USD939459S1 - Boat for wafer processing apparatus - Google Patents
Boat for wafer processing apparatus Download PDFInfo
- Publication number
- USD939459S1 USD939459S1 US29/716,458 US201929716458F USD939459S US D939459 S1 USD939459 S1 US D939459S1 US 201929716458 F US201929716458 F US 201929716458F US D939459 S USD939459 S US D939459S
- Authority
- US
- United States
- Prior art keywords
- view
- boat
- processing apparatus
- wafer processing
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
For clarity, due to the nature and size of the portions of the article that form no part of the claimed design in FIGS. 9 and 10 , hatching to indicate the cut sections is not shown in FIGS. 9 and 10 .
The dashed-dot-dashed lines represent the boundary lines of the claimed design in FIGS. 1-5 and 8 . The even dashed broken lines showing a full or portions of a cylindrical device in FIGS. 1-10 are included for the purpose of illustrating environment and form no part of the claimed design. The dot-dash broken line of the box showing the enlarged portion view of FIG. 8 in FIG.2 shows the bounds of the enlarged portion view and forms no part of the claimed design.
Claims (1)
- The ornamental design for a boat for wafer processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-017637 | 2019-08-07 | ||
JPD2019-17637F JP1658652S (en) | 2019-08-07 | 2019-08-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD939459S1 true USD939459S1 (en) | 2021-12-28 |
Family
ID=70335647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/716,458 Active USD939459S1 (en) | 2019-08-07 | 2019-12-10 | Boat for wafer processing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD939459S1 (en) |
JP (1) | JP1658652S (en) |
TW (1) | TWD208179S (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1042374S1 (en) | 2022-03-18 | 2024-09-17 | Applied Materials, Inc. | Support pipe for an interlocking process kit for a substrate processing chamber |
USD1042373S1 (en) | 2022-03-18 | 2024-09-17 | Applied Materials, Inc. | Sliding ring for an interlocking process kit for a substrate processing chamber |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1718541S (en) | 2021-10-15 | 2022-06-29 | Carrier board for handling | |
JP1724481S (en) | 2021-10-15 | 2022-09-12 | Carrier substrate for handling | |
JP1727916S (en) | 2021-10-15 | 2022-10-21 | Carrier substrate for handling | |
JP1718604S (en) | 2021-10-15 | 2022-06-29 | Carrier board for handling | |
JP1724567S (en) | 2021-10-15 | 2022-09-12 | Carrier substrate for handling |
Citations (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US6966771B2 (en) * | 2001-12-27 | 2005-11-22 | Tokyo Electron Limited | Boat for heat treatment and vertical heat treatment equipment |
US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD616396S1 (en) * | 2009-03-12 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
US7857140B2 (en) * | 2005-12-06 | 2010-12-28 | Fujitsu Semiconductor Limited | Semiconductor wafer storage case and semiconductor wafer storing method |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
-
2019
- 2019-08-07 JP JPD2019-17637F patent/JP1658652S/ja active Active
- 2019-11-21 TW TW108307123F patent/TWD208179S/en unknown
- 2019-12-10 US US29/716,458 patent/USD939459S1/en active Active
Patent Citations (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US6966771B2 (en) * | 2001-12-27 | 2005-11-22 | Tokyo Electron Limited | Boat for heat treatment and vertical heat treatment equipment |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
US7857140B2 (en) * | 2005-12-06 | 2010-12-28 | Fujitsu Semiconductor Limited | Semiconductor wafer storage case and semiconductor wafer storing method |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD616396S1 (en) * | 2009-03-12 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
US11929272B2 (en) * | 2019-07-31 | 2024-03-12 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
USD1021832S1 (en) | 2020-09-17 | 2024-04-09 | Ebara Corporation | Elastic membrane |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
USD1042374S1 (en) | 2022-03-18 | 2024-09-17 | Applied Materials, Inc. | Support pipe for an interlocking process kit for a substrate processing chamber |
USD1042373S1 (en) | 2022-03-18 | 2024-09-17 | Applied Materials, Inc. | Sliding ring for an interlocking process kit for a substrate processing chamber |
USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
Also Published As
Publication number | Publication date |
---|---|
TWD208179S (en) | 2020-11-11 |
JP1658652S (en) | 2020-04-27 |
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Legal Events
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FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |