US8957348B2 - Welding equipment - Google Patents

Welding equipment Download PDF

Info

Publication number
US8957348B2
US8957348B2 US13/639,156 US201113639156A US8957348B2 US 8957348 B2 US8957348 B2 US 8957348B2 US 201113639156 A US201113639156 A US 201113639156A US 8957348 B2 US8957348 B2 US 8957348B2
Authority
US
United States
Prior art keywords
welding
laser beam
mirror member
welding equipment
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US13/639,156
Other languages
English (en)
Other versions
US20130026142A1 (en
Inventor
Katsuya Sennyu
Shuho Tsubota
Fumiaki Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Machinery Systems Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Assigned to MITSUBISHI HEAVY INDUSTRIES, LTD. reassignment MITSUBISHI HEAVY INDUSTRIES, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INOUE, FUMIAKI, SENNYU, KATSUYA, TSUBOTA, SHUHO
Publication of US20130026142A1 publication Critical patent/US20130026142A1/en
Application granted granted Critical
Publication of US8957348B2 publication Critical patent/US8957348B2/en
Assigned to MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD. reassignment MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MITSUBISHI HEAVY INDUSTRIES, LTD.
Assigned to MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD. reassignment MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD. CHANGE OF ADDRESS Assignors: MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD.
Assigned to MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, LTD. reassignment MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, LTD. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD.
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/285—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B23K26/103—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam the laser beam rotating around the fixed workpiece
    • B23K26/106—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam the laser beam rotating around the fixed workpiece inside the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B23K26/24—Seam welding
    • B23K26/28—Seam welding of curved planar seams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B23K26/24—Seam welding
    • B23K26/28—Seam welding of curved planar seams
    • B23K26/282—Seam welding of curved planar seams of tube sections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/32—Bonding taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/32—Bonding taking account of the properties of the material involved
    • B23K26/322—Bonding taking account of the properties of the material involved involving coated metal parts
    • B23K26/423—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/703—Cooling arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426—Fixtures for other work
    • B23K37/0435—Clamps
    • B23K37/0443—Jigs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/04—Tubular or hollow articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/14—Titanium or alloys thereof
    • B23K2201/04—
    • B23K2203/08—

Definitions

  • the present invention relates to a welding equipment employed, in particular, for manufacturing a superconducting accelerator cavity.
  • a superconducting accelerator cavity is formed by joining a plurality of members that are placed one after another in an axial direction. This joining is conventionally performed from outside by penetration welding by electron beam welding or laser welding in a vacuum atmosphere because a vacuum atmosphere has low contamination caused by impurities.
  • Patent Literature 1 As a technique for doing so, it has been proposed, for example, to perform joining in a superconducting accelerator cavity from the inside by employing laser welding in an argon atmosphere, as disclosed in Patent Literature 1.
  • a superconducting accelerator cavity is a hollow, annular body, in the case of laser welding, it is conceivable to make a laser beam incident from outside a vacuum container to perform welding inside the superconducting accelerator cavity.
  • the present invention has been conceived in light of the above-described circumstances, and an object thereof is to provide a welding equipment that performs welding of an annular body from inside thereof so as to be perpendicular to a welding groove, thereby making it possible to enhance weld quality.
  • the present invention employs the following solutions.
  • an aspect of the present invention is a welding equipment in which a plurality of annular bodies having openings at both ends in an axial direction are placed one after another in the axial direction and that forms an annular joined body by joining the corresponding openings with each other by laser welding, the welding equipment including a vacuum compartment in which a vacuum atmosphere can be established; a holding member that is installed in the vacuum compartment and that holds the annular joined body in which a welding groove is formed by placing the openings of the plurality of the annular bodies next to each other; a window member that is installed in a wall of the vacuum compartment, which intersects with an axial center of the annular joined body, and that forms a portion of the wall; a laser radiating member that is installed outside the vacuum compartment and that radiates a laser beam into an internal space of the annular joined body through the window member; and a mirror member that is installed so as to be positioned in the internal space of the annular joined body and that adjusts a reflected laser beam, formed by reflecting the laser beam, so as to be
  • a plurality of annular bodies having openings at both ends in the axial direction are placed one after another in the axial direction and are mounted in the holding member in the vacuum compartment so as to form the annular joined body in which the welding groove is formed by placing the openings next the each other.
  • vacuum suction is performed to establish a vacuum atmosphere in the vacuum compartment.
  • the position of the reflected laser beam, which is reflected by the mirror member, in the axial direction is adjusted as needed in accordance with the position of the welding groove, and then, welding is initiated.
  • the laser beam when the laser beam is radiated from the laser radiating member, the laser beam passes through the window member and is radiated on the mirror member that is installed so as to be positioned in the internal space of the annular joined body. This laser beam is reflected at the mirror member and is radiated in the direction perpendicular to the welding groove. The welding groove is melted by the radiated laser beam to complete joining.
  • This welding may be penetration welding or non-penetration welding. In the case of non-penetration welding, welding is also performed from outside afterwards.
  • the laser beam is radiated from the direction perpendicular to the welding groove, the position thereof can be easily set, and it is possible to reduce the risk of welding outside the welding groove. Therefore, because sufficient welding properties can be guaranteed, the weld quality can be enhanced.
  • the equipment configuration can be made compact, which makes it possible to make the equipment low-cost. Because the size of the vacuum area is small, the vacuum atmosphere can be established in a short period of time. Accordingly, the operation time can be reduced, which reduces the operating costs.
  • At least one of the mirror member and the holding member be rotatable about the axial center.
  • a cooling member that cools the mirror member be provided.
  • the mirror member When the laser beam is radiated on the mirror member in the vacuum atmosphere, the mirror member generates heat, which brings about the risk of, for example, deformation.
  • the mirror member is cooled by the cooling member, it can be cooled even if heat is generated therein. Accordingly, because it is possible to restrict deformation of the mirror member, the radiation position of the laser beam can be accurately set, and the weld quality can be enhanced.
  • mirror member be installed so that a center of a reflecting surface thereof is shifted further from the axial center toward an opposite side from a radiating direction of the reflected laser beam.
  • metal vapor is generated at the welding portion, which spatters in all directions and adheres to the mirror member or the window member. If the metal vapor adheres to, for example, the mirror member, because the reflection level of the laser beam is reduced, there is a risk of incomplete welding.
  • the mirror member is installed so that the center of the reflecting surface thereof is shifted further from the axial center toward the opposite side from the radiation direction of the reflected laser beam, the distance between the portion to be welded and the mirror member can be increased as compared with a mirror member positioned at the axial center position of the annular joined body. Accordingly, it is possible to further restrict adhesion of the metal vapor on the mirror member, and therefore, the weld quality can be enhanced.
  • gas supplying members be provided, which individually supply inert gas to vicinities of the reflecting surface of the mirror member and an inner surface of the window member.
  • metal vapor is generated at the welding portion, which spatters in all directions and adheres to the mirror member or the window member. If the metal vapor adheres to, for example, the mirror member, the reflection level of the laser beam is reduced. If the metal vapor adheres to the window portion, the transmission level of the laser beam is reduced. Because this reduces the laser beam intensities, there is a risk of incomplete welding.
  • the gas supplying members that individually supply the inert gas to the vicinities of the reflecting surface of the mirror member and the inner surface of the window member are installed, the pressure at respective positions in the vicinities of the reflecting surface of the mirror member and the inner surface of the window member is slightly increased when the inert gas is supplied thereto from the gas supplying members.
  • the pressure at the respective positions in the vicinities of the reflecting surface of the mirror member and the inner surface of the window member is increased, because the spattered metal vapor can be pushed back with the pressure, it is possible to restrict adhesion of the metal vapor on the reflecting surface of the mirror member and the inner surface of the window portion.
  • the invention provides a vacuum compartment in which a vacuum atmosphere can be established; a holding member that is installed in the vacuum compartment and that holds an annular joined body in which a welding groove is formed by placing the openings of a plurality of annular bodies next to each other; a transparent window member that is installed in a wall of the vacuum compartment, which intersects with an axial center of the annular joined body, and that forms a portion of the wall; a laser radiating member that is installed outside the vacuum compartment and that radiates a laser beam into an internal space of the annular joined body through the window member; and a mirror member that is installed so as to be positioned in the internal space of the annular joined body and that adjusts a reflected laser beam, which is formed by reflecting the laser beam, so as to be oriented in a direction perpendicular to the welding groove.
  • FIG. 1 is a front view of a superconducting accelerator cavity to which end parts are attached by welding by employing a welding equipment according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing, in outline, the configuration of the welding equipment according to the embodiment of the present invention.
  • FIG. 3 is a partial front view showing a mirror according to the embodiment of the present invention.
  • FIG. 4 is a partial cross-sectional view showing welded states achieved by the welding equipment according to the embodiment of the present invention.
  • a welding equipment 1 according to an embodiment of the present invention will be described below with reference to FIGS. 1 to 4 .
  • the welding equipment 1 according to this embodiment forms end parts 5 for a superconducting accelerator cavity 3 .
  • FIG. 1 is a front view of the superconducting accelerator cavity 3 to which the end parts 5 fabricated with the welding equipment 1 according to the embodiment of the present invention are attached.
  • FIG. 2 is a cross-sectional view showing, in outline, the configuration of the welding equipment 1 according to the embodiment of the present invention.
  • FIG. 3 is a partial front view showing a mirror according to the embodiment of the present invention.
  • the superconducting accelerator cavity 3 is provided with the end parts (annular joined bodies) 5 and a cavity portion 7 .
  • the cavity portion 7 is a structure in which cells 9 with circular tube shapes having swollen center portions are combined.
  • the superconducting accelerator cavity 3 for example, niobium-based materials, which are superconducting materials, are subjected to bending and press forming, thus forming half cells 11 , which are the cells 9 divided into two in the axial direction thereof.
  • the half cells 11 extend along an axial direction L between equator portions 13 , which are the most-swollen portions of the cells 9 , and iris portions 15 , which are the narrowest portions thereof.
  • the cavity portion 7 is formed by joining a plurality of half cells 11 by welding so that the equator portions 13 thereof are overlaid on each other or the iris portions 11 thereof are overlaid on each other.
  • the equator portions 13 of the half cells 11 are individually positioned at both ends of the cavity portion 7 .
  • the end parts 5 are formed of the half cells (annular bodies) 11 , end plates (annular bodies) 17 , and beam pipes (annular bodies) 19 .
  • the end plates 17 form both ends of a helium jacket into which liquid helium is introduced and are made of, for example, titanium.
  • the beam pipes 19 are hollow, circular tube members made of, for example, niobium, and are provided with flanges 21 at one end thereof.
  • Groove portions with which the iris portions 15 of the half cells 11 engage are provided over the entire circumference at one end of the end plates 17 in the axial direction L, and groove portions with which ends of the beam pipes 19 engage are provided at the other end thereof.
  • the end parts 5 are formed by engaging the iris portions 15 of the half cells 11 and the ends of the beam pipes 19 with the groove portions of the end plates 17 , thereby forming welding grooves 18 and 20 that extend in a substantially horizontal direction, as shown in FIG. 4 , and by joining these welding grooves 18 and 20 by welding.
  • the superconducting accelerator cavity 3 is formed by joining, by welding, the equator portions 13 of the half cells 11 positioned at both ends of the cavity portion 7 to the equator portions 13 of the half cells 11 positioned at one end of the end parts 5 .
  • the welding equipment 1 is provided with a hollow vacuum chamber (vacuum compartment) 23 with a circular tube shape; a holding member 25 that is installed inside the vacuum chamber 23 and holds the end part 5 so that an axial center O thereof extends in the vertical direction; a window (window member) 29 provided at a top-end surface portion (wall) 27 of the vacuum chamber 23 , with which the axial center O intersects; a laser radiating head (laser radiating member) 35 that is installed outside the vacuum chamber 23 and radiates a laser beam 33 into an internal space 31 of the end part 5 through the window 29 ; and a mirror member 37 that is installed inside the internal space 31 and reflects the laser beam 33 .
  • a hollow vacuum chamber (vacuum compartment) 23 with a circular tube shape
  • a holding member 25 that is installed inside the vacuum chamber 23 and holds the end part 5 so that an axial center O thereof extends in the vertical direction
  • a window (window member) 29 provided at a top-end surface portion (wall) 27 of the vacuum chamber 23
  • a vacuum suction member 39 that sucks gas in the vacuum chamber 23 to establish a vacuum atmosphere in the vacuum chamber 23 is connected to the vacuum chamber 23 .
  • the holding member 25 is provided with a top holding plate 41 and a bottom holding plate 43 that firmly hold the end part 5 at both ends thereof; a plurality of restraining shafts 45 that link between the top holding plate 41 and the bottom holding plate 43 to maintain the distance therebetween; and a positioner 49 whose bottom portion is fixedly attached to a bottom-end surface portion 47 of the vacuum chamber 23 and whose a top portion is rotatable about the axial center O.
  • a bottom portion of the bottom holding plate 43 is fixedly attached to the top portion of the positioner 49 .
  • the window 29 is attached so as to cover an opening in the top-end surface portion 27 and forms a sealed structure by being integrated with the top-end surface portion 27 .
  • the laser radiating head 35 is mounted so as to be movable in a horizontal plane. By being moved in the horizontal plane, the laser radiating head 35 can adjust, in the horizontal plane, the position of the laser beam 33 radiated therefrom.
  • a top surface (reflecting surface) 53 of the mirror member 37 reflects the laser beam 33 , thus turning it into a reflected laser beam 55 .
  • a space 57 is provided at a bottom portion of the mirror member. The space 57 and the top surface 53 are communicated with each other via a plurality of through-holes 59 .
  • the through-holes 59 are provided at the circumferential edge of the top surface 53 at positions that are not irradiated with the laser beam 33 .
  • a cooling pipe (cooling member) 61 that extends in the vertical direction and that has an internal space through which a cooling liquid passes is fixedly attached to the bottom-end surface portion 47 .
  • the top end of the cooling pipe 61 is closed and is also inclined. Because the bottom surface of the mirror member 37 is attached to the top end of the cooling pipe 61 , it is inclined along the inclination at the top end thereof.
  • the cooling pipe 61 is bent so that an axial center O 1 at the top end thereof does not align with an axial center O.
  • the mirror member 37 is mounted so that the axial center O 1 passes through the center of the plane of the top surface 53 , and the side closer to the axial center O is positioned at the lower side thereof.
  • the mirror member 37 is installed such that the top-surface center (axial center O 1 ) thereof is shifted further from the axial center O toward the opposite side from the radiation direction of the reflected laser beam 55 .
  • a gas pipe (gas supplying member) 63 that supplies inert gas, for example, argon gas, to the space 57 from outside the vacuum chamber 23 is connected to the bottom surface of the mirror member 37 .
  • a gas pipe (gas supplying member) 65 that supplies inert gas, for example, argon gas, from outside the vacuum chamber 23 is connected to the vicinity of an inner surface of the window 29 .
  • the half cell 11 and the beam pipe 19 are individually engaged with the groove portions processed at both ends of the end plate 17 in the axial direction L, and they are held in the holding portion 25 in a state in which the half cell 11 , the end plate 17 , and the beam pipe 19 are placed one after another in the axial direction L.
  • the vacuum suction member 39 is activated to suck out gas in the vacuum chamber 23 , thus establishing a vacuum atmosphere in the vacuum chamber 23 .
  • the position of the laser radiating head 35 in the horizontal direction is adjusted so that the position of the reflected laser beam 55 in the axial direction L is aligned with the welding groove 20 .
  • Cooling liquid is supplied to the cooling pipe 61 .
  • Inert gas is supplied to the space 57 with the gas pipe 63 so that the inert gas exits from the top surface 53 via the through-holes 59 .
  • Inert gas is supplied to the vicinity of the inner surface of the window 29 with the gas pipe 65 .
  • the laser beam 33 When the laser beam 33 is emitted from the laser radiating head 35 in this state, the laser beam 33 strikes the top surface 53 of the mirror member 37 and is reflected, becoming the reflected laser beam 55 that travels in the substantially horizontal direction. This reflected laser beam 55 is radiated on the welding groove 20 and melts the welding groove 20 to complete joining.
  • the welding groove 20 can be welded over the entire circumference.
  • this embodiment is configured so that the end part 5 rotates about the axial center O
  • the configuration may be such that the end part 5 is fixed and the laser radiating head 35 and the mirror member 37 are rotated about the axial center O.
  • the end part 5 , the laser radiating head 35 , and the mirror member 37 may be individually rotated about the axial center O.
  • the position of the laser radiating head 35 in the horizontal direction is adjusted so that the position of the reflected laser beam 55 in the axial direction L aligns with the welding groove 18 , and the welding groove 18 is welded as with the welding groove 20 .
  • this embodiment is configured such that the position of the reflected laser beam 55 in the axial direction L is adjusted by adjusting the position of the laser radiating head 35 in the horizontal direction
  • the configuration may be such that the position of the mirror member 37 in the axial direction L is adjusted without changing the horizontal position of the laser radiating head 35 .
  • the mirror member 37 Because the laser beam 33 is radiated on the mirror member 37 placed in a vacuum atmosphere, the mirror member 37 generates heat, which brings about the risk of, for example, deformation. Because the mirror member 37 in this embodiment is cooled with the cooling liquid supplied by the cooling pipe 61 , it can be cooled even if heat is generated therein. Accordingly, because it is possible to restrict, for example, deformation of the mirror member 37 , the radiating position of the reflected laser beam 55 can be accurately set, and the weld quality can be enhanced.
  • the pressure at respective positions in the vicinities of the top surface 53 of the mirror member 37 and the inner surface of the window 29 is slightly increased.
  • the pressure at the respective positions in the vicinities of the top surface 53 of the mirror member 37 and the inner surface of the window 29 is increased, because the spattered metal vapor can be pushed back with the pressure, it is possible to restrict adhesion of the metal vapor on the top surface 53 of the mirror member 37 and the inner surface of the window 29 .
  • the weld quality can be enhanced.
  • the reflected laser beam 55 is aligned with the direction in which the welding groove 20 extends, in other words, because it is radiated in the direction perpendicular to the welding groove 20 , it is possible to easily set the position thereof, and it is also possible to reduce the risk of the melted portion being outside the welding groove 20 . Therefore, because sufficient welding properties can be guaranteed, the weld quality can be enhanced.
  • the equipment configuration of the vacuum chamber 23 can be made compact, and it is possible to make the equipment low-cost. If the vacuum chamber 23 can be made compact, a vacuum atmosphere can be established in a short period of time, and therefore, the operation time for the welding can be reduced, which makes it possible to reduce the operating costs.
US13/639,156 2010-05-14 2011-05-10 Welding equipment Active 2031-12-12 US8957348B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010111952A JP5781278B2 (ja) 2010-05-14 2010-05-14 溶接装置
JP2010-111952 2010-05-14
PCT/JP2011/060743 WO2011142350A1 (ja) 2010-05-14 2011-05-10 溶接装置

Publications (2)

Publication Number Publication Date
US20130026142A1 US20130026142A1 (en) 2013-01-31
US8957348B2 true US8957348B2 (en) 2015-02-17

Family

ID=44914405

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/639,156 Active 2031-12-12 US8957348B2 (en) 2010-05-14 2011-05-10 Welding equipment

Country Status (4)

Country Link
US (1) US8957348B2 (ja)
EP (1) EP2570224B1 (ja)
JP (1) JP5781278B2 (ja)
WO (1) WO2011142350A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10383204B2 (en) * 2015-06-30 2019-08-13 Mitsubishi Heavy Industries Machinery Systems, Ltd. Superconducting accelerator

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015210479A (ja) * 2014-04-30 2015-11-24 三菱電機株式会社 反射型位相差板およびレーザ加工機
CN105252143B (zh) * 2015-11-23 2017-09-29 哈尔滨工业大学 一种大功率真空激光焊接装置
CN116117321B (zh) * 2023-02-21 2024-02-09 东莞市蓝宇激光有限公司 一种异质金属激光焊接设备与激光焊接方法

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414460A (en) * 1980-12-26 1983-11-08 Tokyo Shibaura Denki Kabushiki Kaisha Method of sealing a tube using a laser beam
JPS61183921A (ja) 1985-02-08 1986-08-16 Sumitomo Electric Ind Ltd レ−ザまたは光による半導体、金属の加工装置
JPS63140786A (ja) 1986-12-03 1988-06-13 Fuji Electric Co Ltd レ−ザ−溶接方法
US4760236A (en) * 1985-11-26 1988-07-26 Kurt Stoll Method and a support fixture for the manufacture of bellows consisting of annular elements
US5347242A (en) * 1991-01-24 1994-09-13 The Furukawa Electric Co., Ltd. Superconducting accelerating tube comprised of half-cells connected by ring shaped elements
JPH07112296A (ja) 1993-10-15 1995-05-02 Matsushita Electric Ind Co Ltd レーザー加工装置
JPH10272587A (ja) 1997-03-28 1998-10-13 Nippon Steel Corp レーザー光線拡散防止方法
US6097153A (en) * 1998-11-02 2000-08-01 Southeastern Universities Research Assn. Superconducting accelerator cavity with a heat affected zone having a higher RRR
JP2000260599A (ja) 1999-03-09 2000-09-22 Toshiba Corp 超電導キャビティ、その製造方法、及び超電導加速器
JP2007050415A (ja) 2005-08-16 2007-03-01 Matsushita Electric Ind Co Ltd レーザ加工装置とその補正方法
JP2007283354A (ja) 2006-04-17 2007-11-01 Nippon Steel Corp レーザ用光学素子の汚れ防止装置及び方法
US20100044922A1 (en) 2008-08-22 2010-02-25 Panasonic Electric Works Co., Ltd. Method and apparatus for producing a three-dimensionally shaped object
JP2011040321A (ja) 2009-08-17 2011-02-24 Mitsubishi Heavy Ind Ltd 超伝導加速空洞の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000094169A (ja) * 1998-09-18 2000-04-04 Japan Nuclear Fuel Co Ltd<Jnf> 燃料棒端栓溶接方法及び装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414460A (en) * 1980-12-26 1983-11-08 Tokyo Shibaura Denki Kabushiki Kaisha Method of sealing a tube using a laser beam
JPS61183921A (ja) 1985-02-08 1986-08-16 Sumitomo Electric Ind Ltd レ−ザまたは光による半導体、金属の加工装置
US4760236A (en) * 1985-11-26 1988-07-26 Kurt Stoll Method and a support fixture for the manufacture of bellows consisting of annular elements
JPS63140786A (ja) 1986-12-03 1988-06-13 Fuji Electric Co Ltd レ−ザ−溶接方法
US5347242A (en) * 1991-01-24 1994-09-13 The Furukawa Electric Co., Ltd. Superconducting accelerating tube comprised of half-cells connected by ring shaped elements
JPH07112296A (ja) 1993-10-15 1995-05-02 Matsushita Electric Ind Co Ltd レーザー加工装置
JPH10272587A (ja) 1997-03-28 1998-10-13 Nippon Steel Corp レーザー光線拡散防止方法
US6097153A (en) * 1998-11-02 2000-08-01 Southeastern Universities Research Assn. Superconducting accelerator cavity with a heat affected zone having a higher RRR
JP2000260599A (ja) 1999-03-09 2000-09-22 Toshiba Corp 超電導キャビティ、その製造方法、及び超電導加速器
JP2007050415A (ja) 2005-08-16 2007-03-01 Matsushita Electric Ind Co Ltd レーザ加工装置とその補正方法
JP2007283354A (ja) 2006-04-17 2007-11-01 Nippon Steel Corp レーザ用光学素子の汚れ防止装置及び方法
US20100044922A1 (en) 2008-08-22 2010-02-25 Panasonic Electric Works Co., Ltd. Method and apparatus for producing a three-dimensionally shaped object
JP2010046694A (ja) 2008-08-22 2010-03-04 Panasonic Electric Works Co Ltd 三次元形状造形物の製造方法およびその製造装置
JP2011040321A (ja) 2009-08-17 2011-02-24 Mitsubishi Heavy Ind Ltd 超伝導加速空洞の製造方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
International Search Report issued Jun. 7, 2011 in corresponding International Application No. PCT/JP2011/060743.
Notice of Reason(s) for Refusal issued Feb. 18, 2014 in corresponding Japanese Application No. 2010-111952 (with partial English translation).
Notice of Reason(s) for Refusal issued Sep. 30, 2014 in corresponding Japanese Application No. 2010-111952 (with English translation).
Written Opinion of the International Search Authority issued Jun. 7, 2011 in corresponding International Application No. PCT/JP2011/060743.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10383204B2 (en) * 2015-06-30 2019-08-13 Mitsubishi Heavy Industries Machinery Systems, Ltd. Superconducting accelerator

Also Published As

Publication number Publication date
EP2570224B1 (en) 2020-03-11
EP2570224A1 (en) 2013-03-20
JP2011240348A (ja) 2011-12-01
US20130026142A1 (en) 2013-01-31
WO2011142350A1 (ja) 2011-11-17
JP5781278B2 (ja) 2015-09-16
EP2570224A4 (en) 2017-07-26

Similar Documents

Publication Publication Date Title
US8957348B2 (en) Welding equipment
EP2571338B1 (en) Superconducting acceleration cavity and method of manufacturing superconducting acceleration cavity
JP4929606B2 (ja) 密閉型蓄電装置及びその製造方法
US20150145241A1 (en) Member joining method, member joining structure, and joint pipe
EP2960005A1 (en) Laser welding apparatus and laser welding method
US11094959B2 (en) Method of manufacturing secondary battery
EP2469989B1 (en) Manufacturing method for superconducting acceleration cavity
JP2007090368A (ja) レーザ溶接装置、及びレーザ溶接方法
JP2009104841A (ja) 封止装置、封止方法、電子デバイス、および電子デバイスの製造方法
JP2010005632A (ja) レーザ溶接用隙間制御装置及びレーザ溶接方法
JP3959198B2 (ja) 超電導キャビティ、その製造方法、及び超電導加速器
EP2571337B1 (en) Method of producing superconducting accelerator cavity
US10688594B2 (en) Fuel supply pipe assembly device
US10637010B2 (en) Method for manufacturing energy storage device and apparatus for manufacturing energy storage device
WO2014098145A1 (ja) 差厚材及びそれを用いた筒状部材
CN116551181A (zh) 一种半封闭式局部低真空激光焊接装置、焊接方法
JP2006014999A (ja) 車両用シートリクライニング装置
JP2004105981A (ja) 缶型電池の溶接装置
JP2012130935A (ja) レーザ溶接装置
CN211743291U (zh) 锂离子电池的电连接结构和具有其的锂离子电池
JP2011071066A (ja) 高周波加速空胴の製造方法
EP3939741A1 (en) Welding jig device and production method for component
JP2002361441A (ja) 真空容器製造方法
JP6210834B2 (ja) 接合組立装置及び接合組立管の組立方法
CN220560655U (zh) 一种卧枪储能器多工位焊接装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: MITSUBISHI HEAVY INDUSTRIES, LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SENNYU, KATSUYA;TSUBOTA, SHUHO;INOUE, FUMIAKI;REEL/FRAME:029071/0160

Effective date: 20120829

STCF Information on status: patent grant

Free format text: PATENTED CASE

AS Assignment

Owner name: MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MITSUBISHI HEAVY INDUSTRIES, LTD.;REEL/FRAME:040663/0452

Effective date: 20151001

AS Assignment

Owner name: MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS,

Free format text: CHANGE OF ADDRESS;ASSIGNOR:MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD.;REEL/FRAME:045889/0556

Effective date: 20170401

Owner name: MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, LTD

Free format text: CHANGE OF NAME;ASSIGNOR:MITSUBISHI HEAVY INDUSTRIES MECHATRONICS SYSTEMS, LTD.;REEL/FRAME:045889/0681

Effective date: 20171001

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551)

Year of fee payment: 4

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 8