USD871609S1 - Electrode plate peripheral ring for a plasma processing apparatus - Google Patents

Electrode plate peripheral ring for a plasma processing apparatus Download PDF

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Publication number
USD871609S1
USD871609S1 US29/635,296 US201829635296F USD871609S US D871609 S1 USD871609 S1 US D871609S1 US 201829635296 F US201829635296 F US 201829635296F US D871609 S USD871609 S US D871609S
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United States
Prior art keywords
processing apparatus
plasma processing
electrode plate
peripheral ring
plate peripheral
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Active
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US29/635,296
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English (en)
Inventor
Masakazu Isozaki
Masahito Mori
Kenetsu Yokogawa
Takao Arase
Takahisa Hashimoto
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YOKOGAWA, KENETSU, ARASE, TAKAO, HASHIMOTO, TAKAHISA, ISOZAKI, MASAKAZU, MORI, MASAHITO
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Publication of USD871609S1 publication Critical patent/USD871609S1/en
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
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US29/635,296 2017-08-31 2018-01-30 Electrode plate peripheral ring for a plasma processing apparatus Active USD871609S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-018890 2017-08-31
JPD2017-18890F JP1598997S (enrdf_load_stackoverflow) 2017-08-31 2017-08-31

Publications (1)

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USD871609S1 true USD871609S1 (en) 2019-12-31

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US29/635,296 Active USD871609S1 (en) 2017-08-31 2018-01-30 Electrode plate peripheral ring for a plasma processing apparatus

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US (1) USD871609S1 (enrdf_load_stackoverflow)
JP (1) JP1598997S (enrdf_load_stackoverflow)
TW (1) TWD193611S (enrdf_load_stackoverflow)

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD886739S1 (en) * 2019-01-04 2020-06-09 Libest Inc. Electrode plate
USD889335S1 (en) * 2018-10-03 2020-07-07 Vaughn C Jewell Disc
USD891636S1 (en) * 2018-10-25 2020-07-28 Hitachi High-Tech Corporation Ring for a plasma processing apparatus
USD895777S1 (en) * 2017-09-20 2020-09-08 Gardner Denver Petroleum Pumps Llc Header ring
US10837556B2 (en) 2017-09-20 2020-11-17 Fardner Denver Petroleum Pumps Llc Packing for a well service pump
USD905270S1 (en) * 2015-03-13 2020-12-15 Hamamatsu Photonics K.K. Lid for a culture vessel
USD905268S1 (en) * 2015-03-13 2020-12-15 Hamamatsu Photonics K.K. Lid for a culture vessel
USD916038S1 (en) * 2019-03-19 2021-04-13 Hitachi High-Tech Corporation Grounded electrode for a plasma processing apparatus
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD952462S1 (en) * 2019-05-07 2022-05-24 Ynb Supply (Asia) Corporation Ring-peel-seal liner
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD957627S1 (en) * 2020-03-19 2022-07-12 Coloplast A/S Ostomy accessory
USD958604S1 (en) * 2018-08-07 2022-07-26 Solo Brands, Llc Eating dish
USD971006S1 (en) * 2021-04-01 2022-11-29 Curtis Alan Schwartz Underground plumbing target
USD973160S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. End plates for vibrating fitness roller
USD973159S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. Endcaps for a vibrating fitness roller
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap
USD1005245S1 (en) * 2021-04-19 2023-11-21 Hitachi High-Tech Corporation Electrode cover for a plasma processing apparatus
USD1008986S1 (en) * 2021-04-26 2023-12-26 Hitachi High-Tech Corporation Ion shield plate for plasma processing apparatus
USD1008782S1 (en) * 2020-12-30 2023-12-26 Spigen Korea Co., Ltd. Wall plate
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
USD1057110S1 (en) * 2023-08-10 2025-01-07 Ynb Supply (Asia) Corporation Sealing liner
USD1066275S1 (en) 2022-04-04 2025-03-11 Applied Materials, Inc. Baffle for anti-rotation process kit for substrate processing chamber
USD1078086S1 (en) * 2022-06-03 2025-06-03 Princeton Biochemicals, Inc. Interchangeable support for a capillary electrophoresis cartridge cassette
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors
US12387913B2 (en) 2022-07-08 2025-08-12 Tosoh Smd, Inc. Dynamic vacuum seal system for physical vapor deposition sputter applications

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USD368516S (en) * 1993-08-24 1996-04-02 Keizo Matsumura Gasket for vacuum apparatus
USD458380S1 (en) * 2001-09-10 2002-06-04 Patricia M. Dutil Protective collar for a baby bottle
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USD563531S1 (en) * 2005-05-02 2008-03-04 Nippon Pillar Packing Co., Ltd. Fluid gasket
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD649986S1 (en) * 2010-08-17 2011-12-06 Ebara Corporation Sealing ring
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD683451S1 (en) * 2011-03-07 2013-05-28 Hollister Incorporated Convex barrier ring with tapered peripheral end portions for ostomy appliance
USD697038S1 (en) * 2011-09-20 2014-01-07 Tokyo Electron Limited Baffle plate
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD709537S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709536S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
JP1545406S (enrdf_load_stackoverflow) 2015-06-16 2016-03-14
USD753736S1 (en) * 2014-05-15 2016-04-12 Ebara Corporation Dresser disk
USD770992S1 (en) * 2015-06-12 2016-11-08 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD797691S1 (en) * 2016-04-14 2017-09-19 Applied Materials, Inc. Composite edge ring
JP1604358S (enrdf_load_stackoverflow) * 2017-10-26 2018-05-21
USD837015S1 (en) * 2014-06-06 2019-01-01 Husqvarna Construction Products North America, Inc. Polishing pad

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TW304626U (en) 1996-06-26 1997-05-01 United Microelectronics Corp Ceramic ring structure to guide the chip to slide down to the bottom electrode in a dry etcher

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD368516S (en) * 1993-08-24 1996-04-02 Keizo Matsumura Gasket for vacuum apparatus
USD458380S1 (en) * 2001-09-10 2002-06-04 Patricia M. Dutil Protective collar for a baby bottle
USD494551S1 (en) * 2002-12-12 2004-08-17 Tokyo Electron Limited Exhaust ring for manufacturing semiconductors
USD563531S1 (en) * 2005-05-02 2008-03-04 Nippon Pillar Packing Co., Ltd. Fluid gasket
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD649986S1 (en) * 2010-08-17 2011-12-06 Ebara Corporation Sealing ring
USD683451S1 (en) * 2011-03-07 2013-05-28 Hollister Incorporated Convex barrier ring with tapered peripheral end portions for ostomy appliance
USD697038S1 (en) * 2011-09-20 2014-01-07 Tokyo Electron Limited Baffle plate
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD709537S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD709536S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD753736S1 (en) * 2014-05-15 2016-04-12 Ebara Corporation Dresser disk
USD837015S1 (en) * 2014-06-06 2019-01-01 Husqvarna Construction Products North America, Inc. Polishing pad
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD770992S1 (en) * 2015-06-12 2016-11-08 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
JP1545406S (enrdf_load_stackoverflow) 2015-06-16 2016-03-14
USD797691S1 (en) * 2016-04-14 2017-09-19 Applied Materials, Inc. Composite edge ring
JP1604358S (enrdf_load_stackoverflow) * 2017-10-26 2018-05-21

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
GAMFLEX Metal Jacket Gaskets. Online, published date unknown. Retrieved on Apr. 19, 2019 from URL: http://www.gambitgi.eu/en/produkty/seals/gamflex-metal-jacket-gaskets.html. *
Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
Metal Gaskets Manufacturer. Online, published date unknown. Retrieved on Apr. 19, 2019 from URL: https://www.jaydeepsteels.com/metal-gaskets/. *
Okuda et al., Design U.S. Appl. No. 29/635,289, filed Jan. 30, 2018.
Spiral Wound Gasket, CRIR, 12 in, 16⅛ in. Online, published date unknown. Retrieved on Apr. 19, 2019 from URL: https://www.zoro.com/klinger-spiral-wound-gasket-type-cr-spiral-wound-gasket-crir-12-in-16-18-in-swcrir-1200-p1-g-we-oa/i/G1610248/. *

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD905268S1 (en) * 2015-03-13 2020-12-15 Hamamatsu Photonics K.K. Lid for a culture vessel
USD905270S1 (en) * 2015-03-13 2020-12-15 Hamamatsu Photonics K.K. Lid for a culture vessel
US10837556B2 (en) 2017-09-20 2020-11-17 Fardner Denver Petroleum Pumps Llc Packing for a well service pump
USD895777S1 (en) * 2017-09-20 2020-09-08 Gardner Denver Petroleum Pumps Llc Header ring
USD958604S1 (en) * 2018-08-07 2022-07-26 Solo Brands, Llc Eating dish
USD889335S1 (en) * 2018-10-03 2020-07-07 Vaughn C Jewell Disc
USD891636S1 (en) * 2018-10-25 2020-07-28 Hitachi High-Tech Corporation Ring for a plasma processing apparatus
USD886739S1 (en) * 2019-01-04 2020-06-09 Libest Inc. Electrode plate
USD916038S1 (en) * 2019-03-19 2021-04-13 Hitachi High-Tech Corporation Grounded electrode for a plasma processing apparatus
USD952462S1 (en) * 2019-05-07 2022-05-24 Ynb Supply (Asia) Corporation Ring-peel-seal liner
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD957627S1 (en) * 2020-03-19 2022-07-12 Coloplast A/S Ostomy accessory
USD986190S1 (en) 2020-03-19 2023-05-16 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD1057943S1 (en) 2020-03-19 2025-01-14 Coloplast A/S Packaged ostomy accessory
USD1008782S1 (en) * 2020-12-30 2023-12-26 Spigen Korea Co., Ltd. Wall plate
USD973160S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. End plates for vibrating fitness roller
USD973159S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. Endcaps for a vibrating fitness roller
USD971006S1 (en) * 2021-04-01 2022-11-29 Curtis Alan Schwartz Underground plumbing target
USD1005245S1 (en) * 2021-04-19 2023-11-21 Hitachi High-Tech Corporation Electrode cover for a plasma processing apparatus
USD1008986S1 (en) * 2021-04-26 2023-12-26 Hitachi High-Tech Corporation Ion shield plate for plasma processing apparatus
USD1066275S1 (en) 2022-04-04 2025-03-11 Applied Materials, Inc. Baffle for anti-rotation process kit for substrate processing chamber
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
USD1078086S1 (en) * 2022-06-03 2025-06-03 Princeton Biochemicals, Inc. Interchangeable support for a capillary electrophoresis cartridge cassette
US12387913B2 (en) 2022-07-08 2025-08-12 Tosoh Smd, Inc. Dynamic vacuum seal system for physical vapor deposition sputter applications
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors
USD1057110S1 (en) * 2023-08-10 2025-01-07 Ynb Supply (Asia) Corporation Sealing liner

Also Published As

Publication number Publication date
TWD193611S (zh) 2018-10-21
JP1598997S (enrdf_load_stackoverflow) 2018-03-05

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