WO1992004989A1 - Machine pour tester des dispositifs electroniques - Google Patents

Machine pour tester des dispositifs electroniques Download PDF

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Publication number
WO1992004989A1
WO1992004989A1 PCT/US1991/006948 US9106948W WO9204989A1 WO 1992004989 A1 WO1992004989 A1 WO 1992004989A1 US 9106948 W US9106948 W US 9106948W WO 9204989 A1 WO9204989 A1 WO 9204989A1
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
stage
test
electronic devices
post
Prior art date
Application number
PCT/US1991/006948
Other languages
English (en)
Inventor
Ray G. Twigg
Malcolm V. Hawkes
Marrone Santino
Mark W. Klug
Original Assignee
Sym-Tek Systems, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sym-Tek Systems, Inc. filed Critical Sym-Tek Systems, Inc.
Priority to JP03516185A priority Critical patent/JP3093264B2/ja
Priority to KR1019930700871A priority patent/KR930702085A/ko
Publication of WO1992004989A1 publication Critical patent/WO1992004989A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/344—Sorting according to other particular properties according to electric or electromagnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks

Definitions

  • This invention relates in general to electronic device test handlers having integrated environmental control for testing such devices at selected temperatures.
  • electronic device shall refer to and mean semiconductor devices, integrated circuits, modular packaged hybrid electronic circuits and the like.
  • handlers for the testing of the electronic devices are of two general types.
  • the first type is commonly characterized as being "gravity fed.” In this type of handler, the electronic devices are propelled through the handler by gravity.
  • This type of handler has two very significant disadvantages. It is slower, in that it can handle fewer electronic devices per time unit, and the electronic devices are handled "naked.” By the term “naked,” it is meant that the devices are handled bare. That is, they are not in any kind of protective media while they are passed through the handler and tested.
  • the second type of handler is characterized as a "pick and place" handler.
  • the electronic devices are transported through the handler in batches, typically in a tray. From the batch, the electronic devices are picked and placed in contact with a test head contactor for testing. After testing they are returned to the batch.
  • This type of handler has higher throughput than the gravity- fed type handler, but it also has the major disadvantage of handling the electronic devices naked at the test stage. Electronic devices so handled are susceptible to damage, for example, because of handler malfunction or because of variations in the form of the electronic devices.
  • This invention has many advantages. First of all, it is not gravity fed and therefore and has higher throughput than the gravity fed handlers. Secondly, electronic devices are placed into a protective medium prior to being handled and carried on trays throughout a handler according to this invention, the devices are carried in their medium, even during the test stage. Moreover throughput is enhanced by overlapping of tray movement operations. Also, use of standard sized trays and electronic device carrier media with a standard interface to the trays gives a handler according to this invention the ability to handle a wide variety of devices with inexpensive change over kits.
  • This invention presents an electronic device handler comprising: (1) an electronic device carrier unit comprising a primary carrier and at least one secondary carrier, the secondary carriers riding atop the primary carrier in seats defined by the primary, each secondary carrier defining at least one seat in which an electronic device is carried atop the secondary carrier with the electronic devices' leads being accessible from above the carrier unit, (2) a pre-test conditioning chamber having therein means for changing the temperature of electronic devices passing through the chamber, (3) means for moving carrier units through the pre ⁇ test conditioning chamber in an ordered fashion at a pace suitable to effect a desired temperature change in the electronic devices riding upon the carrier units, (4) a test chamber comprising a path along which a plurality of carrier units can be moved, said path having at least one staging site at which carrier units awaiting test, a test site at which carrier units rest while the electronic devices atop them are being tested, and at least one removal-awaiting site at which carrier units await removal from the test chamber, the test chamber further comprising a test head contactor with downward facing contacts disposed above the path test site, means for moving carrier
  • An object of this invention is to provide an electronic device handler which achieves higher through-rate for the testing of- semiconductor devices on that which could be achieved by conventional handlers. Further object of this invention is to provide a handler as is described previous paragraph but which occupies a smaller floor space than conventional systems.
  • a further object of this invention is to provide electronic device handler as described in the previous two paragraphs which has the capability of handling the devices while they are seated in protective carriers.
  • a further object of this invention is to provide an electronic device handler as described above which has the capability of moving the electronic devices through the handler in batches and which have the ability to present the full batch or a subset of a batch simultaneously to test head contactors.
  • a further object of this invention is to provide an electronic device handler which moves the devices about.in a standard size tray, each tray carrying a set or batch of electronic devices.
  • secondary carriers which uniformly interface to the standard size trays and which provide some degree of protection for the electronic devices so carried.
  • Figure 1 is a pictorial view illustrating the path and motions of the carrier units through the machine
  • Figure 2 is a perspective view of one primary carrier in the form of a tray and typical secondary carriers as inserts;
  • Figure 3 is a front elevation view of the electronic device loading and unloading and carrier unit advance mechanism
  • Figure 4 is a sectional view taken on a line 4-4 of Fig. 3;
  • Figure 5 is an enlarged sectional view taken on line 5-5 of Fig. 3;
  • Figure 6 is a sectional view taken on line 6-6 of Fig. 5;
  • Figure 7 is a sectional view taken on 7-7 of Fig. 5;
  • Figure 8 is a sectional view taken on line 8-8 of Fig. 7;
  • Figure 9 is a sectional view taken on line 9-9 of Fig.
  • Figure 10 is an enlarged sectional view taken on line 10-10 of Fig. 3;
  • Figure 11 is a sectional view taken on line ll-ll of Fig. 10;
  • Figure 12 is an enlarged sectional view taken on line 12-12 of Fig. 3;
  • Figure 13 is a sectional view taken on line 13-13 of Fig. 12;
  • FIG. 14A, B, and C illustrate different configurations of secondary carriers
  • Figure 15 is a diagram of the control and actuating system of this invention.
  • an electronic device 2 is illustrated as being carried in a seat 4 which is one of two seats defined by secondary carrier which in this embodiment is a device-carrying insert 6.
  • the device- carrying insert has a base 8 reduced in size which defines a marginal shoulder 10.
  • a primary carrier which in this embodiment is a tray 12 in the form of a planar frame which defines four uniform openings 14 each of which conform to the reduced-size base of the device-carrying insert 6 such that the reduced-size base can be slippingly inserted into any one of the four openings with the insert resting on the tray by means of the shoulder 10.
  • four device- carrying inserts are seatable in the four openings defined by the insert tray, lateral movement of the inserts in any direction being restrained by the frame of the insert tray and vertical movement being limited by gravity.
  • the seats defined by the device-carrying inserts can be differently configured to accommodate the various forms and configurations of electronic devices, but all of the inserts have uniform reduced size bases. While the device-carrying inserts illustrated in Figs. 1 and 2 have two device seats each, it should be noted that each insert can have a plurality of seats, i.e. four. Thus, the insert trays can carry a wide variety of electronic devices.
  • the arrows illustrate the path and motions of insert trays throughout a test handler 16.
  • the rectangular slabs designated T schematically represent each an insert tray 12 carrying a full compliment of inserts 6.
  • the arrows illustrate the closed route through which the trays T traverse during typical operation of the test handler 16.
  • the trays T traverse generally from right to left along a front platform 34.
  • an unloading mechanism generally U
  • the device-carrying inserts are unloaded of electronic devices.
  • a load mechanism generally L
  • they are reloaded with electronic devices.
  • a supply platform 18 illustrates in general a means by which this invention receives individual electronic devices, i.e. components.
  • the means by which the components arrive at and upon the supply platform is not a part of this invention.
  • the load mechanism L is used to pick up the individual electronic devices from the supply platform and load them into device-carrying seats 4, preferably in pick ⁇ up order, the inserts 6 being seated in insert trays 12.
  • the load mechanism comprises generally a loading pick-up head 20 which moves reciprocally along a track 22 suspended by supports, 24A and 24B. As will be further explained, at the base of the pick-up head is a suction means which grips the electronic devices during the loading process. In operation, the loading head 20 has two positions of rest proximate the opposite ends of the track 22.
  • the loading head 20 is positioned over the supply platform and the suction means (not shown) reaches down, grips and lifts one or more electronic devices.
  • the loading head then moves to the opposite extent of the track and registers the electronic devices with empty device-carrying insert seats and deposits the devices therein by moving down and releasing the suction means.
  • the loading head supplies a continuous stream of electronic devices from the supply platform to the device-carrying insert seats.
  • an unloading head 26 which also has a fixed pitch of movement along a track 28 between supports, 30A and 3OB.
  • Unloading head 26 also has a suction means for gripping the individual electronic devices.
  • the unload mechanism In operation, it moves to one extent of the track 28 proximate support 30A. It then reaches down and pulls one or more electronic devices from a device-carrying insert. The unloading head then moves to the opposite extent of the track 28 and deposits the electronic devices onto a delivery platform 32. The delivery platform 32 and the means by which the electronic devices are removed from the delivery platform and loaded into tubes or other carrying packages are not a part of this invention. In operation, the unload mechanism continually unloads devices from the device-carrying inserts providing a steady stream of tested devices to the delivery platform.
  • each tray After each tray has been fully reloaded with untested electronic devices, it is moved to align with an ingress 35 of an elevating conveyor mechanism 36.
  • the elevating conveyor has shelves, 37A and 37B, upon which the trays rest as they are elevated.
  • the elevating conveyor is disposed within an environmental chamber 39 which either elevates or depresses the temperature of the electronic devices as they pass through the chamber toward a test head.
  • the trays are inserted into this environmental chamber and onto an elevating conveyor shelf by a pushing mechanism 38.
  • each tray reaches the top of the elevator, it is pushed from the shelf upon which it is resting and guided onto a test path or track (not illustrated in this Figure) .
  • the tray designated Tl illustrates a tray in a staging site, i.e., it is waiting to be moved to a test site under the test head (not illustrated in this Figure) which is directly above the tray designated T2.
  • the tray designated T3 has been tested and is at an awaiting removal site, i.e. it is waiting to be moved onto a tray lowering conveyor 40.
  • SI and S2 accomplishes the purpose of moving the trays waiting to be tested or being tested under the test head.
  • the second shuttle S2 moves the tested trays from under the test head to a position aligned with an ingress 41 (see Fig. 13) to the lowering conveyor. Once in that position, the exiting tray waits for an open shelf and is then pushed onto the open shelf and subsequently lowered through a chamber 43 (see Fig. 12) which permits the electronic devices to unsoak, i.e. return to substantially ambient external temperature.
  • the first shuttle SI moves the trays in step fashion. For example, if the test head has a sufficient number of contactors to contact all of the electronic devices carried by a tray simultaneously, then the first shuttle will move, i.e. index, each tray step wise a full tray length at a time. If, however, the test head has only the capacity of contacting a subset of the electronic devices carried by a tray, the first shuttle will index the trays alone in steps equal to the number of electronic devices capable of being handled by the test head.
  • the second shuttle moves the fully tested tray in one step to the position for exiting onto the lowering conveyor. In this fashion the operations of the two shuttles can overlap and a tray can be moving in or into the test site while a tray containing all tested devices can be moving toward the awaiting-re oval site. This accomplishes faster through ⁇ put.
  • the loading head 20 is illustrated as comprising a trunion or carrier block 42 being affixed to a linear actuator 44 by any suitable means.
  • the carrier block is moved by the belt in basically a two-stroke movement. In one motion, the block 42 is moved to a position above the loading platform 18 to pick up devices, and in a reciprocal motion the block is moved to a position more suitable for loading electronic devices onto a tray centered on the front platform 34.
  • the carrier block is guided by guide rods 50A and 50B which are parallel to the movement of the belt and which slip through bores defined by the carrier block.
  • a pick-up head 52 Extending beneath the carrier block is a pick-up head 52 which moves reciprocally up and down by an actuator 54. Protruding from the bottom surface of the pick-up head is at least one suction means which is illustrated as a pair of suction cups 56 on the necks 58.
  • the actuator 54 moves the pick-up head between two positions, one position wherein the suction cup is in contact with and presses against an electronic device and a second higher position wherein the electronic device is above the front platform and the supply platform a sufficient distance to allow clearance when the loading head is being moved by the linear actuator 44.
  • FIG 4 illustrates the front platform with three insert trays atop the platform. Each insert tray is illustrated as carrying four device-carrying inserts with two electronic devices each.
  • the trays are guided in their movement from right to left on top of the front platform by a plurality of outboard V-shaped channel guides, 60A and 60B, and by a centered inboard V-shaped guide 60C.
  • a gap wherein no guide is disposed. This gap permits ingress of the left most tray into the elevator conveyor and soak chamber.
  • the absence of a V-shaped guide in the gap to the right of the centered V-shaped guide 60c allows for the egress of trays from the unsoak chamber onto the front platform.
  • the tray in the center of the front platform 34 as illustrated contains three inserts, 6A, 6B and 6C which have been unloaded, i.e. their electronic devices have been removed.
  • the right most insert of the center tray still contains devices which have not yet been unloaded, but which have been tested.
  • Figure 3 illustrates the loading head being in a position to deposit electronic devices into the left most insert of the centered insert tray, and it also illustrates the unloading head in a position to remove the two remaining tested electronic devices in the right most insert of the centered insert tray.
  • Two vertical beams, 70A and 70B are variably spaced apart.
  • the shelves on each beam are uniformly spaced and in operation the shelves of one beam at all times aligns with the shelves of the facing beam.
  • the beams are moveable and have at least four distinct positions. Horizontally they have a position where they are the closest together. In this position, the beams can be said to be contracted. In their contracted position, the beams are close enough together to allow the insert to trays rest upon pairs of aligned shelves.
  • the beams also have an expanded position where they are farthest apart. In this position, the gap between the shelves does not permit the trays to rest thereon.
  • the beams also have high and low vertical positions.
  • the arrows in Figure 8 associated with the beam 70b on the right side of the conveying elevator indicate the path and direction of motion of that particular beam as driven by horizontal actuators 71A and 7IB, and vertical actuator 69.
  • the beam on the left side of the conveying elevator moves in coordination but in a counter- clockwise direction.
  • the insert trays are illustrated as having a width greater than the length of the shelves of the beams, 70A and 7OB.
  • a rotatable post 72A and 72B
  • retainer tabs 74 are fixed vertically and horizontally. The purpose of the retainer tabs is to rotate underneath the insert trays in anticipation of the shelf beams expanding. In the absence of the support from the shelves, the retainer tabs hold the insert trays in place as illustrated in phantom. When the shelf beams subsequently contract to provide support for the shelves, the retainer tabs rotate to the position where they are clear of the insert trays as illustrated in solid lines.
  • the top insert tray When an insert tray reaches the top shelf and the shelf beams are in their high position, the top insert tray is in alignment to be slid from the top shelf onto a pair of facing V-shaped grooves toward the test track.
  • the lowering conveyor 40 moves the insert trays in much the same manner as the elevating conveyor, however, the operation of the shelf beams and retainer tabs are essentially reversed.
  • the right most beam operates in a counter-clockwise direction and when the beams are contracted that is, when their shelves are supporting the insert trays, they move from the high position to the low position, and when they are expanded, they move from the low position to the high position.
  • the retainer tabs perform the same functions as the retainer tabs in the elevating conveyor, i.e., they hold the trays while the shelf beams are in the expanded position.
  • an insert tray is shown to be on the top shelf of the conveying elevator 36.
  • a pivoting arm 80 has a frame 82 slidably engaged thereto by means of a slot 84 defined by the arm and a slot rider 86.
  • the pivoting arm is operable to move the frame from a first position centered over the top shelf of the conveying elevator and a second position over the test track 81.
  • a pair of guide rods, 87A and 87B insure that the movement of the frame is linear notwithstanding the angular movement of the driving arm 80.
  • Figure 8 illustrates a flange 88 along an outboard edge of the frame 82, the flange extending downward so as to catch and inwardly push an insert tray in the top position of the conveying elevator.
  • V-shaped guide rails , 89A and 89B are provided along the outward of the edges of the path.
  • further V-shaped guides provide lateral stability for the insert trays as they move along the test trac .
  • the test head contactor is fixed in a certain position above the test track, preferably centered with respect to the length of the test track so that the centered insert tray is the one being tested.
  • a test head contactor with the capacity of simultaneously testing two electronic devices is shown.
  • movement of only one device-carrying insert is necessary and movement of the trays along the test track are in steps equal to the pitch of the device-carrying inserts.
  • the tray is then moved forward, i.e. to the right according to the orientation of the illustrations, until the next immediately following insert is registered below the test head.
  • FIG. 13 the mechanism for removing the insert trays from the test track to the top position of the lowering conveyor is illustrated.
  • a pair of opposing extraction arms, 100A and 100B are pivoted. At the ends of the extraction arms remote from pivots are the V rollers, 102A and 102B, one each for the arms.
  • the V-shaped rollers ride in the grooves on the corresponding side of the insert tray.
  • the arms are rotated, the right arm counter- clockwise and the left arm clockwise, the tray is pushed from the test track toward the unsoak chamber 43.
  • an extractor tongue 104 with a upward protruding flange 106 hooks the bottom tray and pulls it out onto the front platform 34.
  • the notches are located along the edge of the trays so that the trays can be step advanced one device- carrying insert per step.
  • the advance bar moves to its right most extent, raises the pin and engages one or two trays depending on their positions; the advance bar then moves to its left most extent and lowers the pins. In this fashion, the trays are all advanced , i.e. indexed, one device-carrying insert at a time.
  • shuttles 120A and 120B there are two independently moveable shuttles, 120A and 120B.
  • the shuttles move along the test track between their respective extents by corresponding screws, 122A and 122B, which engage threads defined by the shuttles.
  • These shuttles also have bores through which corresponding guides, 124A and 124B, parallel to these screws provide guided movement of the respective shuttles.
  • Each shuttle supports a head, 126A and 126B, carrying at least two tray engaging pins 128 fixed in the head.
  • the shuttle heads are moveable up and down between two positions.
  • the space in between its corresponding tray engagement pins equals the spacing between any immediately adjacent pair of sockets on a tray.
  • the independent movement of the two shuttles provides for faster operation and relatively independent handling of trays moving toward and into the test position and trays being removed away from the test head position.
  • the trays along the test track are always under control of one of the shuttles.
  • the second shuttle moves the tray to the awaiting-removal site. While the first shuttle is moving its quad tray from the staging site to the testing site. In general, during the testing of one tray, another tray can be moving - either moving toward the test site or moving toward the awaiting- removal site.
  • Figure 14A illustrates an insert 132A carrying one large device 134A.
  • Figure 14C illustrates an insert 132B carrying two dual-in-line devices 134B.
  • Figure 14B illustrates an insert 132C carrying four dual-in-line devices 134C.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

Dispositif (16) servant à présenter automatiquement des dispositifs électroniques à un testeur pour les essais. Une pluralité de supports (12), chacun servant à porter un ensemble de dispositifs électroniques (2), sont acheminés cycliquement en boucle fermée, de l'étage de chargement, où les dispositifs électroniques (2) sont chargés sur les supports, à travers une chambre d'essais préliminaires, telle qu'une chambre de conditionnement; après la chambre d'essais préliminaires, ils passent à l'étage des essais où les dispositifs (2) sont de préférence soulevés des supports (12) pour être mis en contact avec un contacteur de tête d'essais afin que les essais puissent être effectués; de l'étage des essais, ils passent à une chambre post-essais, telle qu'une chambre de déconditionnement, et de la chambre post-essais à étage de déchargement (12) où les supports (12) sont déchargés des dispositifs électroniques testés; enfin, de l'étage de déchargement, ils retournent à l'étage de chargement pour recevoir un nouvel ensemble de dispositifs électroniques non testés. Chaque support (12) peut aussi comprendre un ensemble de supports secondaires (12) qui s'emboitent dans un nombre identique de sièges (4) définis par un support primaire et des ensembles de dispositifs électroniques sont chargés sur les, et déchargés des supports secondaires. Parmi d'autres utilisations, les supports secondaires servent d'adaptateurs entre les diverses formes de dispositifs électroniques (2) et une forme standard de support primaire (12).
PCT/US1991/006948 1990-09-24 1991-09-24 Machine pour tester des dispositifs electroniques WO1992004989A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP03516185A JP3093264B2 (ja) 1990-09-24 1991-09-24 電子デバイス試験の制御装置
KR1019930700871A KR930702085A (ko) 1990-09-24 1991-09-24 전자장치 테스트 처리기

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58721890A 1990-09-24 1990-09-24
US587,218 1990-09-24

Publications (1)

Publication Number Publication Date
WO1992004989A1 true WO1992004989A1 (fr) 1992-04-02

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PCT/US1991/006948 WO1992004989A1 (fr) 1990-09-24 1991-09-24 Machine pour tester des dispositifs electroniques

Country Status (3)

Country Link
JP (1) JP3093264B2 (fr)
KR (1) KR930702085A (fr)
WO (1) WO1992004989A1 (fr)

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* Cited by examiner, † Cited by third party
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US5465850A (en) * 1992-03-11 1995-11-14 Nec Corporation Integrated circuit test system
EP0848260A2 (fr) * 1996-12-13 1998-06-17 Rohde & Schwarz GmbH & Co. KG Station de test pour appareils électriques, en particulier des téléphones mobiles
NL1008697C2 (nl) * 1998-03-25 1999-09-28 Fico Bv Testinrichting, testsamenstel, werkwijze voor testen en werkwijze voor kalibreren van een testinrichting.
EP0965845A1 (fr) * 1999-03-19 1999-12-22 Hewlett-Packard Company Tête de test
EP0995998A2 (fr) * 1998-10-19 2000-04-26 Mirae Corporation Chambre pour dispositif de manipulation d'un module à circuit integré
US6239396B1 (en) * 1998-08-07 2001-05-29 Samsung Electronics Co., Ltd. Semiconductor device handling and sorting apparatus for a semiconductor burn-in test process
WO2002033432A1 (fr) * 2000-10-16 2002-04-25 Advanced Micro Devices, Inc. Prevention automatique du transfert d'un boitier de microcircuit non trempe
EP1273925A2 (fr) * 2001-06-30 2003-01-08 STMicroelectronics Sdn Bhd Manipulateur de test pour SMD, BGA et CSP
EP1446672A1 (fr) * 2001-10-22 2004-08-18 Electroglas, Inc. Appareil et procede permettant de manipuler et de tester des plaquettes
WO2005047912A1 (fr) * 2003-11-10 2005-05-26 Delta Design, Inc. Systeme d'essai d'un groupe de puces ci comportant un sous-ensemble support de puces encastre et charge/decharge automatiquement
EP1832886A1 (fr) * 2006-03-08 2007-09-12 Rasco GmbH Dispositif et procédé destiné au test de composants électroniques
DE102015207290A1 (de) * 2015-04-22 2016-10-27 Siemens Aktiengesellschaft Werkstückträger zur wahlweisen Aufnahme eines Werkstücks oder eines auf einem Unterbaumodul montierten Werkstücks
EP3330725A1 (fr) * 2016-11-30 2018-06-06 JOT Automation Oy Agencement de transport pour système de test
CN109499898A (zh) * 2018-11-19 2019-03-22 长春工业大学 小型照明灯立式检测系统
CN109530274A (zh) * 2018-11-19 2019-03-29 长春工业大学 小型照明灯卧式检测系统
US10294032B2 (en) 2016-11-30 2019-05-21 Jot Automation Oy Conveying arrangement

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US6446517B1 (en) * 2000-11-20 2002-09-10 Samsung Electronics Company Controlled particle deposition in drives and on media for thermal asperity studies
CN112246692A (zh) * 2020-09-29 2021-01-22 原言(广州)科技有限公司 一种家电制造自动检测装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4683424A (en) * 1984-11-07 1987-07-28 Wehr Corporation Apparatus for use in testing circuit boards
US4908126A (en) * 1986-11-11 1990-03-13 Multitest, Elektronische Systeme Gmbh Apparatus for testing and sorting electronic components, in particular IC's
US4993136A (en) * 1989-06-19 1991-02-19 Hewlett-Packard Company Method of converting a vacuum test fixture on a board testing apparatus to a mechanical test fixture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4683424A (en) * 1984-11-07 1987-07-28 Wehr Corporation Apparatus for use in testing circuit boards
US4908126A (en) * 1986-11-11 1990-03-13 Multitest, Elektronische Systeme Gmbh Apparatus for testing and sorting electronic components, in particular IC's
US4993136A (en) * 1989-06-19 1991-02-19 Hewlett-Packard Company Method of converting a vacuum test fixture on a board testing apparatus to a mechanical test fixture

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5465850A (en) * 1992-03-11 1995-11-14 Nec Corporation Integrated circuit test system
EP0848260A2 (fr) * 1996-12-13 1998-06-17 Rohde & Schwarz GmbH & Co. KG Station de test pour appareils électriques, en particulier des téléphones mobiles
EP0848260A3 (fr) * 1996-12-13 1999-07-21 Rohde & Schwarz GmbH & Co. KG Station de test pour appareils électriques, en particulier des téléphones mobiles
NL1008697C2 (nl) * 1998-03-25 1999-09-28 Fico Bv Testinrichting, testsamenstel, werkwijze voor testen en werkwijze voor kalibreren van een testinrichting.
WO1999049328A1 (fr) * 1998-03-25 1999-09-30 Fico B.V. Dispositif, ensemble, et procede pour controler des composants electroniques, et procede de calibrage s'y rapportant
US6507185B1 (en) 1998-03-25 2003-01-14 Fico B.V. Device, assembly and method for testing electronic components, and calibrating method therefor
US6239396B1 (en) * 1998-08-07 2001-05-29 Samsung Electronics Co., Ltd. Semiconductor device handling and sorting apparatus for a semiconductor burn-in test process
EP0995998A2 (fr) * 1998-10-19 2000-04-26 Mirae Corporation Chambre pour dispositif de manipulation d'un module à circuit integré
EP0995998A3 (fr) * 1998-10-19 2001-03-07 Mirae Corporation Chambre pour dispositif de manipulation d'un module à circuit integré
US6507203B1 (en) 1999-03-19 2003-01-14 Agilent Technologies, Inc. Test head assembly
EP0965845A1 (fr) * 1999-03-19 1999-12-22 Hewlett-Packard Company Tête de test
WO2002033432A1 (fr) * 2000-10-16 2002-04-25 Advanced Micro Devices, Inc. Prevention automatique du transfert d'un boitier de microcircuit non trempe
US6507206B1 (en) 2000-10-16 2003-01-14 Advanced Micro Devices, Inc. Automated prevention of transfer of an unsoaked IC package from a temperature soaking chamber to a testing chamber
EP1273925A2 (fr) * 2001-06-30 2003-01-08 STMicroelectronics Sdn Bhd Manipulateur de test pour SMD, BGA et CSP
EP1273925A3 (fr) * 2001-06-30 2003-09-03 STMicroelectronics Sdn Bhd Manipulateur de test pour SMD, BGA et CSP
EP1446672A1 (fr) * 2001-10-22 2004-08-18 Electroglas, Inc. Appareil et procede permettant de manipuler et de tester des plaquettes
WO2005047912A1 (fr) * 2003-11-10 2005-05-26 Delta Design, Inc. Systeme d'essai d'un groupe de puces ci comportant un sous-ensemble support de puces encastre et charge/decharge automatiquement
EP1832886A1 (fr) * 2006-03-08 2007-09-12 Rasco GmbH Dispositif et procédé destiné au test de composants électroniques
US7673520B2 (en) 2006-03-08 2010-03-09 Rasco Gmbh Device and method for testing electronic components
DE102015207290A1 (de) * 2015-04-22 2016-10-27 Siemens Aktiengesellschaft Werkstückträger zur wahlweisen Aufnahme eines Werkstücks oder eines auf einem Unterbaumodul montierten Werkstücks
EP3330725A1 (fr) * 2016-11-30 2018-06-06 JOT Automation Oy Agencement de transport pour système de test
US10173843B2 (en) 2016-11-30 2019-01-08 Jot Automation Oy Conveying arrangement for testing system
US10294032B2 (en) 2016-11-30 2019-05-21 Jot Automation Oy Conveying arrangement
CN109499898A (zh) * 2018-11-19 2019-03-22 长春工业大学 小型照明灯立式检测系统
CN109530274A (zh) * 2018-11-19 2019-03-29 长春工业大学 小型照明灯卧式检测系统

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JP3093264B2 (ja) 2000-10-03
KR930702085A (ko) 1993-09-08

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