JPS5093692A - - Google Patents

Info

Publication number
JPS5093692A
JPS5093692A JP49144903A JP14490374A JPS5093692A JP S5093692 A JPS5093692 A JP S5093692A JP 49144903 A JP49144903 A JP 49144903A JP 14490374 A JP14490374 A JP 14490374A JP S5093692 A JPS5093692 A JP S5093692A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49144903A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5093692A publication Critical patent/JPS5093692A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
JP49144903A 1973-12-17 1974-12-17 Pending JPS5093692A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US425457A US3878392A (en) 1973-12-17 1973-12-17 Specimen analysis with ion and electrom beams

Publications (1)

Publication Number Publication Date
JPS5093692A true JPS5093692A (ja) 1975-07-25

Family

ID=23686655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49144903A Pending JPS5093692A (ja) 1973-12-17 1974-12-17

Country Status (5)

Country Link
US (1) US3878392A (ja)
JP (1) JPS5093692A (ja)
DE (1) DE2454826A1 (ja)
FR (1) FR2254788B3 (ja)
GB (1) GB1457975A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60221944A (ja) * 1985-03-28 1985-11-06 Shimadzu Corp 総合局所分析方法

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942005A (en) * 1974-12-12 1976-03-02 Hitachi, Ltd. Electron scanning apparatus
US4088895A (en) * 1977-07-08 1978-05-09 Martin Frederick Wight Memory device utilizing ion beam readout
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
DE3403254A1 (de) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur kompensation von aufladungen bei der sekundaerionen-massenspektrometrie (sims) elektrisch schlecht leitender proben
IE58049B1 (en) * 1985-05-21 1993-06-16 Tekscan Ltd Surface analysis microscopy apparatus
EP0265245A3 (en) * 1986-10-21 1992-07-01 Matsushita Electric Industrial Co., Ltd. Method of erasable recording and reading of information
JPH0754287B2 (ja) * 1987-12-16 1995-06-07 三菱電機株式会社 不純物検出分析方法
JPH02183150A (ja) * 1989-01-09 1990-07-17 Hitachi Ltd イオンの質量分析法および装置
US5014287A (en) * 1990-04-18 1991-05-07 Thornton Michael G Portable x-ray fluorescence spectrometer for environmental monitoring of inorganic pollutants
WO1993011704A1 (en) * 1991-12-17 1993-06-24 Eduard Emmanuilovich Godik Method and device for diagnosis of living organism
DE4232509A1 (de) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Verfahren zur Bestimmung von Kontaminaten in Behältern
US5699797A (en) * 1992-10-05 1997-12-23 Dynamics Imaging, Inc. Method of investigation of microcirculation functional dynamics of physiological liquids in skin and apparatus for its realization
US6002958A (en) * 1992-12-24 1999-12-14 Dynamics Imaging, Inc. Method and apparatus for diagnostics of internal organs
US5747789A (en) * 1993-12-01 1998-05-05 Dynamics Imaging, Inc. Method for investigation of distribution of physiological components in human body tissues and apparatus for its realization
US5865743A (en) * 1994-02-23 1999-02-02 Dynamics Imaging, Inc. Method of living organism multimodal functional mapping
US6192262B1 (en) 1994-02-23 2001-02-20 Dobi Medical Systems, Llc Method of living organism multimodal functional mapping
US5730133A (en) * 1994-05-20 1998-03-24 Dynamics Imaging, Inc. Optical functional mamoscope
US6373070B1 (en) 1999-10-12 2002-04-16 Fei Company Method apparatus for a coaxial optical microscope with focused ion beam
FR2806527B1 (fr) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
WO2003077488A1 (en) * 2002-03-04 2003-09-18 Glowlink Communications Technology, Inc. Detecting and measuring interference contained within a digital carrier
CN106950191B (zh) * 2017-02-28 2019-11-05 电子科技大学 配套检测样品在电子注激励下产生光谱特性的实验系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
DE1006983B (de) * 1955-02-01 1957-04-25 Leitz Ernst Gmbh Verfahren und Vorrichtung zur uebermikroskopischen Abbildung mittels eines Jonenmikroskops
CH391912A (de) * 1961-11-09 1965-05-15 Trueb Taeuber & Co Ag Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern
DE1937482C3 (de) * 1969-07-23 1974-10-10 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Mikrostrahlsonde

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60221944A (ja) * 1985-03-28 1985-11-06 Shimadzu Corp 総合局所分析方法

Also Published As

Publication number Publication date
FR2254788A1 (ja) 1975-07-11
FR2254788B3 (ja) 1977-09-16
US3878392A (en) 1975-04-15
DE2454826A1 (de) 1975-06-19
GB1457975A (en) 1976-12-08

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