WO1992014965A1 - Piping system free of stagnation of fluid - Google Patents
Piping system free of stagnation of fluid Download PDFInfo
- Publication number
- WO1992014965A1 WO1992014965A1 PCT/JP1992/000180 JP9200180W WO9214965A1 WO 1992014965 A1 WO1992014965 A1 WO 1992014965A1 JP 9200180 W JP9200180 W JP 9200180W WO 9214965 A1 WO9214965 A1 WO 9214965A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- valve
- fluid
- piping system
- bypass means
- pressure reducing
- Prior art date
Links
Classifications
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/04—Domestic or like local pipe systems
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/04—Domestic or like local pipe systems
- E03B7/045—Domestic or like local pipe systems diverting initially cold water in warm water supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/06—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfaces; Packings therefor
- F16K5/0605—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfaces; Packings therefor with particular plug arrangements, e.g. particular shape or built-in means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/02—Energy absorbers; Noise absorbers
- F16L55/027—Throttle passages
Definitions
- the present invention relates to a piping system, and more particularly, to a piping system in which fluid upstream of a valve section and fluid in a valve do not stay even when a valve is in an open state or a closed state.
- a piping line in a semiconductor manufacturing process is provided with a sub-line 32 branched from the main line 31 as necessary, and a fluid supplied to the sub-line 32 is provided.
- a valve 33 is provided for adjusting or opening / closing the valve. Now, when the valve 33 is closed, the fluid in the line 35 from the branch point 34 to the valve 33 inevitably stays. If the residence time is long, there are problems such as the generation of bacteria and the like in the fluid, and the purity of ultrapure water is reduced.
- a method of reducing the volume of the line 35 serving as a retaining portion as much as possible can be considered. For example, a method in which a branch valve disclosed in Japanese Patent Application Laid-Open No. 62-151676 is used at a branch point 34 is considered to be one example.
- the present invention has been made to solve the above-mentioned problems of the prior art.
- valve can be mounted anywhere on the subline as needed.
- the configuration of the non-stagnant piping system includes a pipe line for transporting fluid, which has a function of completely closing the fluid and is upstream of a valve section where a substantial seal is performed.
- a valve device provided with a bypass means for allowing fluid to flow out to the outside, and a decompression device provided with a decompression unit formed by a throttling means therein and provided with a bypass means for communicating the decompression unit with the outside.
- a position where the bypass device of the valve device communicates with the bypass device of the decompression unit, and the decompression device is capable of sucking and flowing fluid upstream of the valve unit in the closed state of the valve device.
- the valve device is a ball valve provided with a port for communicating the upstream flow path with the valve chamber in a closed state of the valve.
- the pressure reducing device is a diaphragm valve having a valve seat provided with bypass means.
- the material of the non-stagnant piping system of the present invention may be metal or plastic, and is not particularly limited.
- the fluid flows into the valve device and the pressure reducing section, and when the valve device is closed, the fluid flows upstream of the valve device. Since the body pressure is higher than the fluid pressure in the pressure reducing section, the fluid on the upstream side of the valve device flows into the pressure reducing section through the communication path between the bypass means of the valve device and the bypass means of the pressure reducing section due to this pressure difference. . Therefore, the fluid upstream of the valve device does not always flow into the pressure reducing section even when the valve device is closed, and does not stay there. Even when the valve device is in the open state, the same operation as described above is performed by designing the opening area of the pressure reducing unit so that the fluid pressure in the pressure reducing unit is lower than the fluid pressure on the upstream side of the valve device. Stays can be avoided.
- the ball valve Even if a ball valve is attached to the sub-line, in the closed state, the fluid always flows through the valve chamber, where the fluid has stayed in a sealed state, so it should be connected from the branch point to the main line. The stagnant portion of the subline up to the valve can be almost completely removed. In addition, even in the open state, the fluid in the valve chamber, which has been a stagnant portion in the past, is sucked out by the pressure reducing device. It does not become a stagnant area. That is, in the system of the present invention, the ball valve also has the same performance as the diaphragm valve, which is extremely advantageous in terms of cost.
- the system Since no other power source is required to operate the system, it can greatly contribute to energy saving measures, and since there is no mechanical drive unit in the decompression means, it is the most important in the LSI manufacturing process. No hated particles are generated.
- the system also has features such as a system that can be configured very easily and compactly.
- FIG. 1 is a longitudinal sectional view of one embodiment of the non-retaining piping system of the present invention.
- FIG. 2 is a longitudinal sectional view of a main part of another embodiment of the present invention.
- FIG. 3 is a vertical sectional view of an essential part showing a closed state of the valve in FIG.
- FIG. 4 is a longitudinal sectional view showing another example of the pressure reducing device in FIG.
- FIG. 5 is a longitudinal sectional view showing still another example of the pressure reducing device in FIG.
- FIG. 6 is a flowchart showing a conventional piping line. BEST MODE FOR CARRYING OUT THE INVENTION
- FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention.
- 1 is a main line
- 2 indicates a subline branched from the main line.
- Reference numeral 3 denotes a diaphragm valve (hereinafter, referred to as a valve) used as a valve device for adjusting and closing a flow rate of a fluid supplied to the use point 8, and a valve having a substantial closing function inside.
- Part 3a is provided.
- a tubular bypass means 3b for communicating the internal passage of the valve 3 main body with the outside is provided integrally with the three valves.
- Reference numeral 4 denotes a decompression device, which is a Venturi tube type configuration having a constricted portion 4a inside, and a tubular bypass means 4b for communicating the constricted portion 4a with the outside is provided in the decompressor main body. It is provided integrally.
- the restricting portion 4a of the pressure reducing device 4 has a configuration of a penture tube type.
- FIG. 4 and FIG. A decompression device of the type shown in the figure can also be suitably used. That is, the pressure reducing device 21 shown in FIG. 4 has a weir 22 inside, and a bypass means 23 is provided immediately after the weir 22.
- the decompression device 24 shown in FIG. 5 is a modification of a commercially available diaphragm valve. As is well known, this type of valve is provided with a valve seat 27 as shown in the figure. The configured orifice is adopted as the aperture section 26. 25 is a bypass means provided in the valve seat 27. This configuration is very convenient because the opening area of the aperture portion 26 can be changed as needed. Another advantage is that there is no restriction on the flow direction.
- Reference numeral 5 denotes a connecting means.
- a tube made of fluororesin, PFA is used.
- the connecting means 5 has one end fused to the bypass means 3a of the valve 3 and the other end fused to the bypass means 4b of the pressure reducing device 4, and connects the two bypass means, 3b and 4b.
- the valve 3, the bypass means 3b, the pressure reducing device 4, the bypass means 4b, and the connecting means 5 are each made of PFA, but are particularly limited to such materials. Instead, it may be made of other plastics or metal materials.
- the bypass means 3b and 4b do not need to be integrally formed, and may be provided by mounting and fixing a commercially available joint or the like.
- 6 is a branch point between main line 1 and sub line 2
- 7 is a water storage tank
- 8 is a use point.
- equation (2) is expressed by the following equation.
- FIG. 2 and FIG. 3 are loose cross-sectional views of a main part showing a second embodiment of the present invention.
- valve 3 in FIG. An example in which a ball valve having a small hole is used is shown.
- the configuration other than the valve 3 is the same as that of the first embodiment shown in FIG.
- FIG. 2 shows a case where the valve is in an open state
- FIG. 3 shows a case where the valve is in a closed state.
- 1 1 is a ball, which is 90.
- the rotation opens and closes the valve.
- Reference numeral 12 denotes a valve portion, which substantially performs a sealing action when the valve is closed.
- Reference numeral 13 denotes a communication port provided in the ball 11, which communicates the flow path 1 ⁇ with the valve chamber 14 when the valve is open, and also communicates with the valve chamber 14 and the flow path 17 when the valve is closed. And communicate with.
- 15 is a bypass means
- 16 is a connecting means
- 19 is a decompression device.
- the part of the fluid is sucked from the flow path 17 through the valve chamber 14, the bypass means 15, and the connection means 16 to the flow path in the pressure reducing device 19.
- the fluid always flows into the valve chamber, which has been a stagnant portion in the open state of the valve.
- valve chamber 14 and the upstream flow path 17 communicate with each other through the communication port 13. 7) is established, and the fluid in the valve chamber 14 and the flow path 17 upstream of the valve section 12 flows through the bypass means 15 and the connection means 16 to the flow path in the pressure reducing device 19. and Ru suction of ⁇ L outflow _ 3.
- the present invention can be effectively used in ultrapure water lines and chemical liquid lines in the semiconductor industry, the biotechnology industry, and the like, in which it is required that the fluid in the piping is always kept clean.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Pipeline Systems (AREA)
- Control Of Fluid Pressure (AREA)
- Check Valves (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69219143T DE69219143T2 (de) | 1991-02-22 | 1992-02-20 | Stagnationsfreies rohrleitungssystem |
EP92905303A EP0608416B1 (en) | 1991-02-22 | 1992-02-20 | Piping system free of stagnation of fluid |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3028901A JP2815239B2 (ja) | 1991-02-22 | 1991-02-22 | 非滞留配管システム |
JP3/28901 | 1991-02-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1992014965A1 true WO1992014965A1 (en) | 1992-09-03 |
Family
ID=12261312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1992/000180 WO1992014965A1 (en) | 1991-02-22 | 1992-02-20 | Piping system free of stagnation of fluid |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0608416B1 (ja) |
JP (1) | JP2815239B2 (ja) |
CA (1) | CA2081010C (ja) |
DE (1) | DE69219143T2 (ja) |
WO (1) | WO1992014965A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013023933A3 (en) * | 2011-08-12 | 2013-08-29 | Airbus Operations Gmbh | Water supply system comprising a venturi pipe |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2392715A (en) * | 2002-09-04 | 2004-03-10 | Glynwed Pipe Systems Ltd | Improvements in secondary containment pipe fitting |
CN112527035B (zh) * | 2020-12-04 | 2022-03-01 | 平顶山自来水二次供水有限公司 | 一种二次供水智能化运行数据监控平台 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421604A (en) * | 1977-07-18 | 1979-02-19 | Tlv Co Ltd | Condensing recovery pump |
JPS6014232B2 (ja) * | 1979-09-21 | 1985-04-12 | 日本ダイヤバルブ株式会社 | ダイヤフラム弁 |
JPS6088300A (ja) * | 1983-10-19 | 1985-05-18 | Shinwa Control Kk | 流水システムの配管系及び配管系の滞留防止法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1471800A (en) * | 1922-11-14 | 1923-10-23 | Samuel C Barnes | Water-supply system |
JPS6091100A (ja) * | 1983-10-21 | 1985-05-22 | Shinko Fuaudoraa Kk | 滞留部をもたない配管構造 |
JPH07113424B2 (ja) * | 1985-09-19 | 1995-12-06 | 積水化学工業株式会社 | 分岐バルブ |
CH674230A5 (ja) * | 1987-07-15 | 1990-05-15 | Geberit Ag |
-
1991
- 1991-02-22 JP JP3028901A patent/JP2815239B2/ja not_active Expired - Fee Related
-
1992
- 1992-02-20 CA CA 2081010 patent/CA2081010C/en not_active Expired - Fee Related
- 1992-02-20 EP EP92905303A patent/EP0608416B1/en not_active Expired - Lifetime
- 1992-02-20 WO PCT/JP1992/000180 patent/WO1992014965A1/ja active IP Right Grant
- 1992-02-20 DE DE69219143T patent/DE69219143T2/de not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421604A (en) * | 1977-07-18 | 1979-02-19 | Tlv Co Ltd | Condensing recovery pump |
JPS6014232B2 (ja) * | 1979-09-21 | 1985-04-12 | 日本ダイヤバルブ株式会社 | ダイヤフラム弁 |
JPS6088300A (ja) * | 1983-10-19 | 1985-05-18 | Shinwa Control Kk | 流水システムの配管系及び配管系の滞留防止法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP0608416A4 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013023933A3 (en) * | 2011-08-12 | 2013-08-29 | Airbus Operations Gmbh | Water supply system comprising a venturi pipe |
US9695578B2 (en) | 2011-08-12 | 2017-07-04 | Airbus Operations Gmbh | Water supply system comprising a venturi pipe |
Also Published As
Publication number | Publication date |
---|---|
JP2815239B2 (ja) | 1998-10-27 |
EP0608416B1 (en) | 1997-04-16 |
CA2081010A1 (en) | 1992-08-23 |
DE69219143T2 (de) | 1997-10-30 |
CA2081010C (en) | 1996-07-30 |
EP0608416A4 (en) | 1994-09-14 |
DE69219143D1 (de) | 1997-05-22 |
JPH04266700A (ja) | 1992-09-22 |
EP0608416A1 (en) | 1994-08-03 |
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