USD404374S - Fin for use in a semiconductor wafer heat processing apparatus - Google Patents

Fin for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD404374S
USD404374S US29/083,717 US8371798F USD404374S US D404374 S USD404374 S US D404374S US 8371798 F US8371798 F US 8371798F US D404374 S USD404374 S US D404374S
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US
United States
Prior art keywords
fin
processing apparatus
semiconductor wafer
heat processing
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/083,717
Inventor
Norifumi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIMURA, NORIFUMI
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Publication of USD404374S publication Critical patent/USD404374S/en
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Expired - Lifetime legal-status Critical Current

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FIG. 1 a perspective view of fin for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a right side view thereof;
FIG. 3 a front elevational view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view thereof;
FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 3;
FIG. 7 a cross-sectional view taken along line VII--VII in FIG. 3; and,
FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 3.

Claims (1)

  1. I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/083,717 1997-08-20 1998-02-12 Fin for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD404374S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65104 1997-08-20
JP6510497 1997-08-20

Publications (1)

Publication Number Publication Date
USD404374S true USD404374S (en) 1999-01-19

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ID=71729424

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US29/083,717 Expired - Lifetime USD404374S (en) 1997-08-20 1998-02-12 Fin for use in a semiconductor wafer heat processing apparatus

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US (1) USD404374S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924823S1 (en) * 2018-07-19 2021-07-13 Kokusai Electric Corporation Adiabatic plate for substrate processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924823S1 (en) * 2018-07-19 2021-07-13 Kokusai Electric Corporation Adiabatic plate for substrate processing apparatus

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