US4850216A - Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same - Google Patents

Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same Download PDF

Info

Publication number
US4850216A
US4850216A US07/126,228 US12622887A US4850216A US 4850216 A US4850216 A US 4850216A US 12622887 A US12622887 A US 12622887A US 4850216 A US4850216 A US 4850216A
Authority
US
United States
Prior art keywords
data
suction
pressure
removal
comparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US07/126,228
Other languages
English (en)
Inventor
Kouichi Tamai
Shigeyuki Motokawa
Noriyuki Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Assigned to KABUSHIKI KAISHA TOSHIBA, 72 HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI, JAPAN A CORP. OF JAPAN reassignment KABUSHIKI KAISHA TOSHIBA, 72 HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI, JAPAN A CORP. OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: HIRATA, NORIYUKI, MOTOKAWA, SHIGEYUKI, TAMAI, KOUICHI
Application granted granted Critical
Publication of US4850216A publication Critical patent/US4850216A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Definitions

  • the present invention relates to an improved suction detector which can accurately detect suction and removal of, for example, semiconductor parts or electronic parts, and a suction/transfer apparatus which incorporates the same.
  • a suction detector utilizes a pressure difference in a fluid and detects suction/removal of, for example, semiconductor parts or electronic parts during conveyance of the parts.
  • a suction/transfer apparatus incorporating such a detector includes a suction nozzle, with the suction detector itself being located between the suction nozzle and a vacuum device.
  • the suction detector detects a reduction in the pressure and hence suction of the object.
  • the suction detector detects an increase in the pressure and hence removal of the object.
  • FIG. 1 shows an arrangement of a conventional suction detector which uses a semiconductor transducer.
  • semiconductor transducer 111 for converting a pressure value of a fluid into a resistance is connected between terminals 112 and 113 through diode 114 and converter 115 for converting a constant voltage into a constant current.
  • An output terminal of transducer 111 is connected to the inverting input terminal of operational amplifier 117 as a comparator through operational amplifier 116 as an amplifier.
  • the non-inverting input terminal of amplifier 117 is connected to a variable terminal of variable resistor 118 provided between converter 115 and terminal 113.
  • the output terminal of amplifier 117 is connected to the base of transistor 119, the emitter of transistor 119 is connected to terminal 113, and its collector is connected to terminal 120.
  • Diode 121 is connected between the emitter and the collector of transistor 119 so that an anode of diode 121 is connected to the emitter of transistor 119.
  • Light-emitting diode 122 for display is connected between the base of transistor 119 and terminal 113.
  • level A is set at a constant value not crossing a drift value of a pressure.
  • a resistance of transducer 111 varies in accordance with the pressure. Therefore, level B of the inverting input terminal of amplifier 117 varies in accordance with a pressure value of a fluid. Since the pressure of the fluid is high when an object is not chucked to the nozzle, an output voltage is low and level B of the inverting input terminal of operational amplifier 117 becomes lower than level A. However, since the fluid pressure is low when an object is chucked by a suction nozzle, an output voltage of transducer 111 is high, and hence level B of the inverting input terminal of the amplifier 117 becomes higher than level A.
  • pressure level B is varied due to the presence of a vacuum device while level A is fixed as shown in FIG. 2. Therefore, when level B is at P2 or P4, suction can be detected, but when level B is at P1, P3, or P5, suction cannot be detected because level A is higher than level B. As a result, although an object is chucked, no suction is detected and hence the object cannot be transferred.
  • level A is fixed, detection time varies upon pressure change in pipe 4, and in a high-speed machine in particular, the detection timing error may occur.
  • the present invention has been made in consideration of the above situation, and has as its object to provide a suction/transfer apparatus which can reliably transfer an object to be chucked when a pressure varies, when a pressure difference between suction and nonsuction is small because a suction nozzle is narrow, or when a size of an orifice varies due to dirt of the suction nozzle.
  • a suction detector of the suction/transfer apparatus includes:
  • a pressure sensor for detecting a pressure in a suction path for chucking the object to be chucked and generating pressure data corresponding to a detected pressure.
  • Delaying section delays transmission of the pressure data from the pressure sensor and generates delayed pressure data.
  • Suction/removal detecting section compares first total data of the delayed pressure data from the delaying section and adjustably-set first level difference data with the pressure data from the pressure sensor to detect suction of the object to be chucked, and compares second total data of the pressure data from the pressure sensor and adjustably-set second level difference data with the delayed pressure data from the delaying section to detect removal of the object to be chucked.
  • an integrator and a level setter are provided. That is, in accordance with a pressure signal from a pressure sensor, an integrated pressure signal obtained by integrating the pressure signal by the integrator, and a level difference signal set by the level setter, a suction comparator detects suction of the object, and a removal comparator detects removal thereof. Since the level difference signal can be set by the level setter, suction and removal can be accurately detected even if the pressure difference between suction and nonsuction modes of the object is relatively small. In this case, the level difference signal varies together with a pressure variation.
  • the suction detector according to the present invention is always stable and hence can be applied for detection in a high-speed machine.
  • FIG. 1 is a block diagram of an arrangement of a conventional suction detector
  • FIG. 2 is a graph for explaining an operation of the conventional suction detector
  • FIG. 3 is a perspective view of an arrangement of a suction/transfer apparatus according to the present invention.
  • FIG. 4A to 4D are timing charts for explaining an operation of the suction/transfer apparatus shown in FIG. 3;
  • FIG. 5 is a block diagram of an arrangement of a first embodiment of a suction detector according to the present invention and incorporated in the suction/transfer apparatus shown in FIG. 3;
  • FIG. 6 and FIGS. 7A and 7B are graphs for explaining an operation of the first embodiment of the suction detector shown FIG. 3;
  • FIGS. 8, 9, and 10 are block diagrams of arrangements of other embodiments of the suction detector according to the present invention, respectively, and showing parts different from those of the first embodiment.
  • FIG. 3 shows a suction/transfer apparatus according to the present invention which utilizes a pressure difference in a fluid.
  • pivotal arm portion 2 having suction nozzle 3 at its distal end is provided to support portion 1.
  • An arm consists of a pipe.
  • Arm portion 2 is connected to a decompression device (vacuum pump) through hose 4, solenoid valve 10, and suction detector 8. That is, the pipe of arm portion 2 and hose 4 form a fluid path between the decompression device and suction nozzle 3.
  • Detector 8 (to be described later in detail) branched from the path detects suction and removal of object to be chucked 5 in accordance with a change in pressure of the path and sends a detection result to controller 6.
  • Valve 10 connects the path from nozzle 3 to the atmosphere or the decompression device in accordance with a control signal from controller 6.
  • conveyor 12 moves and conveys object 5 below nozzle 3 at timing T1.
  • controller 6 detects this, valve 10 is opened in accordance with a suction control signal from controller 6 as shown in FIG. 4A, and the path of pipe 4 is connected to the decompression device. Before the suction control signal is input, the path is connected to the atmosphere by valve 10. When the path is connected to the decompression device, a pressure in pipe 4 is reduced, and object 5 is chucked to nozzle 3.
  • controller 6 When detector 8 detects suction of object 5 as shown in FIG. 4B, controller 6 outputs a rotation control signal to drive portion 9. As shown in FIG. 4C, in accordance with the rotation control signal, arm portion 2 is rotated toward table 13 while object 5 is chucked by nozzle 3. When it is detected that nozzle 3 reaches a predetermined position on table 13, controller 6 outputs a removal control signal to valve 10. Therefore, as shown in FIG. 4A, valve 10 connects the path to an opening portion in accordance with the removal control signal at timing T2. Therefore, when the pressure in pipe 4 is increased to reach the atmospheric pressure, object 5 is removed from nozzle 3 and placed on table 13.
  • controller 6 When detector 8 detects removal of object 5 as shown in FIG. 4B, controller 6 outputs a reverse rotation control signal to drive portion 9. As shown in FIG. 4C, drive portion 9 returns arm portion 2 to its original position in accordance with the reverse rotation control signal. When it is detected that arm portion 2 is returned to the original position at timing T3, controller 6 outputs a processing start signal. Therefore, object 5 is processed on table 13 in accordance with the start signal.
  • controller 6 After the processing is ended and a processing end signal is input, controller 6 outputs the rotation control signal to drive portion 9 as described above at timing T4. Therefore, arm portion 2 is rotated.
  • controller 6 outputs the suction control signal to valve 10. Therefore, object 5 on table 13 is chucked by nozzle 3 as described above.
  • controller 6 When detector 8 detects suction of object 5 as shown in FIG. 4B, controller 6 outputs the reverse rotation control signal to drive portion 9. Therefore, arm portion 2 returns to the original position while object 5 is chucked by nozzle 3.
  • controller 6 When it is detected that arm portion 2 returns to the original position at timing T6, controller 6 outputs the removal control signal to valve 10. Therefore, object 5 is placed on conveyor 12.
  • detector 8 detects removal of object 5 as shown in FIG. 4B
  • conveyor 12 is driven by controller 6 at timing T7 as shown in FIG. 4D. Conveyor 12 conveys next object 5 to the predetermined position below nozzle 3. Thereafter, the above operation is repeated.
  • an object to be chucked is transferred onto a table, processed thereon, and then returned to a conveyor.
  • the object is to be transferred to another conveyor or the like after processing, it is obvious for a person skilled in the art that timings are difference from those shown in FIGS. 4A to 4D.
  • Suction detector 8 shown in FIG. 3 will be described in detail with reference to FIG. 5.
  • detector 8 As a pressure sensor, a mechanical type which varies a contact position in accordance with a pressure change may be used. However, in detector 8 of the present invention shown in FIG. 5, a semiconductor transducer is used as pressure sensor 31 for detecting a pressure of a fluid. A semiconductor transducer detects a pressure change by converting it into a change in a resistance. In the transducer, a silicon crystal is used as, e.g., a pressure-sensitive element of a diaphragm structure. A strain resistor is patterned on the surface of the pressure-sensitive element by thermal diffusion. The diaphragm deforms by a pressure of the fluid, and the resistance is changed utilizing a piezo resistance effect.
  • transducer 31 The input terminals of transducer 31 are connected to terminals 32 and 33 respectively through nodes 58 and 59. Constant currents are supplied to transducer 31 through terminals 32 and 33.
  • the output terminal of transducer 31 is connected to operational amplifier 34.
  • the output terminal of amplifier 34 is connected to integrator 37 including resistor 35 and capacitor 36 and to node 56. Integrator 37 removes spike noise and the like and integrates an output from amplifier 34.
  • Switching circuit 38 is provided in parallel with resistor 35 and incorporates a timer. Circuit 38 is turned on at a timing controlled by OR gate 48 and turned off after a time predetermined by the timer has passed.
  • Midpoint node 57 between resistor 35 and capacitor 36 of integrator 37 is connected to the non-inverting input terminal of operational amplifier 39.
  • An output from amplifier 39 is fed back to the inverting input terminal thereof so as to constitute a voltage follower circuit.
  • the output terminal of amplifier 39 is connected to the inverting input terminal of suction comparator 42 through resistor 40 and node 62 and to the non-inverting input terminal of removal comparator 46 through resistor 44.
  • the output terminal of amplifier 39 is also connected to one end of variable resistor 41 as level setter 41. The other end of resistor 41 is grounded.
  • Resistor 43 is connected to node 56 at its one end and is connected to the non-inverting input terminal of comparator 42 at its other end.
  • Resistor 45 is connected to node 56 at its one end and is connected to the inverting input terminal of comparator 46 through node 63 at its other end.
  • Element 64 is connected between node 62 and a variable terminal of resistor 41 and element 65 is connected between node 63 and the variable terminal of resistor 41. Since one end of resistor 41 is connected to the output terminal of amplifier 39, not only a difference is provided between input signals to comparators 42 and 46, but also a pulse height during suction is enhanced.
  • resistors 40, 43, 44, and 45 have the same resistance. If elements 64 and 65 are resistors, their resistances are sufficiently larger than those of resistors 40, 43, 44, and 45. If elements 64 and 65 are diodes, they are connected such that their anodes face node 61 and their cathode face nodes 62 and 63, respectively. Therefore, a current flowing into node 62 from node 56 through resistor 45 and elements 65 and 64 can be almost prevented. In addition, a current flowing into node 62 from the output terminal of amplifier 39 through resistor 45 and elements 65 and 64 can be almost prevented. The output terminals of comparators 42 and 46 are connected to nodes 54 and 55, respectively.
  • Node 54 is connected to set terminal S of flip-flop (F/F) 47, and node 55 is connected to reset terminal R of F/F 47.
  • the input terminals of two-input OR gate 48 are connected to nodes 54 and 55.
  • Output terminal Q of F/F 47 is connected to the base of transistor 50 as an output circuit.
  • the collector of transistor 50 is connected to terminal 51, and its emitter is connected to terminal 33 and is grounded through node 59.
  • Light-emitting diode 52 for display is connected between terminal Q and node 58 connected to terminal 32.
  • resistor 41 as a level setter is adjusted in accordance with an actual pressure difference between suction and nonsuction modes of object 5 such as semiconductor parts or electronic parts.
  • a resistance of transducer 31 changes in accordance with a change in pressure of the fluid.
  • a constant current is supplied to transducer 31, and a pressure signal corresponding to the pressure change of the fluid is output to amplifier 34.
  • Amplifier 34 amplifies the pressure signal. Then, in order to delay the amplified pressure signal and to removes spike noise and the like, amplifier 34 outputs the amplified pressure signal to integrator 37.
  • comparator 42 compares total signal C of the delayed pressure signal from integrator 37 through voltage follower 39 and resistor 40 and the level difference signal from resistor 41 with amplified pressure signal D from amplifier 34.
  • the pressure of the fluid reduces, and a voltage from transducer 31 abruptly increases.
  • signal D becomes larger than signal C which is integrated and hence does not abruptly increase.
  • an output from comparator 42 becomes positive, and F/F 47 is set. Therefore, transistor 50 is turned on, and diode 52 is turned on to indicate detection of suction.
  • OR gate 48 drives circuit 38 when the output from comparator 42 is positive. As shown by timing b in FIG. 6, when circuit 38 is driven, it is turned on to bypass resistor 35. As a result, the delayed pressure signal abruptly rises. Thereafter, circuit 38 is turned off by the built-in timer at timing c. Therefore, the amplified pressure signal is integrated by integrator 37.
  • comparator 46 compares total signal F of the amplified pressure signal from amplifier 34 and the level difference signal from resistor 41 with delayed pressure signal E from integrator 37 through voltage follower 39 and resistor 44.
  • the pressure of the fluid increases, and the voltage from transducer 31 abruptly reduces.
  • signal F becomes lower than signal E which is integrated and hence does not abruptly reduce.
  • an output from comparator 46 becomes positive, and F/F 47 is reset. Therefore, transistor 50 is turned off, and diode 52 for indicating detection of suction is turned off.
  • OR gate 48 drives circuit 38 when the output from comparator 46 is positive. As shown by timing e in FIG. 6, when circuit 38 is driven, it is turned on to bypass resistor 35. As a result, the delayed pressure signal abruptly falls. Thereafter, circuit 38 is turned off by the built-in timer at timing f. Therefore, the amplified pressure signal is integrated by integrator 37.
  • pulsed graph G in FIGS. 7A and 7B represents a suction/removal state of object 5.
  • spike noise can be removed by the integrator even if the noise is generated. Therefore, if the level setter provides a proper level difference signal, the suction detector can accurately detect suction and removal.
  • switching circuit 38 is provided in parallel with integrator 37 and is closed in accordance with the output from comparator 42 or 46, thereby forming a bypass circuit. Therefore, since an output value is not integrated for a predetermined time interval after suction or removal of object 5, a response time is shortened. Moreover, since a display element such as light-emitting diode 52 or the like is provided, suction/removal of object 5 can be easily confirmed.
  • the degree of freedom with respect to a pressure variation is improved from 60 [mmHg] to 480 [mmHg], i.e., 8 times that of the conventional detector, and the suction detection accuracy is improved from 20 [mmHg] to 5 [mmHg], i.e., 4 times that of the conventional detector.
  • FIG. 8 shows a second embodiment of suction detector 8 of the present invention.
  • the second embodiment is substantially the same as the first embodiment.
  • the second embodiment differs from the first embodiment that level setter (variable resistor) 66 is provided in addition to level setter 41.
  • One end of resistor 66 is connected to the output terminal of operational amplifier 39, and its other end is grounded.
  • a variable terminal of resistor 66 is connected to the inverting input terminal of removal comparator 46. Therefore, setter 41 supplies a level difference signal to only the inverting input terminal of suction comparator 42, and setter 66 supplies the level difference signal to only the inverting input terminal of comparator 46.
  • An operation of the second embodiment is the same as that of the first embodiment.
  • FIG. 9 shows a third embodiment of suction detector 8 of the present invention.
  • the third embodiment is substantially the same as the first embodiment.
  • the third embodiment differs from the first embodiment that one end of level setter 41 is connected not to the output terminal of operational amplifier 39 but to a power source region. Therefore, a difference between signals C and D and that between signals E and F shown in FIG. 6 are always maintained constant. In addition, peak heights of signals C, D, E and F become substantially the same.
  • An operation of the third embodiment is the same as that of the first embodiment.
  • FIG. 10 shows a fourth embodiment of suction detector 8 of the present invention.
  • the fourth embodiment is substantially the same as the first embodiment.
  • the fourth embodiment differs from the second embodiment that one end of each of setters 41 and 61 is connected to a power source voltage. Therefore, a difference between signals C and D and that between signals E and F shown in FIG. 6 are always maintained constant. In addition, peak heights of signals C, D, E, and F become substantially the same.
  • An operation of the fourth embodiment is the same as that of the first embodiment.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
US07/126,228 1986-11-28 1987-11-27 Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same Expired - Fee Related US4850216A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61-283544 1986-11-28
JP61283544A JPH07274B2 (ja) 1986-11-28 1986-11-28 吸着検出装置

Publications (1)

Publication Number Publication Date
US4850216A true US4850216A (en) 1989-07-25

Family

ID=17666900

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/126,228 Expired - Fee Related US4850216A (en) 1986-11-28 1987-11-27 Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same

Country Status (5)

Country Link
US (1) US4850216A (fr)
EP (1) EP0269128B1 (fr)
JP (1) JPH07274B2 (fr)
KR (1) KR910001843B1 (fr)
DE (1) DE3767671D1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020185764A1 (en) * 2001-06-12 2002-12-12 Griggs Stephen R. Vacuum detection apparatus and method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4026574C2 (de) * 1989-08-24 1997-04-30 Smc Corp Verfahren und Vorrichtung zur Vorhersage eines Fehlverhaltens in einem Fluiddrucksystem
JPH0797599B2 (ja) * 1990-04-27 1995-10-18 株式会社芝浦製作所 基板検出装置
US5203547A (en) * 1990-11-29 1993-04-20 Canon Kabushiki Kaisha Vacuum attraction type substrate holding device
EP0500064B1 (fr) * 1991-02-22 1996-11-06 Smc Kabushiki Kaisha Méthode pour le traitement d'information de la pression à vide dans une unité à vide pour la prévision d'une panne
WO1993004963A1 (fr) * 1991-09-09 1993-03-18 Smc Kabushiki Kaisha Appareil pour assurer le serrage d'une ventouse et procede pour fixer le niveau de pression assurant le serrage de la ventouse
JP3652397B2 (ja) * 1995-02-21 2005-05-25 三星テクウィン株式会社 部品搭載方法および搭載装置
US20060053624A1 (en) * 2002-08-06 2006-03-16 Takashi Maeda Method and equipment for mounting part

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3674140A (en) * 1970-01-02 1972-07-04 Aspro Nicholas Ltd Article sensing apparatus
EP0045436A1 (fr) * 1980-08-04 1982-02-10 International Business Machines Corporation Dispositif à aspiration pour l'alimentation en documents
US4510683A (en) * 1983-10-27 1985-04-16 Sperry Corporation Force assembler apparatus for robots
US4683654A (en) * 1982-04-13 1987-08-04 U.S. Philips Corporation Method of and device for sensing the presence or absence of an article at the end of a vacuum pick-up means

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3674140A (en) * 1970-01-02 1972-07-04 Aspro Nicholas Ltd Article sensing apparatus
EP0045436A1 (fr) * 1980-08-04 1982-02-10 International Business Machines Corporation Dispositif à aspiration pour l'alimentation en documents
US4683654A (en) * 1982-04-13 1987-08-04 U.S. Philips Corporation Method of and device for sensing the presence or absence of an article at the end of a vacuum pick-up means
US4510683A (en) * 1983-10-27 1985-04-16 Sperry Corporation Force assembler apparatus for robots

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020185764A1 (en) * 2001-06-12 2002-12-12 Griggs Stephen R. Vacuum detection apparatus and method

Also Published As

Publication number Publication date
DE3767671D1 (de) 1991-02-28
EP0269128B1 (fr) 1991-01-23
JPS63139688A (ja) 1988-06-11
JPH07274B2 (ja) 1995-01-11
KR880006535A (ko) 1988-07-23
EP0269128A3 (en) 1989-02-22
KR910001843B1 (en) 1991-03-28
EP0269128A2 (fr) 1988-06-01

Similar Documents

Publication Publication Date Title
US4850216A (en) Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same
JPS55105480A (en) Solid state pickup device
US5961168A (en) Pick and place apparatus for transferring objects
US5523642A (en) External force measuring system and component mounting apparatus equipped with same
JPH01307312A (ja) 予め定められ制御された衝撃係数を有する一連のパルスを発生するための回路
US6549058B1 (en) Signal processing circuits for multiplication or division of analog signals and optical triangulation distance measurement system and method incorporating same
US4115831A (en) Velocity detecting apparatus insensitive to noise
JPH0317384B2 (fr)
JP2565647Y2 (ja) 部品吸着装置における吸着完了検出装置
KR900004740B1 (ko) 주파수 판정회로
US4024578A (en) Scan control and sensor sampling system for self-scanned photosensor arrays
US4546274A (en) Non-linear integration circuit
JP2798881B2 (ja) チップ部品の吸着不良検出装置及びチップ部品の吸着不良検出方法
JPH0749421Y2 (ja) ピーク検出回路
JPS61245620A (ja) 信号処理回路
JPH0738294A (ja) 電子部品実装装置
KR200298535Y1 (ko) 반도체제조장치의센서안정화시스템
JPS638565A (ja) 半導体加速度検出装置
JPH1076432A (ja) 真空吸着装置のスイッチ回路
JP2597993Y2 (ja) 電気掃除機のゴミセンサ
US5751367A (en) Video signal detecting apparatus
JPH09321558A (ja) 差動増幅装置
JPS59188578A (ja) 磁気検出装置
JPS62225915A (ja) 半導体集積回路
JPH02167491A (ja) センサ装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: KABUSHIKI KAISHA TOSHIBA, 72 HORIKAWA-CHO, SAIWAI-

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:TAMAI, KOUICHI;MOTOKAWA, SHIGEYUKI;HIRATA, NORIYUKI;REEL/FRAME:004814/0811

Effective date: 19871118

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FEPP Fee payment procedure

Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 19970730

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362