozzle. And means for alternately switching between.
• a liquid feed pump for injecting the cleaning liquid as the fluid from the fluid injection nozzle is provided, or the cleaning liquid is supplied to the fluid.
• gas introducing means disposed between the liquid feed pump and the fluid injection nozzle for mixing and introducing a compressed gas into the cleaning liquid, wherein the cleaning liquid is used as the fluid.
• a mixture of a gas and a gas is used as the fluid.
• the mixed fluid is ejected from the fluid ejection nozzle.
• the forced flowing direction of the cleaning liquid can be changed. Therefore, the object to be cleaned immersed in the cleaning tank is directly exposed to the forced flow of the cleaning liquid from different directions, and the entire surface is uniformly cleaned.
• the direction in which the cleaning liquid is forced to flow toward the object to be cleaned is changed, there is no occurrence of a stagnation point (point where the flow velocity becomes zero) in the flow of the cleaning liquid. Therefore, the cleaning is performed uniformly regardless of the position of the object to be cleaned in the cleaning tank.
• the cleaning is performed while substantially reversing the forced flow direction of the cleaning liquid.
• the entire surface of the object to be cleaned can be surely and uniformly cleaned.
• the cleaning is performed while sequentially switching the forced flow direction of the cleaning liquid directly to the cleaning object, so that the entire surface of the cleaning object can be surely and uniformly cleaned.
• the direction of the forced flow of the cleaning liquid can be changed because the fluid ejecting nozzle that ejects the fluid for forcibly flowing the cleaning liquid toward the object to be cleaned is moved. Therefore, the object to be cleaned immersed in the cleaning tank is directly exposed to the forced flow of the cleaning liquid from different directions, and the entire surface is uniformly cleaned.
• the direction in which the cleaning liquid is forced to flow toward the object to be cleaned is continuously changed, there is no stagnation point in the flow of the cleaning liquid. Therefore, it is uniformly cleaned regardless of the position of the cleaning object in the cleaning tank.
• the fluid ejection nozzle in a substantially horizontal direction and performing the cleaning while substantially reversing the forced flow direction of the cleaning liquid, the entire surface of the object to be cleaned can be more reliably and uniformly cleaned.
• the cleaning liquid is forcibly flowed in a direction substantially opposite to the ultrasonic oscillation direction from the ultrasonic oscillator, so that the object to be cleaned immersed in the cleaning tank is mechanically cleaned from a different direction.
• ultrasonic cavitation mechanically removes insoluble dirt and facilitates the removal of soluble dirt by the forced flow of the cleaning solution. It is possible to efficiently wash the objects to be cleaned that are mixed and adhered.
• the fluid is divided as a two-phase flow of the gas and the liquid.
• the gas becomes fine bubbles when injected. Therefore, the object to be cleaned can be more uniformly cleaned by the mechanical force of the fine bubbles.
• generation of mist can be prevented by using gas as a balanced bubble.
• the injection timing of the fluid for forcibly flowing the cleaning liquid from the plurality of fluid injection nozzles toward the object to be cleaned is switched, thereby changing the direction of the forced flow of the cleaning liquid.
• the objects to be cleaned are each directly exposed to the forced flow of the cleaning liquid from different directions. Therefore, the entire surface of the object to be cleaned can be uniformly cleaned.
• the direction in which the cleaning liquid is forced to flow toward the object to be cleaned changes, there is no stagnation point in the flow of the cleaning liquid. Therefore, the cleaning is performed uniformly regardless of the position of the object to be cleaned in the cleaning tank.
• the forced flow direction of the cleaning liquid is substantially reversed, so that the entire surface of the object to be cleaned can be surely and uniformly cleaned.
• the forced flow direction of the cleaning liquid directly toward the object to be cleaned changes sequentially, so that the entire surface of the object to be cleaned can be surely and uniformly cleaned.
• the third cleaning apparatus has a nozzle moving means for moving a fluid jet nozzle for jetting a fluid for forcibly flowing the cleaning liquid to change the direction of the forced flow of the cleaning liquid.
• the cleaning objects are each directly exposed to the forced flow of the cleaning liquid from different directions. Therefore, the entire surface of the object to be cleaned can be uniformly cleaned.
• the forced flow direction of the cleaning liquid changes, there is no stagnation point in the flow of the cleaning liquid. Therefore, the object is uniformly washed regardless of the position of the object in the washing tank.
• the fluid ejection nozzle in a substantially horizontal direction and substantially reversing the forced flow direction of the cleaning liquid, the entire surface of the object to be cleaned can be more reliably and uniformly cleaned.
• the fourth cleaning apparatus has a fluid ejection nozzle for forcibly flowing the cleaning liquid in a direction substantially opposite to the direction of ultrasonic oscillation from the ultrasonic oscillator, the object to be cleaned immersed in the cleaning tank is You will be subject to specific washing from different directions. Accordingly, the entire surface of the object to be cleaned is uniformly cleaned, and the surface of the object to be cleaned is uniformly cleaned regardless of the position of the object in the cleaning tank.
• ultrasonic cavitation removes insoluble stains in a non-dissolving manner, and the forced flow of the cleaning solution facilitates the removal of insoluble stains. It is possible to efficiently clean the objects to be cleaned that are mixed and adhered.
• the gas is injected when the fluid is injected into the cleaning liquid. Fine bubbles can be formed. This allows the object to be cleaned to be more uniformly cleaned by the mechanical force of the fine bubbles. Can be. In addition, generation of mist can be prevented by forming gas into fine bubbles.
• FIG. 1 is a view showing the configuration of a cleaning apparatus according to a first embodiment of the present invention
• FIG. 2 is a view for explaining the operation of the cleaning apparatus shown in FIG. 1
• FIG. FIG. 4 shows a schematic diagram of a cleaning liquid regenerating device in the cleaning device shown in FIG. 1
• FIG. 5 shows a cleaning tank portion of a cleaning device according to a modified example of the first embodiment.
• FIG. 6, is a view for explaining the operation of the cleaning apparatus whose main part is shown in FIG. 5
• FIG. 7 is a view showing a cleaning tank part of a cleaning apparatus according to another modification of the first embodiment
• FIG. FIG. 7 is a view for explaining the operation of the cleaning apparatus showing the main parts
• FIG. 9 is a view showing the cleaning tank part of the cleaning apparatus according to the second embodiment of the present invention
• FIG. FIG. 11 is a view for explaining the operation of the cleaning apparatus shown in FIG. 11.
• FIG. 11 is a view showing a cleaning tank portion of the cleaning apparatus according to the third embodiment of the present invention
• FIG. FIG. 11 is a diagram for explaining the operation of the cleaning device showing the main part
• FIG. 13 is a diagram showing a cleaning device used in a specific example using a mixed fluid of a cleaning liquid and a gas
• FIG. FIG. 13 is a view showing a cleaning tank portion of the cleaning device according to the fourth embodiment.
• FIG. 1 is a diagram schematically showing a configuration of a cleaning apparatus according to one embodiment to which the first cleaning method of the present invention is applied.
• the cleaning apparatus 1 shown in FIG. 1 has an immersion cleaning tank 3 in which a cleaning liquid 2 is stored.
• a fluid ejection nozzle 4 for ejecting a fluid for forcibly flowing the washing liquid 2 is arranged.
• four fluid ejection nozzles 4 a, 4 b, 4 c, and 4 d are arranged in parallel along a bottom surface 3 a which is one of the tank walls of the immersion cleaning tank 3.
• Each fluid injection nozzle 4 has ten injection ports 5 opened in the same direction, that is, upwards.
• the number of the fluid jet nozzles 4 may be set according to the flow state of the cleaning liquid to be obtained, the size of the cleaning tank 3, and the like, and is not limited to four.
• the four fluid injection nozzles 4a, 4b, 4c, and 4d described above are a first nozzle group consisting of two outer fluid injection nozzles 4a and 4d, and two inner fluid injection nozzles 4 b, 4 c and a second nozzle group, and an injection timing control device 6 for switching the fluid injection timing for each group and substantially reversing the forced flow direction of the cleaning liquid 2 is provided. ing.
• a cleaning liquid outlet 7 is provided at the bottom of the immersion cleaning tank 3, and the cleaning liquid outlet 7 is connected to a cleaning liquid circulation system 8.
• a pressurizing pump (high-pressure pump) is interposed in the cleaning liquid circulation system 8 as a liquid sending pump 12 for circulating the cleaning liquid via a first cleaning liquid valve 9, a Y-strainer 10 and a filter 11. .
• the above-described injection timing control device 6 is connected to the discharge side of the liquid sending pump 12 via an electromagnetic valve as the cleaning liquid gate valve 13.
• a gas introduction device 14 described below is interposed between the cleaning liquid gate valve 13 and the injection timing control device 6.
• the injection timing control device 6 performs the fluid injection for each of the first nozzle group by the outer fluid injection nozzles 4a and 4d and the second nozzle group by the inner fluid injection nozzles 4b and 4c.
• the first and second nozzle groups have cleaning liquid circulation pipes 15 a and 15 b connected to each other so that the first and second nozzle groups can be implemented. These cleaning liquid circulation pipes 15a and 15b are connected to the cleaning liquid circulation system 8, respectively, and control the fluid injection timing for each of the first nozzle group and the second nozzle group.
• Injection timing control solenoid valves 16a and 16b of No. 2 are inserted. The operation of these injection timing control solenoid valves 16a and 16b is controlled by a control system not shown.
• the above-described gas introduction device 14 is for introducing a compressed gas, for example, compressed air, into the cleaning liquid 2 circulated by the liquid sending pump 12.
• a compressed gas for example, compressed air
• the ejector as the gas introduction device 14 is connected to a compressed air supply source 20 via a check valve 17 for backflow prevention, a compressed air flow control valve 18 and a valve 19.
• a check valve 17 for backflow prevention a compressed air flow control valve 18
• a valve 19 a valve 19
• an inert gas or the like may be used as the compressed gas depending on the type of the cleaning liquid. The projector will be described later in detail.
• the above-described cleaning apparatus 1 is configured so that the cleaning liquid 2 is delivered to the cleaning liquid regenerating means 22 via a cleaning liquid discharge pipe 21 connected near the bottom of the immersion cleaning tank 3.
• the cleaning liquid 2 is regenerated by the cleaning liquid regenerating means 22 described above.
• the cleaning liquid is supplied again to the immersion cleaning tank 3.
• the cleaning liquid regenerating means 22 will be described later in detail.
• the immersion cleaning tank 3 is provided with a cleaning heat device 23, whereby the cleaning liquid 2 can be heated or heated.
• a direct heating device such as a heater using a flame-retardant oil or the like as a heating medium or a heater is appropriately used depending on the type of the cleaning liquid 2.
• the immersion cleaning tank 3 ultrasonic cleaning, swing cleaning, spin cleaning, barrel cleaning, and the like of an object to be cleaned can be used in combination, if necessary.
• a rinsing tank, a drying device, and the like are arranged following the immersion washing tank 3.
• the second cleaning liquid inserted into the cleaning liquid sub-circulation system 24 connected to the discharge side of the liquid sending pump 12 is used. Open the valve 25 and circulate the washing liquid 2. In this way, by continuing the circulation of the cleaning liquid 2, the uniformity of the cleaning liquid 2 can be achieved. It is also preferable to open the second cleaning liquid valve 25 to continue the circulation of the cleaning liquid 2 at times other than when the cleaning step is actually being performed. At this time, the cleaning liquid gate valve 13 may be opened at the same time.
• the cleaning liquid 2 can be forced to flow regardless of the cleaning liquid, the compressed gas, or the mixed fluid of the cleaning liquid and the compressed gas.However, prevention of mist described later and prevention of mass consumption of factory air In view of the formation of a better forced flow of the cleaning liquid 2, it is preferable to use a mixed liquid of the cleaning liquid and compressed air for the cleaning liquid L.
• the mixed fluid of the cleaning liquid and the compressed air or the like also contributes to the improvement of the cleaning performance.
• the injection amount of the cleaning liquid, compressed air, and the mixed fluid of these cleaning liquids is The amount is not particularly limited as long as the amount of the purified liquid 2 can be forcedly flowed, and is set according to the form of the object to be cleaned, the degree of contamination, the cleaning effect to be obtained, and the like.
• various cleaning agents such as a non-aqueous cleaning agent such as a water-based cleaning agent and a solvent-based cleaning agent can be used.
• a solvent-based cleaning agent is preferable.
• Solvent-based cleaning agents include silicone-based solvents, hydrocarbon-based solvents, perfluorocarbon-based solvents, terpene-based solvents, mixed solvents of these, etc., or the addition of cleaning active ingredients such as alcohol and various additives.
• a solvent such as an alkylamine oxide-based solvent, a polyglycol-based solvent, a terpene-based solvent, a hydrocarbon-based solvent, and a detergent containing these and a surfactant
• a solvent-based cleaning agent that can rinse the cleaning composition with water can also be used.
• aqueous detergent examples include aqueous solutions of inorganic acids, organic acids, alkalis, and the like, detergents containing a surfactant as a main component, and aqueous solutions of these, and those obtained by adding various additives thereto. The same applies to the cleaning liquid in other examples described later.
• the cleaning device of the present invention is preferably combined with a cleaning agent that exerts a cleaning effect by the dissolving power of the cleaning agent itself, such as a solvent-based cleaning agent.
• a cleaning agent that exerts a cleaning effect by the dissolving power of the cleaning agent itself, such as a solvent-based cleaning agent.
• the diffusion of the cleaning liquid can be accelerated by the forced flow, so that the cleaning effect by the dissolving power of the cleaning agent itself can be further enhanced.
• a solvent-based detergent dissolves dirt such as oils and fats in the detergent, which is suitable for the cleaning device of the present invention.
• aqueous detergents contain a surfactant, and the hydrophilic and hydrophobic groups (lipophilic groups) of the surfactant take in dirt such as oils and fats and disperse them in the aqueous detergent.
• the specific gravity of the fat is lighter than that of water, the dirt such as the fat taken in by the surfactant floats on the water surface of the aqueous detergent.
• the cleaning object 27 stored in the basket 26 is immersed in the immersion cleaning tank 3 to remove various types of dirt such as oil and water adhered to the surface.
• the first injection timing control solenoid valve 16a is opened and the second injection timing control solenoid valve 16b is closed, whereby the cleaning liquid 2 is opened.
• the fluid to be ejected may be any of the cleaning liquid, the compressed gas, and the mixed fluid thereof as described above.
• the cleaning liquid 2 is released by opening the second solenoid valve 16b for controlling the injection timing and closing the first solenoid valve 16a for controlling the injection timing.
• the fluid to be forced to flow is jetted from the second nozzle group by the two inner fluid jet nozzles 4b and 4c.
• the direction of the forced flow is reversed as shown by the arrow in the figure, and the flow is reversed in the left half of the immersion washing tank 3.
• a clockwise forced flow occurs, and near the center of the immersion washing tank 3, the washing liquid 2 flows upward, and at both ends, the washing liquid 2 flows downward from above.
• the cleaning liquid 2 is forced to flow upward from the bottom toward the object 27.
• the forced flow of the cleaning liquid 2 mainly causes Mechanical detergency is applied to the lower surface of the object 27 to be cleaned.
• the cleaning liquid does not have a stagnation point at a specific location, and the immersion cleaning tank 3 In this case, it is possible to prevent uneven cleaning due to the position of the object 27 to be cleaned.
• Switching between the fluid ejection timing from the first nozzle group by the outer fluid ejection nozzles 4a and 4d and the fluid ejection timing from the second nozzle group by the inner fluid ejection nozzles 4b and 4c is as follows. Low per immersion It is preferable to switch a plurality of times in order to enhance the cleaning effect that can achieve the above-mentioned effect if performed at least once.
• the substrate is immersed in such a way that the forced flow direction of the cleaning liquid 2 and the gap between the substrates are parallel, a passage between the substrates is formed. Since the flow of the cleaning liquid 2 is generated, and the direction of the flow is reversed by switching the fluid ejection timing, a good dirt removal effect can be obtained. Further, in the cleaning apparatus 1 of the above embodiment, since the fluid injection nozzle 4 is disposed at the bottom of the immersion cleaning tank 3, it does not affect the entry and exit of the object to be cleaned 27, and the immersion cleaning tank 3 is not affected. It is possible to achieve a reduction in size and an improvement in space efficiency.
• the object to be cleaned 27 is not particularly limited, and is applicable to cleaning of industrial uses such as metals, ceramics, and plastics. More specifically, metal parts, surface treatment parts, electronic parts, semiconductor parts, electric parts, Precision machine parts, optical parts, glass parts, ceramic parts, etc. This is particularly effective when washing a large amount in a basket 26 or the like. However, it is also possible to wash the object 27 without cleaning the basket 26 or the like.
• Technocare FEE-90 (trade name, manufactured by Toshiba Corporation) was used as the cleaning liquid 2, and 900 pressed parts with press working oil adhering as dirt were stored in a basket 26 as a cleaning object 27 and immersed. Washing was performed by immersing in washing tank 3 for 30 seconds.
• the fluid mixture of the cleaning liquid and the compressed air is ejected from the fluid ejection nozzles 4, and this fluid ejection is performed by the first nozzle group by the outer fluid ejection nozzles 4a and 4d and the inner fluid ejection nozzles 4 Cleaning was performed by alternately switching between the second nozzle group by b and 4c every 30 seconds.
• Specific conditions were as follows: pump ejection pressure 5.8 kg / cm 2 , ejection volume 26 liters Z, air pressure 4.613 ⁇ 4 / ⁇ .
• cleaning was performed under the same conditions as in the above example, except that the cleaning liquid was allowed to flow only from below to above.
• the pressed parts were arranged in the basket with the protrusions of the pressed parts facing upward.
• the ejector restricts a part of the pipe 28 through which the fluid flows, and an opening 29 is provided in this part.
• the Bernoulli principle This is a device that depressurizes and aspirates the part connected to the opening 29 by utilizing the fact that the pressure is reduced by the pressure.
• the cleaning liquid is passed through the pipe 28 and compressed air or the like is introduced from the opening 29.
• the pressure of the introduced air can be reduced.
• the air pressure obtained in the factory of “ ⁇ is at most about 5 kg / cm 2
• the pressure of the liquid discharged from the liquid sending pump (pressurizing pump) 12 is about 6 to 7 kg / cm 2. Therefore, compressed air cannot be simply introduced using a T-joint, etc.
• the discharge pressure of the liquid is reduced to introduce compressed air, the cleaning effect will naturally decrease.
• air at a pressure about 1 to 2 kg / cm2 lower than the pressure on the liquid side can be introduced into the cleaning liquid, so that the cleaning effect by the cleaning liquid injection is not reduced. Introducing ⁇ etc. into the cleaning solution with the air pressure of general factories is sufficient.
• the cleaning liquid regenerating means 22 for example, as shown in FIG. 4, a means having a distillation apparatus such as a reduced pressure distillation tank 30 is preferably used.
• the cleaning liquid regeneration means 22 shown in Fig. 4 mainly consists of the cleaning liquid supply pipe 31, the reduced pressure distillation tank 30, the condensing cooler 32, the regenerated cleaning liquid storage tank 33, the regenerated cleaning liquid circulation pump 34, etc. It is configured.
• a cleaning liquid inlet 30 a is provided at the lower part of the vacuum distillation still 30, and the cleaning liquid inlet 30 a is connected to the liquid level regulator 35.
• the liquid level adjuster 35 supplies the cleaning liquid via a heat exchanger 37 that exchanges heat between the steam pipe 36 connected to the upper part of the decompression still 30 and the supplied cleaning liquid, for example, via an economizer.
• a heat exchanger 37 that exchanges heat between the steam pipe 36 connected to the upper part of the decompression still 30 and the supplied cleaning liquid, for example, via an economizer.
• the cleaning liquid supply pipe 31 is directly connected to, for example, the cleaning liquid discharge pipe 21.
• a cleaning liquid storage tank or the like may be provided on the way.
• the ffi-type distillation still 30 and the condensing cooler 3 2 are connected, for example, to a condenser by a steam pipe 36, and a regenerating washing liquid storage tank 33 is connected to the lower part of the condensing cooler 32. .
• a pressure reducing pump 38 is connected to the regeneration washing Sf tank 33, and the pressure from the liquid level regulator 35 to the pressure reducing still 30 is reduced to a predetermined pressure by the pressure reducing pump 38.
• the washing liquid is introduced from the liquid level adjuster 35 into the vacuum distillation still 30.
• the introduction of the cleaning liquid is performed via a solenoid valve 39.
• a heating device 40 for example, a heater, is installed around the decompression distillation still 30. The cleaning liquid introduced into the distillation still 30 is heated by the heating device 40 under ff. Attempts to recover are vaporized.
• the steam generated by heating at a temperature lower than the atmospheric pressure is sent to the condenser 32 through the steam pipe 36. Cooling water is supplied into the condensing cooler 32 from a cooling water supply device (not shown), and the supplied steam is condensed.
• the condensate is stored in the regenerating cleaning liquid storage tank 33 as the regenerating cleaning liquid 41.
• the regenerated cleaning solution 41 stored in the regenerated cleaning solution storage tank 33 is supplied to the immersion cleaning tank 3 by the regenerated cleaning solution circulation pump 34 and reused as the cleaning solution 2.
• vacuum distillation enables direct treatment and regeneration without diluting a high-load washing solution, and also allows lower heat treatment temperatures to improve thermal efficiency. Becomes Danger is also reduced when treating flammable solvents.
• Vacuum distillation not only increases processing efficiency and thermal efficiency, but also suppresses evaporation and thermal decomposition of various substances contained in the cleaning solution, and prevents scale from adhering to piping systems.
• it is effective to use a silicon-based antifoaming agent in the vacuum distillation treatment.
• the cleaning liquid 2 is always forced to flow, and the dirt separated from the object to be cleaned 27 also circulates together with the cleaning liquid 2. It is preferable to maintain the cleanliness of the cleaning liquid 2 and prevent re-adhesion of dirt.
• the cleaning liquid regenerating means 22 is originally provided for purifying and reusing the cleaning liquid 2, but when a high-pressure pump is used as in the cleaning apparatus of the present invention.
• the regeneration of the washing liquid is effective from the viewpoint of protecting the pump and the valve.
• liquid stains such as oil stains
• solid stains such as chips generated by cutting and residues of abrasive grains used in the polishing process adhere to the cleaning object brought into the cleaning device. Something you are doing. For a pump that generates high pressure, such solid dirt is a great enemy. If the amount of solid dirt is large, the pump or valve may be worn out in a short time.
• the cleaning liquid circulation system for fluid ejection and the cleaning Although the example in which the circulation system for regenerating the liquid is installed separately has been described, the fluid injection nozzle 4 and the like can be connected to the circulation system for regenerating the cleaning liquid. Further, the liquid can be sent to the fluid ejection nozzle 4 from a separately installed washing liquid storage tank or the like.
• two circular fluid injection nozzles 43a and 43b for injecting a fluid for forcibly flowing the cleaning liquid are concentric, and the bottom of the immersion cleaning tank 42 Are arranged in parallel along.
• the two circular fluid injection nozzles 43a and 43b have injection ports 5 opened in the same direction, that is, upward.
• the other configuration is the same as that of the cleaning device 1 shown in FIG. 1, and the two circular fluid injection nozzles 43 a and 43 b are respectively connected to the injection timing control device 6. That is, the outer circular fluid injection nozzle 43a is connected to the first injection timing control solenoid valve 16a, and the inner circular fluid injection nozzle 43b is connected to the second injection nozzle. It is connected to the timing control solenoid valve 16b.
• the first injection timing control solenoid valve 16a is opened, and the second injection timing control solenoid valve 16b is closed, as shown in FIG. 6 (a).
• the fluid for forcibly flowing the cleaning liquid 2 is ejected only from the outer circular fluid ejection nozzle 43a.
• the cleaning liquid 2 flows from the bottom to the top at the outer periphery of the circular immersion cleaning tank 42, as shown by the arrow in the figure, and the cleaning liquid near the center. 2 flows from top to bottom.
• the cleaning liquid 2 is forcibly flowed from the top toward the cleaning object. Due to the forced flow of the cleaning liquid 2, a mechanical cleaning power is mainly applied to the upper surface side of the object to be cleaned.
• the cleaning liquid 2 is forcibly applied as shown in FIG. 6 (b).
• the fluid to be flown is ejected only from the inner circular fluid ejection nozzle 43b.
• the cleaning liquid 2 flows from the bottom to the top near the center of the circular immersion cleaning tank 42, and is washed at the outer periphery. Purified liquid 2 Flows from top to bottom. As you can see, there are some products that are not shown.
• the cleaning liquid 2 is forcibly flown from the bottom toward the object to be cleaned. Due to the forced flow of the cleaning liquid 2, a mechanical cleaning power is mainly applied to the lower surface side of the object to be cleaned.
• the injection from the outer circular fluid injection nozzle 43a and the injection from the inner circular fluid injection nozzle 43b are alternately switched, and the direction of the forced flow of the cleaning liquid 2 is reversed.
• the entire surface of the object to be cleaned can be uniformly cleaned.
• there is no stagnation point in the flow of the cleaning liquid there is no unevenness in cleaning due to the position of the object to be cleaned in the circular immersion cleaning tank 42.
• the size of the cleaning tank is also the same as in the above-described embodiment.
• Each fluid injection nozzle 4a, 4b, 4c and 4d for injecting a fluid for forcibly flowing the cleaning liquid are provided on the side wall 3b of the immersion cleaning tank 3 near one side wall in the immersion cleaning tank 3. They are erected in parallel. Each fluid ejection nozzle 4 has ten ejection ports 5 opened in the same direction, that is, in the horizontal direction. Other configurations are the same as those of the cleaning apparatus 1 shown in FIG.
• the four fluid ejection nozzles 4a, 4b, 4c, and 4d are the first group of two fluid ejection nozzles 4a and 4d on the outside, and the two fluid ejection nozzles 4b and 4 on the inside.
• the nozzles are divided into two groups, namely a second nozzle group by c, and each group is connected to the injection timing control device 6. That is, the first group of nozzles by the outer fluid injection nozzles 4a and 4d is connected to the first injection timing control solenoid valve 16a, and the first group of fluid injection nozzles by the inner fluid injection nozzles 4b and 4c. The second nozzle group is connected to a second injection timing control solenoid valve 16b.
• the first injection timing control solenoid valve 16a is opened, and the second injection timing control solenoid valve 16b is closed, as shown in FIG. 8 (a).
• the fluid for forcibly flowing the cleaning liquid 2 is ejected from the first nozzle group by the outer fluid ejection nozzles 4a and 4d.
• the cleaning liquid 2 flows in the fluid ejection direction at the end of the immersion washing tank 3, as shown by the arrow in the figure, and near the center. Then it flows in the opposite direction. This Due to the forced flow of the cleaning liquid 2 toward the object to be cleaned, a mechanical cleaning force is mainly applied to the surface of the object to be cleaned on the side opposite to the fluid injection nozzle 4.
• the ejection from the first nozzle group by the outer fluid ejection nozzles 4a and 4d and the ejection from the second nozzle group by the inner fluid ejection nozzles 4b and 4c alternate.
• the entire surface of the object to be cleaned can be uniformly cleaned even in the case of using the upstanding fluid jet nozzle 4 as in the above-described embodiment. it can.
• there is no stagnation point in the flow of the cleaning liquid there is no unevenness in cleaning depending on the position of the object to be cleaned in the immersion cleaning tank 3.
• the fluid jet nozzle 4 can be easily replaced according to, for example, the shape of the object to be cleaned. It has advantages such as being able to.
• four fluid injection nozzles 4a, 4b, 4c, 4d for injecting a fluid for forcibly flowing the cleaning liquid are arranged so as to surround the object to be cleaned. It is erected at a separate location.
• These four fluid injection nozzles 4a, 4b, 4c, 4d are connected to injection timing control solenoid valves (not shown), respectively, and the four fluid injection nozzles 4a, 4b, 4d
• the fluid injection timings from c and 4d can be controlled separately. That is, the cleaning device of this embodiment has an injection timing control unit (not shown) having the above-described injection timing control solenoid valve and the like.
• the other configuration is the same as that of the cleaning apparatus 1 shown in FIG.
• the cleaning apparatus of this embodiment first, only the first injection timing control solenoid valve is opened, and as shown in FIG. 10 (a), a fluid for forcibly flowing the cleaning liquid 2 toward the object to be cleaned is provided.
• the first fluid ejection nozzle 4a only ejects the object to be cleaned.
• a fluid for forcibly flowing the cleaning liquid 2 toward the object to be cleaned is jetted from only the second fluid jet nozzle 4a toward the object to be cleaned.
• the forced flow of the cleaning liquid 2 toward the object to be cleaned is maintained, and the forced flow direction of the cleaning liquid 2 is changed. Can be changed by about 90 degrees.
• the entire surface of the object to be cleaned can be uniformly cleaned as in the above-described embodiments. Can be.
• no uneven cleaning occurs due to the position of the object to be cleaned in the circular immersion cleaning tank 42.
• FIG. 11 is a diagram showing a cleaning tank portion of the cleaning apparatus of this embodiment. Near the bottom of the cleaning tank 3, two fluid injection nozzles 44 a for injecting a fluid for forcibly flowing the cleaning liquid 2 are shown. 4 4 b are arranged in parallel. These two fluid ejection nozzles 44 a and 44 b have an L-shape, and are respectively held by nozzle moving devices 45 installed outside the cleaning tank 3. The two fluid injection nozzles 44a and 44b are configured to move in the cleaning tank 3 in a substantially horizontal direction along the bottom surface by the nozzle moving device 45.
• the two fluid injection nozzles 44a and 44b are connected to the cleaning liquid circulation system 8 with a liquid feed pump 12 and a gas introduction device 14 interposed in the same manner as the cleaning device 1 shown in FIG. ing.
• two fluid injection nozzles 44 a and 44 b are connected to one cleaning liquid circulation pipe 15 connected to the gas introduction device 14.
• the cleaning liquid circulation pipe 15 is formed of a flexible pipe so as not to hinder the movement of the fluid injection nozzles 44a and 44b. Other than these, see Figure 1. It has the same configuration as the cleaning device 1 shown.
• FIG. 12 (a) when the fluid is jetted in a state where the two fluid jet nozzles 44a and 44b are respectively located at the outermost positions.
• the cleaning liquid 2 flows from bottom to top at both ends of the immersion cleaning tank 3, and the cleaning liquid 2 flows from top to bottom near the center. Due to the forced flow of the cleaning liquid 2 toward the object to be cleaned in the vicinity of the central portion, a unique cleaning power is mainly applied to the upper surface side of the object to be cleaned.
• the two fluid injection nozzles 44a and 44b are respectively moved toward the center of the tank as indicated by arrow B in the figure.
• Fig. 12 (b) when the two fluid injection nozzles 44a and 44b move to the innermost positions, respectively, as shown by arrow C in the figure, Near the center, the cleaning liquid 2 flows from bottom to top, and at both ends, the cleaning liquid 2 flows from top to bottom.
• the flow direction of the cleaning liquid 2 is 180 degrees opposite from the initial state (shown in Fig. 12 (a)). It changes continuously to the inverted state (shown in Fig. 12 (b)). Therefore, the object to be cleaned is directly exposed to the flow of the cleaning liquid 2 from both the front and back surfaces, and also from the intermediate direction, so that the entire surface of the object to be cleaned can be uniformly cleaned.
• the injection from the fluid injection nozzles 44a and 44b is a parallel injection, there is no stagnation point in the flow of the cleaning liquid 2 even during the movement of the fluid injection nozzles 44a and 44b. Therefore, there is no unevenness in cleaning depending on the position of the object to be cleaned in the immersion cleaning tank 3.
• one or a plurality of fluid ejection nozzles may be moved all over the immersion cleaning tank 3. It can also be configured to be moved over As described above, if the direction of flow of the cleaning liquid 2 can be changed by moving the fluid ejection nozzle, and preferably by 180 degrees, the same effect as in the above embodiment can be obtained.
• the disposition position of the fluid injection nozzles 4 is not limited to the vicinity of the bottom of the immersion cleaning tank 3 but may be the vicinity of the side wall of the immersion cleaning tank 3. In this way, by disposing the fluid injection nozzle near the side wall of the immersion cleaning tank, the nozzle movable type A cleaning device can be applied. In this case, it is preferable to move the fluid ejection nozzle by 180 degrees or more.
• the cleaning device shown in FIG. 13 has four fluid injection nozzles 4 for injecting a fluid for forcibly flowing the cleaning solution 2 near the bottom of the immersion cleaning tank 3, similarly to the cleaning device shown in FIG. .
• a cleaning liquid outlet 7 is provided at the bottom of the immersion cleaning tank 3, and the cleaning liquid outlet 7 is connected to a cleaning liquid circulation system 8.
• a first cleaning liquid valve 9, a Y-strainer 10, a filter 11, and a pressurizing pump are sequentially inserted as a liquid sending pump 12 for circulating the cleaning liquid.
• a gas introducing device 14, for example, the above-described ejector force is connected to the discharge side of the liquid sending pump 12 via an electromagnetic valve serving as a cleaning liquid gate valve 13.
• the gas introduction device 14 and the four fluid injection nozzles 4 are connected by a cleaning liquid circulation pipe 15.
• the injector serving as the gas introduction device 14 is connected to a compressed air supply source 20 via a check valve 17 for backflow prevention, a compressed air gate valve 18 and a Mffi valve 19. The same applies to the cleaning liquid regenerating means 22 and the cleaning liquid heating device 23.
• the cleaning liquid valve 13 and the compressed air gate valve 18 are both opened, so that the mixed fluid of the cleaning liquid and the compressed air or the like is jetted from the fluid jet nozzle 4 while the cleaning target (not shown) is cleaned.
• the object can be washed.
• the mixed fluid of the cleaning liquid and the compressed air or the like is jetted in this manner, the fluid is divided as a two-phase flow of gas and liquid, so that when this fluid is jetted into the cleaning liquid 2, the compressed air becomes It becomes fine bubbles. Therefore, uniform cleaning of the object to be cleaned can be enhanced by the mechanical force of the fine bubbles.
• mist was generated when the pressure of the compressed air became, for example, 0.5 kg / cm 2 or more. If only compressed air is used, in order to prevent the generation of mist, the air pressure must be set to L or pneumatic pressure, where the cleaning effect is hardly obtained. won. On the other hand, by injecting a mixed fluid of the cleaning liquid and the compressed air into the cleaning liquid 2, even if the pressure of the compressed air was set to, for example, 5 kg / c or more, generation of mist could be prevented.
• FIG. 14 is a diagram showing a cleaning tank portion of the cleaning apparatus of this embodiment.
• An ultrasonic oscillator 46 is provided near the bottom of the immersion cleaning tank 3. Ultrasonic waves are oscillated upward from the ultrasonic oscillator 46.
• two fluid ejection nozzles 4 for ejecting a fluid for forcibly flowing the washing liquid are arranged outside the bottom of the immersion washing tank 3. Fluid is ejected upward from these fluid ejection nozzles 4, but flows downward from two washing liquids in a substantial washing area, that is, in the vicinity of the storage position of the basket 26 or the like.
• the ultrasonic wave The cleaning liquid 2 is forced to flow from above to below in a direction substantially opposite to the direction of ultrasonic oscillation from the oscillator 46, that is, toward the object to be cleaned.
• the equipment and the like attached to the fluid ejection nozzle 4 are the same as those in the above-described embodiments.
• the ultrasonic oscillation of the ultrasonic oscillator 46 and the fluid ejection from the fluid ejection nozzle 4 are configured to be alternately switched by a control system (not shown) as means for switching these operations. I have. That is, in the state where the fluid ejection from the fluid ejection nozzle 4 is stopped, the ultrasonic oscillation from the ultrasonic oscillator 46 is performed for a predetermined time, and then the ultrasound oscillation is stopped and the fluid ejection from the fluid ejection nozzle 4 is performed. It is configured to perform for a predetermined time. .
• the cleaning liquid 2 is forcibly flown in a direction substantially opposite to the ultrasonic oscillation direction from the ultrasonic oscillator 46, and the ultrasonic oscillation from these ultrasonic oscillators 46 and the forced flow of the cleaning liquid 2 are alternately performed.
• the object to be cleaned immersed in the immersion cleaning tank 3 receives mechanical cleaning power from both the front and back surfaces in this order. Therefore, the entire surface of the object to be cleaned is uniformly cleaned, and is uniformly cleaned regardless of the position of the object to be cleaned in the cleaning tank.
• non-soluble stains are mechanically peeled off by ultrasonic cavitation, and removal of soluble stains is accelerated by the forced flow of the cleaning solution 2. It is possible to efficiently clean an object to be cleaned to which both and adhere to. In this way, by using the ultrasonic oscillator 46 and the fluid jet nozzle 4 for forcibly flowing the cleaning liquid 2, non-soluble dirt and soluble dirt are mixed and the cleaning target is adhered to.
• An effective cleaning device can be configured.
• the cleaning method and the cleaning apparatus of the present invention it is possible to suppress the occurrence of uneven cleaning depending on the part of the object to be cleaned and the position in the cleaning tank. It is possible to uniformly clean the entire surface of a large amount of the cleaning object.
• Such a cleaning method and a cleaning apparatus are useful for cleaning for various industrial uses and the like.
• the fourth cleaning method and the fourth cleaning apparatus in addition to the above-described effects, the object to be cleaned to which non-soluble dirt and soluble dirt are mixedly adhered can be efficiently removed. It can be washed well. Furthermore, by using a mixed fluid of a cleaning liquid and a gas as the fluid for forcibly flowing the cleaning liquid, in addition to the above effects, the cleaning effect can be enhanced while preventing the generation of mist. The ability to improve the drying properties is possible.

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• Cleaning By Liquid Or Steam (AREA)

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Citations (8)

• 1995
  • 1995-04-14 WO PCT/JP1995/000730 patent/WO1995028235A1/ja active Search and Examination
  • 1995-04-14 CN CN95193443A patent/CN1150397A/zh active Pending
  • 1995-04-17 TW TW084103744A patent/TW270904B/zh active
• 1996
  • 1996-10-14 KR KR1019960705744A patent/KR970702105A/ko not_active Ceased

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