CH391912A - Process for visualization and recording of electron-optical images - Google Patents

Process for visualization and recording of electron-optical images

Info

Publication number
CH391912A
CH391912A CH1300961A CH1300961A CH391912A CH 391912 A CH391912 A CH 391912A CH 1300961 A CH1300961 A CH 1300961A CH 1300961 A CH1300961 A CH 1300961A CH 391912 A CH391912 A CH 391912A
Authority
CH
Switzerland
Prior art keywords
visualization
electron
recording
optical images
images
Prior art date
Application number
CH1300961A
Other languages
German (de)
Inventor
Moellenstedt Gottfried P Habil
Original Assignee
Trueb Taeuber & Co Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trueb Taeuber & Co Ag filed Critical Trueb Taeuber & Co Ag
Priority to CH1300961A priority Critical patent/CH391912A/en
Priority to GB27750/62A priority patent/GB966442A/en
Priority to FR905032A priority patent/FR1340216A/en
Priority to US219382A priority patent/US3219817A/en
Publication of CH391912A publication Critical patent/CH391912A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B44—DECORATIVE ARTS
    • B44F—SPECIAL DESIGNS OR PICTURES
    • B44F11/00—Designs imitating artistic work
    • B44F11/04—Imitation of mosaic or tarsia-work patterns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
CH1300961A 1961-11-09 1961-11-09 Process for visualization and recording of electron-optical images CH391912A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CH1300961A CH391912A (en) 1961-11-09 1961-11-09 Process for visualization and recording of electron-optical images
GB27750/62A GB966442A (en) 1961-11-09 1962-07-19 Improvements in and relating to electron-emission microscopes
FR905032A FR1340216A (en) 1961-11-09 1962-07-25 Secondary emission electron microscope
US219382A US3219817A (en) 1961-11-09 1962-08-27 Electron emission microscope with means to expose the specimen to ion and electron beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1300961A CH391912A (en) 1961-11-09 1961-11-09 Process for visualization and recording of electron-optical images

Publications (1)

Publication Number Publication Date
CH391912A true CH391912A (en) 1965-05-15

Family

ID=4388443

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1300961A CH391912A (en) 1961-11-09 1961-11-09 Process for visualization and recording of electron-optical images

Country Status (3)

Country Link
US (1) US3219817A (en)
CH (1) CH391912A (en)
GB (1) GB966442A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH455959A (en) * 1965-11-25 1968-05-15 Balzers Patent Beteilig Ag Electron emission microscope
US3479505A (en) * 1966-06-30 1969-11-18 Applied Res Lab Method of operating an ion microprobe using secondary elections
GB1194355A (en) * 1967-10-25 1970-06-10 Standard Telephones Cables Ltd Improvements in or relating to Scanning Electron Microscopes.
US3930155A (en) * 1973-01-19 1975-12-30 Hitachi Ltd Ion microprobe analyser
US3878392A (en) * 1973-12-17 1975-04-15 Etec Corp Specimen analysis with ion and electrom beams
US4249077A (en) * 1978-08-04 1981-02-03 Crawford Charles K Ion charge neutralization for electron beam devices
GB2111299B (en) * 1981-11-30 1986-07-09 Thermo Electron Corp High current density photoelectron generators
US4460831A (en) * 1981-11-30 1984-07-17 Thermo Electron Corporation Laser stimulated high current density photoelectron generator and method of manufacture
DE3403254A1 (en) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR COMPENSATING CHARGES IN SECONDARY ISSUE MASS SPECTROMETRY (SIMS) ELECTRICALLY BAD CONDUCTING SAMPLES
JP2811073B2 (en) * 1988-11-01 1998-10-15 セイコーインスツルメンツ株式会社 Cross section processing observation device
JPH09320505A (en) * 1996-03-29 1997-12-12 Hitachi Ltd Electron beam type inspecting method, device therefor, manufacture of semiconductor, and its manufacturing line
US7660687B1 (en) * 2006-05-25 2010-02-09 Kla-Tencor Corporation Robust measurement of parameters

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
US2281325A (en) * 1941-08-20 1942-04-28 Gen Electric Electron microscope
NL71103C (en) * 1946-08-30
DE1006983B (en) * 1955-02-01 1957-04-25 Leitz Ernst Gmbh Method and device for super-microscopic imaging by means of an ion microscope
DE1133841B (en) * 1957-09-11 1962-07-26 Leitz Ernst Gmbh Electron microscope for the direct imaging of surfaces by secondary electrons, method for examining non-conductors or semiconductors and arrangement for carrying out the method

Also Published As

Publication number Publication date
GB966442A (en) 1964-08-12
US3219817A (en) 1965-11-23

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