JPS557661B2 - - Google Patents

Info

Publication number
JPS557661B2
JPS557661B2 JP9232973A JP9232973A JPS557661B2 JP S557661 B2 JPS557661 B2 JP S557661B2 JP 9232973 A JP9232973 A JP 9232973A JP 9232973 A JP9232973 A JP 9232973A JP S557661 B2 JPS557661 B2 JP S557661B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9232973A
Other languages
Japanese (ja)
Other versions
JPS49132975A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS49132975A publication Critical patent/JPS49132975A/ja
Publication of JPS557661B2 publication Critical patent/JPS557661B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP9232973A 1972-08-17 1973-08-17 Expired JPS557661B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS49132975A JPS49132975A (enrdf_load_stackoverflow) 1974-12-20
JPS557661B2 true JPS557661B2 (enrdf_load_stackoverflow) 1980-02-27

Family

ID=23077025

Family Applications (3)

Application Number Title Priority Date Filing Date
JP9232973A Expired JPS557661B2 (enrdf_load_stackoverflow) 1972-08-17 1973-08-17
JP13038078A Pending JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator
JP1980138035U Pending JPS5661960U (enrdf_load_stackoverflow) 1972-08-17 1980-09-26

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP13038078A Pending JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator
JP1980138035U Pending JPS5661960U (enrdf_load_stackoverflow) 1972-08-17 1980-09-26

Country Status (7)

Country Link
US (1) US3809899A (enrdf_load_stackoverflow)
JP (3) JPS557661B2 (enrdf_load_stackoverflow)
CA (1) CA1031080A (enrdf_load_stackoverflow)
DE (2) DE2341377A1 (enrdf_load_stackoverflow)
FR (2) FR2199613B1 (enrdf_load_stackoverflow)
GB (2) GB1433945A (enrdf_load_stackoverflow)
NL (2) NL7311344A (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (de) * 1975-03-27 1977-04-28 Siemens Ag Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
EP0189498B1 (en) * 1985-01-29 1989-05-03 International Business Machines Corporation Field-emission scanning auger electron microscope
DE69132441T2 (de) * 1990-06-20 2001-06-07 Hitachi, Ltd. Ladungsträgerstrahlgerät
DE69125229T2 (de) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Ladungspartikelstrahlanordnung
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP2969091B2 (ja) * 1997-01-20 1999-11-02 株式会社日立製作所 電子ビーム検査装置
JP2951610B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 欠陥検査方法
JP2951609B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 電子ビーム検査装置
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (enrdf_load_stackoverflow) * 1939-05-08
NL112758C (enrdf_load_stackoverflow) * 1942-10-28
NL102095C (enrdf_load_stackoverflow) * 1955-07-01
NL289910A (enrdf_load_stackoverflow) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (ja) * 1977-05-04 1983-11-21 松下電器産業株式会社 モ−タの回転数調整装置

Also Published As

Publication number Publication date
FR2214962A1 (enrdf_load_stackoverflow) 1974-08-19
FR2199613A1 (enrdf_load_stackoverflow) 1974-04-12
CA1031080A (en) 1978-05-09
DE2366144C2 (de) 1982-12-30
JPS54161263A (en) 1979-12-20
GB1433944A (en) 1976-04-28
FR2214962B1 (enrdf_load_stackoverflow) 1978-07-07
FR2199613B1 (enrdf_load_stackoverflow) 1977-02-25
JPS49132975A (enrdf_load_stackoverflow) 1974-12-20
NL7311344A (enrdf_load_stackoverflow) 1974-02-19
NL7908479A (nl) 1980-03-31
US3809899A (en) 1974-05-07
JPS5661960U (enrdf_load_stackoverflow) 1981-05-26
GB1433945A (en) 1976-04-28
DE2341377A1 (de) 1974-03-07

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