JPS5627640A - Method for evaluating oxide film - Google Patents

Method for evaluating oxide film

Info

Publication number
JPS5627640A
JPS5627640A JP10387179A JP10387179A JPS5627640A JP S5627640 A JPS5627640 A JP S5627640A JP 10387179 A JP10387179 A JP 10387179A JP 10387179 A JP10387179 A JP 10387179A JP S5627640 A JPS5627640 A JP S5627640A
Authority
JP
Japan
Prior art keywords
oxide film
amplified
lens
electron
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10387179A
Other languages
Japanese (ja)
Other versions
JPS5941533B2 (en
Inventor
Hiroshi Koyama
Koichiro Ootori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI, Agency of Industrial Science and Technology filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP10387179A priority Critical patent/JPS5941533B2/en
Publication of JPS5627640A publication Critical patent/JPS5627640A/en
Publication of JPS5941533B2 publication Critical patent/JPS5941533B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To evaluate the state of electrons or the chemical state of an oxide film of a complex semicoductor element construction directly by using the electron beam excitation luminescence of the oxide film. CONSTITUTION:Electron beams 4 emitted from a heating filament 1 are shaped and scanned by an electron optical system consisting of a condenser lens 3, an objective lens 5, etc., and projected to an oxide film sample 7. Luminescence 9 excited from the sample 7 as a result of this is condensed through a quartz window 10 and a lens 11 and introduced to and split by a diffraction spectroscope 12. The split light is amplified by a photomultiplier tube 13, further amplified by an operational amplifier 18 and displayed on a CRT19 as a brightness modulated image or amplified by a lock-in amplifier 15 synchronized with the blanking system (a pulse generator 14 and a blanking plate 2) of the electron beams 4 and recorded as a spectrum on an X-Y recorder 16.
JP10387179A 1979-08-15 1979-08-15 Oxide film evaluation method Expired JPS5941533B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10387179A JPS5941533B2 (en) 1979-08-15 1979-08-15 Oxide film evaluation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10387179A JPS5941533B2 (en) 1979-08-15 1979-08-15 Oxide film evaluation method

Publications (2)

Publication Number Publication Date
JPS5627640A true JPS5627640A (en) 1981-03-18
JPS5941533B2 JPS5941533B2 (en) 1984-10-08

Family

ID=14365492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10387179A Expired JPS5941533B2 (en) 1979-08-15 1979-08-15 Oxide film evaluation method

Country Status (1)

Country Link
JP (1) JPS5941533B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4800278A (en) * 1985-06-06 1989-01-24 Nippon Ceramic Co., Ltd. Pyroelectric infrared sensor
DE102009015341A1 (en) * 2009-03-27 2010-10-07 Carl Zeiss Ag Method for optical testing of sample during e.g. chemical analysis, involves detecting optical emission of sample depending on characteristic modulation i.e. temporally periodic modulation, of particle beam
WO2012008836A3 (en) * 2010-07-14 2012-03-01 Delmic B.V. Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
JP2015129726A (en) * 2014-01-09 2015-07-16 Ｊｆｅスチール株式会社 Evaluation method for adhesiveness of insulation coating on directional electromagnetic steel plate surface
US9939382B2 (en) 2013-03-28 2018-04-10 Jfe Steel Corporation Method of checking forsterite, apparatus that evaluates forsterite, and production line that manufactures steel sheet

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4800278A (en) * 1985-06-06 1989-01-24 Nippon Ceramic Co., Ltd. Pyroelectric infrared sensor
DE102009015341A1 (en) * 2009-03-27 2010-10-07 Carl Zeiss Ag Method for optical testing of sample during e.g. chemical analysis, involves detecting optical emission of sample depending on characteristic modulation i.e. temporally periodic modulation, of particle beam
WO2012008836A3 (en) * 2010-07-14 2012-03-01 Delmic B.V. Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
US8895921B2 (en) 2010-07-14 2014-11-25 Delmic B.V. Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
US9939382B2 (en) 2013-03-28 2018-04-10 Jfe Steel Corporation Method of checking forsterite, apparatus that evaluates forsterite, and production line that manufactures steel sheet
JP2015129726A (en) * 2014-01-09 2015-07-16 Ｊｆｅスチール株式会社 Evaluation method for adhesiveness of insulation coating on directional electromagnetic steel plate surface

Also Published As

Publication number Publication date
JPS5941533B2 (en) 1984-10-08

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