US3809899A - Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope - Google Patents

Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope Download PDF

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Publication number
US3809899A
US3809899A US00281375A US28137572A US3809899A US 3809899 A US3809899 A US 3809899A US 00281375 A US00281375 A US 00281375A US 28137572 A US28137572 A US 28137572A US 3809899 A US3809899 A US 3809899A
Authority
US
United States
Prior art keywords
cathode
electron
chamber
tip
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00281375A
Other languages
English (en)
Inventor
T Baker
M Balsiger
K Considine
H Litsjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Priority to US00281375A priority Critical patent/US3809899A/en
Priority to GB3159874A priority patent/GB1433945A/en
Priority to GB3818173A priority patent/GB1433944A/en
Priority to DE2366144A priority patent/DE2366144C2/de
Priority to DE19732341377 priority patent/DE2341377A1/de
Priority to FR7330655A priority patent/FR2199613B1/fr
Priority to CA178,925A priority patent/CA1031080A/en
Priority to NL7311344A priority patent/NL7311344A/xx
Priority to JP9232973A priority patent/JPS557661B2/ja
Priority to US441718A priority patent/US3881125A/en
Priority to FR7412881A priority patent/FR2214962B1/fr
Application granted granted Critical
Publication of US3809899A publication Critical patent/US3809899A/en
Priority to CA233,767A priority patent/CA998731A/en
Priority to JP13038078A priority patent/JPS54161263A/ja
Priority to NL7908479A priority patent/NL7908479A/nl
Priority to JP1980138035U priority patent/JPS5661960U/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Definitions

  • An electron beam tube comprising:
  • interconnecting means includes means for mechanically joining said chambers and means for puncturing a sealing diaphragm member in said first chamber to provide communication between said first chamber and said second chamber.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US00281375A 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope Expired - Lifetime US3809899A (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
GB3159874A GB1433945A (en) 1972-08-17 1973-08-13 Electronbeam tubes for scanning electron microscopes
GB3818173A GB1433944A (en) 1972-08-17 1973-08-13 Method and apparatus for producing electron emission from a field emission cathode
DE19732341377 DE2341377A1 (de) 1972-08-17 1973-08-16 Elektronenstrahlroehre mit thermionikfeld-emissionskathode fuer ein abtastendes elektronenmikroskop
FR7330655A FR2199613B1 (enrdf_load_stackoverflow) 1972-08-17 1973-08-16
CA178,925A CA1031080A (en) 1972-08-17 1973-08-16 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
DE2366144A DE2366144C2 (de) 1972-08-17 1973-08-16 Verfahren und Anordnung zum Bilden einer Öffnung für den Durchtritt des Elektronenstrahls in einer zwischen zwei Kammern angeordneten dichtenden Membran einer evakuierten Elektronenstrahlröhre und Anwendung des Verfahrens
JP9232973A JPS557661B2 (enrdf_load_stackoverflow) 1972-08-17 1973-08-17
NL7311344A NL7311344A (enrdf_load_stackoverflow) 1972-08-17 1973-08-17
US441718A US3881125A (en) 1972-08-17 1974-02-11 Separable-chamber electron-beam tube including means for puncturing a pressure seal therein
FR7412881A FR2214962B1 (enrdf_load_stackoverflow) 1972-08-17 1974-04-04
CA233,767A CA998731A (en) 1972-08-17 1975-08-20 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
JP13038078A JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator
NL7908479A NL7908479A (nl) 1972-08-17 1979-11-21 Elektronenstraalbuis.
JP1980138035U JPS5661960U (enrdf_load_stackoverflow) 1972-08-17 1980-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
US3809899A true US3809899A (en) 1974-05-07

Family

ID=23077025

Family Applications (1)

Application Number Title Priority Date Filing Date
US00281375A Expired - Lifetime US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Country Status (7)

Country Link
US (1) US3809899A (enrdf_load_stackoverflow)
JP (3) JPS557661B2 (enrdf_load_stackoverflow)
CA (1) CA1031080A (enrdf_load_stackoverflow)
DE (2) DE2341377A1 (enrdf_load_stackoverflow)
FR (2) FR2199613B1 (enrdf_load_stackoverflow)
GB (2) GB1433944A (enrdf_load_stackoverflow)
NL (2) NL7311344A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066905A (en) * 1975-03-27 1978-01-03 Siemens Aktiengesellschaft Particle beam apparatus with zones of different pressure
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same
US4698502A (en) * 1985-01-29 1987-10-06 International Business Machines Corporation Field-emission scanning auger electron microscope
US5235188A (en) * 1990-08-10 1993-08-10 U.S. Philips Corporation Charged particle beam device
US5254856A (en) * 1990-06-20 1993-10-19 Hitachi, Ltd. Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
US5502306A (en) * 1991-05-30 1996-03-26 Kla Instruments Corporation Electron beam inspection system and method
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
US20110221360A1 (en) * 2010-03-10 2011-09-15 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flashing

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
JP2951610B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 欠陥検査方法
JP2951609B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 電子ビーム検査装置
JP2969091B2 (ja) * 1997-01-20 1999-11-02 株式会社日立製作所 電子ビーム検査装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2266218A (en) * 1939-05-08 1941-12-16 Krause Friedrich Electron microscope vacuum system
US2916668A (en) * 1955-07-01 1959-12-08 Research Corp Heat stabilized field emission electron sources
US3248542A (en) * 1962-03-08 1966-04-26 Hilger & Watts Ltd Electron beam devices having plural chambers designed to be assembled and disassembled
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112758C (enrdf_load_stackoverflow) * 1942-10-28
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (ja) * 1977-05-04 1983-11-21 松下電器産業株式会社 モ−タの回転数調整装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2266218A (en) * 1939-05-08 1941-12-16 Krause Friedrich Electron microscope vacuum system
US2916668A (en) * 1955-07-01 1959-12-08 Research Corp Heat stabilized field emission electron sources
US3248542A (en) * 1962-03-08 1966-04-26 Hilger & Watts Ltd Electron beam devices having plural chambers designed to be assembled and disassembled
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Electron Gun Using a Field Emmision Source, Creve, Review of Scientific Instruments Vol. 39 No. 4 April 1968 pp. 576 583. *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066905A (en) * 1975-03-27 1978-01-03 Siemens Aktiengesellschaft Particle beam apparatus with zones of different pressure
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same
US4698502A (en) * 1985-01-29 1987-10-06 International Business Machines Corporation Field-emission scanning auger electron microscope
US5254856A (en) * 1990-06-20 1993-10-19 Hitachi, Ltd. Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
US5442183A (en) * 1990-06-20 1995-08-15 Hitachi, Ltd. Charged particle beam apparatus including means for maintaining a vacuum seal
US5235188A (en) * 1990-08-10 1993-08-10 U.S. Philips Corporation Charged particle beam device
US5502306A (en) * 1991-05-30 1996-03-26 Kla Instruments Corporation Electron beam inspection system and method
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
US20110221360A1 (en) * 2010-03-10 2011-09-15 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flashing
US8674300B2 (en) * 2010-03-10 2014-03-18 ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprüftechnik mbH Feedback loop for emitter flashing

Also Published As

Publication number Publication date
GB1433945A (en) 1976-04-28
DE2341377A1 (de) 1974-03-07
FR2199613B1 (enrdf_load_stackoverflow) 1977-02-25
FR2199613A1 (enrdf_load_stackoverflow) 1974-04-12
JPS49132975A (enrdf_load_stackoverflow) 1974-12-20
JPS557661B2 (enrdf_load_stackoverflow) 1980-02-27
JPS5661960U (enrdf_load_stackoverflow) 1981-05-26
CA1031080A (en) 1978-05-09
GB1433944A (en) 1976-04-28
DE2366144C2 (de) 1982-12-30
FR2214962A1 (enrdf_load_stackoverflow) 1974-08-19
NL7908479A (nl) 1980-03-31
FR2214962B1 (enrdf_load_stackoverflow) 1978-07-07
NL7311344A (enrdf_load_stackoverflow) 1974-02-19
JPS54161263A (en) 1979-12-20

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