USD404374S - Fin for use in a semiconductor wafer heat processing apparatus - Google Patents
Fin for use in a semiconductor wafer heat processing apparatus Download PDFInfo
- Publication number
- USD404374S USD404374S US29/083,717 US8371798F USD404374S US D404374 S USD404374 S US D404374S US 8371798 F US8371798 F US 8371798F US D404374 S USD404374 S US D404374S
- Authority
- US
- United States
- Prior art keywords
- fin
- processing apparatus
- semiconductor wafer
- heat processing
- wafer heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
FIG. 1 a perspective view of fin for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a right side view thereof;
FIG. 3 a front elevational view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view thereof;
FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 3;
FIG. 7 a cross-sectional view taken along line VII--VII in FIG. 3; and,
FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 3.
Claims (1)
- I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9-65104 | 1997-08-20 | ||
JP6510497 | 1997-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD404374S true USD404374S (en) | 1999-01-19 |
Family
ID=71729424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/083,717 Expired - Lifetime USD404374S (en) | 1997-08-20 | 1998-02-12 | Fin for use in a semiconductor wafer heat processing apparatus |
Country Status (1)
Country | Link |
---|---|
US (1) | USD404374S (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD924823S1 (en) * | 2018-07-19 | 2021-07-13 | Kokusai Electric Corporation | Adiabatic plate for substrate processing apparatus |
-
1998
- 1998-02-12 US US29/083,717 patent/USD404374S/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD924823S1 (en) * | 2018-07-19 | 2021-07-13 | Kokusai Electric Corporation | Adiabatic plate for substrate processing apparatus |
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