WO1988003968A1 - Device for growing profiled monocrystals - Google Patents
Device for growing profiled monocrystals Download PDFInfo
- Publication number
- WO1988003968A1 WO1988003968A1 PCT/SU1987/000118 SU8700118W WO8803968A1 WO 1988003968 A1 WO1988003968 A1 WO 1988003968A1 SU 8700118 W SU8700118 W SU 8700118W WO 8803968 A1 WO8803968 A1 WO 8803968A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heater
- crucible
- mοnοκρisτallοv
- ρas
- vyρaschivaniya
- Prior art date
Links
- 238000009434 installation Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 241000193317 Lindra <fungus> Species 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/66—Crystals of complex geometrical shape, e.g. tubes, cylinders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
- Y10T117/104—Means for forming a hollow structure [e.g., tube, polygon]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
Definitions
- Very high quality is used on the basis of the quality of the installed components.
- the main characteristics of the quality are the exact size of the electrical components, the stability of the electrical circuit, the in-
- Flat thermal screens are made from a refractory material in the form of rings with a thickness of 0.5 to I mm each and are assembled in a package of 10 to 20 pieces.
- the height of the empty cylinder is made up to 6, the distance between the upper part of the consumer and the upper part of the heater
- the thickness of the heater 3 is not the same. Approximately 1/3 of the height of the heater is 3 times less than 4, and it has an identical thickness, while the height of the heater is 3 ⁇ ay 4.
- Heater 3 is equipped with a Type 5 and an optional 6, which is used to configure the multi-port 7 of the unit 20.
- Ligel 5 is made of molybdenum, has a secondary format, its internal performance is completed.
- Form 6 is made from a material wetted by a melting of a metal alloy, in particular from molybdenum. It is intended for ⁇ as ⁇ -
- the maximum diameter of the part 7 is 0.1-0.2 mm smaller than the maximum part number 13 and the part size 6, and the minimum part number is small; 13 agent 6.
- the pressurized camera I didn’t respond at part 19, after a quick turn off of 20. On the other hand, at 20, the charge was closed.
- a live television 24 should be from 1.5 to 2.0 diameters and written out
- a thermal screen 24 may be used in the simplest case of a ring, a triangle,
- the thickness of the domestic 24-hour screen must be between 0.1 and 0.15 of the external diameter in the country-
- ⁇ Gives of diameter in a thermal ecana 24 change 1, 5 ⁇ . or greater, and its thickness is less than ⁇ , ⁇ or. greater than 0.15 ⁇ , alignment of the temperature of the outside of the set 7 is not ensured.
- the proposed device for cultivating industrial bathtubs is a large number of industrial melting pots for industrial production.
- Ligature 5 by moving part 8 to the top, is installed in heater 3 to the uppermost position and after disconnecting 17 in unit 2, it is not used due to the use of aluminum
- the crucible 5 is placed in the lowermost position (not shown on the drawing) and in the heater 3 the flange 12 is mounted on the 24-in-receptacle 23.
- the burner After sealing the chamber and vacuuming it to 6.7 ” 10 Pa, the burner is ignited. The voltage is supplied to the heater 3 and the heat is released by the heater 3;
- chamber I is filled with inert gas, most often an argon, - 9 - under pressure ⁇ 9.81 * 10 to 10.79 * 10 Pa.
- ⁇ ⁇ igle 5 ⁇ as ⁇ lavlyae ⁇ sya is ⁇ dn ⁇ e sy ⁇ e and za ⁇ em ⁇ igel 5 'with ⁇ as ⁇ lav ⁇ m II ⁇ e ⁇ emeschae ⁇ sya in ⁇ aynee ve ⁇ nee ⁇ l ⁇ zhenie 5 d ⁇ first ⁇ n ⁇ a ⁇ a nizhneg ⁇ ⁇ tsa 13 ⁇ m ⁇ b ⁇ az ⁇ va ⁇ e- To 6 ⁇ as ⁇ lav ⁇ m II and further to ⁇ ab ⁇ chee ⁇ l ⁇ zhenie, ⁇ i ⁇ m ⁇ ass ⁇ yanie ⁇ ⁇ ve ⁇ n ⁇ s ⁇ i ⁇ as ⁇ lava II in The crucible 5 is optionally 13 mm long and the component 6 is at least 20 mm. Having completed II on time 18, it leaves from Crucible 5 to zone 14 for installation.
- line 20 is deactivated to contact machine 22 with a step 13 of processor 6, and machine 22 is suspended.
- the 26th alloy 15 gauge is 0.2 0.2-0.3 mm.
- this multi-part 7 is expanded to a predetermined cross-section. Saving is carried out at a location of line 20 with a speed of 22 at a speed of 0.5 to I mm / min.
- step 13 of the manufacturer 6 20 section 26 If you open it at step 13 of the manufacturer 6 20 section 26, the city is turned into a closed ring. Then, the metal 7 is pulled out of the 14 installation zone by moving the 20-bar unit at a speed of up to 5 mm / min.
- the last one is turned off by a melting point 26, for example, by lowering the crucible 5. Then, the crucible is removed 7
- heater 3 After reaching a temperature of ⁇ 50 550 ° C to ⁇ 600 ° C, heater 3 is turned off and further cooling
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Compositions (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IN797/CAL/87A IN167160B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-26 | 1987-10-13 | |
HU88341A HU203134B (en) | 1986-11-26 | 1987-10-23 | Apparatus for increasing monochristals of potically transvisible metal compound of high melting point |
AT88900261T ATE71994T1 (de) | 1986-11-26 | 1987-10-23 | Anordnung zur zuechtung profilierter monokristalle. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU864149059A SU1592414A1 (ru) | 1986-11-26 | 1986-11-26 | Cпocoб bыpaщиbahия пpoфилиpobahhыx kpиctaллob tугoплabkиx coeдиhehий и уctpoйctbo для eгo ocущectbлehия |
SU4149059/26 | 1986-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1988003968A1 true WO1988003968A1 (en) | 1988-06-02 |
Family
ID=21268241
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SU1987/000118 WO1988003968A1 (en) | 1986-11-26 | 1987-10-23 | Device for growing profiled monocrystals |
PCT/SU1987/000117 WO1988003967A1 (en) | 1986-11-26 | 1987-10-23 | Method of growing profiled monocrystals |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SU1987/000117 WO1988003967A1 (en) | 1986-11-26 | 1987-10-23 | Method of growing profiled monocrystals |
Country Status (13)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2507320C2 (ru) * | 2012-02-01 | 2014-02-20 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт Научно-производственное объединение "ЛУЧ" (ФГУП "НИИ НПО "ЛУЧ") | Устройство и способ выращивания профилированных кристаллов тугоплавких соединений |
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SU1592414A1 (ru) * | 1986-11-26 | 1990-09-15 | Vni Pk T I Elektrotermicheskog | Cпocoб bыpaщиbahия пpoфилиpobahhыx kpиctaллob tугoплabkиx coeдиhehий и уctpoйctbo для eгo ocущectbлehия |
US5269875A (en) * | 1989-10-05 | 1993-12-14 | Shin-Etsu Handotai Company, Limited | Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method |
WO1992001091A1 (en) * | 1990-07-10 | 1992-01-23 | Saphikon, Inc. | Apparatus for growing hollow crystalline bodies from the melt |
JP3016897B2 (ja) * | 1991-03-20 | 2000-03-06 | 信越半導体株式会社 | シリコン単結晶の製造方法及び装置 |
WO1992019797A1 (en) * | 1991-04-26 | 1992-11-12 | Mitsubishi Materials Corporation | Process for pulling up single crystal |
WO1993000462A1 (en) * | 1991-06-24 | 1993-01-07 | Komatsu Electronic Metals Co., Ltd. | Device for pulling up single crystal |
US5363795A (en) * | 1991-09-04 | 1994-11-15 | Kawasaki Steel Corporation | Czochralski crystal pulling process and an apparatus for carrying out the same |
US5373805A (en) * | 1991-10-17 | 1994-12-20 | Shin-Etsu Handotai Co., Ltd. | Single crystal pulling apparatus |
JPH05194075A (ja) * | 1992-01-24 | 1993-08-03 | Nec Corp | 単結晶育成法 |
JP2795036B2 (ja) * | 1992-02-04 | 1998-09-10 | 信越半導体株式会社 | 単結晶引上装置 |
US5394830A (en) * | 1993-08-27 | 1995-03-07 | General Electric Company | Apparatus and method for growing long single crystals in a liquid encapsulated Czochralski process |
US5394420A (en) * | 1994-01-27 | 1995-02-28 | Trw Inc. | Multiform crystal and apparatus for fabrication |
JPH09110582A (ja) * | 1995-10-11 | 1997-04-28 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | 結晶製造装置 |
US5900059A (en) * | 1996-05-29 | 1999-05-04 | Komatsu Electronic Metals Co., Ltd. | Method and apparatus for fabricating semiconductor single crystal |
WO1998035074A1 (en) * | 1997-02-06 | 1998-08-13 | Crysteco, Inc. | Method and apparatus for growing crystals |
RU2164267C1 (ru) * | 1999-09-29 | 2001-03-20 | ЗАО "Сафитек" | Способ выращивания профилированных кристаллов тугоплавких соединений |
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RU2222645C1 (ru) * | 2003-03-26 | 2004-01-27 | Амосов Владимир Ильич | Устройство для выращивания монокристаллов из расплава |
CN100465357C (zh) * | 2003-04-23 | 2009-03-04 | 斯特拉化学株式会社 | 氟化物晶体的制造装置 |
TW200510581A (en) * | 2003-07-17 | 2005-03-16 | Stella Chemifa Corp | Method for producing crystal of fluoride |
US7348076B2 (en) | 2004-04-08 | 2008-03-25 | Saint-Gobain Ceramics & Plastics, Inc. | Single crystals and methods for fabricating same |
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RU2439214C1 (ru) * | 2010-06-17 | 2012-01-10 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт Научно-производственное объединение "ЛУЧ" (ФГУП "НИИ НПО "ЛУЧ") | Способ выращивания профилированных кристаллов тугоплавких соединений |
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US4390505A (en) * | 1981-03-30 | 1983-06-28 | Mobil Solar Energy Corporation | Crystal growth apparatus |
SU1592414A1 (ru) * | 1986-11-26 | 1990-09-15 | Vni Pk T I Elektrotermicheskog | Cпocoб bыpaщиbahия пpoфилиpobahhыx kpиctaллob tугoплabkиx coeдиhehий и уctpoйctbo для eгo ocущectbлehия |
-
1986
- 1986-11-26 SU SU864149059A patent/SU1592414A1/ru active
-
1987
- 1987-10-13 IN IN797/CAL/87A patent/IN167160B/en unknown
- 1987-10-23 WO PCT/SU1987/000118 patent/WO1988003968A1/ru not_active Application Discontinuation
- 1987-10-23 US US07/241,988 patent/US4915773A/en not_active Expired - Fee Related
- 1987-10-23 EP EP19880900260 patent/EP0290628B1/de not_active Expired - Lifetime
- 1987-10-23 US US07/241,978 patent/US4957713A/en not_active Expired - Fee Related
- 1987-10-23 EP EP88900261A patent/EP0290629B1/de not_active Expired - Lifetime
- 1987-10-23 AU AU10581/88A patent/AU592921B2/en not_active Ceased
- 1987-10-23 AU AU10582/88A patent/AU592922B2/en not_active Ceased
- 1987-10-23 JP JP63500623A patent/JPH01501468A/ja active Pending
- 1987-10-23 HU HU88341A patent/HU203134B/hu not_active IP Right Cessation
- 1987-10-23 DE DE8888900260T patent/DE3776333D1/de not_active Expired - Fee Related
- 1987-10-23 WO PCT/SU1987/000117 patent/WO1988003967A1/ru active IP Right Grant
- 1987-10-23 JP JP88500622A patent/JPH01501467A/ja active Pending
- 1987-10-23 HU HU88326A patent/HU203587B/hu not_active IP Right Cessation
- 1987-10-23 AT AT88900261T patent/ATE71994T1/de active
- 1987-10-23 AT AT88900260T patent/ATE71993T1/de active
- 1987-10-28 BR BR8705753A patent/BR8705753A/pt unknown
- 1987-11-24 BR BR8706332A patent/BR8706332A/pt unknown
- 1987-11-25 CN CN87108014A patent/CN1010037B/zh not_active Expired
- 1987-11-26 YU YU215187A patent/YU215187A/xx unknown
- 1987-11-26 CN CN87108007A patent/CN1010036B/zh not_active Expired
- 1987-11-27 IN IN933/CAL/87A patent/IN168216B/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3915656A (en) * | 1971-06-01 | 1975-10-28 | Tyco Laboratories Inc | Apparatus for growing crystalline bodies from the melt |
DE2325104C3 (de) * | 1972-07-10 | 1980-10-09 | Tyco Laboratories Inc., Waltham, Mass. (V.St.A.) | Verfahren zum Ziehen eines langgestreckten, kristallinen Körpers |
Non-Patent Citations (2)
Title |
---|
P.I. ANTONOV et al. "Poluchenie Profilirovannykh monokristallov i Izdely Sposobom Stepanova", 1981, Nauka, Leningrad, see page 139 * |
See also references of EP0290629A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2507320C2 (ru) * | 2012-02-01 | 2014-02-20 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт Научно-производственное объединение "ЛУЧ" (ФГУП "НИИ НПО "ЛУЧ") | Устройство и способ выращивания профилированных кристаллов тугоплавких соединений |
Also Published As
Publication number | Publication date |
---|---|
BR8706332A (pt) | 1988-07-19 |
JPH01501468A (ja) | 1989-05-25 |
EP0290629A1 (de) | 1988-11-17 |
IN168216B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-23 |
HUT51685A (en) | 1990-05-28 |
EP0290628B1 (de) | 1992-01-22 |
CN87108014A (zh) | 1988-06-08 |
US4915773A (en) | 1990-04-10 |
SU1592414A1 (ru) | 1990-09-15 |
WO1988003967A1 (en) | 1988-06-02 |
EP0290629B1 (en) | 1992-01-22 |
AU1058188A (en) | 1988-06-16 |
AU592921B2 (en) | 1990-01-25 |
US4957713A (en) | 1990-09-18 |
AU1058288A (en) | 1988-06-16 |
AU592922B2 (en) | 1990-01-25 |
JPH01501467A (ja) | 1989-05-25 |
YU215187A (en) | 1988-10-31 |
CN1010036B (zh) | 1990-10-17 |
IN167160B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-08 |
BR8705753A (pt) | 1988-06-28 |
HU203134B (en) | 1991-05-28 |
CN87108007A (zh) | 1988-06-08 |
HU203587B (en) | 1991-08-28 |
EP0290628A1 (de) | 1988-11-17 |
ATE71994T1 (de) | 1992-02-15 |
CN1010037B (zh) | 1990-10-17 |
EP0290629A4 (de) | 1989-03-22 |
EP0290628A4 (de) | 1989-03-23 |
ATE71993T1 (de) | 1992-02-15 |
HUT51684A (en) | 1990-05-28 |
DE3776333D1 (de) | 1992-03-05 |
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