TWD193611S - Electrode plate peripheral ring for plasma processing equipment - Google Patents

Electrode plate peripheral ring for plasma processing equipment

Info

Publication number
TWD193611S
TWD193611S TW107300612F TW107300612F TWD193611S TW D193611 S TWD193611 S TW D193611S TW 107300612 F TW107300612 F TW 107300612F TW 107300612 F TW107300612 F TW 107300612F TW D193611 S TWD193611 S TW D193611S
Authority
TW
Taiwan
Prior art keywords
electrode plate
plasma processing
peripheral ring
processing equipment
plate peripheral
Prior art date
Application number
TW107300612F
Other languages
English (en)
Inventor
磯崎真一
森政士
横川賢濵
荒瀨高男
橋本尊久
Original Assignee
日商日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立全球先端科技股份有限公司 filed Critical 日商日立全球先端科技股份有限公司
Publication of TWD193611S publication Critical patent/TWD193611S/zh

Links

Abstract

【物品用途】;本設計的物品係為在半導體製造所使用的電漿處理裝置中，如「使用狀態及標示各部名稱之參考圖」所示，設置在噴出氣體的電極板外周附近的外周環。本申請案的設計具有設置錐形部的形狀，藉此可使得來自電極板的氣體流動更加均勻。;【設計說明】;(無)

Description

電漿處理裝置用電極板外周環
本設計的物品係為在半導體製造所使用的電漿處理裝置中，如「使用狀態及標示各部名稱之參考圖」所示，設置在噴出氣體的電極板外周附近的外周環。本申請案的設計具有設置錐形部的形狀，藉此可使得來自電極板的氣體流動更加均勻。
(無)
TW107300612F 2017-08-31 2018-01-31 Electrode plate peripheral ring for plasma processing equipment TWD193611S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-018890 2017-08-31
JPD2017-18890F JP1598997S (zh) 2017-08-31 2017-08-31

Publications (1)

Publication Number Publication Date
TWD193611S true TWD193611S (zh) 2018-10-21

Family

ID=61274595

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107300612F TWD193611S (zh) 2017-08-31 2018-01-31 Electrode plate peripheral ring for plasma processing equipment

Country Status (3)

Country Link
US (1) USD871609S1 (zh)
JP (1) JP1598997S (zh)
TW (1) TWD193611S (zh)

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USD895777S1 (en) * 2017-09-20 2020-09-08 Gardner Denver Petroleum Pumps Llc Header ring
US10837556B2 (en) 2017-09-20 2020-11-17 Fardner Denver Petroleum Pumps Llc Packing for a well service pump
USD883035S1 (en) * 2018-08-07 2020-05-05 Frontline Advance Llc Eating dish with a removable handle
USD889335S1 (en) * 2018-10-03 2020-07-07 Vaughn C Jewell Disc
JP1640255S (zh) * 2018-10-25 2019-09-02
USD886739S1 (en) * 2019-01-04 2020-06-09 Libest Inc. Electrode plate
JP1646366S (zh) * 2019-03-19 2019-11-25
TWD204805S (zh) * 2019-05-07 2020-05-21 鼎貞企業有限公司 拉環墊片(二)
JP1659287S (zh) * 2019-10-18 2020-05-11
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD957627S1 (en) * 2020-03-19 2022-07-12 Coloplast A/S Ostomy accessory
USD1008782S1 (en) * 2020-12-30 2023-12-26 Spigen Korea Co., Ltd. Wall plate
USD973159S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. Endcaps for a vibrating fitness roller
USD973160S1 (en) * 2021-02-24 2022-12-20 Hyper Ice, Inc. End plates for vibrating fitness roller
USD971006S1 (en) * 2021-04-01 2022-11-29 Curtis Alan Schwartz Underground plumbing target
JP1704964S (ja) * 2021-04-19 2022-01-14 プラズマ処理装置用サセプタリング
JP1700629S (zh) * 2021-04-26 2021-11-29

Citations (1)

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TW304626U (en) 1996-06-26 1997-05-01 United Microelectronics Corp Ceramic ring structure to guide the chip to slide down to the bottom electrode in a dry etcher

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Publication number Priority date Publication date Assignee Title
TW304626U (en) 1996-06-26 1997-05-01 United Microelectronics Corp Ceramic ring structure to guide the chip to slide down to the bottom electrode in a dry etcher

Also Published As

Publication number Publication date
USD871609S1 (en) 2019-12-31
JP1598997S (zh) 2018-03-05

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