US9461238B2 - Piezoelectric thin film, piezoelectric element, and manufacturing method thereof - Google Patents

Piezoelectric thin film, piezoelectric element, and manufacturing method thereof Download PDF

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US9461238B2
US9461238B2 US13/581,429 US201113581429A US9461238B2 US 9461238 B2 US9461238 B2 US 9461238B2 US 201113581429 A US201113581429 A US 201113581429A US 9461238 B2 US9461238 B2 US 9461238B2
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thin film
piezoelectric
piezoelectric thin
piezoelectric element
substrate
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US20120319533A1 (en
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Makoto Kubota
Kenichi Takeda
Jumpei Hayashi
Mikio Shimada
Yuichi Shimakawa
Masaki Azuma
Yoshitaka Nakamura
Masanori Kawai
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Canon Inc
Kyoto University NUC
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Kyoto University NUC
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    • H01L41/1878—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H01L41/0478—
    • H01L41/081—
    • H01L41/0973—
    • H01L41/318—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8561—Bismuth-based oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • the present invention relates to a piezoelectric thin film, a piezoelectric element, a manufacturing method for the piezoelectric element, a liquid discharge head, and an ultrasonic motor.
  • the present invention relates to a lead-free piezoelectric thin film with piezoelectricity improved by control of the crystal structure.
  • a piezoelectric element is typically formed of a bulk-shaped or film-shaped piezoelectric material including a lower electrode and an upper electrode.
  • ABO 3 type ceramics such as lead zirconate titanate (hereinafter, referred to as “PZT”) is generally used.
  • PZT contains lead at an A-site of a perovskite skeleton. Therefore, the environmental impact of the lead component is considered to be a problem.
  • a piezoelectric material using a lead-free perovskite type metal oxide has been proposed.
  • a typical lead-free piezoelectric material is BiFeO 3 (hereinafter, referred to as “BFO”), which is a perovskite type metal oxide.
  • PTL (Patent Literature) 1 discloses a BFO-based material containing lanthanum at its A-site.
  • BFO is a good ferroelectric, and it has been reported that the amount of remanent polarization of BFO measured at low temperature is high.
  • PTL 2 discloses an approach to substituting Co at the B-site of BFO at a ratio of 1% to 10%.
  • impurity phases other than the perovskite structure are increased with the substitution of Co, which causes a problem of low piezoelectricity.
  • Non Patent Literature 1 discloses a BFO thin film, which introduces a pseudo-morphotropic phase boundary by epitaxy (described therein as a combination of epitaxial growth techniques).
  • the pseudo-morphotropic phase boundary as used therein is a mechanism for the reversible transformation between a pseudo-rhombohedral phase (described therein as a rhombohedral-like phase) and a pseudo-tetragonal phase (described therein as a tetragonal-like phase).
  • a pseudo-rhombohedral phase described therein as a rhombohedral-like phase
  • pseudo-tetragonal phase described therein as a tetragonal-like phase
  • NPL 1 “Science”, 2009, vol. 326, pp. 977 to 980
  • the present invention has been made to deal with the above-mentioned problem, and provides a piezoelectric thin film having good piezoelectricity in which a rhombohedral structure and a tetragonal structure are mixed.
  • the present invention provides a piezoelectric element using the piezoelectric thin film, a manufacturing method for the piezoelectric element, a liquid discharge head, and an ultrasonic motor.
  • a piezoelectric thin film includes a perovskite type metal oxide, in which the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and a ratio between an a-axis lattice parameter and a c-axis lattice parameter of the tetragonal structure satisfies 1.15 ⁇ c/a ⁇ 1.30.
  • a piezoelectric element includes on a substrate: the above-mentioned piezoelectric thin film; and a pair of electrodes provided in contact with the piezoelectric thin film.
  • a manufacturing method for a piezoelectric element including, on a substrate, a piezoelectric thin film and a pair of electrodes provided in contact with the piezoelectric thin film, includes: forming a first electrode on the substrate, the substrate being a single-crystal substrate selectively oriented in a (100) plane, in which an in-plane lattice parameter of a unit cell of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in a surface of the single-crystal substrate; forming the piezoelectric thin film on the first electrode; and forming a second electrode on the piezoelectric thin film, in which the forming the piezoelectric thin film includes applying a precursor solution of an organometallic compound to the single-crystal substrate, followed by drying, and heating the single-crystal substrate at 430° C. or lower under an excess oxygen atmosphere, thereby obtaining a thin film formed of a crystallized
  • a liquid discharge head for solving the above-mentioned problem includes the above-mentioned piezoelectric element.
  • An ultrasonic motor for solving the above-mentioned problem includes the above-mentioned piezoelectric element.
  • the piezoelectric thin film having good piezoelectricity can be provided. Further, the present invention can provide the piezoelectric element including the above-mentioned piezoelectric thin film, the manufacturing method for the piezoelectric element, the liquid discharge head, and the ultrasonic motor.
  • FIG. 1 is a schematic view in vertical cross-section illustrating an exemplary embodiment of a piezoelectric element according to the present invention.
  • FIGS. 2A and 2B are schematic views illustrating an embodiment of a structure of a liquid discharge head according to the present invention.
  • FIGS. 3A and 3B are schematic views illustrating an embodiment of a structure of an ultrasonic motor according to the present invention.
  • FIG. 4 is a schematic view in vertical cross-section illustrating an image of a piezoelectric thin film observed under a transmission electron microscope according to Example 1 of the present invention.
  • FIG. 5 is a graph illustrating a relation between magnetization and an applied magnetic field on a piezoelectric thin film according to Example 5 of the present invention and a metal oxide thin film according to Comparative Example 1.
  • FIG. 6 is a schematic view in vertical cross-section illustrating another exemplary embodiment of a piezoelectric element according to the present invention.
  • the present invention provides a novel piezoelectric thin film having good piezoelectric characteristics. Taking advantage of the characteristics of a dielectric, the piezoelectric thin film according to the present invention can be used in various applications, including a capacitor material, a memory material, and a sensor material.
  • the piezoelectric thin film according to the present invention is a piezoelectric thin film made of a perovskite type metal oxide, in which the crystal system of the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and the ratio between the a-axis lattice parameter and the c-axis lattice parameter of the tetragonal structure satisfies 1.15 ⁇ c/a ⁇ 1.30.
  • the “perovskite type metal oxide” as used herein refers to a metal oxide having a perovskite type structure as described in Iwanami Dictionary of Physics and Chemistry, 5th Edition (Iwanami Shoten, Publishers, Feb. 20, 1998).
  • the metal oxide having the perovskite type structure is generally represented by the chemical formula ABO 3 .
  • the elements A and B in the perovskite type oxide each act in the form of an ion and occupy specific positions of a crystal unit cell called A-site and B-site, respectively.
  • the element A is positioned at a vertex of a cube and the element B is positioned at the body center of the cube.
  • the elements O act as oxygen anions and occupy face-centered positions.
  • a-axis Three axes along the sides of a unit cell are called a-axis, b-axis, and c-axis.
  • the three axes are perpendicular to one another.
  • the c-axis is an axis with the highest symmetry, such as the long side of a square prism.
  • the length of each axis is called axis lattice parameter.
  • the a-axis lattice parameter and the b-axis lattice parameter are herein considered to be substantially the same.
  • types of crystal systems such as a rhombohedral structure and a tetragonal structure, are defined as follows.
  • the ⁇ angle represents an angle formed by the a-axis and the b-axis of a crystal lattice.
  • the crystal system of the piezoelectric thin film according to the present invention is a mixed crystal system of at least the rhombohedral structure and the tetragonal structure.
  • the mixed crystal system larger piezoelectric effects are generated by an external electric field. This results from the switching from the polarization moment in the (001) axis direction of the tetragonal structure to the polarization moment in the (111) axis direction of the rhombohedral structure.
  • This switching phenomenon may occur in other crystal systems than the mixed crystal system as in the present invention.
  • energy barriers for the switching are so high that the switching occurs infrequently and the level of contribution to piezoelectricity is low.
  • the crystal system of the piezoelectric thin film is a mixed crystal system of the rhombohedral structure and the tetragonal structure, based on a detection angle of the diffraction peak in X-ray diffraction measurement (e.g., 2 ⁇ / ⁇ method or reciprocal lattice mapping), which is commonly used for crystal thin films.
  • a detection angle of the diffraction peak in X-ray diffraction measurement e.g., 2 ⁇ / ⁇ method or reciprocal lattice mapping
  • the crystal system of the piezoelectric thin film is a mixed crystal system of the rhombohedral structure and the tetragonal structure
  • the diffraction peaks of detection angles are relegated into a diffraction peak resulting from the tetragonal structure and a diffraction peak resulting from the rhombohedral structure.
  • the integrated intensity ratio between the diffraction peak resulting from the tetragonal structure and the diffraction peak resulting from the rhombohedral structure is 0.01 or more to 100 or less. Note that, the integrated intensity ratio in the same plane approximates the volume ratio between the structures.
  • the ratio between the a-axis lattice parameter and the c-axis lattice parameter of the tetragonal structure satisfies 1.15 ⁇ c/a ⁇ 1.30, more preferably 1.16 ⁇ c/a ⁇ 1.26.
  • the value of c/a is larger than 1.15, which means that an aspect ratio as a square prism is large enough. Because the value of c/a of the rhombohedral structure is 1, a large shape difference is caused between both structures when the switching occurs therebetween. Taking advantage of the synergistic effect of the large shape difference and the frequent switching described above, the piezoelectric thin film according to the present invention has high piezoelectricity.
  • the aspect ratio c/a be high. However, if c/a exceeds 1.30, it may become difficult to maintain the perovskite type structure, and the shape difference may become large to reduce the frequency of switching between the structures.
  • the above-mentioned perovskite type metal oxide contain a metal oxide represented by the following general formula (1).
  • Bi x (M 1-y CO y )O 3 General formula (1) where M represents at least one kind of metal selected from Fe and Al, and x and y satisfy 0.95 ⁇ x ⁇ 1.25 and 0.05 ⁇ y ⁇ 0.15.
  • bismuth (Bi) is a metallic element that is mainly positioned at the A-site
  • iron (Fe), aluminum (Al), and cobalt (Co) are elements that are each mainly positioned at the B-site.
  • the site A is formed of Bi as a trivalent metallic element, thereby allowing the perovskite structure including the A-site element and the O element to be electrically more stable.
  • the symmetry of the perovskite skeleton constituted by the A-site element and the elements O is increased to improve the stability in a piezoelectric material to external stimulus.
  • the strong bonding inherent in Bi provides the effects of increasing the Curie temperature of the piezoelectric material and widening a variation of internal polarization.
  • x representing the composition of Bi satisfies 0.95 ⁇ x ⁇ 1.25, preferably 0.98 ⁇ x ⁇ 1.15. If x is less than 0.95, the insulation property is adversely affected by defect sites because of a deficiency of Bi. On the other hand, if x is more than 1.25, an excessive amount of bismuth oxide precipitates at a grain boundary, which is responsible for current leakage under high voltage application.
  • the metal oxide represented by the general formula (1) can be interpreted as a solid solution of Bi x MO 3 and Bi x CoO 3 .
  • M is Fe
  • a Bi x FeO 3 itself is a stable rhombohedral structure.
  • M is Al
  • a simple substance of Bi x AlO 3 is difficult to synthesize at normal pressure but is a stable rhombohedral structure in the high-pressure phase.
  • a simple substance of Bi x CoO 3 is difficult to synthesize at normal pressure but is a stable tetragonal structure with a high aspect ratio in the high-pressure phase.
  • the general formula (1) is a solid solution of a rhombohedral-structured material and a tetragonal-structured material, and is a composition with large piezoelectricity taking advantage of the above-mentioned switching mechanism of polarization moments.
  • y representing the compositions of M and Co satisfies 0.05 ⁇ x ⁇ 0.15, more preferably 0.08 ⁇ y ⁇ 0.12. If the value of y satisfies 0.05 ⁇ y ⁇ 0.15, a mixed crystal system of a tetragonal structure with a high aspect ratio and a rhombohedral structure is more easily obtained. If y is less than 0.05, the crystal system of the piezoelectric thin film may have only the rhombohedral structure. If y is more than 0.15, the crystal system of the piezoelectric thin film may have only the tetragonal structure.
  • the metal M be Fe.
  • Bi x FeO 3 has a more stable rhombohedral structure. Besides, Bi x FeO 3 is excellent in solubility to Bi x CoO 3 and forms a homogeneous solid solution.
  • x and y in the piezoelectric thin film according to the present invention can be confirmed by elemental analysis, such as energy-dispersive X-ray spectroscopy (EDX), X-ray fluorescence analysis (XRF), or inductively coupled plasma (ICP) emission spectrometry.
  • elemental analysis such as energy-dispersive X-ray spectroscopy (EDX), X-ray fluorescence analysis (XRF), or inductively coupled plasma (ICP) emission spectrometry.
  • the piezoelectric thin film according to the present invention may be doped with a trace amount of an element other than Bi, Fe, and Co as long as its piezoelectricity and insulation property are not impaired.
  • the element used as a dopant for doping include Ca, Sr, Ba, Sn, La, Th, Y, Sm, Ce, Ti, Sb, Nb, Ta, W, Mo, Cr, Ni, Cu, Si, Ge, Sc, Mg, Mn, and Zr.
  • the amount of the dopant is 0.05 or less in terms of atomic fraction with respect to the total number of atoms of the metallic elements in the general formula (1).
  • the piezoelectric thin film according to the present invention has the composition represented by the general formula (1)
  • the piezoelectric thin film also functions as a multiferroic material having both ferroelectricity and ferromagnetism.
  • the mixed crystal system of the rhombohedral structure and the tetragonal structure with a high aspect ratio like the present invention provides another effect of enhancing the remanent magnetization of the multiferroic material, namely magnetic memory performance.
  • the tetragonal structure of the piezoelectric thin film be selectively (001) oriented, and that the rhombohedral structure of the piezoelectric thin film be selectively (100) oriented.
  • the phrase “selectively (hkl) oriented” as used herein refers to the state in which the degree of orientation in the (hkl) plane is higher than the degree of orientation in other planes.
  • the phrase can be translated as a phrase “preferentially oriented in the (hkl) plane”. This also comprehends an exactly (hkl) oriented state like a single crystal.
  • the (001) oriented tetragonal structure is in the state in which the c-axis is oriented in the thickness direction.
  • the rhombohedral structure is described above as being (100) oriented because no distinction is made between the a-axis and the c-axis in general, but it is intended that the rhombohedral structure is c-axis oriented similar to the tetragonal structure.
  • the tetragonal structure and the rhombohedral structure in the piezoelectric thin film are oriented in the same direction, the directions of polarization moments are aligned with the strain direction of the piezoelectric thin film, thereby increasing the distortion amount in the use of a piezoelectric element.
  • c-axis orientation it is possible to make the most of the strain resulting from a high aspect ratio of the tetragonal structure.
  • the orientation state of the piezoelectric thin film can easily be confirmed based on the detection angle and intensity of the diffraction peak in X-ray diffraction measurement (e.g., 2 ⁇ / ⁇ method), which is commonly used for crystal thin films.
  • X-ray diffraction measurement e.g. 2 ⁇ / ⁇ method
  • the intensity of a diffraction peak detected at an angle corresponding to the (001) plane of the tetragonal structure or the (100) plane of the rhombohedral structure is extremely large as compared with a total intensity of peaks detected at angles corresponding to other planes.
  • At least one of the part of the tetragonal structure and the part of the rhombohedral structure of the piezoelectric thin film form a columnar structure.
  • the columnar structure is intended to a state in which unit cells of one crystal structure are aggregated to grow in the thickness direction and an alternate structure is formed in the plane together with the aggregate of unit cells of the other crystal structure, when viewed from the cross-section of the piezoelectric thin film according to the present invention. This state can be identified by observation using a transmission electron microscope (hereinafter, referred to as TEM).
  • TEM transmission electron microscope
  • the crystal structure can be identified.
  • the crystal structure can also be identified using a high-resolution TEM image (hereinafter, referred to as lattice image).
  • lattice image exhibits a periodic contrast corresponding to a periodic crystal structure.
  • the part of the tetragonal structure and the part of the rhombohedral structure are phase-separated so that at least one thereof forms a columnar structure, to thereby maintain a stable mixed crystal system of both structures.
  • the thickness of the piezoelectric thin film according to the present invention is not particularly limited, but desirably 50 nm or more to 10 ⁇ m or less for example. Setting the thickness of the piezoelectric material to 50 nm or more to 10 ⁇ m or less provides a function of the piezoelectric material, and processability of a film for manufacture of the element is also expected.
  • the thickness of the piezoelectric thin film according to the present invention is preferably 100 nm or more to 1000 nm or less, more preferably 100 nm or more to 750 nm or less.
  • the average of thicknesses between two electrodes, which practically function as the piezoelectric thin film upon manufacture of the element has only to be set to fall within the above-mentioned range.
  • the thickness of the piezoelectric thin film according to the present invention is set to 100 nm or more, a sufficient strain amount required for a piezoelectric element can be obtained.
  • the thickness is set to 1000 nm or less, an increase in integrate density upon manufacture of the element is expected.
  • the above-mentioned thickness range exerts an enlarged synergistic effect with a surface roughness range to be described later.
  • the “thin film” as used herein may be of such a form as to cover one surface of a substrate, or may be of such a form as to aggregate in a foil fashion independently.
  • a root mean square roughness Rq of the surface of the piezoelectric thin film and y in the general formula (1) satisfy the relationship of the following general formula (2). 0 ⁇ Rq ⁇ 25 y+ 2
  • the general formula (2) means that the surface of the piezoelectric thin film according to the present invention is excellent in smoothness. When the surface of the piezoelectric thin film is smooth, high insulation property is expected. The upper limit of the surface roughness for maintaining the insulation property is determined by the function of y representing the composition amount of Co in the general formula (1).
  • root mean square roughness Rq refers to one described in JIS Standard B0601 (revised edition of 2001) and is represented by the following equation:
  • Rq 1 l ⁇ ⁇ 0 l ⁇ Z 2 ⁇ ( x ) ⁇ d x
  • l is a reference length
  • x is a coordinate representing an arbitrary position
  • Z(x) is the height of a roughness curve at the coordinate x.
  • a method of deriving the Rq is not limited as long as the method is in conformance with the standard. For example, a method involving calculating the Rq from the height difference of the surface of the thin film scanned with an atomic force microscope (AFM) is generally adopted.
  • a root mean square height Pq of a sectional curve obtained from the cross-sectional shape of the surface of the film may be used instead.
  • the Rq of the surface of the thin film of 25y+2 or less is a factor for enhancing the insulation property of the piezoelectric thin film.
  • the amount of the Co component increases, the size of a crystal grain of the BFCO itself increases, and hence an allowable Rq increases.
  • the piezoelectric thin film according to the present invention has sufficient insulation property, but it is preferred that the Rq be as small as possible, for example, 20y+2 or less because a higher insulation property can be expected.
  • the Rq necessarily takes a positive value because a crystal grain in the piezoelectric thin film according to the present invention cannot be completely flat. Further, it is preferred that the piezoelectric thin film be provided on a substrate, that the substrate be a single-crystal substrate selectively (100) oriented, and that an in-plane lattice parameter of a unit cell of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in a surface of the single-crystal substrate.
  • the stability in the form of the thin film can be expected.
  • the substrate is a single-crystal substrate selectively (100) oriented
  • the piezoelectric thin film provided on the substrate surface can also be selectively oriented in the same orientation.
  • the piezoelectric thin film is selectively oriented, the polarization moments are aligned in the thickness direction to expect the enhancement of the piezoelectric effects.
  • the in-plane lattice parameter of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in the substrate surface, there is obtained an effect of suppressing the a-axis lattice parameter of a unit cell of the metal oxide during epitaxial growth of the perovskite type metal oxide according to the present invention.
  • a unit cell has a fixed number of metallic elements contained therein, and hence the unit cell of the tetragonal structure elongates the c-axis lattice parameter so as to maintain its volume. In other words, the growth or existence of the tetragonal structure with a high aspect ratio (c/a) is expected.
  • the in-plane lattice parameter is less than 0.360 nm, the a-axis lattice parameter is so suppressed that the impurity phase may be generated in the perovskite type structure. On the contrary, if the in-plane lattice parameter is more than 0.385 nm, the effect of suppressing the a-axis lattice parameter cannot be expected.
  • the piezoelectric element according to the present invention includes on a substrate: the piezoelectric thin film above mentioned; and a pair of electrodes provided in contact with the piezoelectric thin film.
  • FIG. 1 is a schematic view in vertical cross-section illustrating an exemplary embodiment of the piezoelectric element according to the present invention.
  • the piezoelectric element includes a substrate 1 , a lower electrode 2 , a piezoelectric thin film 3 , and an upper electrode 4 .
  • the piezoelectric element according to the present invention includes, on the substrate 1 , the piezoelectric thin film 3 and a pair of the lower electrode 2 and the upper electrode 4 provided in contact with the piezoelectric thin film 3 .
  • the substrate 1 includes a single-crystal substrate selectively (100) oriented, and an in-plane lattice parameter of a unit cell of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in a surface of the single-crystal substrate.
  • the in-plane lattice parameter in the substrate surface of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less, a compressive stress is generated in each of the a-axis direction and the b-axis direction of a unit cell of a metal oxide constituting the piezoelectric thin film according to the present invention.
  • the compressive stress enables a stable mixed crystal system of a rhombohedral structure and a tetragonal structure with a high aspect ratio (c/a).
  • the in-plane lattice parameter is less than 0.360 nm, a compressive stress may be applied excessively to interfere with the piezoelectric strain. On the contrary, if the in-plane lattice parameter is more than 0.385 nm, the compressive stress is too small to expect the effect.
  • Examples of the single crystal substrate satisfying the requirements for the in-plane lattice parameter include lanthanum strontium gallate (LaSrGaO 4 ), strontium lanthanum aluminate (SrLaAlO 4 ), calcium neodymium aluminate (CaNdAlO 4 ), lanthanum aluminate (LaAlO 3 ), neodymium aluminate (NdAlO 3 ), yttrium aluminate (YAlO 3 ), and yttria-stabilized zirconia (YSZ).
  • LaSrGaO 4 strontium lanthanum aluminate
  • CaNdAlO 4 calcium neodymium aluminate
  • LaAlO 3 lanthanum aluminate
  • NdAlO 3 neodymium aluminate
  • YAlO 3 yttrium aluminate
  • the substrate Likening the single-crystal substrate to a cubic crystal system of a pseudo-perovskite type structure, the (100) plane is exposed in the surface, thereby obtaining the in-plane lattice parameter in the above-mentioned range.
  • Those materials may be used in combination or may be laminated to form a multi-layered structure.
  • the substrate In order to double as one electrode of the piezoelectric element, the substrate may be doped with a conductive metal or a conductive metal oxide, or the substrate surface may be laminated therewith.
  • the more preferred range of the in-plane lattice parameter is determined depending on the type of the piezoelectric thin film used in the piezoelectric element according to the present invention.
  • the most preferable substrate is a LaAlO 3 single-crystal substrate.
  • the LaAlO 3 single-crystal substrate is identified by a rhombohedral structure or a pseudo-cubic structure, and when the (100) plane is exposed in the surface, the in-plane lattice parameter is 0.379 nm to 0.380 nm.
  • This in-plane lattice parameter is most suited to the a-axis lattice parameter of a tetragonal structure of the Bi-based perovskite type metal oxide.
  • the lower electrode 2 and the upper electrode 4 of the piezoelectric element are each formed of a conductive layer having a thickness of about 5 nm to 2000 nm.
  • a material for each of the electrodes is not particularly limited, and a material used in a piezoelectric element in ordinary cases suffices. Examples of the material include metals of Ti, Pt, Ta, Ir, Sr, In, Sn, Au, Al, Fe, Cr, and Ni, and oxides of those metals.
  • Each of the lower electrode 2 and the upper electrode 4 may be formed of one kind thereof, or may be formed by laminating two or more kinds thereof.
  • At least one of the lower electrode 2 and the upper electrode 4 be formed of a perovskite type metal oxide represented by M1RuO 3 (M1 represents at least one kind selected from the group consisting of Sr, Ba, and Ca) or Sr (1-z) M2 z CoO 3 (M2 represents at least one kind selected from the group consisting of La, Pr, Sm, and Nd and z satisfies 0 ⁇ z ⁇ 1).
  • M1RuO 3 M1 represents at least one kind selected from the group consisting of Sr, Ba, and Ca
  • Sr (1-z) M2 z CoO 3 M2 represents at least one kind selected from the group consisting of La, Pr, Sm, and Nd and z satisfies 0 ⁇ z ⁇ 1).
  • the lower electrode 2 When applying such a conductive metal oxide to the lower electrode 2 or the upper electrode 4 , crystal lattice matching in the contact interface with the piezoelectric thin film 3 is enhanced so that piezoelectricity and drive durability of the piezoelectric element can be expected to increase.
  • the lower electrode 2 is the above-mentioned conductive oxide
  • the lower electrode 2 serves to promote the perovskite crystallization of the piezoelectric thin film 3 , with the result that the insulation property and piezoelectricity of the piezoelectric element can be expected to increase.
  • the lower electrode 2 provided in contact with both of the piezoelectric thin film 3 and the substrate 1 be formed of Sr (1-z) La z CoO 3 (z satisfies 0 ⁇ z ⁇ 1).
  • Sr (1-z) La z CoO 3 is excellent in conductivity as an electrode and can maintain the in-plane lattice parameter of the substrate, as well as being excellent in smoothness of the electrode surface.
  • an ideal value of z representing the compositions of Sr and La is 0.5.
  • the thickness of the lower electrode 2 made of the above-mentioned material be 10 nm or more to 100 nm or less.
  • the thickness of the lower electrode 2 is smaller than 10 nm, the conductivity as an electrode may become too low. On the contrary, if the thickness of the lower electrode 2 is larger than 100 nm, the maintenance of the in-plane lattice parameter and the smoothness of the electrode surface may be adversely affected.
  • the lower electrode 2 and the upper electrode 4 may each be formed by application and baking by a liquid phase film-forming method such as a chemical solution deposition method, or by a vapor phase film-forming method such as pulse lasering, sputtering, or vapor deposition.
  • a liquid phase film-forming method such as a chemical solution deposition method
  • a vapor phase film-forming method such as pulse lasering, sputtering, or vapor deposition.
  • each of the lower electrode 2 and the upper electrode 4 may be used after having been patterned into a desired shape.
  • the piezoelectric thin film 3 may similarly be used in the element after having been patterned into a desired shape.
  • the piezoelectric element according to the present invention can be used in a device such as a piezoelectric sensor, an ultrasonic vibrator, a piezoelectric actuator, an inkjet head, a ferroelectric memory, or a capacitor.
  • the manufacturing method for a piezoelectric element including, on a substrate, a piezoelectric thin film and a pair of electrodes provided in contact with the piezoelectric thin film, includes: forming a first electrode on the substrate, the substrate including a single-crystal substrate selectively (100) oriented, in which an in-plane lattice parameter of a unit cell of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in a surface of the single-crystal substrate; forming the piezoelectric thin film on the first electrode; and forming a second electrode on the piezoelectric thin film, in which the forming the piezoelectric thin film includes applying a precursor solution of an organometallic compound to the single-crystal substrate, followed by drying, and heating the single-crystal substrate at 430° C. or lower under an excess oxygen atmosphere, thereby obtaining
  • the substrate used in the manufacturing method for a piezoelectric element is a single-crystal substrate selectively (100) oriented
  • the first electrode and the piezoelectric thin film provided on the substrate surface can also be selectively oriented in the same orientation.
  • the piezoelectric thin film is selectively oriented, the polarization moments are aligned in the thickness direction to expect the enhancement of the piezoelectric effects.
  • the (100) plane means the state in which any one of the planes of a unit cell is exposed in the substrate surface when likening the crystal system of the single-crystal substrate to a pseudo-cubic structure of the perovskite type structure.
  • the in-plane lattice parameter of the single-crystal substrate is 0.360 nm or more to 0.385 nm or less in the substrate surface
  • a compressive stress is generated in each of the a-axis direction and the b-axis direction of a unit cell of the metal oxide during epitaxial growth of the piezoelectric thin film.
  • a unit cell has a fixed number of metallic elements contained therein, and hence the unit cell of the tetragonal structure elongates the c-axis lattice parameter so as to maintain its volume.
  • the compressive stress exerts an effect of the stable existence of a mixed crystal system of a rhombohedral structure and a tetragonal structure with a high aspect ratio (c/a).
  • the effect can also be obtained if the first electrode is interposed between the substrate surface and the piezoelectric thin film.
  • the in-plane lattice parameter is less than 0.360 nm, the a-axis lattice parameter is so suppressed that the impurity phase may be generated in the perovskite type structure. On the contrary, if the in-plane lattice parameter is more than 0.385 nm, the effect of suppressing the c-axis lattice parameter cannot be expected.
  • the first electrode refers to an electrode on the substrate side of the pair of electrodes constituting the piezoelectric element according to the present invention. In the embodiment of FIG. 1 , the first electrode corresponds to the lower electrode 2 . Similarly, a second electrode corresponds to the upper electrode 4 in FIG. 1 .
  • the piezoelectric element is manufactured by stacking on the substrate the first electrode, the piezoelectric thin film, and the second electrode in this order, thereby manufacturing a piezoelectric element with good adhesion between the members.
  • Examples of the method of stacking the first electrode, the piezoelectric thin film, and the second electrode include a liquid phase method, such as a chemical solution deposition method or a hydrothermal synthesis method, and a gas phase method, such as a sputtering film-forming method, a pulsed laser deposition method, a vapor deposition method, or an metalorganic chemical vapor deposition method.
  • the crystallization of the piezoelectric thin film according to the present invention is performed at 430° C. or lower under an excess oxygen atmosphere.
  • a lower limit of the crystallization temperature, which varies depending on the composition of the piezoelectric thin film, is typically 400° C. or higher, more preferably 420° C. or higher.
  • the crystallization of the piezoelectric thin film at a temperature within the above-mentioned range can suppress the emergence of impurity phases that are of non-perovskite structures with non-piezoelectricity. Besides, the crystallization of the piezoelectric thin film at a temperature within the above-mentioned range makes the homogeneous growth of crystal grains, thereby providing a piezoelectric thin film having a flat and smooth film surface.
  • the crystallization of the piezoelectric thin film is promoted even in a low temperature region with a maximum of 430° C. or lower.
  • the term “excess oxygen atmosphere” as used herein refers to an atmosphere having a higher oxygen concentration than that of an ordinary air atmosphere, for example, an atmosphere having an oxygen concentration in a reactor of 21 vol % or more, preferably 25 vol % or more.
  • a preferably applicable manner of the crystallization under the excess oxygen atmosphere is that the crystallization while causing an oxygen gas to flow in the reactor or the crystallization while causing an mixed gas with oxygen to flow in the reactor.
  • an ozone component be incorporated into the excess oxygen atmosphere for further promoting the crystallization of the piezoelectric thin film.
  • the term “ozone component” comprehends an ozone gas, an ozone ion, and an ozone radical. Because the ozone component has higher oxidizing power than that of oxygen, the ozone component has an effect of reducing the amount of the impurity phases of the piezoelectric thin film so that the insulation property and piezoelectricity of the piezoelectric element may be improved.
  • the excess oxygen atmosphere containing the ozone component can easily be obtained by using the oxygen gas and a commercially available, industrial ozone generator or the like.
  • a tube furnace, an electric furnace, an infrared annealing oven, a hot plate, or the like can be used in the crystallizing step.
  • the tube furnace is suitable for the introduction of the excess oxygen atmosphere.
  • the first electrode be formed of Sr (1-z) La z CoO 3 (z satisfies 0 ⁇ z ⁇ 1) by a pulsed laser deposition method.
  • Sr (1-z) La z CoO 3 is excellent in conductivity as an electrode and can maintain the in-plane lattice parameter of the substrate, as well as being excellent in smoothness of the electrode surface.
  • an ideal value of z representing the compositions of Sr and La is 0.5.
  • the pulsed laser deposition method as used herein refers to a generic name for film-forming methods with which a metal oxide grows from the vapor on the substrate by using plasma, which is generated when a pulsed laser within several tens of nanoseconds (ns) enters a target material.
  • the term “pulsed laser deposition method” comprehends a film-forming method generally called pulsed laser vapor deposition method, pulsed laser film-forming method, laser ablation method, or molecular beam epitaxy method.
  • an ideal thickness thereof is 10 nm or more to 100 nm or less. The reason is as described above in the description of the piezoelectric element.
  • the oxygen partial pressure in a vacuum chamber is preferably 20 mTorr or more to 100 mTorr or less, more preferably 30 mTorr or more to 50 mTorr or less.
  • the Sr (1-z) La z CoO 3 electrode obtained under the oxygen partial pressure within the above-mentioned range exhibits epitaxial growth with respect to the in-plane lattice parameter of the single-crystal substrate, and has a single crystal orientation.
  • the step of forming the piezoelectric thin film be performed by the chemical solution deposition method.
  • chemical solution deposition method refers to a generic name for film-forming methods each involving applying a precursor solution for a target metal oxide onto a substrate, and crystallizing the applied solution under heat to provide the target metal oxide.
  • film-forming methods called a CSD method, a sol-gel method, and a metalorganic decomposition method are included in the term, and are hereinafter generically referred to as chemical solution deposition methods.
  • the chemical solution deposition methods are each a film-forming method excellent in precision control of metal composition.
  • a precursor solution of a metal oxide applied on the substrate contains at least a metal component constituting a target metal oxide.
  • a precursor solution for Bi x (Fe 1-y Co y )O 3 as a target contains at least Bi, Fe, and Co.
  • Those metallic elements are incorporated into the precursor solution in the form of a hydrolyzable or thermally-degradable organometallic compound.
  • typical examples thereof include metal complexes of the metals such as a metal alkoxide, organic acid salt, and ⁇ -diketone complex.
  • the metal complex in addition to amine complexes, there may be used various other complexes.
  • the organometallic compounds at least a metal salt of 2-ethylhexanoate be incorporated into the precursor solution.
  • a metal salt of 2-ethylhexanoate be incorporated into the precursor solution.
  • the composition ratio of metal components in the precursor be the same molar ratio as in a target.
  • the difference between the total content of Fe and Co and the content of Bi be 1 mol % or less.
  • the organometallic compounds as precursors for the respective component metals are collectively dissolved or dispersed in a proper solvent.
  • a precursor solution for a composite organic metal oxide (oxide containing two or more metals) of which the piezoelectric thin film is formed is prepared.
  • the solvent used in the preparation of the precursor solution is appropriately selected from various known solvents in consideration of dispersibility and an application characteristic.
  • the solvent used for preparing the precursor solution examples include a xylene-based solvent, a toluene-based solvent, an alcohol-based solvent, an ether-based solvent, a cellosolve-based solvent, an amide-based solvent, and a nitrile-based solvent.
  • the xylene-based solvent is preferably used.
  • the amount of the solvent contained in the precursor solution of the present invention is not particularly limited. However, a dense piezoelectric thin film is easily obtained when the amount of the solvent is adjusted so that the concentration of a composite metal oxide component converted to the chemical formula represented by the general formula (1) falls within the range of about 0.05 mol/Kg to 1 mol/Kg.
  • the precursor solution may contain an additive such as a stabilizer in addition to the organometallic compound and solvent.
  • a stabilizer include ⁇ -diketones, ketone acids, lower alkyl esters of those ketone acids, oxyacids, lower alkyl esters of those oxyacids, oxyketones, ⁇ -amino acids, and alkanolamines.
  • the precursor solution is applied onto the first electrode.
  • a known application method such as spin coating, dip coating, bar coating, or spray coating can be employed as a method of applying the precursor solution.
  • a relative humidity in this case is preferably 60% or less.
  • a relative humidity of more than 60% is not preferred because hydrolysis progresses rapidly in the applied raw material solution on the substrate and hence a precipitate is observed in the applied layer in some cases.
  • the number of times of application is determined by a relationship between a coating thickness and a desired thickness of the piezoelectric thin film.
  • the application is performed multiple times (multi-layer coating) in the chemical solution deposition method of the present invention, and a coating thickness per layer is preferably 8 nm or more to 30 nm or less.
  • the microstructure of a metal oxide thin film obtained by the chemical solution deposition method is largely affected by the coating thickness per layer.
  • the coating thickness is set to fall within the above-mentioned range so that the film may be of a stacked structure, the film becomes dense and homogenous. As a result, the effects that the crystal phases become homogeneous and the insulation property is improved can be obtained.
  • the chemical solution deposition method is performed by multi-layer coating.
  • multi-layer refers to two or more layers, preferably 5 or more to 60 or less layers.
  • a drying step be performed during each time period between application and the next application.
  • the drying step may serve also as the step of crystallizing the piezoelectric thin film, it is preferred that the step be performed at a low temperature involving no crystallization, for example, 300° C. or lower.
  • a dryer, a hot plate, a tube furnace, an electric furnace, or the like can be used in the drying step.
  • a liquid discharge head according to the present invention is a liquid discharge head including the above-mentioned piezoelectric element.
  • FIG. 2A is a schematic view illustrating the liquid discharge head.
  • the liquid discharge head includes: discharge ports 11 ; connecting holes 12 connecting individual liquid chambers 13 and the discharge ports 11 ; a common liquid chamber 14 ; a diaphragm 15 ; and a piezoelectric element 10 .
  • the piezoelectric element 10 has a rectangular shape as illustrated in FIG. 2A , but may have the shape of an ellipse, a circle, or a parallelogram, apart from the rectangle.
  • a piezoelectric thin film 7 also adopts the shape according to the shape of the individual liquid chamber.
  • FIG. 2B is a cross-sectional view of the piezoelectric element in the width direction of the liquid discharge head of FIG. 2A .
  • the piezoelectric element 10 has a rectangle shape in cross-section, but may have a trapezoidal or inverted trapezoidal shape.
  • a first electrode 6 and a second electrode 8 correspond to a lower electrode 16 and an upper electrode 18 , respectively, but the first electrode 6 and the second electrode 8 constituting the piezoelectric element 10 according to the present invention may be either of the lower electrode 16 and the upper electrode 18 .
  • a buffer layer 19 may be interposed between the diaphragm 15 and the lower electrode 16 .
  • the diaphragm moves vertically with the expansion and contraction of the piezoelectric thin film to apply pressure to the liquid in the individual liquid chamber, to thereby discharge the liquid from the discharge ports.
  • the liquid discharge head according to the present invention is applicable for use in the manufacture of electronic devices, in addition to a printer.
  • the diaphragm has a thickness of 0.5 ⁇ m or more to 15 ⁇ m or less, preferably 1.0 ⁇ m or more to 8 ⁇ m or less.
  • the material of the diaphragm is not limited but preferred to be silicon. Further, the buffer layer and the electrode layer above silicon may be part of the diaphragm.
  • the silicon of the diaphragm may be doped with boron or phosphorus.
  • the buffer layer has a thickness of 300 nm or less, preferably 200 nm or less.
  • the size of the discharge port is 5 ⁇ m or more to 40 ⁇ m or less in diameter.
  • the shape of the discharge port is circular, but may be star, square, or triangular.
  • FIGS. 3A and 3B are schematic views illustrating an embodiment of a structure of the ultrasonic motor according to the present invention.
  • FIG. 3A illustrates the ultrasonic motor formed of the single piezoelectric element according to the present invention.
  • the ultrasonic motor includes a transducer 24 , a rotor 25 , and an output shaft integrated with the rotor 25 .
  • the transducer 24 is formed by bonding a piezoelectric element 22 according to the present invention to an elastic metal ring 21 by an organic adhesive 23 (epoxy-based adhesive, cyanoacrylate adhesive, etc.).
  • the rotor 25 receives a pressure force from a pressure spring (not shown) to be brought into contact with a slide surface of the transducer 24 .
  • a flexural progressive wave is generated in the transducer 24 so that the respective points on the slide surface of the transducer 24 make an elliptical motion.
  • the rotor 25 When the rotor 25 is brought into pressure contact with the slide surface of the transducer 24 , the rotor 25 receives a frictional force from the transducer 24 and rotates in the direction of elliptical motion on the transducer slide surface.
  • a driven member (not shown) is bonded to the output shaft by a coupling or the like and is driven by receiving a rotational force of the rotor 25 .
  • This type of motor uses the principle that, when the piezoelectric element is bonded to the elastic member like a metal, the elastic member is bent because of the expansion and contraction of the piezoelectric element by the piezoelectric lateral effect caused by voltage application to the piezoelectric thin film.
  • FIG. 3B an ultrasonic motor in which the piezoelectric element has a laminate structure is exemplified.
  • a transducer 61 made of a metallic material is constituted by interposing multiple piezoelectric elements 63 according to the present invention between cylinder metal blocks and by fastening the metal blocks with bolts to sandwich and fix the multiple piezoelectric elements 63 .
  • the transducer 61 when a driving piezoelectric film of the piezoelectric element is applied with AC voltages having different phases, two orthogonal vibrations are excited and combined to form a circular vibration for driving at the distal end portion of the transducer.
  • a constricted circumferential groove is formed in the tip of the transducer 61 so as to increase the displacement of vibration for driving.
  • a rotor 62 is brought into pressure contact with the transducer 61 by a pressure spring to obtain a frictional force for driving.
  • the piezoelectric element according to the present invention is suitably applicable to the liquid discharge head and the ultrasonic motor.
  • a xylene solution of bismuth 2-ethylhexanoate a xylene solution of iron 2-ethylhexanoate, a xylene solution of aluminum 2-ethylhexanoate, and a xylene solution of cobalt 2-ethylhexanoate, each having a concentration of 0.2 mol/Kg.
  • the mixed solution was heated and refluxed for 1 hour at 120° C. under a nitrogen atmosphere to promote the progress of a thermolysis reaction.
  • Xylene was added to the resultant so that the concentration of the oxides as perovskite type metal oxide might be 0.2 mol/Kg, to thereby obtain a precursor solution.
  • the precursor solutions of Manufacture Examples 1 to 9 each had a difference between the total concentration of Fe or Al, and Co components and the concentration of Bi of 1 mol % or less.
  • a substrate and a first electrode each having a structure shown in Table 2 were prepared.
  • a substrate A and a substrate B are a substrate provided with the first electrode on its surface, whereas a substrate C is a substrate without an electrode.
  • the in-plane lattice parameter in the surface of a LaAlO 3 single crystal used in the substrates A, B, and C was 0.379 nm.
  • a Sr 0.5 La 0.5 CoO 3 electrode and a SrRuO 3 electrode in Table 2 were about 60 nm in thickness provided by a pulsed laser deposition method.
  • Substrate temperature was 500° C. and oxygen partial pressure was 30 mTorr.
  • a substrate D and a first electrode each having a structure shown in Table 2 were prepared for comparison with the present invention.
  • the in-plane lattice parameter in the surface of a SrTiO 3 single crystal used in a substrate D was 0.390 nm.
  • the manufacturing method for a first electrode provided on the surface of the substrate D was the same as in the substrate B.
  • Substrate A with (100)-oriented (100)-oriented electrodes LaAlO 3 single Sr 0.5 La 0.5 CoO 3 film crystal
  • Substrate B with (100)-oriented (100)-oriented electrodes LaAlO 3 single SrRuO 3 film crystal
  • Substrate C (100)-oriented — LaAlO 3 single crystal
  • Substrate D with (100)-oriented (100)-oriented electrodes SrTiO 3 single SrRuO 3 film crystal
  • a piezoelectric thin film made of a perovskite type metal oxide was formed by a chemical solution deposition method using the precursor solution of Manufacture Example 1 shown in Table 1 and the substrate A with electrodes shown in Table 2.
  • the precursor solution was applied to the surface of the substrate with a spin coater (3000 rpm).
  • the applied layer was heat-treated at 250° C. for 5 minutes to dry the solvent.
  • the heat treatment process was performed with an electric dryer under an air atmosphere.
  • the applying step and the drying step were repeated to form second to twentieth layers.
  • the entire substrate having the multiple applied layers was placed in an infrared-annealing tube furnace.
  • An oxygen gas was introduced into the tube furnace via a commercially available, industrial ozone generator at a flow rate of 1 L/min (corresponding to an oxygen concentration in the furnace of 50 vol % to 80 vol %).
  • the generated ozone concentration of the ozone generator was about 100 g/m 3 .
  • the substrate placed in the tube furnace was heat-treated at 430° C. for 60 minutes to crystallize the film provided on the substrate, thereby obtaining the piezoelectric thin film according to the present invention.
  • X-ray diffraction measurement including 2 ⁇ / ⁇ measurement and reciprocal lattice measurement was carried out to find that the piezoelectric thin film was a perovskite type metal oxide having a mixed crystal system of a tetragonal structure selectively (001) oriented and a rhombohedral structure selectively (100) oriented.
  • X-ray fluorescence analysis was carried out to measure the content of metallic elements in the piezoelectric thin film. It was found that, when the total molar amount of iron and cobalt was normalized to 1, a content ratio “Bi/Fe/Co” was 1.00/0.95/0.05. Noted that, other metals than those three kinds were not detected.
  • FIG. 4 is a schematic view illustrating the state of a cross-sectional image.
  • reference numerals 1 , 2 , and 3 denote the substrate, the lower electrode, and the piezoelectric thin film according to the present invention, respectively.
  • the piezoelectric thin film was classified into a first trapezoidal region 301 and a second inverted-trapezoidal region 302 based on the gray level of electron diffraction. Those two regions each form a columnar structure.
  • the ratio between the first region 301 and the second region 302 estimated from the area ratio in the cross-sectional image was about 19:1.
  • the cross-sectional measurement by TEM requires the sample slicing step. Taking into account that this step mitigates a stress in the film to change the crystalline state, the lattice parameters in the above-mentioned two regions were not determined from the TEM image. However, it was confirmed that epitaxial growth matching with the in-plane lattice parameter of the lower electrode was observed in both the two regions. In addition, it was confirmed that the rhombohedral structure in the first region was (100) oriented and the tetragonal structure in the second region was (001) oriented. EDX measurement showed that there was no significant difference in composition between the compositions of the metal oxides in the first region and the second region.
  • the surface of the piezoelectric thin film was scanned with an atomic force microscope (AFM) to obtain the image of crystal grains.
  • a root mean square roughness Rq corresponding to JIS Standard B0601 calculated from a height difference in a 2,000-nm square image was 1.79 nm.
  • the piezoelectric thin films according to the present invention were each formed in the same manner as in Example 1 except that the precursor solution, the substrate, the number of coatings, the crystallization atmosphere, and the crystallization temperature were changed.
  • Table 3 shows the manufacture conditions of each example.
  • Example 13 the crystallization was performed at 430° C. in a tube furnace in which an oxygen gas was introduced at a flow rate of 1 L/min.
  • the oxygen gas was not introduced via an ozone generator.
  • each of the piezoelectric thin films had a mixed crystal system of a tetragonal structure selectively (001) oriented and a rhombohedral structure selectively (100) oriented.
  • the amount of impurity phases other than a perovskite type structure was extremely small. Further, it was confirmed from the shift in peak position in XRD that Co was introduced in a perovskite skeleton.
  • evaluations were carried out on the value of c/a of the tetragonal structure, the thickness measured by a contact profilometer, the composition ratio of metallic elements measured by XRF, the existence of a columnar structure by cross-sectional TEM observation, and a root mean square roughness Rq measured by AFM.
  • the results are shown in Table 4.
  • the mark “OK” indicates that a rhombohedral structure selectively (100) oriented was confirmed in each sample, and the mark “NG” indicates that the rhombohedral structure was not confirmed.
  • the value of c/a is filled in the case where a tetragonal structure selectively (001) oriented was confirmed in each sample, otherwise the mark “NG” is filled.
  • the mark “OK” indicates that one part of the rhombohedral structure and the tetragonal structure formed a columnar structure in the cross-sectional image by TEM.
  • the composition ratio of metals shows a value when the total molar amount of Fe, Al, and Co was normalized to 1.
  • each of the metal oxide thin films of Comparative Example 1 and 2 was a perovskite type metal oxide which had a rhombohedral structure selectively (100) oriented but had no tetragonal structure.
  • Each of the metal oxide thin films of Comparative Examples 3 and 4 was a perovskite type structure metal oxide which had a tetragonal structure selectively (001) oriented but had no rhombohedral structure.
  • impurity phases of non-perovskite type crystal were mixed.
  • Comparative Examples 7 and 8 provide a metal oxide thin film produced by using the substrate D, in which the in-plane lattice parameter was 0.390 nm in the surface.
  • Each of the thin films was a perovskite type metal oxide which had a rhombohedral structure selectively (100) oriented but had no tetragonal structure.
  • Comparative example 9 provides a film obtained by the crystallization at 430° C. under an ordinary air atmosphere
  • Comparative Example 10 provides a film obtained by the crystallization at 430° C. under an excess nitrogen atmosphere.
  • XRD measurement showed that an impurity phase of non-perovskite type crystal was a main phase, and it was difficult to analyze a peak resulting from a perovskite type structure.
  • Comparative Example 11 provides a film obtained by the crystallization at 550° C. under an excess oxygen atmosphere containing an ozone component. XRD measurement showed that the film had a rhombohedral structure selectively (100) oriented but had a large amount of impurity phases of non-perovskite type crystal.
  • Example 1 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 1 oxygen
  • Example 2 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 2 oxygen
  • Example 3 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 3 oxygen
  • Example 4 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 4 oxygen
  • Example 5 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 5 Manufacture A 20 layers Ozone-containing 430° C.
  • Example 5 oxygen
  • Example 6 Manufacture A 13 layers Ozone-containing 420° C.
  • Example 6 oxygen
  • Example 7 Manufacture A 13 layers Ozone-containing 420° C.
  • Example 7 oxygen
  • Example 8 Manufacture A 13 layers Ozone-containing 420° C.
  • Example 8 oxygen
  • Example 9 Manufacture A 13 layers Ozone-containing 420° C.
  • Example 9 oxygen
  • Example 10 Manufacture B 5 layers Ozone-containing 430° C.
  • Example 1 oxygen
  • Example 11 Manufacture B 5 layers Ozone-containing 430° C.
  • Example 5 oxygen
  • Example 12 Manufacture C 35 layers Ozone-containing 430° C.
  • Example 3 oxygen
  • Example 13 Manufacture A 20 layers Oxygen flow 430° C.
  • Example 3 Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 1 Example 10 oxygen Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 2 Example 11 oxygen Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 3 Example 12 oxygen Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 4 Example 13 oxygen Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 5 Example 14 oxygen Comparative Manufacture A 20 layers Ozone-containing 430° C.
  • Example 6 Example 15 oxygen Comparative Manufacture D 20 layers Ozone-containing 430° C.
  • Example 7 Example 1 oxygen Comparative Manufacture D 20 layers Ozone-containing 430° C.
  • Example 8 Example 5 oxygen Comparative Manufacture A 20 layers Air 430° C.
  • Example 9 Example 3 Comparative Manufacture A 20 layers Nitrogen flow 430° C.
  • Example 10 Example 3 Comparative Manufacture A 20 layers Ozone-containing 550° C.
  • Example 11 Example 3 oxygen
  • a platinum electrode of 120 ⁇ m in diameter was provided on each surface of the piezoelectric thin films of Examples 1 to 5, 7, and 13 by a sputtering film-forming method, thereby producing the piezoelectric element according to the present invention.
  • a pair of platinum electrodes were provided at the ends of the surface of the piezoelectric thin film of Example 12 by a sputtering film-forming method, thereby producing the piezoelectric element as shown in FIG. 6 according to the present invention.
  • the references in FIG. 6 are the same as those in FIGS. 1 and 2B .
  • Each of the electrodes was patterned into a rectangular electrode in 0.25 mm by 1.5 mm, and the distance between the electrodes was 5 mm.
  • a platinum electrode of 120 ⁇ m in diameter was provided on each surface of the metal oxide thin films of Examples 2, 3, 7, and 8 by a sputtering film-forming method, thereby producing the element for comparison.
  • Each of the elements was measured for values representing the characteristics of a piezoelectric element at room temperature (25° C.), for example, a leak current, P-E hysteresis, and a piezoelectric constant.
  • the measurement results of the P-E hysteresis and the piezoelectric constant are shown in Table 5.
  • the leak current was determined by measuring leak currents in such a range that an applied voltage per thickness of a thin film sandwiched between electrodes was ⁇ 2,000 kV/cm, and recording the maximum leak current. All of the piezoelectric elements of Examples 1 to 5, 7, and 13 and the elements of Comparative Examples 2, 3, 7, and 8 exhibited good insulation property with the maximum leak current of 10 mA/cm or less.
  • the P-E hysteresis measurement was carried out for determining whether or not a target element had ferroelectricity and insulation property at room temperature.
  • a material with ferroelectricity has piezoelectricity.
  • the piezoelectric element according to the present invention or a comparative element was applied with an external electric field having a maximum value of ⁇ 700 kV/cm while changing the phase to positive and negative, and the hysteresis of spontaneous polarization at that time was observed.
  • the mark “OK” in Table 5 indicates that a hysteresis loop peculiar to a ferroelectric, in which the spontaneous polarization is reversed, was observed.
  • the mark “NG” indicates that no ferroelectric loop was observed because of poor insulation property or that the insulation property was good but no reversal of the spontaneous polarization was observed as in the case of paraelectrics.
  • the piezoelectric constant was determined by room-temperature piezoelectric constant (d 33 constant) measurement with an atomic force microscope (AFM) as a displacement detector.
  • AFM atomic force microscope
  • the AFM was used to observe the strain of the piezoelectric material in such a range that an applied voltage per thickness of a thin film sandwiched between electrodes was ⁇ 1500 kV/cm.
  • the strain curve to be obtained is a closed, butterfly curve.
  • the slope of the curve was approximated by a straight line to calculate the piezoelectric constants shown in Table 5. This technique is a well-known calculating method in the art.
  • the mark “NG” indicates that a piezoelectric constant could not be calculated because of low piezoelectricity of the element.
  • each of the piezoelectric elements according to the present invention exhibits ferroelectricity and piezoelectricity in the room-temperature region.
  • the elements of Comparative Examples 2, 7, and 8 also exhibited ferroelectricity and piezoelectricity, but the element with only a tetragonal structure of Comparative Example 3 had poor ferroelectricity and poor piezoelectricity.
  • the piezoelectric constants gradually increased with the increase in Co content, but in the piezoelectric element according to the present invention, the piezoelectric constant had a tendency to abruptly increase because of the effect of the mixture with a tetragonal structure.
  • Comparative Example 1 is similar to the manufacturing method for a BFO thin film described in “Science”, 2009, vol. 326, pp. 977 to 980, but the existence of a pseudo-tetragonal structure was not observed.
  • Magnetization measurement was carried out on the piezoelectric thin films of Example 5 and Comparative Example 1.
  • a high-resolution SQUID (superconducting quantum interference device) magnetometer for magnetization measurement and analysis was used with two levels of measurement temperature, room temperature (300 K) and low temperature (20 K). The measurement results are illustrated in FIG. 5 .
  • the piezoelectric thin film of Example 5 was a multiferroic material having ferromagnetism in addition to the above-mentioned ferroelectricity.
  • the metal oxide thin film of Comparative Example 1 which was a BiFeO 3 thin film having multiferroic property, did not exhibit as much of a ferromagnetic behavior as in Example 5 in the low-temperature measurement. Although not illustrated, no magnetization behavior was observed also in the room-temperature measurement.
  • FIG. 5 illustrates the results of in-plane magnetization measurement on the thin films of Example 5 and Comparative Example 1, but a similar magnetization behavior and a comparable level of magnetization were observed in interplanar measurement as well.
  • Example 3 Using the same piezoelectric thin film as in Example 3, a liquid discharge head and an ultrasonic motor illustrated in FIGS. 2A and 2B and 3A and 3B , respectively, were produced.
  • the liquid discharge head the discharge of ink following an input electrical signal was confirmed.
  • the ultrasonic motor the rotational behavior of a motor according to an applied alternating voltage was confirmed.
  • the piezoelectric thin film having high piezoelectricity can be provided. Further, the present invention can provide the piezoelectric element including the above-mentioned piezoelectric thin film, the manufacturing method for the piezoelectric element, the liquid discharge head, and the ultrasonic motor.
  • the piezoelectric thin film according to the present invention is also applicable to MEMS technology and can be used for appliances using many ferroelectric materials and piezoelectric thin films, such as a ferroelectric memory, a ferroelectric sensor, and a piezoelectric transducer, without difficulty.

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JP5909336B2 (ja) 2011-08-23 2016-04-26 矢崎総業株式会社 コネクタ端子の製造方法
CN103014625B (zh) * 2012-12-28 2014-08-13 东南大学 制备四方相室温多铁性材料BiFeO3的方法
JP5943144B2 (ja) * 2013-03-28 2016-06-29 Tdk株式会社 磁器組成物
JP6079515B2 (ja) * 2013-09-09 2017-02-15 富士通株式会社 二次イオン質量分析装置
FR3018389B1 (fr) * 2014-03-06 2017-09-01 St Microelectronics Sa Procede de fabrication de lamelles bistables de courbures differentes
JP6398771B2 (ja) * 2014-03-31 2018-10-03 Tdk株式会社 圧電組成物および圧電素子
JP6390170B2 (ja) 2014-05-28 2018-09-19 株式会社リコー 電気−機械変換素子、電気−機械変換素子の製造方法、液滴吐出ヘッド、液滴吐出装置
JP6525255B2 (ja) * 2015-05-28 2019-06-05 株式会社リコー 電気機械変換素子、電気機械変換素子の製造方法、液滴吐出ヘッド及び液滴吐出装置
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JP2018186227A (ja) * 2017-04-27 2018-11-22 Tdk株式会社 積層構造体及びスピン変調素子
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