USD846513S1 - Sheet heater for electrostatic chuck - Google Patents
Sheet heater for electrostatic chuck Download PDFInfo
- Publication number
- USD846513S1 USD846513S1 US29/581,749 US201629581749F USD846513S US D846513 S1 USD846513 S1 US D846513S1 US 201629581749 F US201629581749 F US 201629581749F US D846513 S USD846513 S US D846513S
- Authority
- US
- United States
- Prior art keywords
- electrostatic chuck
- sheet heater
- taken along
- along line
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken lines in the drawings depict unclaimed subject matter only and form no part of the claimed design.
Claims (1)
- The ornamental design for a sheet heater for electrostatic chuck, as shown and described.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2016-9254F JP1570740S (en) | 2016-04-27 | 2016-04-27 | |
JP2016-009258 | 2016-04-27 | ||
JP2016-009254 | 2016-04-27 | ||
JP2016-009255 | 2016-04-27 | ||
JPD2016-9258F JP1571118S (en) | 2016-04-27 | 2016-04-27 | |
JPD2016-9255F JP1571115S (en) | 2016-04-27 | 2016-04-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD846513S1 true USD846513S1 (en) | 2019-04-23 |
Family
ID=66103511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/581,749 Active USD846513S1 (en) | 2016-04-27 | 2016-10-21 | Sheet heater for electrostatic chuck |
Country Status (1)
Country | Link |
---|---|
US (1) | USD846513S1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD872032S1 (en) * | 2018-09-14 | 2020-01-07 | Telit Communications S.P.A. | Connection module |
USD872033S1 (en) * | 2018-09-14 | 2020-01-07 | Telit Communications S.P.A. | Connection module |
Citations (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD266070S (en) * | 1980-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD266074S (en) * | 1981-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD266077S (en) * | 1980-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD273582S (en) * | 1981-09-08 | 1984-04-24 | Bolt William S | Holding pallet for PC boards |
USD273860S (en) * | 1981-09-08 | 1984-05-15 | Bolt William S | Holding pallet for PC boards |
USD327883S (en) * | 1990-02-09 | 1992-07-14 | Gemplus Card International | Connecting terminal for chip cards |
USD328599S (en) * | 1990-04-10 | 1992-08-11 | Gemplus Card International | Connecting terminal for chip cards |
USD370464S (en) * | 1994-11-30 | 1996-06-04 | Metropage, Inc. | Heat seal connector for a pager |
USD405427S (en) * | 1997-01-31 | 1999-02-09 | Tokyo Electron Limited | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
US6133557A (en) * | 1995-01-31 | 2000-10-17 | Kyocera Corporation | Wafer holding member |
USD466093S1 (en) * | 2001-04-27 | 2002-11-26 | Taiyo Yuden Co., Ltd. | Hybird integrated circuit board |
USD529031S1 (en) * | 2004-07-27 | 2006-09-26 | Siliconware Precision Industries Co., Ltd. | IC card type circuit module |
USD540272S1 (en) * | 2005-04-18 | 2007-04-10 | Murata Manufacturing Co., Ltd. | Semiconductor module |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD598380S1 (en) * | 2008-05-09 | 2009-08-18 | Fujifilm Corporation | Conductive sheet |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD613690S1 (en) * | 2008-12-09 | 2010-04-13 | Fujifilm Corporation | Conductive sheet |
USD615927S1 (en) * | 2008-05-09 | 2010-05-18 | Fujifilm Corporation | Conductive sheet |
USD651991S1 (en) * | 2010-08-17 | 2012-01-10 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD651992S1 (en) * | 2010-08-17 | 2012-01-10 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD655256S1 (en) * | 2010-08-17 | 2012-03-06 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD690672S1 (en) * | 2011-10-04 | 2013-10-01 | Kabushiki Kaisha Yaskawa Denki | Encoder optical module |
USD699201S1 (en) * | 2012-10-01 | 2014-02-11 | Gemalto M2M Gmbh | Pad arrangement of a circuit module |
US8981263B2 (en) * | 2009-12-10 | 2015-03-17 | Tokyo Electron Limited | Electrostatic chuck apparatus |
USD775092S1 (en) * | 2013-10-17 | 2016-12-27 | Vlt, Inc. | Electric terminal |
USD797690S1 (en) * | 2015-03-16 | 2017-09-19 | Nuflare Technology, Inc. | Heater for semiconductor manufacturing apparatus |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
-
2016
- 2016-10-21 US US29/581,749 patent/USD846513S1/en active Active
Patent Citations (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD266070S (en) * | 1980-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD266077S (en) * | 1980-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD266074S (en) * | 1981-03-31 | 1982-09-07 | Showa Aluminum Kabushiki Kaisha | Heat releasing plate for mounting semiconductor components |
USD273582S (en) * | 1981-09-08 | 1984-04-24 | Bolt William S | Holding pallet for PC boards |
USD273860S (en) * | 1981-09-08 | 1984-05-15 | Bolt William S | Holding pallet for PC boards |
USD327883S (en) * | 1990-02-09 | 1992-07-14 | Gemplus Card International | Connecting terminal for chip cards |
USD328599S (en) * | 1990-04-10 | 1992-08-11 | Gemplus Card International | Connecting terminal for chip cards |
USD370464S (en) * | 1994-11-30 | 1996-06-04 | Metropage, Inc. | Heat seal connector for a pager |
US6133557A (en) * | 1995-01-31 | 2000-10-17 | Kyocera Corporation | Wafer holding member |
USD405427S (en) * | 1997-01-31 | 1999-02-09 | Tokyo Electron Limited | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
USD466093S1 (en) * | 2001-04-27 | 2002-11-26 | Taiyo Yuden Co., Ltd. | Hybird integrated circuit board |
USD471167S1 (en) * | 2001-04-27 | 2003-03-04 | Taiyo Yuden Co., Ltd. | Hybrid integrated circuit board |
USD529031S1 (en) * | 2004-07-27 | 2006-09-26 | Siliconware Precision Industries Co., Ltd. | IC card type circuit module |
USD540272S1 (en) * | 2005-04-18 | 2007-04-10 | Murata Manufacturing Co., Ltd. | Semiconductor module |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD598380S1 (en) * | 2008-05-09 | 2009-08-18 | Fujifilm Corporation | Conductive sheet |
USD615927S1 (en) * | 2008-05-09 | 2010-05-18 | Fujifilm Corporation | Conductive sheet |
USD613690S1 (en) * | 2008-12-09 | 2010-04-13 | Fujifilm Corporation | Conductive sheet |
US8981263B2 (en) * | 2009-12-10 | 2015-03-17 | Tokyo Electron Limited | Electrostatic chuck apparatus |
USD651992S1 (en) * | 2010-08-17 | 2012-01-10 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD655256S1 (en) * | 2010-08-17 | 2012-03-06 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD651991S1 (en) * | 2010-08-17 | 2012-01-10 | Sumitomo Electric Industries, Ltd. | Semiconductor substrate |
USD690672S1 (en) * | 2011-10-04 | 2013-10-01 | Kabushiki Kaisha Yaskawa Denki | Encoder optical module |
USD699201S1 (en) * | 2012-10-01 | 2014-02-11 | Gemalto M2M Gmbh | Pad arrangement of a circuit module |
USD775092S1 (en) * | 2013-10-17 | 2016-12-27 | Vlt, Inc. | Electric terminal |
USD797690S1 (en) * | 2015-03-16 | 2017-09-19 | Nuflare Technology, Inc. | Heater for semiconductor manufacturing apparatus |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
Non-Patent Citations (1)
Title |
---|
Rectangle, Webster's Dictionary, 1913, http://www.webster-dictionary.org/definition/Rectangle. * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD872032S1 (en) * | 2018-09-14 | 2020-01-07 | Telit Communications S.P.A. | Connection module |
USD872033S1 (en) * | 2018-09-14 | 2020-01-07 | Telit Communications S.P.A. | Connection module |
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