USD405427S - Heat retaining tube for use in a semiconductor wafer heat processing apparatus - Google Patents
Heat retaining tube for use in a semiconductor wafer heat processing apparatus Download PDFInfo
- Publication number
- USD405427S USD405427S US29/074,278 US7427897F USD405427S US D405427 S USD405427 S US D405427S US 7427897 F US7427897 F US 7427897F US D405427 S USD405427 S US D405427S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- semiconductor wafer
- retaining tube
- heat
- heat processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1: a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2: a top plan view thereof;
FIG. 3: a front elevational view thereof, the rear elevational view is identical with the front view;
FIG. 4: a right side view thereof, the left side view being a mirror image of the right view;
FIG. 5: a bottom plan view thereof; and,
FIG. 6: a cross sectional view thereof taken along line VI--VI in FIG. 3.
Claims (1)
- I claim the ornamental design for a heat retaining tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9-2649 | 1997-01-31 | ||
| JP264997 | 1997-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD405427S true USD405427S (en) | 1999-02-09 |
Family
ID=71726518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/074,278 Expired - Lifetime USD405427S (en) | 1997-01-31 | 1997-07-24 | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD405427S (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
| USD846513S1 (en) * | 2016-04-27 | 2019-04-23 | Ngk Insulators, Ltd. | Sheet heater for electrostatic chuck |
| USD906989S1 (en) * | 2017-05-03 | 2021-01-05 | Fluence Bioengineering, Inc. | Heat sink for a luminaire |
| USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
-
1997
- 1997-07-24 US US29/074,278 patent/USD405427S/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
| USD846513S1 (en) * | 2016-04-27 | 2019-04-23 | Ngk Insulators, Ltd. | Sheet heater for electrostatic chuck |
| USD906989S1 (en) * | 2017-05-03 | 2021-01-05 | Fluence Bioengineering, Inc. | Heat sink for a luminaire |
| USD907592S1 (en) * | 2017-05-03 | 2021-01-12 | Fluence Bioengineering, Inc. | Heat sink for a luminaire |
| USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
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