WO1995010060A1 - Microscope optique en champ proche - Google Patents

Microscope optique en champ proche Download PDF

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Publication number
WO1995010060A1
WO1995010060A1 PCT/EP1993/002713 EP9302713W WO9510060A1 WO 1995010060 A1 WO1995010060 A1 WO 1995010060A1 EP 9302713 W EP9302713 W EP 9302713W WO 9510060 A1 WO9510060 A1 WO 9510060A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
field
sample
angles
microscope
Prior art date
Application number
PCT/EP1993/002713
Other languages
English (en)
Inventor
Bert Hecht
Harald Heinzelmann
Lukas Novotny
Wolfgang D. Pohl
Original Assignee
International Business Machines Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corporation filed Critical International Business Machines Corporation
Priority to US08/635,943 priority Critical patent/US5739527A/en
Priority to CA002170860A priority patent/CA2170860C/fr
Priority to EP93921916A priority patent/EP0722574B1/fr
Priority to PCT/EP1993/002713 priority patent/WO1995010060A1/fr
Priority to DE69320992T priority patent/DE69320992T2/de
Priority to KR1019960701695A priority patent/KR100262878B1/ko
Publication of WO1995010060A1 publication Critical patent/WO1995010060A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Definitions

  • the invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM). Especially, it concerns an aperture scanning optical microscope (a-SNOM).
  • SNOM scanning near-field optical microscope
  • a-SNOM aperture scanning optical microscope
  • the aperture is implemented as a sharply pointed optically transparent body covered with an opaque layer into which an opening is formed at the apex of the body, the opening having a diameter small compared to the wavelength of the light used.
  • the classical scanning near-field optical microscope employs a tiny aperture with an entrance pupil diameter that is small with respect to the wavelength of the light used for illuminating the object to be inspected.
  • a-SNOM aperture-scanning near-field microscope
  • Directed at the aperture is a laser beam of which a minute part passes to impact the surface of the object. If the object is placed from the aperture at a distance which is also small compared to the wavelength, that is, in the near-field, the light reflected by, or transmitted through, the object can be collected. The transmitted light is collected at an axis perpendicular to the sample surface and opposite of the aperture.
  • the detected light intensity of the described a-SNOM is, however, insensitive to variations in the distance between tip and sample. It is therefore difficult to use the measured signal to control the approach and distance of the tip and sample.
  • the basis of operation of a second type of SNOM is the sample-modulated tunneling of normally internally reflected photons to a sharply pointed optically transparent tip.
  • the source of the photons is the evanescent field produced by the total internal reflection of a light beam from the sample surface.
  • An internal reflection is caused by placing the sample surface at the hypothenuse face of a total-reflection prism.
  • the light beam enters perpendicular to one of the side faces of the prism to be totally reflected by the hypothenuse face.
  • the prism has been replaced by a hemisphere.
  • the spatial variations in the evanescent field intensity form the basis for imaging. They essentially provide an exponeni : ally decaying waveform normal to the sample surface. Photons tunneling from the total internal reflection surface to the tip are guided to a suitable detector which converts the light flux to an electrical signal.
  • the PSTM detects a signal only when the tip is placed within the decay length of the evanescent wave, allowing an accurate distance control.
  • the PSTM relates to the illumination of the sample: In contrast to the a-SNOM, the whole sample is irradiated throughout the total measuring time. Thus, the probability of damages through heating or other effects of the light is enlarged. Further, the PSTM shows an inferior lateral resolution compared to the a-SNOM techniques, due to the transparent optical probe tip.
  • One way of improving this resolution is to cover the tip of a PSTM in a manner known by a-SNOM techniques by an opaque material leaving only a tiny aperture which in this case serves to collect the light from a well-defined spot of the sample, however, at the cost of the detected light intensity.
  • the new invention aimes at eliminating the described shortcomings and to provide an a-SNOM with an improved distance control. It is a further object of the invention to broaden the scope of application for near-field optical microscopy.
  • the present invention provides a near-field optical microscope with means to detect the intensity of light transmitted through a sample and emerging from the near-field at an angle 0 substantially differing from the direction perpendicular to a plane defined by the sample, preferably at an angle ⁇ larger than the critical angle 0 C
  • the invention introduces angle-resolved measurement in near-field microscopy, in particular at a range of angles hitherto not exploited by any type of microscopy.
  • a critical angle is described. Though this concept is well known, misinterpretations might arise from incoherent definitions, occasionally found in the art.
  • a critical angle is observed when light passes a boundary between two media with different indices of refraction, e.g.
  • n, and n 2 respectively, with n, ⁇ n 2 .
  • Any incident light beam which passes the boundary coming from the less dense medium (n,) is refracted in the denser medium (n 2 ) at an angle smaller as or equal to the critical angle.
  • the sinus of the critical angle ⁇ c equals n 2 /n,.
  • the angles of incidence and of refraction are both measured with regard to the normal of the boundary , i.e. with regard to an axis perpendicular to the boundary at the spot at which the beam meets the boundary.
  • the current invention discloses means to detect light emerging at angles larger than ⁇ c .
  • the angle ⁇ defines the direction of observation, taking into account, that any detector has a finite area sensible for measuring.
  • the intensity of light measured is the one emerging at a solid angle from the near-field, said solid angle being defined by the sensible area of the detector with ⁇ at its center.
  • a direction is defined as being substantially differing from the direction perpendicular to the sample plane, if this direction is not within the solid angle of observation as described above.
  • the new microscope comprises sample carrying means having a face onto which the sample is placed during a measurement.
  • the sample carrying means are made from a transparent material and formed to let the light, emerging from the sample area at angles 0 larger than the critical angle 0 C , propagate away from said area towards light detecting means.
  • the fraction of light emerging into the classically forbidden area is already small, it is important to avoid a further loss of intensity at the boundary between the sample carrying means and the light detecting means.
  • the boundary of the sample carrying means are either tilted at an angle, securing that light emerging from the angle (or range of angle) to be measured meets the boundary substantially perpendicular, or connected to the light detecting medium through an intermediate medium with an index of refraction equal to or greater than the index of refraction of the sample carrier.
  • the sample carrying means comprise a hemisphere with its flat face attached to the site of the sample within the range of the near-field. Treating the site of the near-field as a point source of radiation, the curvature of the other face of the hemisphere secures that light emerging from the near-field propagates perpendicular with regard to said other face, provided that the site of the near-field is centered at the flat face.
  • the hemispherical shape of the sample carrier allows an arbitrary positioning of the light detecting means at any angle 0 or ⁇ , with ⁇ being an arbitrary angle in a plane parallel to the flat face and, thus, to the surface of the sample (azimuth angle).
  • it has to be accompanied by either a moveable light detector which can be placed at any point of the hemisphere, or by a detector array covering at least a part of the curved face of the hemisphere.
  • the measurement will be restricted to a smaller range of ⁇ and ⁇ : typically, most of the radiation emerging into the forbidden area is confined to a range of 20 degrees above the critical angle. Consequently, the sample carrying means can be either shaped as a spherical section, or, by giving up the curved outer face, as a prism, appropriately chosen to let the light, emerging from the preferred range of angles, propagate to the detector. Again, either an array of detectors or at least one moveable detector is used in these embodiments of the invention, if a larger range of angles ⁇ or ⁇ should be covered. It might be particularly useful to form one of the described sample carrying means similar to or as a part of a standard optical stage facilitating the installation of the device in other, non near-field types of optical microscopes.
  • the sensitivity of a measurement is further improved by adding (or subtracting) the light intensity as being measured at different directions and, especially, by letting the light, emerging at different angles, interfere or superpose in a phase sensitive manner by applying mirrors, beamsplitters, phase shifters, and other means known to a skilled person.
  • the intensity of the light emerging from the near-field site into the forbidden area varies unambiguously and more sensitively with the distance between near-field generating means and the sample site than does the transmitted light detected by known SNOM devices.
  • the light detected by the new device can, thus, preferably be used to provide an approach and a distance control between the near-field generating means and the sample area.
  • a distance control employing a feedback loop to keep the light intensity at a constant value is known as such from several PSTM-related publications.
  • FIG. 1 illustrates schematically the basic elements of a known near-field optical microscope (a-SNOM).
  • FIGs. 2 A, B show the basic elements of two variants of a first preferred embodiment of the invention.
  • FIG. 3 shows details of another preferred embodiment of the invention.
  • FIG. 4 shows a plot of the detected light intensity versus the distance between sample and the near-field generating tip at different angles of observation.
  • a SNOM comprises a a transparent sample carrier 1 , usually made from glass or quartz, a tapered optical fiber 2 fabricated, for instance, by etching a standard optical fiber in a KOH solution, and cladded with an opaque material, such as aluminum.
  • the fiber 2 has an uncovered apex, which serves as an aperture.
  • a light source 3 Connected to the optical fiber is a light source 3 able to emit intense radiation. Suitable light sources are different types of lasers including laser diodes. Measurements according to the following examples of the invention are made with an argon laser emitting light at 488 nm.
  • positioning elements 4, 5 of piezoelectric material to finely move the tip of the fiber in three dimensions.
  • the positioning elements are controlled by electrical signals generated by a distance control circuit 6 and a scanning control circuit 7, respectively.
  • the Z positioning element 4 enables a setting of the tip to a predetermined height above the surface of a sample.
  • the X-Y positioning element 5 is used to move the tip in a direction parallel to the surface of a sample.
  • the positioning elements are supported by mechanical actuators (not shown) driven by a stepping motor, a DC motor, or by hand for a coarse positioning of the sample.
  • a light detector 8 such as a photomultiplier, a photodiode, or a charge coupled device, is positioned at the opposite side of the sample carrier 1 , along the axis of the tip. Frequently, the detector 8 comprises an optical microscope mounted in front of the light sensing element. In the following examples, a photomultiplier is used to measure the intensity of the light.
  • the light detector is connected to an image processing and analyzing device 9. All important control units of the SNOM are monitored and programmed by suitable microprocessing and computing means, combined for the purpose of FIG. 1 into a single computer unit 10.
  • a sample to be examined is placed on the sample carrier 1. After a first coarse positioning, the tip of the fiber 2 is finely moved into the proximity of the surface of the sample until the sample lies within the optical near-field.
  • the optical near-field is generated by passing a light beam through the optical fiber.
  • the light emitted from the tiny aperture at the apex of the tip forms a near-field, which decays within the length comparable to the dimensions of the aperture (20 - 50 nm).
  • the light transmitted through the sample and the sample carrier in substantially perpendicular direction is collected by the light detector 8 and converted into electrical signals which are processed by the image processing device 9 into data to be displayed. By scanning the sample in horizontal directions, a complete picture of its surface is obtained.
  • the sample carrier 21 comprises a hemisphere 211.
  • the sample 25 is placed at the center of the flat face 212 of the hemisphere 211 underneath the tip of the tapered optical fiber 22.
  • a detector 28 is situated to collect light emerging from the near-field zone 26 at an off-axis angle, in particular at an angle ⁇ larger than the critical angle ⁇ c . As indicated by the drawing, light emerges from the near-field zone 26 into a larger cone than the one limited by the critical angle, and the detector 28 may be placed at various positions.
  • the sample carrier 21 serves as a propagation medium for this far-field component. Its hemispherical shape ensures that the far-field component meets the boundary 213 at a right angle, passing it with only minor internal reflection.
  • the detector 28 is placed close to the boundary to avoid a further dampening of the intensity of the light. However, it is possible to replace the detector at said position by an optical fiber guiding the collected light towards a detector located at a distance. This arrangement becomes important in case that the dimensions of the sample carrier 21 prevent the direct coupling of comparatively large detecting means 28.
  • a hatched area 27 indicates the preferred range of the angle ⁇ within the scope of the current invention spanning approximately 20 degrees.
  • the uncovered tip of the tapered fiber is replaced by a tip coated with aluminum 23.
  • a tiny aperture 24 is left to generate the near-field at the site of the sample.
  • This embodiment provides an enhanced resolution in comparison to the first variant, as the uncoated tip has only an ill-defined aperture.
  • arrays 281-283 of light detectors allows the detection of light emerging at different angles ⁇ , both larger and smaller than () c , extending the scope of activity of the new microscope to simultaneous angle-resolved measurement.
  • FIG. 3B presents a top view of FIG. 3A showing a plane through the sample.
  • the circular sample carrier 31 is adopted to fit into a standard optical stage 311 as found in conventional microscopes.
  • An array of light detectors 38, 381 is arranged at its circumference for detecting the azimuthal distribution of the light emerging from the near-field zone 36 around the sample site 35, i.e. the light intensity at different angles ⁇ . By applying several light detectors 381 at a line perpendicular to the circumference, the variation of the light intensity versus the angle 0 can be measured.
  • the carrier is able to guide the light via subsequent total internal reflections, as known from optical fibers.
  • the shaded areas 37 demonstrate this light guiding effect.
  • the radius of the carrier does not affect this result. By tilting the sidewall 312 by a angle larger than 5 degrees, the whole angular interval of interest, approximately 20 degrees, is transmitted.
  • the sample carrier has a radius of 5.1 mm and a thickness of 1.5 mm.
  • the detectors 38, 381 can also be efficiently coupled to the transparent sample carrier 31 by providing an optical contact either to the sidewall, top and/or bottom face by applying an optical glue, immersion oil, or other means known to a skilled person to provide a boundary without a sharp transition considering the index of refraction.
  • the whole device can be incorporated into a customary optical stage 311 of a lens or confocal microscope.
  • the angular power density is denoted P and P * for both azimuthal directions, respectively, and ( ⁇ — ⁇ ' — A ⁇ ) is the phase difference of both light beams, enlarged by an additionally induced phase shift A ⁇ .
  • P and P * for both azimuthal directions, respectively
  • ( ⁇ — ⁇ ' — A ⁇ ) is the phase difference of both light beams, enlarged by an additionally induced phase shift A ⁇ .
  • a ⁇ 180°
  • the signal vanishes in the absence of the sample.
  • the sample itself can be imaged with a higher contrast and resolution than by observing merely the light intensities.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention se rapporte à un microscope optique en champ proche, en particulier à un microscope optique en champ proche à balayage (SNOM) comprenant des moyens destinés à déterminer l'intensité de lumière provenant du champ selon une direction différant de la direction perpendiculaire à la surface de l'échantillon à examiner, de préférence provenant selon un angle υ supérieur à l'angle critique. Lorsqu'on superpose la lumière avec différents angles Ø d'azimut grâce à l'utilisation de miroirs et de dispositifs de fractionnement de rayons placés de manière adéquate, on peut obtenir une formation d'image au contraste plus important. L'invention permet de commander précisément la distance entre l'embout de sondage du microscope optique à balayage (SNOM) et l'échantillon en utilisant l'intensité mesurée dans la boucle de retour.
PCT/EP1993/002713 1993-10-04 1993-10-04 Microscope optique en champ proche WO1995010060A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US08/635,943 US5739527A (en) 1993-10-04 1993-10-04 Near-field optical microscope for angle resolved measurements
CA002170860A CA2170860C (fr) 1993-10-04 1993-10-04 Microscope optique en champ proche
EP93921916A EP0722574B1 (fr) 1993-10-04 1993-10-04 Microscope optique en champ proche
PCT/EP1993/002713 WO1995010060A1 (fr) 1993-10-04 1993-10-04 Microscope optique en champ proche
DE69320992T DE69320992T2 (de) 1993-10-04 1993-10-04 Optisches nahfeldmikroskop
KR1019960701695A KR100262878B1 (ko) 1993-10-04 1993-10-04 근접시야 광학현미경 및 그 측정방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1993/002713 WO1995010060A1 (fr) 1993-10-04 1993-10-04 Microscope optique en champ proche

Publications (1)

Publication Number Publication Date
WO1995010060A1 true WO1995010060A1 (fr) 1995-04-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1993/002713 WO1995010060A1 (fr) 1993-10-04 1993-10-04 Microscope optique en champ proche

Country Status (6)

Country Link
US (1) US5739527A (fr)
EP (1) EP0722574B1 (fr)
KR (1) KR100262878B1 (fr)
CA (1) CA2170860C (fr)
DE (1) DE69320992T2 (fr)
WO (1) WO1995010060A1 (fr)

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EP0984438A1 (fr) * 1998-03-20 2000-03-08 Seiko Instruments Inc. Appareil d'enregistrement
DE19841736A1 (de) * 1998-09-11 2000-04-20 Max Planck Gesellschaft Lichtkoppler für Breitbandstrahlung im Mikrowellen- bis Infrarotbereich

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JP4144819B2 (ja) * 1998-06-05 2008-09-03 キヤノン株式会社 近接場光学顕微鏡装置
US6633660B1 (en) * 1999-02-05 2003-10-14 John Carl Schotland Near-field tomography
TW579435B (en) 1999-08-02 2004-03-11 Zetetic Inst Scanning interferometric near-field confocal microscopy
EP1373959A2 (fr) 2000-07-27 2004-01-02 Zetetic Institute Reseaux multisources a transmission optique amelioree par des cavites resonantes
AU2001279047A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Control of position and orientation of sub-wavelength aperture array in near-field microscopy
AU2001281362A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
JP2004505313A (ja) 2000-07-27 2004-02-19 ゼテティック・インスティチュート 差分干渉走査型の近接場共焦点顕微鏡検査法
DE10039337A1 (de) 2000-08-04 2002-02-28 Infineon Technologies Ag Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken
US6534768B1 (en) * 2000-10-30 2003-03-18 Euro-Oeltique, S.A. Hemispherical detector
JP3793430B2 (ja) * 2001-07-18 2006-07-05 株式会社日立製作所 近接場光を用いた光学装置
KR100476318B1 (ko) * 2002-02-22 2005-03-10 학교법인연세대학교 광학식 미세 간격 측정장치 및 이를 이용한 광픽업 장치
US9075225B2 (en) 2009-10-28 2015-07-07 Alentic Microscience Inc. Microscopy imaging
CN105974571B (zh) * 2009-10-28 2019-05-28 阿兰蒂克微科学股份有限公司 显微成像
US20140152801A1 (en) 2009-10-28 2014-06-05 Alentic Microscience Inc. Detecting and Using Light Representative of a Sample
WO2013080209A1 (fr) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Système de détection pour la mesure de la taille et de la concentration de particules
US10502666B2 (en) 2013-02-06 2019-12-10 Alentic Microscience Inc. Sample processing improvements for quantitative microscopy
CA2953620C (fr) 2013-06-26 2020-08-25 Alentic Microscience Inc. Ameliorations de traitement d'echantillon destinees a la microscopie
JP5796056B2 (ja) * 2013-06-26 2015-10-21 韓国科学技術院Ｋｏｒｅａ Ａｄｖａｎｃｅｄ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｓｃｉｅｎｃｅ Ａｎｄ Ｔｅｃｈｎｏｌｏｇｙ 光の散乱を用いた近接場制御装置及び方法
KR102412917B1 (ko) * 2015-02-16 2022-06-27 한국전자통신연구원 현미경
CN111247418B (zh) 2017-10-26 2024-07-23 粒子监测系统有限公司 粒子测量系统和方法
EP3959505B1 (fr) 2019-04-25 2024-05-08 Particle Measuring Systems, Inc. Systèmes et procédés de détection de particules pour la détection de particules sur axe et/ou la détection différentielle
US11988593B2 (en) 2019-11-22 2024-05-21 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

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JPH05203879A (ja) * 1992-01-27 1993-08-13 Nikon Corp 反射共振型近接場走査型顕微鏡

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0984438A1 (fr) * 1998-03-20 2000-03-08 Seiko Instruments Inc. Appareil d'enregistrement
EP0984438A4 (fr) * 1998-03-20 2001-07-25 Seiko Instr Inc Appareil d'enregistrement
US6466537B1 (en) 1998-03-20 2002-10-15 Seiko Instruments Inc. Recording apparatus
DE19841736A1 (de) * 1998-09-11 2000-04-20 Max Planck Gesellschaft Lichtkoppler für Breitbandstrahlung im Mikrowellen- bis Infrarotbereich
DE19841736C2 (de) * 1998-09-11 2000-08-10 Max Planck Gesellschaft Lichtkoppler für Breitbandstrahlung im Mikrowellen- bis Infrarotbereich

Also Published As

Publication number Publication date
EP0722574B1 (fr) 1998-09-09
US5739527A (en) 1998-04-14
CA2170860C (fr) 2002-07-23
CA2170860A1 (fr) 1995-04-13
KR960705246A (ko) 1996-10-09
KR100262878B1 (ko) 2000-08-01
DE69320992D1 (de) 1998-10-15
EP0722574A1 (fr) 1996-07-24
DE69320992T2 (de) 1999-05-27

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