GB1457975A - Specimen analysis with ion and electron beams - Google Patents

Specimen analysis with ion and electron beams

Info

Publication number
GB1457975A
GB1457975A GB5209774A GB5209774A GB1457975A GB 1457975 A GB1457975 A GB 1457975A GB 5209774 A GB5209774 A GB 5209774A GB 5209774 A GB5209774 A GB 5209774A GB 1457975 A GB1457975 A GB 1457975A
Authority
GB
United Kingdom
Prior art keywords
filter
mass
ions
specimen
charge ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5209774A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETEC CORP
Original Assignee
ETEC CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETEC CORP filed Critical ETEC CORP
Publication of GB1457975A publication Critical patent/GB1457975A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Abstract

1457975 Scanning electron microscope ETEC CORP 2 Dec 1974 [17 Dec 1973] 52097/74 Heading H4F Specimens 15, Fig. 1, are analysed by producing a C.R.T. display representative thereof having improved definition. The specimen 15 is mounted on a stage 14 in a vacuum chamber 10 and bombarded by a primary ion beam 28 from source 26. The current of secondary ions emitted from the specimen as a result of bombardment is modulated by a scanning electron beam, emanating from a scanning electron microscope (SEM) 46, in accordance with the mass to charge ratio of the secondary ions emanating from the constituent elements of the specimen. A quadrupole mass filter 33 is used to transmit ions having a given mass : charge ratio. Controls 21 to 25 are provided for positioning stage 14 within the chamber 10 which is evacuated by pump 12. In operation the filter 33 is operated in a spectral mode whereby ions of all mass : charge ratios in a predetermined range are passed by cyclic variation of the narrow transmission range of the filter over the range, while the C.R.T. scan is controlled by the filter control unit 34 to provide a mass : charge ratio vs. beam intensity plot, Fig. 2, on the C.R.T., giving the relative distribution of the various elements in the specimen 15, Fig. 1. The narrow transmission window of the filter is then fixed to pass ions of mass : charge ratio within the range of mass : charge ratios of those ions originating from the element of interest. The control of the C.R.T. scan is switched 50 to a sweep generator 48 which causes synchronous raster scanning of the C.R.T. 42 and the S.E.M. 46 while the C.R.T. beam intensity is modulated by the output of the filter, to produce a display showing the areas of high concentration of elements of interest. The filter may be operated in a combined mode wherein the narrow window is shifted at a slow rate relative to the raster rate to provide a composite picture of the distribution of two or more elements. The various control signals may be converted to digital form and recorded or stored in a computer memory.
GB5209774A 1973-12-17 1974-12-02 Specimen analysis with ion and electron beams Expired GB1457975A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US425457A US3878392A (en) 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams

Publications (1)

Publication Number Publication Date
GB1457975A true GB1457975A (en) 1976-12-08

Family

ID=23686655

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5209774A Expired GB1457975A (en) 1973-12-17 1974-12-02 Specimen analysis with ion and electron beams

Country Status (5)

Country Link
US (1) US3878392A (en)
JP (1) JPS5093692A (en)
DE (1) DE2454826A1 (en)
FR (1) FR2254788B3 (en)
GB (1) GB1457975A (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942005A (en) * 1974-12-12 1976-03-02 Hitachi, Ltd. Electron scanning apparatus
US4088895A (en) * 1977-07-08 1978-05-09 Martin Frederick Wight Memory device utilizing ion beam readout
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
DE3403254A1 (en) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR COMPENSATING CHARGES IN SECONDARY ISSUE MASS SPECTROMETRY (SIMS) ELECTRICALLY BAD CONDUCTING SAMPLES
JPS60221944A (en) * 1985-03-28 1985-11-06 Shimadzu Corp Method of totally analyzing local area of sample
IE58049B1 (en) * 1985-05-21 1993-06-16 Tekscan Ltd Surface analysis microscopy apparatus
EP0265245A3 (en) * 1986-10-21 1992-07-01 Matsushita Electric Industrial Co., Ltd. Method of erasable recording and reading of information
JPH0754287B2 (en) * 1987-12-16 1995-06-07 三菱電機株式会社 Impurity detection analysis method
JPH02183150A (en) * 1989-01-09 1990-07-17 Hitachi Ltd Mass spectrometry method and apparatus for ion
US5014287A (en) * 1990-04-18 1991-05-07 Thornton Michael G Portable x-ray fluorescence spectrometer for environmental monitoring of inorganic pollutants
WO1993011704A1 (en) * 1991-12-17 1993-06-24 Eduard Emmanuilovich Godik Method and device for diagnosis of living organism
DE4232509A1 (en) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Measuring contaminants in containers,e.g. plastic bottles - involves using mass spectrometer with ionisation and photon stimulation
US5699797A (en) * 1992-10-05 1997-12-23 Dynamics Imaging, Inc. Method of investigation of microcirculation functional dynamics of physiological liquids in skin and apparatus for its realization
US6002958A (en) * 1992-12-24 1999-12-14 Dynamics Imaging, Inc. Method and apparatus for diagnostics of internal organs
US5747789A (en) * 1993-12-01 1998-05-05 Dynamics Imaging, Inc. Method for investigation of distribution of physiological components in human body tissues and apparatus for its realization
US5865743A (en) * 1994-02-23 1999-02-02 Dynamics Imaging, Inc. Method of living organism multimodal functional mapping
US6192262B1 (en) 1994-02-23 2001-02-20 Dobi Medical Systems, Llc Method of living organism multimodal functional mapping
US5730133A (en) * 1994-05-20 1998-03-24 Dynamics Imaging, Inc. Optical functional mamoscope
US6373070B1 (en) 1999-10-12 2002-04-16 Fei Company Method apparatus for a coaxial optical microscope with focused ion beam
FR2806527B1 (en) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc SIMULTANEOUS FOCUSING COLUMN OF PARTICLE BEAM AND OPTICAL BEAM
WO2003077488A1 (en) * 2002-03-04 2003-09-18 Glowlink Communications Technology, Inc. Detecting and measuring interference contained within a digital carrier
CN106950191B (en) * 2017-02-28 2019-11-05 电子科技大学 Mating test sample generates the experimental system of spectral characteristic under electronics note excitation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
DE1006983B (en) * 1955-02-01 1957-04-25 Leitz Ernst Gmbh Method and device for super-microscopic imaging by means of an ion microscope
CH391912A (en) * 1961-11-09 1965-05-15 Trueb Taeuber & Co Ag Process for visualization and recording of electron-optical images
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field
DE1937482C3 (en) * 1969-07-23 1974-10-10 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Microbeam probe

Also Published As

Publication number Publication date
FR2254788A1 (en) 1975-07-11
FR2254788B3 (en) 1977-09-16
US3878392A (en) 1975-04-15
DE2454826A1 (en) 1975-06-19
JPS5093692A (en) 1975-07-25

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee