US3878392A - Specimen analysis with ion and electrom beams - Google Patents

Specimen analysis with ion and electrom beams Download PDF

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Publication number
US3878392A
US3878392A US425457A US42545773A US3878392A US 3878392 A US3878392 A US 3878392A US 425457 A US425457 A US 425457A US 42545773 A US42545773 A US 42545773A US 3878392 A US3878392 A US 3878392A
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US
United States
Prior art keywords
ions
mass
specimen
ion
electron beam
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Expired - Lifetime
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US425457A
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English (en)
Inventor
Nelson C Yew
Wyman C Lane
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Etec Systems Inc
ETEC CORP
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ETEC CORP
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Publication date
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Priority to US425457A priority Critical patent/US3878392A/en
Priority to DE19742454826 priority patent/DE2454826A1/de
Priority to GB5209774A priority patent/GB1457975A/en
Priority to JP49144903A priority patent/JPS5093692A/ja
Priority to FR7441528A priority patent/FR2254788B3/fr
Application granted granted Critical
Publication of US3878392A publication Critical patent/US3878392A/en
Assigned to MNC CREDIT CORP., 502 WASHINGTON AVE., STE. 700, TOWSON, MD reassignment MNC CREDIT CORP., 502 WASHINGTON AVE., STE. 700, TOWSON, MD SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ETEC, A CORP. OF NV
Assigned to ETEC, A CORP. OF NV reassignment ETEC, A CORP. OF NV ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: PERKIN-ELMER CORPORATION, THE
Assigned to ETEC SYSTEMS, INC., A CORP. OF NV reassignment ETEC SYSTEMS, INC., A CORP. OF NV CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). 8/30/90 Assignors: ETEC, A CORP. OF NV
Assigned to CONNECTICUT NATIONAL BANK, THE reassignment CONNECTICUT NATIONAL BANK, THE SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ETEC SYSTEMS, INC.
Assigned to ETEC, A CORP. OF NEVADA reassignment ETEC, A CORP. OF NEVADA RELEASED BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: MNC CREDIT CORP., A MD CORP.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
US425457A 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams Expired - Lifetime US3878392A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US425457A US3878392A (en) 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams
DE19742454826 DE2454826A1 (de) 1973-12-17 1974-11-19 Verfahren und vorrichtung zur probenanalyse mit ionen- und elektronenstrahlen
GB5209774A GB1457975A (en) 1973-12-17 1974-12-02 Specimen analysis with ion and electron beams
FR7441528A FR2254788B3 (de) 1973-12-17 1974-12-17
JP49144903A JPS5093692A (de) 1973-12-17 1974-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US425457A US3878392A (en) 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams

Publications (1)

Publication Number Publication Date
US3878392A true US3878392A (en) 1975-04-15

Family

ID=23686655

Family Applications (1)

Application Number Title Priority Date Filing Date
US425457A Expired - Lifetime US3878392A (en) 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams

Country Status (5)

Country Link
US (1) US3878392A (de)
JP (1) JPS5093692A (de)
DE (1) DE2454826A1 (de)
FR (1) FR2254788B3 (de)
GB (1) GB1457975A (de)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942005A (en) * 1974-12-12 1976-03-02 Hitachi, Ltd. Electron scanning apparatus
US4088895A (en) * 1977-07-08 1978-05-09 Martin Frederick Wight Memory device utilizing ion beam readout
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
US4645929A (en) * 1984-01-31 1987-02-24 Siemens Aktiengesellschaft Method and apparatus for the compensation of charges in secondary ion mass spectrometry (SIMS) of specimens exhibiting poor electrical conductivity
US4860224A (en) * 1985-05-21 1989-08-22 501 Tekscan Limited Surface analysis spectroscopy apparatus
EP0378077A2 (de) * 1989-01-09 1990-07-18 Hitachi, Ltd. Verfahren und Vorrichtung zur Analysierung durch Ionenmassenspektroskopie
US5014287A (en) * 1990-04-18 1991-05-07 Thornton Michael G Portable x-ray fluorescence spectrometer for environmental monitoring of inorganic pollutants
EP0265245A3 (de) * 1986-10-21 1992-07-01 Matsushita Electric Industrial Co., Ltd. Methode zur Löschbaren Aufzeichnung und Wiedergabe von Informationen
US5162233A (en) * 1987-12-16 1992-11-10 Mitsubishi Denki Kabushiki Kaisha Method of detecting and analyzing impurities
DE4232509A1 (de) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Verfahren zur Bestimmung von Kontaminaten in Behältern
US5699797A (en) * 1992-10-05 1997-12-23 Dynamics Imaging, Inc. Method of investigation of microcirculation functional dynamics of physiological liquids in skin and apparatus for its realization
US5730133A (en) * 1994-05-20 1998-03-24 Dynamics Imaging, Inc. Optical functional mamoscope
US5747789A (en) * 1993-12-01 1998-05-05 Dynamics Imaging, Inc. Method for investigation of distribution of physiological components in human body tissues and apparatus for its realization
US5865743A (en) * 1994-02-23 1999-02-02 Dynamics Imaging, Inc. Method of living organism multimodal functional mapping
US5865167A (en) * 1991-12-17 1999-02-02 Dynamics Imaging, Inc. Method of living system organism diagnostics and apparatus for its realization
US6002958A (en) * 1992-12-24 1999-12-14 Dynamics Imaging, Inc. Method and apparatus for diagnostics of internal organs
US6192262B1 (en) 1994-02-23 2001-02-20 Dobi Medical Systems, Llc Method of living organism multimodal functional mapping
US6373070B1 (en) 1999-10-12 2002-04-16 Fei Company Method apparatus for a coaxial optical microscope with focused ion beam
US20030102436A1 (en) * 2000-03-20 2003-06-05 Gerard Benas-Sayag Column simultaneously focusing a particle beam and an optical beam
US20030165205A1 (en) * 2002-03-04 2003-09-04 Chu Jeffrey C. Detecting and measuring interference contained within a digital carrier
CN106950191A (zh) * 2017-02-28 2017-07-14 电子科技大学 配套检测样品在电子注激励下产生光谱特性的实验系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60221944A (ja) * 1985-03-28 1985-11-06 Shimadzu Corp 総合局所分析方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
US2799779A (en) * 1955-02-01 1957-07-16 Leitz Ernst Gmbh Method and apparatus for obtaining ultramicroscopic images in an ion microscope
US3219817A (en) * 1961-11-09 1965-11-23 Trub Tauber & Co A G Electron emission microscope with means to expose the specimen to ion and electron beams
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3617739A (en) * 1969-07-23 1971-11-02 Inst Plasmaphysik Gmbh Ion lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
US2799779A (en) * 1955-02-01 1957-07-16 Leitz Ernst Gmbh Method and apparatus for obtaining ultramicroscopic images in an ion microscope
US3219817A (en) * 1961-11-09 1965-11-23 Trub Tauber & Co A G Electron emission microscope with means to expose the specimen to ion and electron beams
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3617739A (en) * 1969-07-23 1971-11-02 Inst Plasmaphysik Gmbh Ion lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatus

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942005A (en) * 1974-12-12 1976-03-02 Hitachi, Ltd. Electron scanning apparatus
US4088895A (en) * 1977-07-08 1978-05-09 Martin Frederick Wight Memory device utilizing ion beam readout
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
US4645929A (en) * 1984-01-31 1987-02-24 Siemens Aktiengesellschaft Method and apparatus for the compensation of charges in secondary ion mass spectrometry (SIMS) of specimens exhibiting poor electrical conductivity
US4860224A (en) * 1985-05-21 1989-08-22 501 Tekscan Limited Surface analysis spectroscopy apparatus
EP0265245A3 (de) * 1986-10-21 1992-07-01 Matsushita Electric Industrial Co., Ltd. Methode zur Löschbaren Aufzeichnung und Wiedergabe von Informationen
US5162233A (en) * 1987-12-16 1992-11-10 Mitsubishi Denki Kabushiki Kaisha Method of detecting and analyzing impurities
EP0378077A2 (de) * 1989-01-09 1990-07-18 Hitachi, Ltd. Verfahren und Vorrichtung zur Analysierung durch Ionenmassenspektroskopie
EP0378077A3 (de) * 1989-01-09 1991-04-24 Hitachi, Ltd. Verfahren und Vorrichtung zur Analysierung durch Ionenmassenspektroskopie
US5014287A (en) * 1990-04-18 1991-05-07 Thornton Michael G Portable x-ray fluorescence spectrometer for environmental monitoring of inorganic pollutants
US5865167A (en) * 1991-12-17 1999-02-02 Dynamics Imaging, Inc. Method of living system organism diagnostics and apparatus for its realization
DE4232509A1 (de) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Verfahren zur Bestimmung von Kontaminaten in Behältern
US5699797A (en) * 1992-10-05 1997-12-23 Dynamics Imaging, Inc. Method of investigation of microcirculation functional dynamics of physiological liquids in skin and apparatus for its realization
US6002958A (en) * 1992-12-24 1999-12-14 Dynamics Imaging, Inc. Method and apparatus for diagnostics of internal organs
US5747789A (en) * 1993-12-01 1998-05-05 Dynamics Imaging, Inc. Method for investigation of distribution of physiological components in human body tissues and apparatus for its realization
US6192262B1 (en) 1994-02-23 2001-02-20 Dobi Medical Systems, Llc Method of living organism multimodal functional mapping
US5865743A (en) * 1994-02-23 1999-02-02 Dynamics Imaging, Inc. Method of living organism multimodal functional mapping
US5730133A (en) * 1994-05-20 1998-03-24 Dynamics Imaging, Inc. Optical functional mamoscope
US6373070B1 (en) 1999-10-12 2002-04-16 Fei Company Method apparatus for a coaxial optical microscope with focused ion beam
US20030102436A1 (en) * 2000-03-20 2003-06-05 Gerard Benas-Sayag Column simultaneously focusing a particle beam and an optical beam
US20060097198A1 (en) * 2000-03-20 2006-05-11 Gerard Benas-Sayag Column simultaneously focusing a particle beam and an optical beam
US7297948B2 (en) 2000-03-20 2007-11-20 Credence Systems Corporation Column simultaneously focusing a particle beam and an optical beam
US20030165205A1 (en) * 2002-03-04 2003-09-04 Chu Jeffrey C. Detecting and measuring interference contained within a digital carrier
US7639761B2 (en) * 2002-03-04 2009-12-29 Glowlink Communications Technology, Inc. Detecting and measuring interference contained within a digital carrier
US20100046672A1 (en) * 2002-03-04 2010-02-25 Chu Jeffrey C System for and Method of Detecting Interference in a Communication System
CN106950191A (zh) * 2017-02-28 2017-07-14 电子科技大学 配套检测样品在电子注激励下产生光谱特性的实验系统
CN106950191B (zh) * 2017-02-28 2019-11-05 电子科技大学 配套检测样品在电子注激励下产生光谱特性的实验系统

Also Published As

Publication number Publication date
JPS5093692A (de) 1975-07-25
DE2454826A1 (de) 1975-06-19
FR2254788B3 (de) 1977-09-16
FR2254788A1 (de) 1975-07-11
GB1457975A (en) 1976-12-08

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Legal Events

Date Code Title Description
AS Assignment

Owner name: MNC CREDIT CORP., 502 WASHINGTON AVE., STE. 700, T

Free format text: SECURITY INTEREST;ASSIGNOR:ETEC, A CORP. OF NV;REEL/FRAME:005262/0967

Effective date: 19900223

AS Assignment

Owner name: ETEC, A CORP. OF NV, NEVADA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:PERKIN-ELMER CORPORATION, THE;REEL/FRAME:005366/0501

Effective date: 19900315

AS Assignment

Owner name: ETEC SYSTEMS, INC., A CORP. OF NV

Free format text: CHANGE OF NAME;ASSIGNOR:ETEC, A CORP. OF NV;REEL/FRAME:005475/0559

Effective date: 19900814

AS Assignment

Owner name: CONNECTICUT NATIONAL BANK, THE

Free format text: SECURITY INTEREST;ASSIGNOR:ETEC SYSTEMS, INC.;REEL/FRAME:005949/0850

Effective date: 19911115

AS Assignment

Owner name: ETEC, A CORP. OF NEVADA, CALIFORNIA

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:MNC CREDIT CORP., A MD CORP.;REEL/FRAME:006014/0078

Effective date: 19911220